VAT 670 Series Installation, Operating, & Maintenance Instructions
Symmetrical flow control & isolation valve
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Summary of Contents for VAT 670 Series
- Page 1 Installation, Operating & Maintenance Instructions Symmetrical flow control & isolation valve Series 670 DN 250 mm (I. D. 14") This manual is valid for the following product ordering number 67048-PH52-ACF1 943070EA Edition 2018-06-19...
- Page 2 The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.
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Page 3: Table Of Contents
Series 670 Contents Description of product ................ 4 Identification of product ....................4 Use of product ......................... 4 Used abbreviations ......................4 Related documents......................4 Important information....................... 4 Technical data ......................... 5 1.6.1 Valve unit ......................5 Safety ....................6 Compulsory reading material ................... -
Page 4: Description Of Product
Dimensional drawing • VAT heating device manual • External controller manual (IC2) Important information This symbol points to a very important statement that requires particular attention. Example: VAT disclaims any liability for damages resulting from inappropriate packaging. 4/39 Edition 2018-06-19 943070EA... -
Page 5: Technical Data
Series 670 DESCRIPTION OF PRODUCT Technical data 1.6.1 Valve unit Describtion Symmetrical flow functional principle (given) Pressure range at 20 °C 1 × 10E-9 mbar to 1.2 bar (abs) Leak rate to outside at 20 °C 1 × 10E-8 mbar l/s Leak rate valve seat at 20 °C 1 ×... -
Page 6: Safety
SAFETY Series 670 Safety Compulsory reading material Read this chapter prior to performing any work with or on the product. It contains important information that is significant for your own personal safety. This chapter must have been read and understood by all persons who perform any kind of work with or on the product during any stage of its serviceable life. -
Page 7: Personnel Qualifications
Series 670 SAFETY Personnel qualifications WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Safety labels Label Part No. Location on valve On protective foil covering the T-9001-156 valve opening 943070EA... -
Page 8: Design And Function
DESIGN AND FUNCTION Series 670 Design and Function Design Sample picture Flange Intermediate piece Plate Actuator shaft with bellows Plate seal Actuator (stepper motor) Plate screw Valve seat side Function The valve plate (2) acts as a throttling element and varies the conductance of the valve opening. The controller calculates the required plate position to achieve the set point pressure. -
Page 9: Installation
Make sure that the supplied products are in accordance with your order. • Inspect the quality of the supplied products visually. If it does not meet your requirements, please contact VAT immediately. • Store the original packaging material. It may be useful if products must be returned to VAT. - Page 10 INSTALLATION Series 670 Open the transport case and remove inside packing material as far as necessary. Use a crane and lifting attachments (4 × M10 thru) to lift the valve. See example figure below. Lift the valve carefully and place it on a clean place. Do not remove protective foils from valve opening 10/39 Edition 2018-06-19...
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Page 11: Installation Into The System
Series 670 INSTALLATION Installation into the system CAUTION Valve opening Risk of injury. Do not connect the controller to power before the valve is installed complete into the system. NOTICE Wrong connection Wrong connection may result in damage of controller or power supply. Connect all cables exactly as shown in the following schematic. -
Page 12: Installation Space Condition
INSTALLATION Series 670 4.2.1 Installation space condition Install the valve with actuators with space (a) for dismantling and air circulation as shown in figure below. 12/39 Edition 2018-06-19 943070EA... -
Page 13: Installation Overview
Series 670 INSTALLATION 4.2.2 Installation overview Chamber Symmetrical flow valve [1] Pump side Heating device [4] Actuator cables [2] Actuator cables [2] External Controller IC2 (3) 943070EA Edition 2018-06-19 13/39... -
Page 14: Installation Procedure
Take care to the connector position at actuators, refer to 3 dots at connector for correct connection. Install all electrical connections at External Controller. Refer to «External Controller manual (IC2)». Connect VAT heating device [4] according to manual of respective heating device. 14/39 Edition 2018-06-19 943070EA... -
Page 15: Tightening Torque
«F » lbf. 4000 For a combination of both forces (F and M) the values are invalid. Verify that the depth of the mounting screws is min. 1x thread diameter. Please contact VAT for more information. 943070EA Edition 2018-06-19 15/39... -
Page 16: Operation
OPERATION Series 670 Operation WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. CAUTION Valve opening Risk of injury. Do not operating before the valve is installed complete into system. For «Operation»... -
Page 17: Trouble Shooting
Series 670 TROUBLE SHOOTING Trouble shooting For «Trouble shooting » refer to «External Controller manual». If you need any further information, please contact one of our service centers. You can find the addresses on our website: www.vatvalve.com. 943070EA Edition 2018-06-19 17/39... -
Page 18: Maintenance
MAINTENANCE Series 670 Maintenance WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. CAUTION Hot surfaces Heated valve may result in minor or moderate injury. Do not touch valve and heating device during operation. Once heating is switched off (valve and system) await until the valve is cooled down complete before doing any work. -
Page 19: Maintenance Intervals
Before carrying out any maintenance, please contact VAT. It has to be individually decided whether the maintenance can be performed by the customer or has to be carried out by VAT www.vatvalve.com. The fabrication number on the valve has always to be specified. Refer to chapter «1.1 Identification of product»... -
Page 20: Removing The Plate And Plate Seal Replacement
MAINTENANCE Series 670 7.2.1 Removing the plate and plate seal replacement 7.2.1.1 Required tools • • Cleanroom wiper Allen wrench 5 mm • • Isopropyl alcohol O-ring removal tool • • Clean room gloves CPA 4.0 (in EC2 integrated) Electrical power is required. Description Required tool Use the CPA 4.0 which is... - Page 21 Series 670 MAINTENANCE Description Required tool Switch OFF the power supply of heating device and valve controller. Disconnect heater cables. Open the service cover. Refer to manual of customized process chamber. Allen wrench 5 Loosen the plate screw (right side) at plate.
