2Set Of Small Parts Pt 163 544 For Open Ion Source; 3Set Of Small Parts Pt 163 543 For Crossbeam Ion Source; 4Set Of Small Parts Pt 163 534 For Grid Ion Source; Tbl. 24: Spare Parts - Pfeiffer Vacuum PrismaPro QMG 250 Translation Of The Original

Part number Quantity
(pieces)
PT 163 504 1
PT 163 508 1
PT 163 510 1
PT 163 512 1
490DFL040-S-G-S5 5 (pack)
Tbl. 24:
14.4.2 Set of small parts PT 163 544 for open ion source
Designation
Screw (M2×3, crosshead, stainless steel, gold-plated)
Lock washer (slotted, stainless steel)
Nut (M1.6, hexagon, stainless steel, gold-plated)
Clamp (M1.6, for filament)
Screw (M1.6×4, flat head)
Clamp (M1.6, for ion source)
Screw (M1.6×5, slot, stainless steel, gold-plated)
Tbl. 25:
14.4.3 Set of small parts PT 163 543 for crossbeam ion source
Designation
Screw (M2×3, crosshead, stainless steel, gold-plated)
Clamp (with M1.6 thread, U-shaped, for ion source)
Screw (M1.6×5, slot, stainless steel, gold-plated)
Ceramic insulator
Nut (M1.6, hexagon, stainless steel)
Nut (square, for connection)
Screw (M1.6x3, flathead, stainless steel, for ion source connections)
Tbl. 26:
14.4.4 Set of small parts PT 163 534 for grid ion source
Designation
Circlip (slotted, stainless steel)
Washer (ceramic)
Hood (ceramic)
Ceramic insulator
Screw (M1.6x3, flathead, stainless steel)
Nut (M1.6, hexagon, stainless steel)
Screw (M2×3, crosshead, stainless steel, gold-plated)
Tbl. 27:
Description
SP 250 (external power supply pack with mains cable
100–240 V(AC)/24 V, 80 W (DC))
Socket key
Installation tool
UTP patch cable, red, length 3 m, crossover connection
Copper gasket (DN 40 CF, silver-plated)
Spare parts
Set of small parts PT 163 544 for open ion source
Set of small parts PT 163 543 for crossbeam ion source
Set of small parts PT 163 534 for grid ion source
Ordering information
Use
QMG 250
Filament unit
QMA 250
QMG 250
QMA 250
Quantity (pieces)
3
6
9
3
3
3
3
Quantity (pieces)
3
4
4
2
2
4
3
Quantity (pieces)
3
3
9
9
4
3
3
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