Symmetrical flow control & isolation valve (39 pages)
Summary of Contents for VAT 642 Series
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Installation, Operating & Maintenance Instructions Control gate valve with RS232 interface Series 642 DN 100 mm (I.D. 4") This manual is valid for the following product ordering numbers: 64240-PEAG-0001 Configured with firmware: 642P.2E.02 603696EA Edition 2013-08-16...
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The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.
Series 642 Contents Description of product ................ 5 Identification of product ....................5 Use of product ......................... 5 Used abbreviations ......................5 Related documents ......................5 Important information ....................... 5 Technical data ......................... 6 1.6.1 Control and actuating unit ................. 6 1.6.2 Valve unit ......................
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Series 642 5.1.1 Local operation ....................50 5.1.2 Remote operation .................... 51 Close valve ........................52 Open valve ........................52 Position control ......................52 Pressure control ......................52 Display information ......................53 5.6.1 Power up ......................53 5.6.2 Operation ......................54 5.6.3 Errors ......................
This product is a control gate valve with isolation functionality. It is intended to use for downstream pressure control applications. Use product for clean and dry vacuum applications only. Other applications are only allowed with the written permission of VAT. Used abbreviations Abbreviation...
DESCRIPTION OF PRODUCT Series 642 Technical data 1.6.1 Control and actuating unit Describtion Input voltage +24 VDC (±10%) @ 0.5 V pk-pk max. [connector: POWER] Power consumption 86 W [connector: POWER] Sensor power supply output ±15 VDC (±5%) / 1000 mA max. [connector: SENSOR] Sensor input 0-10 VDC / Ri>100 kΩ...
Series 642 DESCRIPTION OF PRODUCT 1.6.2 Valve unit Valve unit 1 × 10E-8 mbar to 1.2 bar (abs) Pressure range at 20 C 1 × 10E-9 mbar l/s Leak rate to outside at 20 C 1 x 10E-9 mbar l/s Leak rate valve seat at 20 C Cycles until first service 1’000’000...
SAFETY Series 642 Safety Compulsory reading material Read this chapter prior to performing any work with or on the product. It contains important information that is significant for your own personal safety. This chapter must have been read and understood by all persons who perform any kind of work with or on the product during any stage of its serviceable life.
Series 642 SAFETY Personnel qualifications WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Safety labels Label Part No. Location on valve On protective foil covering of T-9001-156 valve opening 603696EA...
Actuation is performed with a stepper motor and controller. The stepper motor/controller version ensures accurate pressure control due to exact gate positioning. For leak tight closing the VATLOCK principle is applied. For details refer to VAT catalog. 10/82 Edition 2013-08-16...
Series 642 DESIGN AND FUNCTION 3.2.1 Pressure control system overview and function Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences. Valve Process chamber Gas inlet Pressure sensor(s) Sensor cable Controller and actuator Seff Cable to remote control unit Cable to power supply HV Pump Q / p...
DESIGN AND FUNCTION Series 642 3.2.1.1 Way of operation The controller compares the actual pressure in the process chamber given by the pressure sensor with the preset pressure. The controller uses the difference between actual and set pressure to calculate the correct position of the control valve. The controller drives the control valve into the correct position and the actual pressure again equals the set pressure.
Make sure that the supplied products are in accordance with your order. Inspect the quality of the supplied products visually. If it does not meet your requirements, please contact VAT immediately. Store the original packaging material. It may be useful if products must be returned to VAT.
INSTALLATION Series 642 Installation into the system WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.
Series 642 INSTALLATION 4.2.1 Installation space condition Install the valve with integrated controller with space for dismantling and air circulation as shown in figure below. 603696EA Edition 2013-08-16 15/82...
INSTALLATION Series 642 4.2.2 Connection overview System: Valve Process chamber Gas inlet Pressure sensor(s) Sensor cable(s) Cable to RS232 remote control unit Cable to power supply Controller Connection cable controller / actuator Actuator Pump Actuator Controller 16/82 Edition 2013-08-16 603696EA...
Refer also to «Safety mode». 8. This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device.
INSTALLATION Series 642 Tightening torque The torque values below are dependent on many factors, such as materials involved, surface quality, surface treatment, and lubrication. The torques below are valid if immersion depth of the mounting screws is at least once the thread diameter (min. 1d), and the friction coefficient of the screw-flange connection ( )/2) is bigger than 0.12.
