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VAT 642 Series Installation And Operating Instructions Manual

Control gate valve with cc-link interface
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Installation, Operating &
Maintenance Instructions
Control gate valve
with CC-Link interface
Series 642
DN 63 – 400 mm (I.D. 2.5" - 16")
This manual is valid for the valve ordering number(s):
642 . . - . .GL - . . . .
642 . . - . .GN - . . . .
642 . . - . .AL - . . . .
642 . . - . .AN - . . . .
642 . . - . .HL - . . . .
642 . . - . .HN - . . . .
642 . . - . .CL - . . . .
642 . . - . .CN - . . . .
SPS = Sensor Power Supply
configured with firmware 600P.1G.00.08
Sample picture
813316EB
(1 sensor input)
(2 sensor inputs)
(1 sensor input / ±15V SPS)
(2 sensor inputs / ±15V SPS)
(1 sensor input / PFO)
(2 sensor inputs / PFO)
(1 sensor input / ±15V SPS / PFO)
(2 sensor inputs / ±15V SPS / PFO)
PFO = Power Failure Option
Edition 2017-11-24

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Summary of Contents for VAT 642 Series

  • Page 1 Installation, Operating & Maintenance Instructions Control gate valve with CC-Link interface Series 642 DN 63 – 400 mm (I.D. 2.5” - 16") This manual is valid for the valve ordering number(s): 642 . . - . .GL - ..(1 sensor input) 642 .
  • Page 2 The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.

  • Page 3: Table Of Contents

    Series 642 Contents Description of product ................ 6 Identification of product ....................6 Use of product ......................... 6 Used abbreviations ......................6 Related documents......................6 Important information....................... 6 Technical data ......................... 7 1.6.1 Control and actuating unit ................. 7 1.6.2 Valve unit ......................
  • Page 4 CC-Link interface (Process data – cyclic communication) ..........63 4.9.1 OUTPUT Buffer (Master PLC) ................. 63 4.9.2 INPUT Buffer (Master PLC) ................66 4.9.3 Communication and timing between Master (PLC) and Slave (VAT-Valve) ..70 Operation ................... 71 Normal operation ......................71 5.1.1 Local operation ....................72 5.1.2 Remote operation ....................
  • Page 5 Series 642 813316EB Edition 2017-11-24 5/107...

  • Page 6: Description Of Product

    This product is a control gate valve with isolation functionality. It is intended to use for downstream pressure control applications. Use product for clean and dry vacuum applications only. Other applications are only allowed with the written permission of VAT. Used abbreviations Abbreviation...

  • Page 7: Technical Data

    Series 642 DESCRIPTION OF PRODUCT Technical data 1.6.1 Control and actuating unit Description Input voltage +24 VDC (±10%) @ 0.5 V pk-pk max. [connector: POWER] Power consumption 55 W (standard) [connector: POWER] with optional SPS + 36 W with optional PFO + 10 W remote Interface [connector: CC-Link]...

  • Page 8: Valve Unit

    DESCRIPTION OF PRODUCT Series 642 1.6.2 Valve unit Description Pressure range at 20°C (unheated on delivery) • 1 × 10E-8 mbar to 2.0 bar (abs) DN63…200 • 1 × 10E-8 mbar to 1.2 bar (abs) DN250…400 1 × 10E-9 mbar ls Leak rate to outside / seat at 20°C (unheated on delivery) Differential pressure on the gate •...

  • Page 9: Safety

    Series 642 SAFETY Safety Compulsory reading material Read this chapter prior to performing any work with or on the product. It contains important information that is significant for your own personal safety. This chapter must have been read and understood by all persons who perform any kind of work with or on the product during any stage of its serviceable life.

  • Page 10: Personnel Qualifications

    SAFETY Series 642 Personnel qualifications WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Safety labels Label Part No. Location on valve On protective foil covering of T-9001-156 valve opening 10/107...

  • Page 11: Design And Function

    Actuation is performed with a stepper motor and controller. The stepper motor/controller version ensures accurate pressure control due to exact gate positioning. For leak tight closing the VATLOCK principle is applied. For details refer to VAT catalog. 813316EB Edition 2017-11-24...

