Problems During Use And Solutions; When Warning Codes Are Displayed - Olympus AL120-6 Series Operation Manual

Operation Manual

5 Problems during Use and Solutions

5-1 When Warning Codes Are Displayed

Ｗ0001
Warning
Code No.
Cause
W0001
Solution
Cause
W0002
Solution
Cause
W0003
Solution
Cause
W0004
Solution
Cause
W0005
Solution
W0006 Cause
Troubles and Countermeasures/
While not a malfunction, if the loader determines that there is the

possibility that normal wafer loading operations will be hindered, it issues
a warning code on the liquid crystal panel , and halts operations.
In this event, take appropriate countermeasures listed below in the
Warning Codes before pressing the [Start] button again. The loader will
return to normal operation if the problem has been solved correctly.
Warning Codes
Causes and Solutions
 The cassette has not been set in the correct position.
 Reset the cassette in the correct position and press the [Start] button.
 The stage has not been set in the correct position.
 The vacuum stage is not set after the inspection time has elapsed.
 Reset the stage properly to the wafer transfer position.
 [Note] Do not move the stage until the A-arm completes its up-and-down
movement. Make sure that the stage operation permission LED is lit
before moving the stage.
 A foreign object (wafer) has been detected on the A1-arm.
 The wafer is detected as a foreign object due to vacuum pressure being
too high.
 Remove the wafer or set the vacuum pressure within the specifications,
and then press the [Start] button.
 [Note] To unload the wafer automatically, refer to 5-6 Automatic
Unloading.
 A foreign object (wafer) has been detected on the A2-arm.
 The wafer is detected as a foreign object due to vacuum pressure being
too high.
 Remove the wafer or set the vacuum pressure within the specifications,
and then press the [Start] button.
 [Note] To unload the wafer automatically, refer to 5-6 Automatic
Unloading.
 A foreign object (wafer) has been detected on the center (macro) table.
 The wafer is detected as a foreign object due to vacuum pressure being
too high.
 Remove the wafer or set the vacuum pressure within the specifications,
and then press the [Start] button.
 [Note] To unload the wafer automatically, refer to 5-6 Automatic
Unloading.
 A wafer has been left in the Back Macro inspection position during
initialization.
 The wafer is detected as a foreign object due to vacuum pressure being
too high.
When Warning Codes Are Displayed
Page
5-1