4. Operation ..................................................................................................................................... 28
4.1 Test run ...................................................................................................................................... 28
4.2 Operation ................................................................................................................................... 30
4.2.1 Exhaust start ........................................................................................................................ 30
4.2.2 Exhaust stop ........................................................................................................................ 30
5. Option .............................................................................................................................................. 32
5.1 Special motors .......................................................................................................................... 32
5.2
Inlet and outlet flange ............................................................................................................. 32
5.3 Oil type .................................................................................................................................... 32
5.4 Motor control equipment ......................................................................................................... 32
5.5.1 Preparation .......................................................................................................................... 38
5.5.4 Pumping .............................................................................................................................. 38
5.5.6 Operation ............................................................................................................................. 39
5.5.8 Shutdown operation ............................................................................................................ 39
6. Maintenance and Check.................................................................................................................. 44
6.1 Maintenance .............................................................................................................................. 44
6.2 Inspection Items ......................................................................................................................... 45
6.4 Overhaul .................................................................................................................................... 47
6.5Troubleshooting .......................................................................................................................... 48
7. Removal / transport ......................................................................................................................... 50
7.1 Operation procedure .................................................................................................................. 50
8. Disposal ........................................................................................................................................... 51
9. Warranty Clauses ............................................................................................................................ 52
9.1 Warrantable Items ...................................................................................................................... 52
9.2 Duration of guarantee ................................................................................................................ 52
9.3 Warrantee scope........................................................................................................................ 52
9.4 Response procedure ................................................................................................................. 52
9.5 Disclaimer .................................................................................................................................. 53
9.6 Others ........................................................................................................................................ 53
10. Main Displacement Parts .............................................................................................................. 54
Request Form for Repair/Inspection of ULVAC Components /Certificate of Contamination
SERVICE CENTER
Contents-2
YO99-0874-DI-002-18