» lbf. 1000 For a combination of both forces (F and M) the values are invalid. Verify that the depth of the mounting screws is min. 1 × thread diameter. Please contact VAT for more information. 603696EA Edition 2013-08-16 19/82...
INSTALLATION Series 642 4.4.1 Requirements to sensor connection To achieve fast and accurate pressure control a fast sensor response is required. Sensor response time: < 50ms. The sensor is normally connected to the chamber by a pipe. To maintain that the response time is not degraded by this connection it needs to meet the following requirements: Inner diameter of connection pipe: >...
Series 642 INSTALLATION 4.5.1 Ground connection Recommendation for ground strap between controller ground and system chassis. Material L (Length max.) B1 (min.) B2 (min.) d1 ( ) d2 ( ) copper tinned 200 mm 25 mm 25 mm 4.5 mm customized Chassis (PE) (Protective Earth)
INSTALLATION Series 642 4.5.2 Sensor supply concepts Concepts: External +24 VDC supplied to POWER connector is converted into 15 VDC by the valve internal SPS and supplied to SENSOR connector to supply 15 VDC sensors. Refer to chapter «Power and sensor connection ( 15 VDC sensors) with optional SPS module»...
You can use our Software (freeware) 'Control Performance Analyzer' which can be downloaded from: http://www.vatvalve.com/customer-service/informations-and-downloads/control-performance-analyzer. Alternatively the VAT Service Box2 can be connected to the service port for setup and local operation. The service port is not galvanic isolated. Therefore we recommend using this only for setup, testing and maintenance and not for permanent control.
Series 642 INSTALLATION 4.5.5 RS232 Functions and Wiring This interface allows for remote operation by means of a command set based on the RS232 protocol. In addition there are 2 digital inputs and 2 digital outputs. Digital inputs may be operated either by switches or by voltage sources.
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INSTALLATION Series 642 b) Configuration with voltage source for digital inputs: Do not connect other pins than indicated in the schematics above! Use only screws with 4-40UNC thread for fastening the DB-25 connector! 26/82 Edition 2013-08-16 603696EA...
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Series 642 INSTALLATION 4.5.5.1 Digital inputs Function Signal type Description Priority This function will close the valve. Valve will be in interlock mode as long as function is activated. After deactivation of function it will remain effective until - OPEN valve digital input is active - converse RS232 control command have been received Digital The function is activated when optocoupler is ‘on’...
INSTALLATION Series 642 Initial operation To enable the valve for pressure control setup steps 1 to 6 must be performed. In case position control is required only it’s sufficient to perform steps 1 to 3. Setup step Description Turn on external + 24VDC power supply of valve (and external 15 Power up VDC for sensor power supply if required).
Series 642 INSTALLATION 4.6.2 Valve configuration Basic valve configuration must be adapted according to application needs. Definition of valve plate position in case of: After power up, default is ‘close‘. Power failure, default is ‘not defined‘. Only for versions that have Power Fail Option equipped [642 . . - .
INSTALLATION Series 642 Do not perform ZERO as long as pressure gauge voltage is shifting otherwise incorrect pressure reading is the result. Refer to manual of sensor manufacturer for warm up time. Do not perform ZERO, if the base pressure of your vacuum system is higher than 1‰...
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Series 642 INSTALLATION Gasflow calculation for LEARN: Do not apply a different gasflow for learn than determined below. Otherwise pressure control performance may be insufficient. Required pressure / flow regime must be known to calculate the most suitable learn gas flow for a specific application. 1.
Go to ‘Tools / Create Diagnostic File’ in ‘Control View’ resp. ‘Control Performance Analyzer’ and save file Pressure / flow / gas conditions to be controlled Chamber volume Pumping speed (l/s) and pump type (e.g. turbo pump) System description Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 32/82 Edition 2013-08-16 603696EA...
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Series 642 INSTALLATION 4.6.6.1 Gain factor adjustment The gain factor effects: Stability, Response time Default value is 1. Adjustment range is from 0.0001 to 7.5. Higher gain results in: faster response / higher over- / undershoot of pressure Lower gain results in: slower response/ lower over- / undershoot of pressure Adjustment procedure: 1.
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INSTALLATION Series 642 4.6.6.2 Sensor delay adjustment Sensor delay adjustment effects: Stability Default value is 0. Adjustment range is from 0 to 1.0s. Pipes and orifices for sensor attachment delay response time and so badly impact pressure control stability. By adapting this parameter to the approximate delay time stability problems can be reduced. But control response time will be slowed down by this measure.
