Special Operations - Olympus AL120-6 Series Operation Manual

Operation Manual

3-3 Special Operations

3-3-1 Changing the Wafer Selection Setting
1. You can change the inspection wafer number settings after inspection has started.
2. The wafer numbers can be changed when the [Pause] button is pressed, or while the wafers wait for a
start command input when the inspection time is set to ∞. (You can change the setting when the LED in
the [Pause] button is blinking.)
3. Select the wafer numbers using the Wafer No. selector buttons.
4. Press the [Start] button, and the wafers are transferred with the new wafer selection settings.
5. The original wafer selection settings are restored after the entire operation of the specified cassette has
finished.
Settings can not be changed for the wafer being inspected, indicated by a blinking LED in the Wafer No.
selector button.
When wafers that have been inspected are re-specified in the specification change process, the
re-specified wafers are inspected again after inspecting the wafers that have been specified prior to the
specification changes.
Inspections
3-13
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