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Summary of Contents for Ulvac PHS-04N
- Page 1 RF0046E-04 Instruction Manual Phase shifter MODEL: PHS-04N Phase shifter PHS-08N 4th Edition, July 01, 2023 ULVAC, Inc. *Please be sure to read this manual before using this product. In addition, store this manual with care so that you can use at any time.
- Page 3 The content of this instruction manual may differ with the product you use because the product may have been improved. If you have any questions or concerns, please contact ULVAC or its distributors. Please perform safe operation and proper maintenance.
- Page 4 RF POWER SUPPLY and MATCHINGBOX Introduction 1. Notes on safety Most accidents are due to careless operation, inspection, maintenance, and repair. In addition, they are more likely to occur when basic safety precautions are not followed or when risk prediction is neglected. Accidents can be prevented by anticipating potentially dangerous conditions.
- Page 5 RF POWER SUPPLY and MATCHINGBOX Introduction 2. Safety Symbols Indicates a state of immediate danger that will lead to death or serious injury if it is not avoided. Danger Work that ignores this safety section will likely lead to death or serious injury of personnel or damage to factory equipment (including this product).
- Page 6 The descriptions and illustrations in this instruction manual are based on information at the time the manual was created. The instruction manual may change without notice. Because these changes affect inspections, check the latest information at ULVAC distributors before starting work.
- Page 7 No charge repair provisions １ This system has been shipped after undergoing an extensive in-house inspection. However, in the event a failure occurs that ULVAC Inc. is responsible for, such as a manufacturing defect or accident during shipment, please inquire with the ULVAC Inc. or dealer regarding repairs.
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Page 8: Table Of Contents
RF POWER SUPPLY and MATCHINGBOX Table of Contents Table of Contents 1. For safe usage ........................1 1-1. Handling precautions ...................... 1 1-2. Warning labels / nameplates ................... 1 1-3. Inquiries ........................... 1 2. Overview ..........................2 2-1. Introduction........................2 2-2. -
Page 9: For Safe Usage
Do not use gasoline, organic solvent, or other similar items. If a label has been damaged, lost, or become illegible, please contact ULVAC or a distributor. The nameplate is affixed to the rear surface of the power supply. -
Page 10: Overview
RF POWER SUPPLY and MATCHINGBOX 2. Overview 2. Overview This section describes the features, configuration, and specifications of this product. 2-1. Introduction This system was designed with the goal of phase adjustment of RF ink spattering, plasma CVD, etching, and other plasma generation power supplies. This system can change arbitrarily the phase of output of each power supply for multiple units of RF power supply running at 13.56 MHz. -
Page 11: System Configuration
RF POWER SUPPLY and MATCHINGBOX 2. Overview 2-3. System configuration This system is made up of the phase shifter unit and the RF power supply system that you use separately. Figure 2-1 “System configuration” shows the system configuration. The following equipment is required for basic configuration. (1) Phase shifter unit (2) RF power supply system (RFS-N Series) Single-phase AC 100 V... -
Page 12: Phs-N Specifications
RF POWER SUPPLY and MATCHINGBOX 2. Overview 2-4. PHS-N Specifications Table 2-1 PHS-04N individual specifications Specification value Class Category PHS-04N Input frequency Single phase 50 Hz/60 Hz Input voltage AC100 V-240 V Voltage change range ±10% of rated voltage (AC90 V-AC264 V) - Page 13 RF POWER SUPPLY and MATCHINGBOX 2. Overview Table 2-2 PHS-08N individual specifications Specification value Class Category PHS-08N Input frequency Single phase 50 Hz/60 Hz Input voltage AC100 V-240 V Voltage change range ±10% of rated voltage (AC90 V-AC264 V) Input Input capacity 70 VA or less Input connector...
