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New Products IO-Link Compatible Compact ® Flow Rate Controller RAPIFLOW FCM Series IO-Link makes it possible! Predictive maintenance from a flow rate controller CC-1465A...
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Supports the IoT generation! equipped with Flow rate controller predictive maintenance functions Equipped with high-speed response micro-machined sensor chip Stainless steel body [Applicable fluids/flow rates] 0.015 to 50 L/min 0.015 to 50 L/min 0.015 to 10 L/min 0.06 to 20 L/min Weight: Approx.
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System error detection (predictive maintenance) [System abnormality warning Pressure Filter IO-Link functions] Master drop clogging In addition to self-detection functions for detecting the deterioration of sensors and proportional solenoid Filter valves, abnormalities with peripheral systems can also be detected. Outputs an alarm signal via IO-Link. Regulator IO-Link Enhances Conventional Features ●...
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Applications Used in various fields RAPIFLOW is available for a wide variety of applications in industries such as machinery, automobiles, precision components, and cutting-edge fields such as semiconductors and biotechnology, medical care, foodstuffs, and more. Flow rate (L/min) Semiconductor Wire bonding Ideal for tension control of wire bonding that requires high precision.
® RAPIFLOW FCM Series Variation Applicable fluids/flow rate control range Flow rate control range (L/min) Applicable Model No. Body material Port size fluids 0.01 FCM-9500 AI 0.015 to 0.5 Resin Resin ø6 push-in FCM-0001 AI 0.03 to 1 ø8 push-in FCM-0002 AI 0.06 to 2 FCM-0005 AI...
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Compact flow rate controller RAPIFLOW Series IO-Link ● For air, nitrogen, argon, oxygen, city gas, methane, propane (flow rate range: 0.5 to 100 L/min) ● For hydrogen, helium (flow rate range: 0 to 20 L/min) ■ FCM Series for air, nitrogen, argon, oxygen, city gas, methane, propane Specifications Model No.
Series Specifications Pressure Standard differential pressure, working pressure differential *4, 5 (Standard model) Flow rate range *1 9500 0001 0002 0005 0010 0020 0050 0100 Standard differential pressure (kPa) Working pressure differential (kPa) 20 to 150 50 to 200 50 to 250 50 to 250 50 to 250 100 to 300 150 to 300 250 to 350 Max.
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Series ■ FCM Series for hydrogen, helium Specifications Model No. FCM-[*1][*2]-[*3]C Descriptions Valve drive method Proportional solenoid valve - When not energized: Closed Full scale flow rate H2 (Hydrogen) HE (Helium) ● ● 0002 2 L/min ● ● 0005 5 L/min Flow rate range ●...
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Series Specifications Pressure Standard differential pressure, Working pressure differential Flow rate range *1 0002 0005 0010 0020 Standard differential pressure (kPa) Working pressure differential (kPa) 10 to 50 30 to 80 30 to 80 30 to 80 Max. working pressure (kPa) Standard differential pressure (kPa) Working pressure differential (kPa) 20 to 100...
Series ■ Air, nitrogen, argon, oxygen, city gas, methane, propane How to order 9500 Model No. Code Content Flow rate range Flow rate range Applicable fluids AR O2 ● ● ● ● ● ● 9500 0 to 0.5 L/min ● ●...
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Series How to order ■ For hydrogen, helium How to order 0002 Model No. Code Content Flow rate range Flow rate range Applicable fluids ● ● 0002 0 to 2 L/min ● ● 0005 0 to 5 L/min ● ● 0010 0 to 10 L/min ●...
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Series Dimensions □ □ Model No.: FCM- -H6C/H8C Port size: Push-in (ø6) or (ø8) FCM-ML3 (Optional) Note: The cable draw direction is fixed in the orientation shown in the figure. □ □ □ For FCM- , display direction is reversed. (31) (41) M12, 4-pin connector...
Series Dimensions Dimensions □ Model No.: FCM- -4SC FCM-ML3 (Optional) Port size: 1/4" double barbed fitting Note: The cable draw direction is fixed in the orientation shown in the figure. □ □ □ For FCM- , display direction is reversed. (31) (41) M12, 4-pin connector...
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Series Dedicated bracket (floor mounted) FCM-LB1 Discrete model No.: Material : Steel Weight : 28 g Cable optional dimensions ● Cable option (M12 straight (female), M12 straight (male)) FCM-MS3 Discrete model No.: 3000 ● Cable option (M12 L type (female), M12 straight (male)) FCM-ML3 Discrete model No.: 3000...
Series Wiring method Wiring method Wiring method CAUTION: Take care to prevent incorrect wiring. ③ (Blue) ① L + (24 VDC) Brown ② N.C. White ② (White) Main ① (Brown) circuit ③ L-(GND) Blue ④ (Black) ④ C(IO-Link) Black FCM (Device) IO-Link master Terminal No.
