Ulvac PRC-003A Instruction Manual page 7

Operation
● Do not run the Pump on blocking the exhaust outlet or putting any device
that might hamper gas passage onto the outlet. There is a risk that the
pressure inside the Vacuum pump rises up to cause break or oil leak of the
casing or Oil level gauge resulting in overload of the motor.
● This product is not made as the withstand pressure structure. Ensured
WARNING
pressure value of the Pump shall be 0.03MPa (0.3kgf/cm
pressure).
● Do not operate the Pump in hazardous area (where there is a risk of creating
hazardous atmosphere by explosive gas). It might cause injury and/or fire.
WARNING
● Be sure to turn OFF the Power Supply to execute check and repair. You have
a risk of getting electrical shock or injury by accidental sudden move.
● Person other than Repair technician should not be in charge of dismantling,
repairing or remodeling the product.
● You have a risk of getting injured or electrical shock by a fire or erroneous
move.
● Do not touch the Motor, vacuum pump or piping during the pump operation
WARNING
and just after stopped it while the pump unit keeps high temperature. You
have a risk of getting burned.
● Should you found any malfunction or error, just turn OFF the Power Supply
to prevent accident and ask the agency or closest Service Center for check
and repair.
● Ensure to flow the Coolant during operation. Required Coolant volumes hall
be;
▪ Coolant volume PRC-003A: 2.0 L/min or more
CAUTION
▪ Outlet/inlet differential pressure: 0.1MPa (Gauge pressure) or more
▪ Coolant temperature: 5°C ~ 30°C
● Do not attempt to put your hand or article in the opening of the motor; you
have a risk of getting electrical shock, injury or casing a fire.
● Do not touch any rotary section such as the main spindle during operation
of the Vacuum pump; it shall bring in injuries.
CAUTION
● Strictly refrain from putting any combustible substance in and around 1m of
the motor and Vacuum pump; there is a risk of getting a fire.
PRC-006A: 2.0 L/min or more
PRC-012A: 3.0 L/min or more
PRC-018A: 3.0 L/min or more
vi
YO99-0874-DI-002-18
Gauge
2
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