Renishaw ATOM RTLF Series Installation Manual page 67

Linear encoder system
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Speed
Digital
20 µm system
0004
0020
0040
(5 µm)
(1 µm)
(0.5 µm)
10
10
10
10
10
10
10
10
8.1
10
10
6.75
10
9
4.5
10
8.1
4.05
10
6.48
3.24
10
4.5
2.25
10
3.37
1.68
4.2
0.84
0.42
Analogue
20 µm system
10 m/s (−3dB)
Maximum speed (m/s)
0100
0200
0400
(0.2 µm)
(0.1 µm)
(50 nm)
(20 nm)
6.48
3.24
1.62
5.4
2.7
1.35
3.24
1.62
0.81
2.7
1.35
0.675
1.8
0.9
0.45
1.62
0.81
0.405
1.29
0.648
0.324
0.9
0.45
0.225
0.67
0.338
0.169
0.16
0.084
0.042
1000
2000
4000
10KD
(10 nm)
(5 nm)
(2 nm)
0.648
0.324
0.162
0.0654
0.54
0.27
0.135
0.054
0.324
0.162
0.081
0.032
0.27
0.135
0.068
0.027
0.18
0.09
0.045
0.018
0.162
0.081
0.041
0.016
0.13
0.065
0.032
0.013
0.09
0.045
0.023
0.009
0.068
0.034
0.017
0.0068
0.017
0.008
0.004
0.0017
Lowest recommended counter input
20KD
frequency (MHz)
(1 nm)
0.032
50
40
0.027
0.016
25
0.013
20
12
0.009
10
0.0081
0.0065
8
0.0045
6
4
0.0034
0.0008
1
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67

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