Replacing The Filament Unit Of The Crossbeam Ion Source; Fig. 25: Filament Unit Of The Crossbeam Ion Source - Pfeiffer Vacuum PrismaPro QMG 250 Translation Of The Original

Maintenance
7. Tighten the screws.
8. Make sure that the spring washer and the fixing screw have good contact.
9. Measure the resistance of each filament.
Setting parameters in the operating software to 0 (zero)
► Set the pressure cut-off meter of the ion source to 0 (zero) in uCon with the command U204.
9.4.2 Replacing the filament unit of the crossbeam ion source
Prerequisite
● PrismaPro deactivated
Required tools
● Socket key, WAF 3.2
● Flat screwdriver, 3 mm
● Torque wrench
● Flat pliers
Required aid
● Mounting aid for the analyzer
Required spare parts
● Filament unit for crossbeam ion source with tungsten filaments or Y
● If necessary, set of parts PT 163 543 for the replacement of screws, nuts or clamps
Fig. 25:
1 Clamp (4×)
2 Nut (4×)
3 Screw (4×)
4 Filament holder with filament (2×)
5 Formation area
6 Lateral openings of the formation area
50/86
– Tightening torque: 0.15 Nm
– Do not bolt the spring washer and the fixing screw together.
– Alternatively, enter "/mmsp/sensorIonSource/tPTripCount/set?0" in the web browser and con-
firm with Enter.
Renew filaments of both filament holders
Pfeiffer Vacuum recommends always renewing both filament holders with filaments.
Filament unit of the crossbeam ion source
(rectangular)
(M1.6×5, slot, stainless steel, gold-plated)
11
10
9
8
7
7 Stud bolt (2×)
8 Wehnelt plate (2×)
9 Filament (2×)
10 Ceramic insulator (2×)
11 Nut (2×)
(M1.6, hexagon, stainless steel)
O -coated iridium filaments
2 3
1
2
3
4
5
6