Table Of Contents - Olympus AL120-6 Series Operation Manual

Operation Manual
2-4 Stoppage of Transfer····································································· 2-17
1 Temporarily Stopping the Loader during Inspection: [Pause] Button
2 Removing a Wafer with Tweezers during Inspection: [Wafer Reject] Button
3 Unloading a Wafer during Inspection: [Unload] Button
4 Stopping the Operation Immediately: [Loader Stop] Button
5 Terminating the Inspection: [Quit] Button
3 Inspections
3-1 Preparations····················································································· 3-1
3-2 Inspection Operations····································································· 3-1
3-2-1 M
3-2-2 T
3-2-3 B
3-2-4 B
3-2-5 T
3-2-6 B
3-2-7 T
3-2-8 M
3-3 Special Operations ········································································ 3-13
3-3-1 C
4 Specifications
4-1 AL120-L6-150 and LMB6-150·························································· 4-1
4-2 AL120-L86-180, LMB86-180 and LMB-90······································· 4-4
5 Problems during Use and Solutions
5-1 When Warning Codes Are Displayed············································· 5-1
5-2 When Error Codes Are Displayed ·················································· 5-3
5-3 How to Reset the Circuit Breaker ·················································· 5-7
5-4 After use of Loader Stop ································································· 5-7
5-5 Power Failure ··················································································· 5-7
5-6 Automatic Unloading······································································· 5-8
1 During the Top Macro Inspection
2 During the Back Macro Inspection
3 When a Wafer is on the A-arm
C-2
Page

Table of Contents

I
ICROSCOPE NSPECTION
M I
OP ACRO NSPECTION
M I
ACK ACRO NSPECTION
M I
ACK ACRO NSPECTION
M I
OP ACRO NSPECTION
M I
ACK ACRO NSPECTION
M I
OP ACRO NSPECTION
I
ICROSCOPE NSPECTION
I + 2 B
NSPECTION ND ACK
W
HANGING THE AFER
·············································································3-1
···············································································3-3
·············································································3-4
+ 2 B M
ND ACK ACRO
+ M I
ICROSCOPE NSPECTION
+ M I
ICROSCOPE NSPECTION
+ B M I
ACK ACRO NSPECTION
+ T M I
OP ACRO NSPECTION
M I
ACRO NSPECTION
S S ················································3-13
ELECTION ETTING
I ···························3-5
NSPECTION
····································3-6
··································3-8
··································3-10
+ B M
ACK ACRO
·············································· 3-11
2-17
2-17
2-18
2-18
2-18
3-1
4-1
5-1
5-9
5-9
5-10