Related Manuals for Pfeiffer Vacuum QMG 700 HIQUAD
Summary of Contents for Pfeiffer Vacuum QMG 700 HIQUAD
- Page 1 OPERATING INSTRUCTIONS Translation of the Original QMG 700 HIQUAD ® Quadrupole mass spectrometer system...
- Page 2 Dear Customer, Thank you for choosing a Pfeiffer Vacuum product. Your new mass spectrometer system is designed to support you in your individual application with full performance and without malfunctions. The name Pfeiffer Vacuum represents high-quality vacuum technology, a comprehensive and complete range of top-quality products and first-class service. From this extensive, practical experience we have gained a large volume of information that can contribute to efficient deployment and to your personal safety.
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Page 3: Table Of Contents
Foreseeable improper use Responsibilities and warranty Owner requirements Personnel qualification 2.8.1 Ensuring personnel qualification 2.8.2 Personnel qualification for maintenance and repair 2.8.3 Advanced training with Pfeiffer Vacuum Operator requirements Product description System design Control unit QMS 700 3.2.1 System chassis SC 700 3.2.2 Quadrupole controller board QC 700... - Page 4 Changing mains fuse Malfunctions Shipping Recycling and disposal 12.1 General disposal information 12.2 Dispose of a mass spectrometer system Service solutions by Pfeiffer Vacuum Ordering information 14.1 Ordering parts 14.2 Spare parts and accessories 14.3 Cables and jump plugs 14.4 System components Technical data and dimensions 15.1 Control unit QMS 700...
- Page 5 Table of contents 15.3 Analyzer QMA 4x0 15.4 Electrometer pre-amplifier EP 422 15.5 Ion counter pre-amplifier CP 400 EC Declaration of Conformity 5/70...
- Page 6 List of tables List of tables Tbl. 1: Applicable documents Tbl. 2: Abbreviations used Tbl. 3: CTRL pin assignment Tbl. 4: Range code of the detector Tbl. 5: AUX I/O pin assignment Tbl. 6: Electrodes Tbl. 7: Operating modes of HV 702 Tbl.
- Page 7 List of figures List of figures Fig. 1: Configuration example of QMG 700 Fig. 2: Control unit QMS 700 Fig. 3: System chassis SC 700 Fig. 4: Front and back panels of SC 700 Fig. 5: Quadrupole controller board QC 700 Fig.
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Page 8: About This Manual
PT Q12 xxx xxx PT Q14 xxx xxx PT Q15 xxx xxx Pfeiffer Vacuum reserves the right to make technical changes without prior notification. The figures in this document are not to scale. Dimensions are in mm unless stated otherwise. -
Page 9: Conventions
About this manual 1.3 Conventions 1.3.1 Instructions in the text Usage instructions in the document follow a general structure that is complete in itself. The required ac- tion is indicated by an individual step or multi-part action steps. Individual action step A horizontal, solid triangle indicates the only step in an action. ►... -
Page 10: Trademark Proof
Universal Serial Bus Tbl. 2: Abbreviations used 1.4 Trademark proof ● HiQuad ® is a registered trademark of Pfeiffer Vacuum GmbH. ● QUADERA ® is a registered trademark of Inficon GmbH. ● WAGO ® is a registered trademark of WAGO Kontakttechnik GmbH & Co. KG. -
Page 11: Safety
Safety instructions according to product life stages All safety instructions in this document are based on the results of a risk assessment. Pfeiffer Vacuum has taken into account all the relevant life stages of the product. Risks during installation DANGER Danger to life caused by electric voltage on the analyzer During operation, dangerous voltage is present on the electrode system of the QMA analyzer. - Page 12 ► Only operate the unit in a dry environment. ► Operate the unit away from fluids and sources of moisture. ► Do not switch on the unit if fluid has entered it. Instead contact Pfeiffer Vacuum Service. ► Always disconnect the power supply before cleaning the unit.