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Series 642 INSTALLATION 4.6.6.3 Setpoint ramp adjustment Setpoint ramp effects: Undershoot of pressure, Response time Default value for Setpoint Ramp is 0. Adjustment range for Setpoint Ramp is from 0 to 10 s. This parameter defines the time that is used to decrease / raise pressure between 2 setpoints. Especially in pressure decrease situations at low flows pressure response can be improved much by adapting setpoint ramp time.
INSTALLATION Series 642 4.6.6.4 Valve speed adjustment Valve speed effects: Response time Default value is 1000. Adjustment range is from 1 to 1000. This parameter effects valve plate actuating speed. Speed adjustment is effective for PRESSURE CONTROL and POSITION CONTROL. Normally best pressure control response is achieved with max.
Series 642 INSTALLATION 4.7.2 Control commands Acknowledgement Command Control function (within 10ms after reception of command) Description [R:][xxxxxx][CR][LF] [R:][CR][LF] [i:38][CR][LF] [i:38][00xxxxxx][CR][LF] data length 6 characters for writing 8 characters starting with double zero for reading xxxxxx position SETPOINT, value depends on configuration, POSITION CONTROL refer to «RS232 with analog output setup commands, RANGE CONFIGURATION»...
INSTALLATION Series 642 4.7.3 Inquiry commands Acknowledgement Command (within 10ms after reception of command) Inquiry function Description [i:76][CR][LF] [i:76][xxxxxxsyyyyyyyabc][CR][LF] data length 17 characters xxxxxx position, return value depends on configuration, refer to «RS232 with analog output setup commands, RANGE CONFIGURATION» for details sign, 0 for positive pressure readings, - for negative pressure readings yyyyyyy...
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Series 642 INSTALLATION Acknowledgement Command (within 10ms after reception of command) Inquiry function Description [i:64][CR][LF] [i:64][sxxxxxxx][CR][LF] data length 8 characters sign, 0 for positive readings, - for negative readings SENSOR 1 READING xxxxxxx sensor 1 reading, return value depends on configuration, refer to «RS232 with analog output setup commands, RANGE CONFIGURATION»...
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INSTALLATION Series 642 Acknowledgement Command (within 10ms after reception of command) Inquiry function Description [i:51][CR][LF] [i:51][abcdefgh][CR][LF] data length 8 characters 0 = no service required 1 = service request, it is indicated when the control unit detects that motor steps are apparently not effective. This may happen when the valve is heavily contaminated or the gate seal is heavily sticking.
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Series 642 INSTALLATION Acknowledgement Command (within 10ms after reception of command) Inquiry function Description [i:32][CR][LF] [i:32][abcdefgh][CR][LF] data length 8 characters 0 = LEARN not running, 1 = LEARN running 0 = LEARN data set present, 1 = LEARN data set not present 0 = ok 1 = last LEARN interrupted by user (control command) 2 = last LEARN interrupted by control unit...
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INSTALLATION Series 642 Acknowledgement Command (within 10ms after reception of command) Inquiry function Description [i:70][CR][LF] [i:70][xxxxxxxxxx][CR][LF] data length 10 characters xxxxxxxxxx number of throttle cycles THROTTLE CYCLE COUNTER This function returns the number of throttle cycles. A movement from max. throttle position to open back to max.
Series 642 INSTALLATION 4.7.4 Setup commands Acknowledgement Command Setup function (within 10ms after reception of command) Description [c:01][xx][CR][LF] [c:01][CR][LF] data length: 2 characters 00 = local operation (service port) 01 = remote operation, change to local enabled 02 = locked remote operation, change to local not possible via service port ACCESS MODE This function selects the access authorization to the valve.
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INSTALLATION Series 642 Acknowledgement Command Setup function (within 10ms after reception of command) Description [s:01][abcdefgh][CR][LF] [s:01][CR][LF] [i:01][CR][LF] [i:01][abcdefgh][CR][LF] data length 8 characters 0 = no sensor 1 = 1 sensor operation (sensor 1 input) 2 = 2 sensor operation with automatic changeover (low range = sensor 2 input, high range = sensor 1 input) 3 = 1 sensor operation (sensor 2 input) 4 = 2 sensor operation with automatic changeover...
