CKD IO-Link FCM Series Manual page 4

Applications
Used in various fields
RAPIFLOW is available for a wide variety of applications in industries such as machinery,
automobiles, precision components, and cutting-edge fields such as semiconductors and
biotechnology, medical care, foodstuffs, and more.
0.1
Flow rate
(L/min)
Semiconductor
Ideal for tension control of wire bonding
that requires high precision.
Dry
air
N
2
Liquid crystal
Available with a broad flow rate range.
Flow rate control of air is possible.
Foodstuffs
Filling and packaging
Ideal for inert gas filling of food packaging, etc.
Ar
O
2
H
2
1
Wire bonding
Liquid crystal Floating transport system of glass
Ideal for float (non-contact) transportation
of large FPD glass.
Flow rate management
Automobiles, other
Glass processing
10
of ionizer purge gas
Control of N
Semiconductor
Available with a broad flow rate range.
Flow rate control of purge gas can be done.
Flow rate control of argon gas for welding
Available with a broad flow rate range.
Flow rate control of argon gas for welding is possible.
Burner flame control
Suitable for controlling burner flame by
allowing low pressure gas supply.
100
gas in laser oscillator and semiconductor
2
manufacturing equipment
Purge gas flow rate control