Back-fill with Purge Gas
1
Turn off the vacuum pump.
2
Follow the procedure for
3
Enable the core purge gas flow to the EM chamber.
4
Monitor the flow using the anti-siphon exit port assembly. Flow should be continuous, roughly 4–5
bubbles/second. Adjust with the Purge Flow Control valve
NOTE: The Chamber Backfill valve and the Detector Purge Gas valve are used to backfill the system and
release vacuum. Only the Core Purge valve should stay in the On position during a test. The Purge Flow
Control valve controls the Core Purge flow rate.
DXF Getting Started Guide
Vacuum and Purge
Operation.
(Figure
8) on the side of the EM.
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