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Series 642 INSTALLATION Acknowledgement Command (within 10ms after reception of command) Setup function Description [s:21][abcdefgh][CR][LF] [s:21][CR][LF] [i:21][CR][LF] [i:21][abcdefgh][CR][LF] data length 8 characters range for POSITION: 0 = 0 – 1’000, 1 = 0 – 10’000, 2 = 0 – 100’000 bcdefgh upper value for PRESSURE and SENSOR READING: 1000 ...
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INSTALLATION Series 642 Acknowledgement Command Setup function (within 10ms after reception of command) Description [Z:][CR][LF] [Z:][CR][LF] ZERO This command initiates ZERO to compensate for offset of gauge(s). Note: Refer to «ZERO» for correct zero procedure. [c:6002][xxxxxxxx][CR][LF] [c:60][CR][LF] data length: 8 characters xxxxxxxx System base pressure, value depends on configuration, refer to «RS232 with analog output setup commands, RANGE...
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Series 642 INSTALLATION Acknowledgement Command Setup function (within 10ms after reception of command) Description [s:02][abcdefgh][CR][LF] [s:02][CR][LF] [i:02][CR][LF] [i:02][abcdefgh][CR][LF] data length 8 characters 0 (reserved, do not change) gain factor: 0 = 0.10, 1 = 0.13, 2 = 0.18, 3 = 0.23, 4 = 0.32, 5 = 0.42, 6 = 0.56 7 = 0.75, 8 = 1.00, 9 = 1.33, A = 1.78, B = 2.37, C = 3.16, D = 4.22 E = 5.62, F = 7.50, G = 0.0001, H = 0.0003, I = 0.001, J = 0.003, K = 0.01, L = 0.02, M = 0.05...
Series 642 OPERATION Operation WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.
Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT is required. You can use our Software (freeware) 'Control Performance Analyzer' which can be downloaded from: http://www.vatvalve.com/customer-service/informations-and-downloads/control-performance-analyzer.
Series 642 OPERATION 5.1.2 Remote operation This product is equipped with a RS232 interface to allow for remote operation. See section «RS232 interface» for details. 'Control Performance Analyzer' software or 'Service Box 2' may be used for monitoring during remote control. 'Control Performance Analyzer' software 'Service Box 2' In case ‘Control Performance Analyzer’...
OPERATION Series 642 Close valve Local operation: Remote operation: (‘Control View’, ‘Control Performance Analyzer’ or (Refer to chapter: «Control commands» for ‘Service Box 2‘) details) Push CLOSE button Send CLOSE VALVE Open valve Local operation: Remote operation: (‘Control View’, ‘Control Performance Analyzer’ or (Refer to chapter: «Control commands»...
Series 642 OPERATION Display information There is a 4 digit display located on the panel. It displays configuration, status and position information. For details see following tables. 1 2 3 4 Display 5.6.1 Power up Description Digit 1 Digit 2 Digit 3 Digit 4 At first all dots are illuminated then...
Series 642 OPERATION Operation during power up Reaction of valve: Valve position Valve power up configuration = closed Valve power up configuration = open before (default) power up: Valve runs to max. throttle position to Closed (isolated) Valve remains closed. Display shows alternately ‘C C’...
TROUBLE SHOOTING Series 642 Trouble shooting Failure Check Action No dots lighted on display 24 V power supply ok? Connect valve to power supply according to «Electrical connection» and make sure that power supply is working. Remote operation does not work - Local operation via service port active - Switch to remote operation.
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TROUBLE SHOOTING Series 642 Failure Check Action CLOSE VALVE does not work - Safety mode active, check for D on - Provide power to motor to allow for display? operation. - Refer to «Electrical connection» for details. - Refer to “Display shows «M C»” in this - Maintenance mode active table OPEN VALVE does not work...
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TROUBLE SHOOTING Series 642 Failure Check Action PRESSURE CONTROL not optimal - Setup done completely? - Perform «Setup procedure» completely. - LEARN done? - Perform LEARN. Refer to «LEARN» for details. - ZERO performed before LEARN? - Perform ZERO then repeat LEARN. Refer to «Setup procedure»...
Before carrying out any maintenance, please contact VAT. It has to be individually decided whether the maintenance can be performed by the customer or has to be carried out by VAT. Please write down the fabrication number of the valve before contact VAT. Refer to chapter «Identification of product»...
One maintenance procedures are defined for this valve: Replacement of gate seal (gate and bonnet seal) and valve cleaning Required frequency of cleaning and replacement of seals is depending on process conditions. VAT can give the following recommendations for preventive maintenance: Replacement of Recommendation Every 100’000 cycles Gate seal (gate and bonnet seal) For spare parts of gate and bonnet seal refer to chapter: «Spare parts»...
