Fig. 27: Filament Unit Of The Grid Ion Source - Pfeiffer Vacuum PrismaPro QMG 250 Translation Of The Original

Maintenance
Required spare parts
● Filament unit for grid ion source with tungsten filaments
● If necessary, set of parts PT 163 534 for the replacement of screws, nuts or clamps
Fig. 27:
1 Filament unit
2 Connection of filament unit (3×)
3 Screw (3×)
4 Nut (3×)
5 Circlip (3×)
6 Washer (3×)
Disassembling the filament unit
1. Place the analyzer in the mounting aid.
2. Hold the filament unit connections holder with the flat pliers.
3. Loosen the screws of the filament unit.
4. Carefully remove the ion source from the quadrupole rod system.
5. Loosen the nuts.
6. Remove nuts, circlips, washers, hoods, and ceramic isolators.
7. Carefully pull the filament unit away from the ion source.
Installing the filament unit
1. Place the analyzer in the mounting aid.
2. Carefully remove the new filament unit with attached support ring from the transport packaging.
3. Place the new filament unit onto the stud bolts of the ion source.
4. Install the ceramic insulators, hoods, washers and circlips.
5. Tighten the nuts.
6. Loosen the support ring bolts and remove the support ring.
7. Carefully install the ion source onto the quadrupole rod system.
8. Feed the screws through the eyelets of the wiring.
9. Hold the filament unit connections with the flat pliers.
10. Tighten the screws in the connectors of the filament unit.
11. Measure the resistance of each filament.
Setting parameters in the operating software to 0 (zero)
► Set the pressure cut-off meter of the ion source to 0 (zero) in uCon with the command U204.
52/86
1
2
3
Filament unit of the grid ion source
(M1.6, flat head)
(M1.6, hexagon, stainless steel)
– Tightening torque: 0.15 Nm
– Tightening torque: 0.15 Nm
– Alternatively, enter "/mmsp/sensorIonSource/tPTripCount/set?0" in the web browser and con-
firm with Enter.
4
5
6
7
8
9
7 Hood (3×)
8 Ceramic insulator (3×)
9 Stud bolt (3×)
10 Support ring
11 Support ring screw (3×)
10
11