  • Page 12: Pressure Control System Overview And Function

    DESIGN AND FUNCTION Series 642 3.2.1 Pressure control system overview and function Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences. Valve Process chamber Gas inlet Pressure sensor(s) Sensor cable Controller and actuator Seff Cable to remote control unit Cable to power supply HV Pump Q / p...

  • Page 13: Principle Of A Pressure Control System

    Series 642 DESIGN AND FUNCTION 3.2.1.1 Way of operation The controller compares the actual pressure in the process chamber given by the pressure sensor with the preset pressure. The controller uses the difference between actual and set pressure to calculate the correct position of the control valve. The controller drives the control valve into the correct position and the actual pressure again equals the set pressure.

  • Page 14: Installation

    Make sure that the supplied products are in accordance with your order. • Inspect the quality of the supplied products visually. If it does not meet your requirements, please contact VAT immediately. • Store the original packaging material. It may be useful if products must be returned to VAT.

  • Page 15: Installation Into The System

    Series 642 INSTALLATION Installation into the system WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.

  • Page 16: Installation Space Condition

    INSTALLATION Series 642 4.2.1 Installation space condition Install the valve with integrated controller with space for dismantling and air circulation as shown in figure below. (sample picture) Overview table: DN to required distance (d) for maintenance. 80 / 100 320 / 350 16/107 Edition 2017-11-24 813316EB...

  • Page 17: Connection Overview

    Series 642 INSTALLATION 4.2.2 Connection overview System: Valve Process chamber Gas inlet Pressure sensor(s) Sensor cable(s) Cable to remote control unit Cable to power supply Controller Connection cable controller / actuator 10 Actuator 11 Pump Actuator Controller 813316EB Edition 2017-11-24 17/107...

  • Page 18: Installation Procedure

    Refer also to «Safety mode». 8. This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device.

  • Page 19: Tightening Torque

    Series 642 INSTALLATION Tightening torque The torque values below are dependent on many factors, such as materials involved, surface quality, surface treatment, and lubrication. The torques below are valid if immersion depth of the mounting screws is at least once the thread diameter (min. 1d), and the friction coefficient of the screw-flange + µ...

  • Page 20: Mounting With O-Ring In Grooves

    INSTALLATION Series 642 4.3.2 Mounting with O-ring in grooves max. torque t max. torque Max. hole depth [d] (Nm) (lbs . ft) (mm) inch ISO-F ASA-LP ISO-F ASA-LP ISO-F ASA-LP 20/107 Edition 2017-11-24 813316EB...

  • Page 21: Admissible Forces

    2½ 1960 1960 2450 2940 2940 3430 3920 3920 7840 1760 In case of both kind of forces are occurring («FA» und «M»), the above shown values are invalid. Please contact VAT in this case. 813316EB Edition 2017-11-24 21/107...

  • Page 22: Requirements To Sensor Connection

    INSTALLATION Series 642 4.4.1 Requirements to sensor connection To achieve fast and accurate pressure control a fast sensor response is required. Sensor response time: < 50ms. The sensor is normally connected to the chamber by a pipe. To maintain that the response time is not degraded by this connection it needs to meet the following requirements: •...

  • Page 23: Ground Connection

    Series 642 INSTALLATION 4.5.1 Ground connection Recommendation for ground strap between controller ground and system chassis. ∅ ∅ Material L (Length max.) B1 (min.) B2 (min.) d1 ( d2 ( copper tinned 200 mm 25 mm 25 mm 4.5 mm customized Chassis (PE) (Protective Earth)

  • Page 24: Sensor Supply Concepts

    INSTALLATION Series 642 4.5.2 Sensor supply concepts Those valves offer 4 alternative concepts to supply the sensor(s) with power. This depends on the sensor type and valve version that is used. Concepts: • External +24 VDC supplied to POWER connector is feedthrough to SENSOR connector to supply 24 VDC sensors.