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Page 13: Safety Precautions
Safety WARNING Health hazard through poisoning from toxic contaminated components or devices Toxic process media result in contamination of devices or parts of them. During maintenance work, there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub- stances causes environmental damage. -
Page 14: Proper Use
► Inform yourself about any contamination before starting work. 2.4 Proper use The quadrupole mass spectrometer system QMG 700 HiQuad is for gas analysis in the high vacuum range. ► Install, operate and maintain the product only in accordance with these operating instructions. -
Page 15: Ensuring Personnel Qualification
─ Customer with Pfeiffer Vacuum service training ─ Pfeiffer Vacuum service technician 2.8.3 Advanced training with Pfeiffer Vacuum For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of courses and technical trainings. For more information, please contact Pfeiffer Vacuum technical training. -
Page 16: Operator Requirements
4. Comply with the limits of use. 5. Observe the technical data. 6. Please contact the Pfeiffer Vacuum Service Center if your questions on operation or maintenance of the product are not answered in these operating instructions. – You can find information in the Pfeiffer Vacuum service area. -
Page 17: Product Description
Product description 3 Product description 3.1 System design The QMG 700 consists of the following components: ● Control unit QMS 700 with 4 plastic feet ● HF generator QMH 40x ● Analyzer QMA 4x0 ● Electrometer pre-amplifier EP 422 or ion counter pre-amplifier CP 400 (dependent on configura- tions) Performing ion count ►... -
Page 18: Control Unit Qms 700
Product description QMA 4x0 QMS 700 Ion Supply DO AO Fig. 1: Configuration example of QMG 700 Analyzer QMA 4x0 Control unit QMS 700 Ion source Quadrupole controller board QC 700 Mass filter Ion source supply IS 716 90° deflection unit High voltage supply HV 70x Faraday collector Input/output module IO 700 or IO 720... -
Page 19: System Chassis Sc 700
Product description 3.2.1 System chassis SC 700 System chassis SC 700 contains the power supply pack, the internal system bus and the unit ventila- tion. It provides plug-in positions for the plug-in modules QC 700, IS 716, HV 701, HV 702, IO 700 and IO 720. -
Page 20: High Voltage Supply Hv 701
Product description Fig. 6: Ion source supply IS 716 3.2.4 High voltage supply HV 701 The high voltage supply HV 701 supplies SEM 217 of analyzer QMA 4x0 with the required high voltage for detecting positive ions. Fig. 7: High voltage supply HV 701 3.2.5 High voltage supply HV 702 The high voltage supply HV 702 supplies ●... -
Page 21: Hf Generator Qmh 40X
Product description Fig. 10: Input/output module IO 720 3.3 HF generator QMH 40x The HF generator QMH 40x generates the high-frequency voltage required for mass separation. QMH 40x always refers to all types in the following, unless otherwise specified. Fig. 11: HF generator QMH 40x 3.4 Analyzer QMA 4x0 The analyzer QMA 4x0 consists of an ion source, mass filter, ion collector and housing. -
Page 22: Ion Counter Pre-Amplifier Cp 400
Product description The electrometer pre-amplifier EP 422 has the following properties: ● Compact ● Minimum vibration sensitivity, low noise, low drift ● Simple mounting on analyzer QMA 4x0 ● Rapid response and recovery in the case of overmodulation Fig. 13: Electrometer pre-amplifier EP 422 3.6 Ion counter pre-amplifier CP 400 The ion counter pre-amplifier CP 400 contains pulse decoupling, an amplifier and a pulse height dis-... -
Page 23: Connections
Product description 3.7 Connections 3.7.1 ANALOG I/O connection, 15-pin IO 720 Channel 1 – 1 nF 1 nF – Channel 2 – Analog Inputs Channel 3 – Channel 4 – Channel 5 Channel 1 22 Ω 22 Ω 10 nF Channel 2 Analog Outputs Channel 3 Channel 4... -
