Ulvac PRC-003A Instruction Manual page 36

Oil for the mechanical booster pump is the same base of oil for the backing
pump.
Standard oil for our products is either ULVOIL
allowed.
CAUTION
Be sure to refill the same oil as before.
Running the unit with the lubrication filled over the upper limit on the room
temperature (around 20 ℃ ) might cause the oil flowing in the casing.
Discharge the oil if over lubricated so as to match the upper level.
Be sure to check the oil level under operation stop on the room temperature
(around 20℃.)
CAUTION
Oil level might get higher during operation due to the oil temperature rise and
oil rowing, but it makes no problem.
To lubricate, be sure to stop running the Pump and return the Mechanical
booster inside to the atmospheric pressure.
Chamber containing the oil becomes vacuum during operation. Taking off the
plug during operation would cause a large leak and give damage to the Pump
CAUTION
unit.
Be sure to lubricate the machine. If the lubrication oil came down lower than
limit level during operation, it might give damage on the bearing, gear and
shaft sealing and result in leak, noise, motor overload and operation stop.
CAUTION
R-42
20
YO99-0874-DI-002-18
; its combined use is not