  • Page 25: Power And Sensor Connection (+24 Vdc Sensors)

    • VAT fuse recommendation: (a) 5AF, / (b) Safety switch min. 3A • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
  • Page 26 S C1 091 A • VAT fuse recommendation: (a) 5AF, / (b) Safety switch min. 3A • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
  • Page 27 SC 1090 A • VAT fuse recommendation: (a) 5AF, / (b) Safety switch min. 3A • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...
  • Page 28 SC 1092 A • VAT fuse recommendation: (a) 5AF, / (b) Safety switch min. 3A • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...

  • Page 29: Cc-Link Interface Connection

    The valve can be defined as «first station», «…stations…» between first and last, or «last station». If the valve at first or last station, «TR» must be installed between 1 (DA) and 2 (DB). The station type for VAT valves are: Version 2 Remote Device Station. 813316EB Edition 2017-11-24...
  • Page 30 All parts of connector are supplemented in a plastic bag (407612), except «COMBICOM» connector from valve controller 4.5.5.3 CC-Link connector overview COMBICON Strain-relief screw for shield mesh and cable CC-Link wires Connector housing VAT Shield mesh CC-Link cable 30/107 Edition 2017-11-24 813316EB...
  • Page 31 Series 642 INSTALLATION 4.5.5.4 Install CC-Link cable at valve controller Description Required tool Remove the cable coat carefully Cable Pos. A, x about 30mm Knife Cable Pos. B, x about 40mm Pos. see step 8 Cut off the shield wire Side-cutting pliers Cut off the aluminum shield Side-cutting pliers...
  • Page 32 INSTALLATION Series 642 Description Required tool Remove the wire coat carefully Wire strippers about 5mm Shield 10. Insert the cable(s) at connector hosing as shown in the pictures, see also chapter CC-Link connector If valve in CC-Link network is at «first or last station» install the CC-Link cable at position A and close B with blind plug C.
  • Page 33 Series 642 INSTALLATION Description Required tool 12. Install the CC-Link wires, see also «Connector type» table below If cable at pos. A (first or last station) install «TR» between 1 and 2 Screw driver 1 x blue to 1 size 1 1 x white to 2 1 x yellow to 3 If cables at pos.
  • Page 34 INSTALLATION Series 642 Connector type: COMBICON 2.5 / 5 - ST – 5, 08 with special VAT housing interface Signal Color of isolator (CC-Link wires) Comment connector Blue Positive RS485 RxD/TxD White Negative RS485 RxD/TxD Yellow Signal Ground Cable Shield Functional Ground The CC-Link interface is galvanic isolated from control unit.

  • Page 35: Logic I/O

    Series 642 INSTALLATION 4.5.6 LOGIC I/O This interface allows for remote operation by means of a command set based on the CC-Link protocol. In addition there is a digital input and a digital output. Digital input may only be operated by a switch. Active digital input has: higher priority than CC-Link commands higher priority than Local commands...

  • Page 36: Service Port Connection

    You can use our Software (freeware) 'Control Performance Analyzer' which can be downloaded from: http://www.vatvalve.com/customer-service/informations-and-downloads/control-performance-analyzer. Alternatively the VAT Service Box2 can be connected to the service port for setup and local operation. The service port is not galvanic isolated. Therefore we recommend using this only for setup, testing and maintenance and not for permanent control.

  • Page 37: Initial Operation

    • For ease setup (in Local mode) of ‘Interface’, ‘Valve’, ‘Sensor’, ‘Senor ZERO’, ‘LEARN’ and ‘PRESSURE CONTROL COFIGURATION’ it is possible to use the CPA 3.0, The free download is available on the VAT homepage: http://www.vatvalve.com/customer-service/informations-and-downloads/control- performance-analyzer 813316EB...

