Ulvac PRC-003A Instruction Manual page 41

(1) The machine is designed not to cause any leakage under restricted
condition and demonstrated by the Leak test. However, it still has a risk of
leaking under any abnormal condition other than specified, for example
abnormal water pressure rise. In such a case, the leakage shall remain
unstopped unless the supply from the system stops. You should refrain
from installing electrical equipment or wiring beneath the Pump and on the
floor around the Pump.
(2) We recommend you to put the Leak sensor on the floor beneath the Pump
CAUTION
and engage it with the interlock system of the equipment. Close the
Coolant supply valve (HWSV) immediately you noticed the leakage. Put the
[Closed] tag onto the handle after having closed the valve.
(3) Put a Flow meter (HWFM: for example Flow sight) applicable to visually
check the flow onto the Coolant supply source to make it possible to check
the flow.
(1) If you use several pumps, be sure to connect the Coolant pipes parallel.
Cooling capacity might come down if connected them serial and cause the
failure.
(2) You should put a filter at the front stage if you are obliged to use the water
containing much impurity such like water stain, iron and the like.
(3) Appropriate flow might not be ensured when the supply source and
discharge outlet were apart or there was level difference in the piping
CAUTION
(discharge outlet was elevated higher than the Pump). In such a case,
cause a measure to ensure the flow volume, such as to change the piping
layout, put a larger pipe or raise the supply pressure within the
specification range.
(4) Use the soft water as the cooling water.
(1) Be sure to put in the Insert if you use any plastic made product such as
nylon tube. Such a tube is likely to cause deformation or get rigid as
secular distortion and might cause a water leakage.
CAUTION
(2) Keep the environment that does not cause dew formation when the cooling
water temperature was lower.
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