Ulvac PRC-003A Instruction Manual page 47

Mechanical booster pump
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To restart the Pump operation after once turned OFF the Power Supply, ensure
to check that the Rotor is stopped to turn it ON again.
Repeating turning ON/OFF the electricity supply to the Motor control
CAUTION
equipment in a short interval, particularly of the atmospheric pressure
operation specification, might cause a trouble.
Ensure to flow the Coolant with the specified volume. Lack of the Coolant
might give damage to the Pump unit or evaporate the water remained in the
Pump to raise the pressure inside the Cooling system resulting in accidentally
CAUTION
jetting out the hot steam.
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YO99-0874-DI-002-18

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Prc-006aPrc-012aPrc-018a

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