  • Page 38: Cc-Link Configuration

    Series 642 4.6.2 CC-Link configuration The station type for VAT valves are: Version 2 Remote Device Station. Station Number The «station number» is used to distinguish between stations on the CC-Link network. Unique station numbers in consecutive order without duplication must be used, when assigning stations to the CC-Link network.
  • Page 39 Extended cyclic settings: In the extended cyclic transmission (only Ver.2), the extended cyclic points can be set as 2 times, 4 times or 8 times of the normal cyclic transmission points. The VAT slave supports two combinations of the CC-Link parameter settings. Value Operational settings CC-Link Ver.2 / Occupies 1 station / Octuple expanded cyclic...
  • Page 40 INSTALLATION Series 642 Data type of pressure and position values (optional) The «data type of pressure and position» can be configured by ‘Control View’, ‘Control Performance Analyzer’, or ‘Universal Hyper Terminal’. The «set-command» is: «s:23xxy00000». The xxy value is the data type of a pressure and position signal.
  • Page 41 Series 642 INSTALLATION Range of pressure and position values (optional) The «range of pressure and position values» can be adjusted. That means: For position values, the value for valve position “CLOSE” and the valve position “OPEN” can be set to a other ones then the default 0...100’000 is. For pressure values, the value for physical 0 Volt and 10 Volt of the sensor output can be set to other values then the default 0...1’000’000 is.

  • Page 42: Logic I/O Configuration

    The internal accuracy of valve is for all positions 100’000 steps and for all pressures 1’000’000 steps. If the range of pressure and position values is rising, the accuracy of pressure and position will not rise. There is only the gain factor between the VAT valve and the CC-Link Master which will be adapted.

  • Page 43: Valve Configuration

    Series 642 INSTALLATION 4.6.4 Valve configuration Basic valve configuration must be adapted according to application needs. Definition of valve plate position in case of: • After power up, default is ‘close‘. • Power failure, default is ‘not defined‘. Only for versions that have Power Fail Option equipped [642 . . - .

  • Page 44: Zero

    INSTALLATION Series 642 4.6.6 ZERO ZERO allows for the compensation of the sensor offset voltage. When ZERO is performed the current value at the sensor input is equated to pressure zero. In case of a 2 sensor system both sensor inputs will be adjusted. A max. offset voltage of +/- 1.4 V can be compensated.

  • Page 45: Learn (Adaptive)

    Series 642 INSTALLATION 4.6.7 LEARN (adaptive) LEARN adapts the PID controller of the valve to the vacuum system and its operating conditions. LEARN must be executed only once during system setup. The LEARN routine determines the characteristic of the vacuum system. Based on this, the PID controller is able to run fast and accurate pressure control cycles.
  • Page 46 INSTALLATION Series 642 Gasflow calculation for LEARN: Do not apply a different gasflow for learn than determined below. Otherwise pressure control performance may be insufficient. Required pressure / flow regime must be known to calculate the most suitable learn gas flow for a specific application. At first it is necessary to find out about the required control range respectively its conductance values.

  • Page 47: Pressure Control Configuration

    Series 642 INSTALLATION 4.6.8 Pressure control configuration Constant gas flow available Constant gas flow not System Configuration available Tv*<= 500 sec Tv* > 500 sec Downstream Adaptive pressure Process controller Fixed pressure controller chamber (Refer to chapter: (Refer to chapter: Pressure controller) Pressure controller) Control valve...

  • Page 48: Tuning Of Control Performance

    4.6.8.1 Pressure controller For easy setup (Local operation) of ‘Pressure controller’ and ‘Pressure control parameter’ please use the VAT “Control Performance Analyzer” CPA 3.0. There is a free download on the VAT home page, refer to: http://www.vatvalve.com/customer-service/informations-and-downloads/control- performance-analyzer Local operation: Remote operation: (‘Control View’...

  • Page 49: Tuning Of Control Performance With Adaptive Pressure Controller

    Series 642 INSTALLATION 4.7.1 Tuning of control performance with adaptive pressure controller Normally the default settings will result in good pressure control performance. For some applications tuning may be required to improve performance. The tuning procedures for each parameter (grey boxes) and its default values are described separately below.
  • Page 50 INSTALLATION Series 642 4.7.1.1 Gain factor adjustment The gain factor effects: Stability, Response time Adjustment range is from 0.0001 to 7.5. - Higher gain results in: faster response / higher over- / undershoot of pressure - Lower gain results in: slower response/ lower over- / undershoot of pressure Adjustment procedure: 1.
  • Page 51 Series 642 INSTALLATION 4.7.1.2 Sensor delay adjustment Sensor delay adjustment effects: Stability Adjustment range is from 0 to 1.0s. Pipes and orifices for sensor attachment delay response time and so badly impact pressure control stability. By adapting this parameter to the approximate delay time stability problems can be reduced. But control response time will be slowed down by this measure.
  • Page 52 INSTALLATION Series 642 4.7.1.3 Setpoint ramp adjustment Setpoint ramp effects: Undershoot of pressure, Response time Adjustment range for Setpoint Ramp is from 0 to 10 s. This parameter defines the time that is used to decrease / raise pressure between 2 setpoints. Especially in pressure decrease situations at low flows pressure response can be improved much by adapting setpoint ramp time.
  • Page 53 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 813316EB Edition 2017-11-24 53/107...

