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Installation
5 Installation
5.1 Preparing analyzer for installation
Danger to life caused by electric voltage on the analyzer
During operation, dangerous voltage is present on the electrode system of the QMA analyzer. Com-
ponents in the vacuum system are dangerous to touch under certain conditions. There is danger to
life due to electric voltage.
► Protect installed parts, connected units and lines against galvanic connections, flashover or
► Make sure that the QMA, vacuum chamber, and entire apparatus always have a proper connec-
► Provide additional protection if the user can touch the analyzer when the vacuum system is open.
► Ensure mechanical protection against contact of the analyzer and the parts installed.
► Ensure compulsory separation of the current supply when opening the system (using a door con-
Damage to the analyzer caused by external voltages and magnetic fields
Never expose the analyzer electrode system to external voltages that are hazardous in the event of
contact, as a result of galvanic connections, contact, flashover, plasma, ion or electron beams, etc. If
such danger sources exist in the vacuum chamber, you must provide protective measures that safely
rule out such influences. Even smaller external voltages acting on the analyzer will lead to damage to
the electronics and unreliable measuring results.
► Meet appropriate protective measures against external voltages (for example, better arrange-
► Do not mount the analyzer near to magnetic fields with > 0.2 mT.
► Ensure mechanical protection against contact of the analyzer and the parts installed.
► Ensure compulsory separation of the current supply when opening the system (using a door con-
► Observe the standards applicable for the vacuum system.
5.1.1 Choosing mounting orientation
In many cases, the mounting orientation of the analyzer does not affect its function. The position of the
ion source has to match the analytical task. For example, no reliable residual gas measurement is pos-
sible when only a pipe with a small cross section connects the analyzer with the measurement cham-
ber.
Procedure
► Choose a mounting orientation where a good arrangement of QMH high-frequency generator and
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DANGER
charge carrier flow.
tion to protective ground.
tact, for example).
ment, shielding, earthing, etc.).
tact, for example).
cables can be achieved.
NOTICE
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