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Speed
20 µm system
0020
0040
0080
(1 µm)
(0.5 µm)
(0.25 µm)
6.5
6.5
6.5
6.5
6.5
4
-
-
-
6.5
4
2
-
-
-
4
2
1
-
-
-
40 µm system
0020
0040
0080
(2 µm)
(1 µm)
(0.5 µm)
13
13
13
13
13
8
-
-
-
13
8
4
-
-
-
8
4
2
-
-
-
Maximum speed (m/s)
0100
0200
0400
(0.2 µm)
(0.1 µm)
(50 nm)
5.8
3
-
3.2
1.6
-
-
-
0.35
1.6
0.8
-
-
-
0.18
0.8
0.4
-
-
-
0.12
Maximum speed (m/s)
0100
0200
0400
(0.4 µm)
(0.2 µm)
(0.1 µm)
11.6
6
-
6.4
3.2
-
-
-
0.7
3.2
1.6
-
-
-
0.36
1.6
0.8
-
-
-
0.24
Lowest recommended
counter input frequency
1000
2000
(MHz)
(20 nm)
(10 nm)
40
-
-
-
-
20
0.13
0.065
12
-
-
10
0.06
0.03
6
-
-
5
4
0.04
0.02
Lowest recommended
counter input frequency
1000
2000
(MHz)
(40 nm)
(20 nm)
-
-
40
20
-
-
12
0.26
0.13
-
-
10
0.12
0.06
6
5
-
-
0.08
0.04
4
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