Ulvac EGL-406M Industrial Equipment Manuals

Manuals and User Guides for Ulvac EGL-406M Industrial Equipment. We have 1 Ulvac EGL-406M Industrial Equipment manual available for free PDF download: Instruction Manual

Ulvac EGL-406M Instruction Manual

Ulvac EGL-406M Instruction Manual (55 pages)

MULTI-HEARTH ELECTRON BEAM SOURES

Brand: Ulvac | Category: Industrial Equipment | Size: 1 MB

Table of Contents

Table of Contents
9
General
11
Features of EGL-206M/EGL-406M
11
Specifications
12
Unpacking and Receiving Check
14
Care to be Taken in Unpacking
14
Check after Unpacking
14
Standard Spare Parts List
15
Mounting the Electron Beam Gun
16
Necessary Equipment
16
For Disposal
18
Installation of Electron Beam Gun
18
Safeguards against X-Rays (See Fig. 3-5.)
23
Operation
29
Check before Operation
29
Operation of Electron Beam Gun
31
Disassembly and Reassembly of Electron Beam Gun
34
Changing Filament
34
Parts List
39
Maintenance
44
Preventive Maintenance
45
Scheduled Inspection
47
Troubleshooting Guide
50
Troubleshooting
51

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