Page 24: Digital I/O Connection, 25-Pin
Product description 3.7.2 DIGITAL I/O connection, 25-pin IO 720 +24 V Channel 1 Channel 2 Channel 3 Channel 4 – 100 Ω Screen ChGND Fig. 17: Connection diagram for digital inputs IO 720 Channel 1 Channel 1 Channel 2 Channel 2 Channel 3 Channel 3 Channel 4... -
Page 25: Tp Gauge Connection
Product description → → Fig. 19: DIGITAL I/O pin assignment Digital output, channel 9 Digital output, channel 1 Digital output, channel 2 Digital output, channel 10 Digital output, channel 3 Digital output, channel 11 Digital output, channel 4 Digital output, channel 12 Digital output, channel 5 Digital output, channel 13 Digital output, channel 6... -
Page 26: Connections On Qc 700
Product description 3.7.4 Connections on QC 700 Fig. 21: Connections on QC 700 1 USB socket, type B CP connection (D-Sub, 15-pin, bushings) 2 CTRL connection (HD-D-Sub, 26-pin, pins) QMH connection (D-Sub, 25-pin, bushings) 3 LAN connection (RJ-45 socket, 8-pin) Fig. 22: CP pin assignment 1 QMA GND (ground) LEVEL- (threshold voltage) -
Page 27: Tbl. 3: Ctrl Pin Assignment
Product description Signal word Signal type Description OUT 1 TTL output SYNC OUT+ TTL output Positive edge marks the start of the measurement, trigger for oscilloscope SYNC OUT- Reference signal for SYNC OUT+, above 200 Ω to GND EXT IN 1+ Analog input Connection for external measurement signal, differential, max. -
Page 28: Connections On Is 716
Product description RJ-45 green yellow Fig. 24: LAN pin assignment 1 Transmission data (TD+) 4, 5, 7, 8 Not used 2 Transmission data (TD-) Reception data (RD-) 3 Reception data (RD+) 3.7.5 Connections on IS 716 Fig. 25: Connections on IS 716 1 AUX I/O connection for filament protection Connection for analyzer QMA Fig. -
Page 29: Fig. 27: Qma Pin Assignment
Product description Fig. 27: QMA pin assignment 1 QMA GND Filament Common 2 SPEC SRC RET V4, field axis 3 V6, inner deflection V0, Ref GND 4 V3, focus Screen 5 V9, Wehnelt V8, reserve 6 V5, extraction V1, Ion Ref 7 Filament + SPEC SRC ON 8 Filament - / cathode... -
Page 30: Tbl. 6: Electrodes
Product description QMA-GND IONREF (V1) Fig. 29: Ion potentials at max. neg. IONREF (-150 V), negative polarity Electrode designa- Domain, Rated cur- Resolution Offset Gain er- Potential tion range rent for degas IONREF -150 – ±2.5 mA 20 mV ±120 mV 1.6 % +550 V +150 V... -
Page 31: Connections On Hv 701
Product description 3.7.6 Connections on HV 701 Fig. 30: Connections on HV 701 1 High voltage connection HV- 3.7.7 Connections on HV 702 The function and configuration of HV 702 are dependent on the operating mode. Fig. 31: Connections on HV 702 1 Conversion dynode connection CD High voltage connection HV+ 2 High voltage connection HV-... -
Page 32: Connections On Io 700
Product description Operat- Description HV 702 connections Basic diagram mode HV+: Jump plug plugged in HV 702 (connection HV+ connected electri- cally to QMA GND) HV-: -> SEM CD: not used QMA, HV SEM + CD HV+: Jump plug plugged in HV 702 (connection HV+ connected electri- cally to QMA GND) -
Page 33: Fig. 33: Block Diagram Of Io 700
Product description Fig. 33: Block diagram of IO 700 Addressing an I/O module ► Set a node address of the module on a DIP switch. 33/70... -
Page 34: Connections On Io 720
Product description IO 700 Fig. 34: View of IO 700 from above with programming switch for node address Node addresses ● First IO 700 module: ─ 14 , (20 ), switches 3 and 5 set to ON 3.7.9 Connections on IO 720 IO 700 contains digital and analog input/output modules. -
Page 35: Basic Wiring For Faraday Operating Mode