Series 642 MAINTENANCE 7.2.1 Replacement of gate seals and valve cleaning 7.2.1.1 Required tools Allen Wrench 4 mm (Allen torque wrench 4 mm) Isopropyl alcohol 2 × Open end wrench 13mm Vacuum grease (see chapter spare parts) Open end torque wrench 13 mm O-ring removal tool (see chapter Accessories) Clean room wiper...
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MAINTENANCE Series 642 Description Required tool Pull out the gate until the crank bolt can be reached 10. Loosen and remove the crank bolt Allen wrench 4 mm screw 11. Remove the crank bolt from lever 12. Pull out the gate assembly complete Caution! Take care that gate is not scratching at lever while pulling out...
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Series 642 MAINTENANCE Description Required tool Clean room wiper a 15. Clean the o-ring groove and the gate little soaked with assembly isopropyl alcohol 16. Install the new o-ring equally in o-ring groove (for new o-ring refer to chapter: «Spare parts») Cleaning tool a little soaked with isopropyl alcohol...
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MAINTENANCE Series 642 Description Required tool 20. Insert the crank bolt at lever If necessary use a new crank bolt (for new crank bolt refer to chapter: «Spare parts»). 21. Fasten the crank bolt screw with Allen torque wrench 5.7 Nm 4 mm 22.
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Series 642 MAINTENANCE Description Required tool 26. Reassemble the bonnet and bonnet seal with valve 1 × Open end torque wrench 13 mm 27. Fasten the bonnet screws with 18 Nm 1 × Open end wrench 13 mm § 603696EA Edition 2013-08-16 65/82...
MAINTENANCE Series 642 7.2.2 Replacement of Option board NOTICE Electrostatic discharge Electronic components could be damage. All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage. NOTICE Burned connector pins (spark) Connector pins or electronic parts could damage, if plugged and unplugged under power.
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Series 642 MAINTENANCE 7.2.2.1 Durability of power fail battery The curves in the graph show the estimated life of Ultra Cap PFO in the worst condition (max. sensor load = 1 A, valve heating temperature = 150 °C). If the SPS is not fully loaded (< 1 A) or heating temperature of valve body is lower than 150 °C, the corresponding life time curve will be somewhere in between the upper and the lower curve.
MAINTENANCE Series 642 7.2.3 Retrofit / replacement procedure Top view on control and actuating unit with panel removed: Master board Connector board Option board Interface board Motor driver board All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above! 7.2.3.1 Needed tools...
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Series 642 MAINTENANCE Description Required tool Disconnect all electrical connections Attention to ESD protection! Pozidriv screw driver size1 at controller. Open end wrench 7 mm Remove the panel screws. Pozidriv screw driver size1 Remove this screws and the cover. Screw driver size 2 Remove female screw locks from Open end wrench 4.5 mm connectors.
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MAINTENANCE Series 642 Description Required tool Remove or replace option board. (sample picture) Reassemble all parts in reverse order (see steps 6…3). Tighten panel screws with 1.1 Nm (see step 3). Pozidriv screw driver size1 Connect all electrical connections. Open end wrench 7 mm If you need any further information, please contact one of our service centers.
Series 642 Repairs Repairs may only be carried out by the VAT service staff. In exceptional cases, the customer is allowed to carry out the repairs, but only with the prior consent of VAT. Please contact one of our service centers. You will find the addresses on our website www.vatvalve.com.
DISMOUNTING AND STORAGE Series 642 Dismounting and Storage WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination. Always wear clean room gloves when handling the valve.
Series 642 DISMOUNTING AND STORAGE Storage NOTICE Wrong storage Inappropriate temperatures and humidity may cause damage to the product. Valve must be stored at: – relative humidity between 10% and 70% – temperature between +10 °C and +50 °C – non-condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used.
If products are radioactively contaminated, the VAT form «Contamination and Radiation Report» must be filled out. Please contact VAT in advance. If products are sent to VAT in contaminated condition, VAT will carry out the decontaminating procedure at the customer's expense.
10.2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used. Always use the original packaging material and handle product with care. VAT disclaims any liability for damages resulting from inappropriate packaging. 603696EA Edition 2013-08-16 75/82...
DISPOSAL Series 642 Disposal WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. 76/82 Edition 2013-08-16 603696EA...
«Identification of product». This is to ensure that the appropriate spare parts are supplied. VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff.
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