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Keithley S530 Diagnostic Manual page 55

Integrated test system
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S530 Diagnostic Manual
The SMU test uses the first SMU using the Series 2600A instruments. The remaining SMUs will be
looped to test with the first SMU. The test path is made by separately connecting two SMUs to group
of rows without a pin connection. Each group of rows consists of row n and row n+1 (n = 1, 3, 5*). The
test is identical to the pin test and the test results will display in the ACS GUI test log and in the
diagnostic report in the following default directory:
C:\ACS\Projects\Diagnostic\Reports
Leakage pin test
1. Every pair of adjacent pins will be tested. The last pin will be tested with the first pin to cover the
complete set of DUT pins. For example, pin 4 to pin 1, pin 1 to pin 2, pin 2 to pin 3, pin 3 to pin 4.
2. If the system contains a high-voltage Model 2410 SMU, only the row A and B pair will be used
during the test of the high-voltage SMU.
3. The pair of rows will be tested in reverse order once to test the paths opposite direction. For
example, the row A and B test path will change to row B and A.
Figure 58: Model 2410, rows A, B, C, D, E and F
Force test
During the leakage test, SMUs are used in the 2W mode. The test flow is the same as the instrument
card 2W tests.
Sense test
During the leakage test, SMUs are used in 4W mode. The sense terminal is used to connect the two
SMUs.
During the sense test, the SMUs are used in 4W mode. For high-voltage systems, which use the
Model 7072 HV cards, crossbars on rows of differing types (for example, high voltage rows A and B,
general purpose rows C, D, E or F, and CV rows G and H) should not be used together. Therefore,
the rows used will depend on the SMU ranges (see next Figure).
S530-906-01 Rev. A / March 2011
Appendix B: Kelvin (4W) S530 system diagnostics
3-17

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