  • Page 54: Tuning Of Control Performance With Fixed Pi Pressure Controller

    INSTALLATION Series 642 4.7.2 Tuning of control performance with fixed PI pressure controller 4.7.2.1 Optimizing P gain and I gain This valve may be used for downstream or upstream pressure control depending on configuration. The PI parameters of the pressure controller require correct adjustment. These parameters must be set once during system setup and are stored in the device memory which is power fail save.
  • Page 55 Series 642 INSTALLATION Start optimization with P gain set to 1.0 and I gain set to 0.0. Set chamber pressure to SP2, wait until the pressure is stable. Set pressure to SP1. If the transition from SP2 to SP1 results in a significant pressure over shoot or even does not stabilize at all, the P gain is too high.
  • Page 56 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 56/107 Edition 2017-11-24 813316EB...

  • Page 57: Tuning Of Control Performance With Soft Pump Pressure Controller

    The VAT soft pump controller requires a pump down time shorter than 10 sec. for good control results. If the required pump down time is longer than 10 sec., the pump down curve has to be partitioned into sections shorter than 10 sec.
  • Page 58 INSTALLATION Series 642 Optimizing P gain WE start by setting the P gain to 1.0 as a trial value and adjust according to the response. The pump down routine has to be controlled as follows: Move control valve into close position Start pump down by opening the pump isolation valve or starting the pump and sending the first pressure set point to the valve controller.
  • Page 59 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 813316EB Edition 2017-11-24 59/107...

  • Page 60: Cc-Link Interface Commands

    4.8.1 CC-Link Handshaking Before the CC-Link slave station (VAT valve) can be operated by the CC-Link Master (PLC), handshaking is necessary. If the handshake is not done, no data from the master will be transmitted to station. An indication of a successful handshaking is the bit «FIELDBUS DATA VALID» (= 1) in the input buffer >...

  • Page 61: Location Of The Handshaking Bits

    Address assigned to the master module by the station number setting. This means that the address range for this slave begins at address m of the master. n: Dependent on the VAT Operational settings mode (number of occupied stations and number of extension cycles)

  • Page 62: Example Of The Handshaking By A Plc-Program

    Example of the handshaking by a PLC-program The following program sends an answer to the VAT CC-Link station which return a “Remote READY” flag. It is important to correct register address is used. In this example the address for this slave station (valve) starts at 1000 (hex).

  • Page 63: Cc-Link Interface (Process Data - Cyclic Communication)

    Series 642 INSTALLATION CC-Link interface (Process data – cyclic communication) The buffer naming is in view from customer (master) PLC. Data format: All signals are transmitted and received in intel format (low byte first). All one-byte signals use the least significant byte (LSB). Neither valve display information nor CONTROL MODE values or any other fieldbus cyclic/acyclic data are related to any fieldbus states/notation 4.9.1...
  • Page 64 INSTALLATION Series 642 4.9.1.2 Details Signal Start Byte Valid Name Data Type Description Type Word Length Range In case of the valve is is pressure 0..1’000’000 signed integer mode (CONTROL MODE = Pressure Signal PRESSURE SETPOINT (default) or (default), (5)), the signal is used as setpoint floating point adjustable value.
  • Page 65 PING PONG TX BIT transmitted from the master (PLC), is used to check the loop "master PLC - Communication and timing control between Master PING PONG TX BIT VAT station". See chapter: 3.11.9 (PLC) and Station (Valve) NOT USED (reserved)

  • Page 66: Input Buffer (Master Plc)

