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(1) Pump chamber inside
Stop running the Mechanical booster pump around once per three month and conduct the inside
check on removing the Inlet pipe. Confirm that there are no adherents inside the casing (Rotor surface,
casing surface). Substance in the gas might condense and attach to the Rotor surface, particularly
when exhausted any organic gas, and make the clearance narrower and result in rotation failure.
If the Pump was used to exhaust the toxic gas, the Pump oil as well as the
DANGER
Pump unit shall become toxic. Pay a full attention.
Wear protective gear such as rubber gloves, protective goggles and the like.
CAUTION
Be sure to look through the "1. 2 Chemical Material Safety Data Sheet" before
the lubrication.
Should the Vacuum pump oil touched to your hand or entered in your eye,
immediately follow the emergency treatment described on the SDS.
Ensure to use the vacuum pump oil designated by ULVAC. Operation using oil
other than designated shall be out of our guarantee as it might impair the
pump performance and shorten the life cycle.
CAUTION
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YO99-0874-DI-002-18
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