Product description 3.8.1 Basic wiring for Faraday operating mode QC 700 IS 716 QMH 4xx EP 1 FARAD RF - EP 2 RF A RF B Fig. 36: Basic wiring for Faraday operating mode This wiring applies to applications with HV 701 and HV 702. Position Cable Length (m) -
Page 36: Wiring For 90°-Sem Operating Mode With Hv 701
Product description 3.8.2 Wiring for 90°-SEM operating mode with HV 701 HV 701 HV - QMH 4xx EP 2 RF A RF B HV - SEM 217 Fig. 37: Wiring for 90°-SEM operating mode with HV 701 Position Cable / jump plug Length (m) Order number Connection EP 422 (2) –... -
Page 37: Wiring For Cp Operating Mode, Ion Counter, With Hv 701
Product description 3.8.3 Wiring for CP operating mode, ion counter, with HV 701 QC 700 HV 701 HV - RF A RF B CP 400 SEM 217 Fig. 38: Wiring for CP operating mode, ion counter, with HV 701 Position Cable / jump plug Length (m) Order number HV connection HV 701 –... -
Page 38: Wiring For 90°-Sem Operating Mode With Hv 702
Product description 3.8.4 Wiring for 90°-SEM operating mode with HV 702 HV 702 HV - QMH 4xx EP 2 RF A RF B HV - SEM 217 Fig. 39: Wiring for 90°-SEM operating mode with HV 702 This wiring applies to applications with HV 702 and operating mode 0. Position Cable / jump plug Length (m) -
Page 39: Wiring For Cd Operating Mode With Hv 702
Product description 3.8.5 Wiring for CD operating mode with HV 702 HV 702 HV - QMH 4xx EP 2 RF A RF B SEM 218 Fig. 40: Wiring for CD operating mode with HV 702 This wiring applies to applications with HV 702 and operating mode 1. Position Cable / jump plug Length (m) -
Page 40: Wiring For Cp Operating Mode, Ion Counter, With Hv 702
You will need all the data from the rating plate to safely identify the product when communicating with Pfeiffer Vacuum. ► To ensure clear identification of the product when communicating with Pfeiffer Vacuum, always keep all of the information on the rating plate to hand. -
Page 41: Transport And Storage
Transport and storage 4 Transport and storage 4.1 Transporting the product NOTICE Damage caused by incorrect transport Transport in unsuitable packaging or failure to install all transport locks can result in damage to the product. ► Comply with the instructions for safe transport. Packing We recommend keeping the transport packaging and original protective cover. -
Page 42: Installation
Installation 5 Installation DANGER Danger to life due to electric voltage High voltages are present inside the device. When touching parts that are live, there is a risk of death. If there is visible damage, there is a risk of death when commissioning the device. ►... -
Page 43: Installing Qmg 700 Overall System
Installation 5.1 Installing QMG 700 overall system DANGER Danger to life caused by electric voltage on the analyzer During operation, dangerous voltage is present on the electrode system of the QMA analyzer. Com- ponents in the vacuum system are dangerous to touch under certain conditions. There is danger to life due to electric voltage. -
Page 44: Installing System Chassis As 19" Rack Module
Installation 5.2.1 Installing system chassis as 19" rack module Procedure 1. Push the unit into the control cabinet according to DIN 41 494. 2. Fasten the unit using the corresponding screws. 3. Always tighten all screws and strain reliefs to ensure reliable contact making and prevent plugs from falling out. -
Page 45: Establishing Connections At Qc 700
Installation Chassis (with HV 701): Chassis (with HV 702): Fig. 44: Standard positions of the plug-in modules in the chassis Procedure ► Seal empty plug-in positions with appropriate dummy plates to ensure safety and ventilation. ► Install a 4HP dummy plate if the FB 711 module is not fitted. ►... -
Page 46: Installing Electrometer Pre-Amplifier Ep 422 On Analyzer
