Pressure Control Configuration - VAT 642 Series Installation And Operating Instructions Manual
Control gate valve with cc-link interface
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Series 642
4.6.8
Pressure control configuration
System Configuration
Downstream
Control
valve
Pump
Upstream
Control
valve
Pump
Tv =
813316EB
Adaptive pressure
Process
chamber
Pressure controller)
Process
chamber
Soft Pump
Use the formula below to define the applicable pressure control algorithm.
• CV
P
SFS
q
L
Edition 2017-11-24
INSTALLATION
Constant gas flow available
Tv*<= 500 sec
controller
(Refer to chapter:
Fixed pressure controller
(Refer to chapter: Pressure controller)
Soft Pump (Refer to chapter: Pressure controller)
q
gasflow for learn [mbarl/s]
L
p
sensor full scale pressure [mbar]
SFS
Tv*
Vacuum time constant [sec]
CV
Chamber Volume [l]
Constant gas flow not
Tv* > 500 sec
Fixed pressure controller
(Refer to chapter: Pressure controller)
available
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