Kelvin Short Test; Short Test Flow - Keithley S530 Diagnostic Manual

Integrated test system

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Appendix B: Kelvin (4W) S530 system diagnostics

3. If the current row is E.



Use pin 1 to connect the force and sense terminals of the current SMU under test to row C.



Use pin 2 to connect the force and sense terminals of the support SMU (except GNDU) to row D.



Use pin 3 to connect the force and sense terminals of the common lo (GNDU) to row F.



Use the current row (E) on the sense card to connect the current SMU under test and the test

support SMU together.

Figure 47: Example SMU sense test connections using row E

Kelvin short test

The purpose of the short test is to confirm that the adjacent paths from the SMU to a pin on the probe

card are not shorted.

The short test uses SMU1 and SMU2 using the Series 2600A instruments. Each pair of adjacent pins

will be tested with groups of rows. Each group of rows consists of row n and row n+1 (n = 1, 3,

5*)(see next Figure).

After connecting each set of pins and rows, execute the test by forcing 1mA from the first SMU and

forcing 0V from the second SMU. The current is then measured using the second SMU. If the

measured current is higher than 1μA, Fail will display in the ACS GUI test log and in the diagnostic

report in the following default directory:

C:\ACS\Projects\Diagnostic\Reports

1. Every pair of adjacent pins will be tested. The last pin will be tested with the first pin to cover the

entire set of switch matrix pins. For example, pin 1 to pin 2, pin 2 to pin 3, pin 3 to pin 4, and pin 4

to pin 1.

2. When a Model 2410 SMU is in your system (high-voltage systems only), only row pair A and B

will be tested by the 2410. The remaining rows will be tested using the Series 2600A instruments.

Systems without a Model 2410 will test rows A through H using the Series 2600A instruments.

3. The connections of the rows and SMUs will reverse once in order to test the path in the opposite

direction. For example, first rows A and B and then rows B and A.

3-10

S530 Diagnostic Manual

S530-906-01 Rev. A / March 2011

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