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Series Compact flow rate controller - About FCM series functions Functions Function Content Instantaneous flow rate Displays the instantaneous flow rate. display Instantaneous flow rate values are output to Process Data IN. Set flow rate output Process Data IN outputs the current flow rate setting. Integrates the flow rate.
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Series Operation mode Names and functions of display/operation section Output display (Red) 3-digit number LED display (green) ● ● "F" is displayed when confirming the Displays instantaneous flow rate display and function setting function setting. details during RUN mode (instantaneous flow rate display). * The setting mode No.
Series Error code table Generally, the error resets automatically; however, if it does not do so, hit the emergency stop or turn OFF the power supply, check and correct the cause of the error as per the following table, clear the emergency stop and then turn ON the power supply again. Control processing Category Display processing...
0 to 5000 FCM-0100*-*C 0 to 100.0 L/min 0 to 100 0 to 1000 0 to 999999 L * Refer to the SM-A19060 instruction manual for parameter configuration. * The IO-Link setting file (IODD) can be downloaded from the CKD website (https://www.ckd.co.jp).
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Series Process data IN Data name Integrating flow unit upper byte Data range 2 byte Format UInteger16 Data name Integrating flow unit lower byte Data range 2 byte Format UInteger16 Data name Set flow rate *1 Data range 2 byte Format UInteger16 Data name...
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Series Communication specifications Process data OUT Data name Set flow rate *1 Data range 2 byte (depends on model. Refer to P14 Table 1 ProcessData output values) Format UInteger16 Start/ Preset *2 Accumulation Data name Reset stop Reset Stop Vacant Vacant Vacant Data range...
(Note that this product can be used when CKD is consulted prior to its usage and the customer consents to CKD product specifications. The customer should provide safety measures to avoid danger in the event of problems.)
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Flow rate controller Safety Precautions Be sure to read this section before use. Product-specific cautions: Compact flow rate controller FCM Series Design/selection ■ Ensure that foreign substances do not flow into the product. 1. Working fluids If foreign matter (dirt, water drops, or oil mist inside the piping, etc.) enters the product, accuracy or DANGER control properties may be adversely affected,...
Series Design/selection CAUTION 2. Working environment ■ Be alert for pressure loss in the piping. WARNING When piping to this product, keep the differential ■ pressure between upstream and downstream sides Corrosive environments within the working pressure differential range (refer Do not use this product in an atmosphere to pages 2 and 4).
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Series Product-specific cautions Mounting, installation and adjustment ■ The power supply for the stainless steel body is a 1. Wiring DC stabilized power supply completely isolated from the AC primary side. Connect either the + side DANGER or - side of the power to the FG. Between the ■...
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Series Mounting, installation and adjustment ■ When connecting pipes, wrap sealing tape in the 2. Piping opposite direction from the threading, from the inside position to within 2 mm from the pipe end. CAUTION ● If sealing tape protrudes from the pipe threads, it could be ■...
Series Product-specific cautions Use/maintenance ■ Clear each Process Data OUT to "0" before WARNING powering this product. Gas may flow ■ Output accuracy is affected by temperature unintentionally. characteristics and heat generated when energized. Provide sufficient stand-by time (10 ■ The settings of this product can be changed in two minutes or more after energizing) before use.
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Explanation Control range Calibration range of this product. Calibration error from CKD reference device. (Conditions: Temperature 25 ±3˚C, power supply voltage 24±0.01 VDC, Accuracy standard differential pressure, secondary side released to atmosphere) Calculated from variation (D = Max. - Min.) when flow rate controls of 0% F.S. and 50% F.S. are repeated 20 times Repeatability continuously in a cycle where the control is sufficiently stabilized.
Series Related products Compact flow rate controller RAPIFLOW FCM Series (Standard Type) Catalog No.CB-024SA ■ Compact/high speed/high precision 70 × 70 × 30 (H × D × W) size. Installable in narrow spaces or on movable parts, enabling equipment downsizing and weight reduction.
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Series Related products IO-Link related products Compact flow rate sensor (RAPIFLOW) FSM3 Series Catalog No.CC-1393A ■ IO-Link compatible ■ Five types of gases can be measured with just one unit ■ Reduction of pressure loss ■ High precision/high-speed response ■ Bi-directional fluid measurement ■...
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CKD (SHANGHAI) CORPORATION CKD KOREA CORPORATION CKD EUROPE B.V. CKD EUROPE BRANCH CKD UK OFFICE CKD USA CORPORATION TAIWAN CKD CORPORATION CKD MEXICO, S. DE R.L. DE C.V. CKD VIETNAM ENGINEERING CO.,LTD M-CKD PRECISION SDN.BHD. CKD FRANKFURT OFFICE PT CKD TRADING INDONESIA CKD CZECH OFFICE CKD SINGAPORE PTE.
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