    INSTALLATION Series 642 4.9.2 INPUT Buffer (Master PLC) 4.9.2.1 Overview Buffer Data Index model Contents (MSB) Contents (LSB) Pressure Pressure Sensor 1 Pressure Sensor 2 (optional, only in case of 2 sensor version) Position Not used – reserved Not used – reserved Control mode Fatal error 16-Bit...
  • Page 67 Series 642 INSTALLATION 4.9.2.2 Details Signal Start Byte Data Valid Name Description Type Word Length Type Range -270000.. In case of default valid range: 1’230’000 Physical full scale value of the sensor signed (default) (10 Volt) equals to 1’000’000. integer PRESSURE Signal (default) or...
  • Page 68 ZERO successful executed, active for 2 seconds PING PONG RX BIT, is inverted and transmitted back to the fieldbus master (PLC), See chapter: PING PONG RX-BIT Communication and timing between Master (PLC) and Slave (VAT-Valve) 4.9.3 0 = off PRESSURE SIMULATION...
  • Page 69 Series 642 INSTALLATION GENERAL WARNING bitmap table: Description SERVICE REQUEST Valve movement tight LEARN DATA SET Learn data not present. Learn required for adaptive pressure control. NOT USED (reserved) POWER FAILURE Not ready, voltage too low BATTERY SENSOR OVERLAPPING Sensor deviation between sensor 1 and sensor 2 >= ±10% NOT USED (reserved) NOT USED (reserved) NOT USED (reserved)

  • Page 70: Communication And Timing Between Master (Plc) And Slave (Vat-Valve)

    INSTALLATION Series 642 4.9.3 Communication and timing between Master (PLC) and Slave (VAT-Valve) See chapter: «OUTPUT Buffer» > «PING PONG TX-BIT» and «INPUT Buffer» > «PING PONG RX-BIT». For visual overview see the diagram below. MASTER = PLC Check if...

  • Page 71: Operation

    Series 642 OPERATION Operation WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.

  • Page 72: Local Operation

    Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT is required. You can use our Software (freeware) 'Control Performance Analyzer' which can be downloaded from: http://www.vatvalve.com/customer-service/informations-and-downloads/control-performance-analyzer.

  • Page 73: Remote Operation

    Series 642 OPERATION 5.1.2 Remote operation This product is equipped with a CC-Link interface to allow for remote operation. See section «CC-Link interface» for details. 'Control Performance Analyzer' software or 'Service Box 2' may be used for monitoring during remote control. 'Control Performance Analyzer' software 'Service Box 2' In case ‘Control Performance Analyzer’...

  • Page 74: Close Valve

    OPERATION Series 642 Close valve Local operation: Remote operation: (‘Control View’, ‘Control Performance (Refer to chapter «OUTPUT Buffer» > «CONTROL Analyzer’ or ‘Service Box 2‘) MODE SETPOINT» for details) «OUTPUT Buffer» > «CONTROL MODE SETPOINT» Push CLOSE button Select [Close] (value = 3) Open valve Local operation: Remote operation:...

  • Page 75: Pressure Control

    Series 642 OPERATION Pressure control To prepare valve for PRESSURE CONTROL perform complete «Setup procedure». The valve has parameters that may be modified to tune pressure control performance. Refer to «Tuning of control performance». The included PID controller controls the chamber pressure according to the pressure setpoint by means of the valve position.

  • Page 76: Pressure Control Operation With 2 Sensors

    OPERATION Series 642 5.5.1 Pressure control operation with 2 sensors [applicable with 642 . . - . . . F - ..version only] If 2 sensor operation is enabled, changeover between the sensors is done automatically during pressure control.

  • Page 77: Display Information

    Series 642 OPERATION Display information There is a 4 digit display located on the panel. It 1 2 3 4 Display displays configuration, status and position information. For details refer to following tables. 5.6.1 Power up Description Digit 1 Digit 2 Digit 3 Digit 4 ●...

  • Page 78: Operation

    OPERATION Series 642 5.6.2 Operation Description / Mode Digit 1 Digit 2 Digit 3 Digit 4 PRESSURE CONTROL mode POSITION CONTROL mode Valve closed Valve open Closed / open interlock (Valve closed / open by digital input) 0…100 HOLD (position frozen) = valve position (%, 0 = closed / 100 = open) activated ZERO running...