- Page 22 MAINTENANCE Series 670 Description Required tool • O-ring removal tool 14. If necessary replace the shaft seal. • Cleanroom 15. Clean the shaft and the seal wiper groove. • Isopropyl alcohol • Cleanroom wiper 16. Clean the internal valve. • Isopropyl alcohol 17.
- Page 23 Series 670 MAINTENANCE Description Required tool 19. Insert the fixation disc until stop. Allen torque 20. Fasten the plate screws with 5 Nm. wrench 4 mm Allen torque 21. Fasten the plate screws with 8 Nm. wrench 5 mm 22. Switch ON the power supply. 23.
- Page 24 MAINTENANCE Series 670 Description Required tool 25. Select [CLOSE], the valve is executing Homing and moves to close position. 26. Close the service cover. Refer to manual of customized process chamber. 27. Connect the heater cables. 28. Switch ON the power supply of heating device.
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Page 25: Replace The Actuator
Series 670 MAINTENANCE 7.2.2 Replace the actuator 7.2.2.1 Required tools • • Allen wrench 2.5 mm Pozidriv screwdriver No.1 • • Allen wrench 3 mm CPA 4.0 (in EC2 integrated) • Allen wrench 4 mm Electrical power is required. Description Required tool Use the description of chapter «7.2.1 Removing the plate and... - Page 26 MAINTENANCE Series 670 Description Required tool Pozidriv Disconnect the power cable screwdriver No.1 Take care to sealing surface of flange and actuator. Loosen the actuator screws (white Allen wrench arrows) complete and remove the actuators. Make sure that the actuator not dropdown.
- Page 27 Series 670 MAINTENANCE Description Required tool Take care to sealing surface and valve surface Remove the actuator Take care to sealing surface and valve surface 10. Insert the new actuator 943070EA Edition 2018-06-19 27/39...
- Page 28 MAINTENANCE Series 670 Description Required tool Allen wrench 11. Fasten the actuator screws by hand Allen torque 12. Fasten the actuator screws with wrench 13. Connect the power cables Take care to the connector Pozidriv position at actuators, refer to screwdriver No.1 3 dots at connector for correct connection.
- Page 29 Series 670 MAINTENANCE Description Required tool 15. If the valve does not start the homing procedure automatically (depends on valve setting), initiate homing procedure manually: Valve > Parameters > System > Control Mode = [Homing], press save button or [Enter] on keyboard. 16.
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Page 30: Repairs
Series 670 Repairs Repairs may only be carried out by the VAT service staff. In exceptional cases, the customer is allowed to carry out the repairs, but only with the prior consent of VAT. Please contact one of our service centers. You will find the addresses on our website www.vatvalve.com. -
Page 31: Dismounting And Storage
Series 670 DISMOUNTING AND STORAGE Dismounting and Storage WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Dismounting NOTICE Contamination Gate and other parts of the valve could be contaminated. Always wear clean room gloves when handling the valve. -
Page 32: Storage
DISMOUNTING AND STORAGE Series 670 Storage NOTICE Wrong storage Inappropriate temperatures and humidity may cause damage to the product. Valve must be stored at: – relative humidity between 10% and 70% – temperature between +10 °C and +50 °C – non-condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used. -
Page 33: Packaging And Transport
If products are radioactively contaminated, the VAT form «Contamination and Radiation Report» must be filled out. Please contact VAT in advance. • If products are sent to VAT in contaminated condition, VAT will carry out the decontamination procedure at the customer's expense. 10.1 Packaging Cover all valve openings with a protective foil. -
Page 34: Transport
10.2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used. Always use the original packaging material and handle product with care. VAT disclaims any liability for damages resulting from inappropriate packaging. 34/39 Edition 2018-06-19 943070EA... -
Page 35: Disposal
Series 670 DISPOSAL Disposal WARNING Harmful substances Environmental pollution. Discard products and parts according to the local regulations. 943070EA Edition 2018-06-19 35/39... -
Page 36: Spare Parts
«1.1 Identification of product». This is to ensure that the appropriate spare parts are supplied. • VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff. •... - Page 37 Series 670 SPARE PARTS Item Description Part number (15) Wiper ring (optional) (2 ×) 567449 (110) Plate seal (1 ×) 393283 (100) Actuator seal (2 ×) N-5100-221 943070EA Edition 2018-06-19 37/39...
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Page 38: Appendix
APPENDIX Series 670 Appendix No information entered on time. 38/39 Edition 2018-06-19 943070EA... - Page 39 Series 670 This Page Intentionally Left Blank 943070EA Edition 2018-06-19 39/39...