Installation Fig. 46: Connection to the network with non-crossed connection cable (gray) RJ-45 green yellow Fig. 47: "Ethernet" (LAN) connection 1 Transmission data (TD+) Reception data (RD-) 2 Transmission data (TD-) 4, 5, 7, 8 Not used 3 Reception data (RD+) Status Meaning Green (link) -
Page 47: Installing Hf Generator Qmh 40X
You can find information on how to install and mount analyzer QMA 4x0 in the corresponding operating instructions for QMA 4x0. 5.9 Connecting IO 700 Pfeiffer Vacuum installs options ex factory if you have ordered them with the overall system. Subse- quent installation is possible. Fig. 48:... -
Page 48: Commissioning
Switching on QMS 700 only with QMA cable Only switch on QMS 700 with the QMA cable properly connected. Factory setting Pfeiffer Vacuum configures complete systems optimally at the factory. Therefore, do not change anything without good reason. Data transmission If the yellow LED of the Ethernet connection remains dark, a problem has occurred during data transmission. -
Page 49: Operation
Operation 7 Operation QMG 700 is operated using the Quadera software. You can find information on the Quadera software in the software documentation as part of the software. Operating QMG 700 with Quadera software ► Use the Quadera software to – Set unit parameters –... -
Page 50: Decommissioning
1. Switch off the SEM and, if necessary, the filament. 2. Terminate the connection between QMG 700 HiQuad and the PC in QUADERA. 3. Click on the check mark in front of "Connect" in the "Device" menu, or click on the green symbol in the unit status display. -
Page 51: Maintenance
► Operate the device away from fluids and humidity sources. ► Take special precautions if there is a risk of dripping water. ► Do not switch on the device if fluid has penetrated into it, instead contact the Pfeiffer Vacuum Service Center. -
Page 52: Cleaning The Filter Mat
Maintenance Prerequisites ● Device is switched off ● Mains plug is removed Required consumables ● Common cleaning agent (e.g. mild household detergent). ● Clean, soft cloth External cleaning of the device 1. Use a soft, damp cloth to clean the surfaces. 2. -
Page 53: Changing Mains Fuse
► Protect the device against moisture. Device or system problem Generally, a faulty fuse is an indication of a problem in the device or system. If the new fuse is again faulty after replacement, contact your nearest Pfeiffer Vacuum Service Cen- ter. Spare part required ●... -
Page 54: Malfunctions
Malfunctions 10 Malfunctions Error Possible cause Remedy The "DC" LED on the front panel of the unit remains dark Mains fuse defec- ● Replace the when the mains voltage is applied and the mains switch tive mains fuse. is switched on. Tbl. -
Page 55: Shipping
► Comply with the instructions for safe distribution. Decontamination subject to charge Pfeiffer Vacuum decontaminates products not clearly declared "Free of contamination" at your expense. Ship product safely ► Do not ship microbiological, explosive or radioactively contaminated products. -
Page 56: Recycling And Disposal
– Fluoroelastomers (FKM) – Potentially contaminated components that come into contact with media 12.2 Dispose of a mass spectrometer system Pfeiffer Vacuum mass spectrometer systems contain materials that you must recycle. 1. Dismantle the housing parts. 2. Dismantle all individual components. -
Page 57: Service Solutions By Pfeiffer Vacuum
We are always focused on perfecting our core competence – servicing of vacuum components. Once you have purchased a product from Pfeiffer Vacuum, our service is far from over. This is often exactly where service begins. Obviously, in proven Pfeiffer Vacuum quality. - Page 58 Service solutions by Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the provisions in the contamination declaration. a) Neutralize the product with nitrogen or dry air. b) Seal all openings with blind flanges, so that they are airtight.