  • Page 79: Safety Mode

    Series 642 OPERATION RUN LED (1) State Meaning No network participation, timeout status (no power) Green Participating, normal operation Major fault (FATAL error) ERR LED (3) State Meaning No error detected (no power) Major fault (Exception or FATAL event) Red, flickering CRC error (temporary flickering) Red, flashing Station Number or Baud rate has changed since startup (flashing)

  • Page 80: Operation During Power Up

    1). Default is not defined. Display indicates F. 1) Provide that battery pack of the VAT controller is charged. Charging time after power up is 2 minutes max.. All parameters are stored in a power fail save memory.

  • Page 81: Trouble Shooting

    TROUBLE SHOOTING Series 642 Trouble shooting Failure Check Action Connect valve to power supply according to No dots lighted on display 24 V power supply ok? «Electrical connection» and make sure that power supply is working. Remote operation does not work - Local operation via - Switch to remote operation.
  • Page 82 TROUBLE SHOOTING Series 642 - Does sensor power supply - Verify sensor supply voltage. provide enough power for sensor(s)? ZERO does not work - Valve in open position, check - OPEN VALVE and bring chamber to base pressure for O on display? before performing ZERO.

  • Page 83: Additional Cc-Link Warning

    TROUBLE SHOOTING Series 642 Additional CC-Link warning Failure detection with CPA or Check Action CV software Network failure: No CC-Link - CC-Link cable ok? - Check CC-Link cable. communication is active - Connection to master ok? - Check the CC-Link connection to master. (warning 8) If you need any further information, please contact one of our service centers.

  • Page 84: Maintenance

    Before carrying out any maintenance, please contact VAT. It has to be individually decided whether the maintenance can be performed by the customer or has to be carried out by VAT. Please write down the fabrication number of the valve before contact VAT. Refer to chapter «Identification of product»...

  • Page 85: Maintenance Procedures

    Replacement of gate seal (gate and bonnet seal) and valve cleaning Required frequency of cleaning and replacement of seals is depending on process conditions. VAT can give the following recommendations for preventive maintenance: Replacement of Recommendation Gate seal (gate and bonnet seal) Every 100’000 cycles...

  • Page 86: Replacement Of Gate Seals And Valve Cleaning

    MAINTENANCE Series 642 7.2.1 Replacement of gate seals and valve cleaning 7.2.1.1 Required tools • • Allen Wrench 4 mm (Allen torque wrench 4 mm) Isopropyl alcohol • • 2 × Open end wrench 13 mm Vacuum grease (see chapter spare parts) •...
  • Page 87 Series 642 MAINTENANCE Description Required tool Pull out the gate until the crank bolt can be reached 10. Loosen and remove the crank bolt Allen wrench 4 mm screw 11. Remove the crank bolt from lever 12. Pull out the gate assembly complete Caution! Take care that gate is not scratching at lever while pulling out...
  • Page 88 MAINTENANCE Series 642 Description Required tool Clean room wiper a 15. Clean the o-ring groove and the gate little soaked with assembly isopropyl alcohol 16. Install the new o-ring equally in o-ring groove (for new o-ring refer to chapter: «Spare parts») Cleaning tool a little soaked with isopropyl alcohol...
  • Page 89 Series 642 MAINTENANCE Description Required tool 20. Insert the crank bolt at lever If necessary use a new crank bolt (for new crank bolt refer to chapter: «Spare parts»). 21. Fasten the crank bolt screw Allen torque wrench adequately 4 mm 22.
  • Page 90 MAINTENANCE Series 642 Description Required tool 26. Reassemble the bonnet and bonnet seal with valve DN 63 / 100 1 × Open end torque wrench 13 mm 1 × Open end wrench 13 mm 27. Fasten the bonnet screws with: •...

