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Technical data and dimensions
12 Technical data and dimensions
12.1 Technical data
Parameter
Overpressure
Permissible overpressure
Vacuum
Operating pressure (Faraday)
Operating pressure (SEM)
9) 10)
Sensitivity
Smallest detectable partial pressure (Faraday)
Smallest detectable partial pressure (with 90° SEM and electronic
counter)
Sensitivity for air (Faraday)
Sensitivity for air (SEM)
Mass filter
QMA 400
Rod diameter
Rod length
Rod material
QMA 410
Rod diameter
Rod length
Rod material
QMA 430
Rod diameter
Rod length
Rod material
SEV 217
Amplification (new)
Operating voltage
Bias voltage
Number of stages
Voltage divider
Admissible output current
Bakeout temperature
for dynode material
SEV 218
Data as for SEV 217, however, with separate conversion dynode (CD)
CD voltage
Connection flange
QMA 400
QMA 410
QMA 430
Gas connections (CB ion sources)
9)
10) Peak with = 1 u on 10% of the peak height
48/52
Valid for QMA 400 without SEM, CB-IQ with magnet, emission 1 mA, ΔM
Value
≤ 2000 hPa (absolute)
≤1 × 10
-4
hPa in the ion source
≤1 × 10
-5
hPa in the ion source
<10
-11
hPa
<10
-15
hPa
-4
>3 × 10
A/hPa
>200 A/hPa
8 mm
200 mm
Molybdenum
16 mm
300 mm
Molybdenum
8 mm
200 mm
Stainless steel
8
>10
at 3.5 kV
1 – 3.5 kV
≤±3,2 kV at SEM-
17
18 MΩ
≤10
-5
A
≤400°C
CuBe
≤-6.3 kV
DN 63 CF
DN 100 CF
DN 63 CF
= 1 u
10
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