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Page 59: Ordering Information
● description and order number according to the parts list 14.2 Spare parts and accessories Installation and operation of accessories Pfeiffer Vacuum offers a series of special, compatible accessories for its products. ● Information and ordering options for analysis equipment accessories can be found on- line. -
Page 60: System Components
Ordering information 14.4 System components Description Order number EP 422 PT 444 570 -T CP 400 PT 442 210 -T QMH 400-1, 1 – 128 u (QMA 410) PT M23 067 QMH 400-5, 1 – 300/512 u (QMA 430/QMA 400) PT M23 066 QMS 700 with SC 700 and QC 700 PT M27 580 Tbl. -
Page 61: Technical Data And Dimensions
Technical data and dimensions 15 Technical data and dimensions 15.1 Control unit QMS 700 QMS modules The information applies to all QMS 700 modules unless otherwise specified. Parameter Value Temperature (storage) -40 – +65 °C Temperature (operation) +5 – +40 °C Relative humidity ≤... -
Page 62: 2Quadrupole Controller Qc 700
Technical data and dimensions 15.1.2 Quadrupole controller QC 700 Parameter Value Suitable for System chassis SC 700 Required plug-in positions Quantity per system Plug-in positions Plug-in positions no. 1 and 2 (on the very left in system chassis SC 700) Weight 0.4 kg Tbl. -
Page 63: 3Ion Source Supply Is 716
Technical data and dimensions Detect TYPE Detector type FARAD Faraday collector, EP 422 SEV (design configurable), EP 422 ION-CNT Ion counter, CP 400 EXTERN 1 External analog input of QC 700 (EXT IN 1) EXTERN 2 External analog input of QC 700 (EXT IN 2) A-INPUT (1–n) Analog signals via IO 700/IO 720 (analog channels 1 –... -
Page 64: 4High Voltage Supply Hv 701
Technical data and dimensions Parameter Value Plug-in position (see chapter “Installing or replacing plug-in modules in system chas- sis”, page 44) Weight 1 kg Tbl. 30: Technical data, IS 716 Parameter Value Voltage 0 – +10 V Current max. 5 A Power max. -
Page 65: 6Input/Output Module Io 700
Technical data and dimensions Parameter Value Plug-in position (see chapter “Installing or replacing plug-in modules in system chas- sis”, page 44) Weight 0.54 kg Tbl. 35: Technical data, HV 702 Parameter High-level voltage (U SEV supply (U CD supply (U BIAS Voltage -100 V –... -
Page 66: 7Input/Output Module Io 720
Technical data and dimensions Parameter Value Permitted loads ohmic, inductive, lamps Refresh rate 10 ms Tbl. 39: Digital outputs IO 700 Parameter Value Module used ® WAGO 750-430 Number of inputs Input voltage 0/+24 V Input current 2.8 mA Input filter Time constant 3 ms Refresh rate 10 ms... -
Page 67: Tbl. 43: Qmh And Qma Types
Technical data and dimensions QMH type Mass range [u] QMA type Rod diameter [mm] QMH 400-1 QMA 410 QMH 400-5 QMA 430 QMA 400 QMH 402 QMA 410 Tbl. 43: QMH and QMA types 15.3 Analyzer QMA 4x0 You can find the technical data of QMA 4x0 in the corresponding operating instructions for QMA 4x0. 15.4 Electrometer pre-amplifier EP 422 Parameter Value... - Page 68 Technical data and dimensions Measuring range Sensitivity Tolerance at 25 °C Rise time from 10 to Offset at 25 °C 90 % ± 1 % 50 μs ± 0.5 mV ± 10 ± 10 ± 1 % 90 μs ± 0.5 mV ±...
- Page 69 EC Declaration of Conformity Declaration for product(s) of the type: Quadrupole mass spectrometer system QMG 700 HiQuad ® We hereby declare that the listed product satisfies all relevant provisions of the following European Directives. Basse tension 2014/35/CE Electromagnetic compatibility 2014/30/EU...
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