  • Page 91: Replacement Of Option Board

    Series 642 MAINTENANCE 7.2.2 Replacement of Option board NOTICE Electrostatic discharge Electronic components could be damage. All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage. NOTICE Burned connector pins (spark) Connector pins or electronic parts could damage, if plugged and unplugged under power.
  • Page 92 MAINTENANCE Series 642 7.2.2.1 Durability of power fail battery The curves in the graph show the estimated life of Ultra Cap PFO in the worst condition (max. sensor load = 1 A, valve heating temperature = 150 °C). If the SPS is not fully loaded (< 1 A) or heating temperature of valve body is lower than 150 °C, the corresponding life time curve will be somewhere in between the upper and the lower curve.

  • Page 93: Retrofit / Replacement Procedure

    Series 642 MAINTENANCE 7.2.3 Retrofit / replacement procedure Top view on control and actuating unit with panel removed: Master board Connector board Option board Interface board Motor driver board All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above! 7.2.3.1 Required tools...
  • Page 94 MAINTENANCE Series 642 Description Required tools Attention to ESD protection! Disconnect all electrical connections Pozidriv screw driver size1 at controller. Open end wrench 7 mm Remove the panel screws. Pozidriv screw driver size1 Remove this screws and the cover. Screw driver size 2 Remove the female screw locks from Open end wrench 4.5 mm connectors.
  • Page 95 Series 642 MAINTENANCE Description Required tools Lift controller panel carefully. Remove or replace option board. Reassemble all parts in reverse order (see steps 6…3). Tighten panel screws with 1.1 Nm (see step 2). 10. Reconnect all electrical connections at controller. If you need any further information, please contact one of our service centers.

  • Page 96: Repairs

    Series 642 Repairs Repairs may only be carried out by the VAT service staff. In exceptional cases, the customer is allowed to carry out the repairs, but only with the prior consent of VAT. Please contact one of our service centers. You will find the addresses on our website www.vatvalve.com.

  • Page 97: Dismounting And Storage

    Series 642 DISMOUNTING AND STORAGE Dismounting and Storage WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination. Always wear clean room gloves when handling the valve.

  • Page 98: Storage

    DISMOUNTING AND STORAGE Series 642 Storage NOTICE Wrong storage Inappropriate temperatures and humidity may cause damage to the product. Valve must be stored at: – relative humidity between 10% and 70% – temperature between +10 °C and +50 °C – non-condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used.

  • Page 99: Packaging And Transport

    If products are radioactively contaminated, the VAT form «Contamination and Radiation Report» must be filled out. Please contact VAT in advance. • If products are sent to VAT in contaminated condition, VAT will carry out the decontaminating procedure at the customer's expense. 10.1...

  • Page 100: Transport

    10.2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used. Always use the original packaging material and handle product with care. VAT disclaims any liability for damages resulting from inappropriate packaging. 100/107 Edition 2017-11-24 813316EB...

  • Page 101: Disposal

    Series 642 DISPOSAL Disposal WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. 813316EB Edition 2017-11-24 101/107...

  • Page 102: Spare Parts

    «Identification of product». This is to ensure that the appropriate spare parts are supplied. • VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff. •...

  • Page 103: Drawing

    Series 642 SPARE PARTS 12.1 Drawing Sample picture All “Item“ refer to chapter «Drawing» 813316EB Edition 2017-11-24 103/107...

  • Page 104: Valve Unit With Seals And Grease

    97442-R1 225315 97446-R1 85047-R1 95939-R1 98472-R1 98474-R1 98476-R1 Feedtrough 91001-R1 227400 assembling tool VAT vacuum N-6951-012 grease (40g) 12.1.2 Controller Item Description Part number Too many to list. Please contact Control and actuating unit VAT. Option board with SPS module 371399 (±15 VDC sensor power supply)

  • Page 105: Accessories

    Service Box 2 601BS-29NN-000 Control panel (rack-mount version of 602BS-29LE-000 Service Box 2) O-ring removal tool 234859 VAT valve cleaning tool 305709 12.1.3.1 Centering ring with Viton o-ring DN 63 / 2½” DN 80 / 3” DN 100 / 4”...

  • Page 106: Appendix

    APPENDIX Series 642 Appendix No information entered on time. 106/107 Edition 2017-11-24 813316EB...
  • Page 107 Series 642 This page left blank intentionally. 813316EB Edition 2017-11-24 107/107...

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