Keithley S530 Diagnostic Manual page 6

Table of Contents
Kelvin SMU diagnostic test flow........................................................................................... 3-2
SMU communication Test ......................................................................................................... 3-2
Kelvin SMU voltage and current test.................................................................................... 3-3
Kelvin voltage communication test....................................................................................... 3-6
Kelvin matrix diagnostic ....................................................................................................... 3-6
Matrix Communication Test....................................................................................................... 3-6
Kelvin basic short and continuity tests ................................................................................. 3-6
Kelvin short test.................................................................................................................. 3-10
Short test flow ......................................................................................................................... 3-10
Kelvin continuity test .......................................................................................................... 3-12
Continuity pin test.................................................................................................................... 3-12
Kelvin leakage test ............................................................................................................. 3-16
S530 troubleshooting information ............................................................. Appendix C
Introduction .......................................................................................................................... 4-1
CVU confidence check testing .................................................................................................. 4-1
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S530 Diagnostic Manual
S530-906-01 Rev. A / March 2011