Tbl. 8: Conversion Table: Pressure Units; Tbl. 9: Conversion Table: Units For Gas Throughput; Tbl. 10: Measured And Pressure Values - Pfeiffer Vacuum TPR 280 Operating Instructions Manual

Pirani gauge
Table of Contents

Advertisement

Technical data and dimensions
14 Technical data and dimensions
14.1 General
mbar
bar
Pa
hPa
kPa
Torr | mm Hg
Tbl. 8:
mbar l/s
Pa m
sccm
Torr l/s
atm cm
Tbl. 9:
14.2 Technical data
Parameter
Measuring range (air, O
Maximum pressure (absolute)
Measuring principle
Accuracy (N
Resolution
Repeatability (air)
Gauge calibration
Tbl. 10:
Parameter
Output signal (measuring sig-
nal)
Output impedance
Load impedance (minimum load)
Response time
Gauge identification
38/42
mbar
bar
1
1 · 10
1000
1
0.01
1 · 10
1
1 · 10
10
0.01
1.33
1.33 · 10
Conversion table: Pressure units
mbar l/s
1
10
3
/s
-2
1.69 · 10
1.33
1.01
3
/s
Conversion table: Units for gas throughput
, CO, N
2
)
5 × 10
-4
2
1 × 10
-3
100 to 1000 hPa
-3
1 × 10
Measured and pressure values
Pa
-3
100
1 · 10
5
1
-5
100
-3
1000
-3
133.32
2
1 Pa = 1 N/m
sccm
Pa m
3
/s
0.1
59.2
1
592
-3
1
1.69 · 10
0.133
78.9
0.101
59.8
)
2
up to 1 × 10
-3
hPa
up to 100 hPa
up to 100 hPa
Voltage range
Measuring range
Error signal
Relation voltage-pressure
hPa
kPa
Torr | mm Hg
1
0.1
0.75
1000
100
750
0.01
1 · 10
-3
7.5 · 10
1
0.1
0.75
10
1
7.5
1.33
0.133
1
Torr l/s
0.75
7.5
-2
1.27 · 10
1
0.76
Value
5 × 10
-4
up to 1000 hPa
≤ 1000 kPa
Heat conduction according to Pirani
±50 % of measured value
±15 % of measured value
±50 % of measured value
1 % of measured value
2 % of measured value
Button for ATM and HV calibration
Value
0 to +9 V
+2.2 to +8.5 V
0 V to +0.5 V
+0.1 V (broken filament)
1 V/decade, logarithmic
2 × 4.7 Ω, short circuit proof
> 10 kΩ, short circuit proof
80 ms
3.0 kΩ against supply earth (voltage to
pin 1 ≤ 5 V)
-3
atm cm
3
/s
0.987
9.87
-2
1.67 · 10
1.32
1

Advertisement

Table of Contents
loading

This manual is also suitable for:

Tpr 281

Table of Contents