Preparing Gas Inlet System; Installing Support Plate; Fig. 9: Correct Alignment On The Flange Of The Qma With C/B Ion Source; Fig. 10: Installing Support Plate - Pfeiffer Vacuum QMA 4X0 Operating Instructions Manual

5.1.2 Preparing gas inlet system
Fig. 9:
Procedure
► Prepare the gas inlet system as necessary to enable easy connection to the ion source afterward.
► Mark the correct alignment (arrow direction) on the flange of the QMA and of the system, if the
5.1.3 Installing support plate
Required tools
● Screwdriver, no. 6
Fig. 10:
1 Clamping screw on the side
Procedure
1. Place the analyzer on the edge of the table.
2. Use the screwdriver to loosen the clamping screw on the side of the support plate.
3. Push the support plate onto the analyzer flange.
4. Align the support plate in such a way that you are able to easily hold the analyzer to guide it into
5. Tighten the clamping screw with the screwdriver.
Correct alignment on the flange of the QMA with C/B ion source
crossbeam ion source has to be aligned to the gas supply.

Installing support plate

the vacuum system with the correct orientation.
2 Support
Installation
1
2
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