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Page 14: Preparation
RF POWER SUPPLY and MATCHINGBOX 3. Preparation 3. Preparation This section lists the necessary preparation and cautions from receiving this product until it can be used. 3-1. Check of accessories Table 3-1 PHS-N standard accessories Product name Remarks Quantity For single phase 100 V, 3 m (1) AC 100 V input cable User terminal AC 100 V (3 prongs with ground) HDAB-15S(05) -
Page 15: Attachment Method And Rack Manufacturing
RF POWER SUPPLY and MATCHINGBOX 3. Preparation Danger: To prevent electric shock, always implement a protective ground before switching on the power of this equipment. The power supply cord included with this equipment is a three-prong cord with ground wire. Therefore, use a three-prong outlet with a protective ground terminal. -
Page 16: Storage Environment And Transportation Conditions
3. Preparation RF POWER SUPPLY and MATCHINGBOX Equipment must be used at an altitude of 2,000 m or lower. Ensure good airflow to the front and rear sides. Establish a gap of 10 cm from the front side and 10 cm or more from the rear side. When equipment will be installed in the cabinet or similar location, use panels with air-intake holes on the front and rear sides, and set a structure for the rear side so that heat does not accumulate inside. - Page 17 RF POWER SUPPLY and MATCHINGBOX 3. Preparation Figure 3-2 System wiring example...
- Page 18 RF POWER SUPPLY and MATCHINGBOX 3. Preparation * The customer must separately prepare the RF power supply system unit to be used. * Up to 8 RF power-supply units can be used simultaneously with the PHS. When fewer than 8 units are to be used, connection to the BNC connector of an unused oscillation signal output section is not necessary.
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Page 19: Explanation Of Functions
RF POWER SUPPLY and MATCHINGBOX 4. Explanation of functions 4. Explanation of functions This section explains the functions. 4-1. Explanation of functions of the front panel Figure 4-1 Explanation of functions of front panel Table 4-1. Explanation of functions of front panel Category Function (1) POWER LED... -
Page 20: Explanation Of Functions Of The Rear Panel
4. Explanation of functions 4-2. Explanation of functions of the rear panel Figure 4-3 Explanation of functions of the PHS-04N rear panel Figure 4-3 Explanation of functions of the PHS-08N rear panel Table 4-2. Explanation of functions of the rear panel... -
Page 21: Operation Methods
RF POWER SUPPLY and MATCHINGBOX 5. Operation methods 5. Operation methods This section explains the operation methods. 5-1. Switching on the power supply If the POWER switch is set to ON, the following screen appears, and settings can be configured. If the screen appears after the POWER switch is set to ON, output starts automatically in accordance with the setting values of the screen display. -
Page 22: Screen 2
RF POWER SUPPLY and MATCHINGBOX 5. Operation methods 5-3. Screen 2 At Screen 2, the phase settings for the standard waveform can be configured from 0.0° to 359.9° for each channel from P05(CH5) to P08(CH08). *Not displayed by PHS-04N. P05= P06= P07= P08=... -
Page 23: Screen 4
5-6. Screen 5 At Screen 5, the equipment name, model, and serial number information are displayed. Settings cannot be changed at the screen. PHASE SHIFTER PHS-04N 715001 Figure 5-6 Screen 5 Table 5-5 Explanation of functions of Screen 5 Category... -
Page 24: Screen 6
5-7. Screen 6 At Screen 6, the equipment manufacturer, software version, and software creation date information is displayed. Settings cannot be changed at the screen. ULVAC,Inc. Ver.1.01 2012/09/05 Figure 5-7 Screen 6 Table 5-6 Explanation of functions of Screen 6... - Page 25 RF POWER SUPPLY and MATCHINGBOX 5. Operation methods PHS-N internal section External controller CH01 9 to 15 (COM) CH02 9 to 15 (COM) CH03 9 to 15 (COM) CH04 9 to 15 (COM) CH05 9 to 15 (COM) CH06 9 to 15 (COM) CH07 9 to 15 (COM) CH08...
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Page 26: Maintenance
* When equipment has been stored while off, internal elements may deteriorate in a shorter time than the recommended periodic exchange intervals above. * Always have ULVAC perform the overhaul. When the customer or a third-party has exchanged parts without ULVAC’s permission, ULVAC will charge a fee both during and... -
Page 27: Reference Materials
RF POWER SUPPLY and MATCHINGBOX 7. Reference materials 7. Reference materials The following materials are appended. ● PHS-04N Exterior diagram ● PHS-08N Exterior diagram... - Page 28 RF POWER SUPPLY and MATCHINGBOX 7. Reference materials Figure 7-1 PHS-04N External diagram...
- Page 29 RF POWER SUPPLY and MATCHINGBOX 7. Reference materials Figure 7-2 PHS-08N External diagram...
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