Pfeiffer Vacuum QMG 422 Operating Instructions Manual
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Pfeiffer Vacuum QMG 422 Operating Instructions Manual

Pfeiffer Vacuum QMG 422 Operating Instructions Manual

Quadrupole mass spectrometer system
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Operating Instructions
Incl. Declaration of Conformity
Quadrupole Mass Spectrometer System
QMG 422
BG 805 981 BE
(0201)
1

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Summary of Contents for Pfeiffer Vacuum QMG 422

  • Page 1 Operating Instructions Incl. Declaration of Conformity Quadrupole Mass Spectrometer System QMG 422 BG 805 981 BE (0201)

  • Page 2: Validity

    Validity This document applies to QMG 422 systems with QMS 422 and QMI 422 control units equipped with the modules listed on → 65, some of which come with their own operating instructions. It is valid for firmware numbers: DSP / PRG No.

  • Page 3: Table Of Contents

    Contents Validity 1 Safety 1.1 Symbols used 1.2 Intended use 1.3 Safety information 1.4 Liability and warranty 1.5 Courses 2 Overview 2.1 QMS 422 control unit 2.2 QMI 422 control unit 2.3 EP 422 Electrometer preamplifier 2.4 Family 400 components 2.5 Family 125 components 2.6 Options 3 Technical data...
  • Page 4 7 Troubleshooting 7.1 General 7.2 Warnings 7.3 Error messages 7.4 Measurement signal problems 7.5 General problems 7.6 Service interventions 8 Maintenance 9 Decommissioning 10 Spare parts and accessories Appendix A: Default parameter values B: Literature C: Index Declaration of Contamination Declaration of Conformity BG 805 981 BE (0201)

  • Page 5: Safety

    1 Safety 1.1 Symbols used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environmental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Skilled personnel Instructions marked with this symbol may only be carried out by persons who have suitable technical training and the necessary experience to do it safely.

  • Page 6: Intended Use

    1.2 Intended use The QMG 422 is a mass spectrometer designed for gas analysis in the high vacuum range. It may be used only for this purpose. The instructions in this user’s guide and in those of the accessories must be conscientiously followed.

  • Page 7: Overview

    2 Overview The QMG 422 comprises two equipment families: Family 400 In the family 400 the analyzers QMA 400 and QMA 430 (8 mm rod diameter) and QMA 410 (16 mm rod diameter) and the HF generators QMH 400/410 with mass ranges of 128 to 2048 amu are used.

  • Page 8: Qms 422 Control Unit

    Family 125 The family 125 uses the QME 125 mass filter electronics with the mass ranges 100 and 200 amu and QMA 125 analyzers with 6 mm rod diameter. This symbol refers to information that is applicable only to Series 125 equipment.

  • Page 9: Family 400 Components

    2.4 Family 400 components QMH 400/410 The HF generator produces the high-frequency voltage required for mass separation (→  [1]). QMH type Range QMA type Rod ø QMH 400-1 128 amu QMA 410 16 mm QMH 400-5 300 amu QMA 430 8 mm QMH 400-5 512 amu...

  • Page 10: Options

    2.6 Options CS 422 The operator console of the CS 422 is installed in the QMS 422 and allows manual operation. AO 421 / IC 421 The analog output AO 421 and the ion counter IC 421 are mounted on one board which is directly installed in the QC 422 (without system bus).

  • Page 11: Technical Data

    3 Technical data 3.1 General This information applies to all components unless specified otherwise. Ambient conditions Temperature Storage: –40 °C ... +65 °C / Operation: +5 °C ... +40 °C ≤80% up to +31 °C, decreasing linearly to 50% at +40 °C Relative humidity indoors, altitude up to 2000 m Type of protection...

  • Page 12: Qc 422 Quadruple Controller

    3.5 QC 422 quadruple Slots 3 (with and without AO 421 or IC 421) controller Number per unit Weight 0.67 kg without / 0.9 kg with AO/IC421 Number of measurement channels Operating modes MONO / MULTI channel Measurement cycles 1 ... 10'000, or REPEAT Channel switching time 1.5 ...
  • Page 13 Measurement ranges and Detector type Meas. ranges Modes Resolution resolution FARAD,SEM ...10 A fsd FIX- and AUTO- 16 bit * (per range) Range EXTERN GAIN 1: ±10.240V FIX-Range 16 bit * GAIN 10: ±1.024V ION-CNT 10-2...108 cps, AUTO-Range in mass-MODE: meaning full use SAMPLE: 1/DWELL up to 106...107...
  • Page 14 RS-232-C interface Also refer to → Detailed description Measured data buffer 256 kB Protocol ASCII or binary protocol (according to SECS-1 standard) 1 start, 8 data, 1 stop bit, no parity 9 pin D-sub, see ( → Connector 25). Baud rate , 1200, 2400, 4800, 9600, 19200 baud ≤...
  • Page 15 Connections on QC 422 Connector ctrl Analog output of the electrometer signal : 2× 200 Ω, short-circuit proof 0 ... ±10,24 V, R Analog input in place of electrometer signal. ELM OUT+ ctrl ELM OUT– ±10,24 V, common mode signal: ±2 V = 2×...

  • Page 16: Is 420 Ion Source Supply

    3.6 IS 420 Slots Ion source supply max. 1 No. of IS 420 per unit Supply 5 V / 0.6 A; ±24 V / 2 A (2.4 A with Degas) → Fuses F1, F2 Filament supply 0...10 V / 5 A / 50 W with Fil1+2: 1.4...2 V on Fil2 Filament modes...

  • Page 17: Ep 422 Electrometer

    DANGER The external voltage source for V0 must be reliably limited to 2 mA isolated for 750 V. The relay connected to SPEC SRC ON and SPEC SRC RET incl. lines must be isolated for 750 V and be protected against accidental contact. Interface to QMH 400/410, QME 125 3.7 EP 422...

  • Page 18: Hv 420 High Voltage Supply

    CP400 Dimension diagram 36 mm 16 mm 86 mm Slots 3.9 HV 420 max. 1 not simultaneously with HV 421 Number per unit High voltage supply Supply 5 V / 0.4 A ; +24 V / 0.15 A ; -24 V / 0.05 A →...

  • Page 19: Di 420 Digital Input

    Slots 3.11 DI 420 Number per unit max. 2 Digital Input Supply 5 V / 0.45 A Number of inputs Input signals 24 VDC ±25% / 10 mA, low true Switching threshold 10.6 ... 16 V Insulation 30 V / 60 VDC to GND and between input groups Protection +35 V / -30 V continuous;...

  • Page 20: Ai 421 Analog Input

    3.13 AI 421 Slots Analog Input Number per unit max. 1 Supply 5V / 1 A Inputs 16, differential, I <±150 nA @70 °C Measurement range -10.24 ... +10.235 VDC, linear -10.0 ... +10.0 V Resolution 12 bit monotone Accuracy ±0.1% FSR Measurement interval 40 ms for all 16 inputs...

  • Page 21: Installation

    4 Installation 4.1 QMS/QMI 422 DANGER Before you connect the equipment make sure that the line voltage corresponds to the specifications on the nameplate. A 3-conductor power cable with protective ground must be used. The power outlet must have a protective ground contact. Extensions without protective ground conductor are inadmissible.

  • Page 22: Ep 422

    Skilled personnel When the QMA is in operation, hazardous voltages up to 600 VDC are present. Under unfavorable conditions other built-in components in the vacuum chamber (e.g. gauge heads) can be subjected to this voltage. If as a result such components become dangerous to touch (also take into consideration the lines and the connected equipment!), they must be arranged or protected in such a way that no contact, no arcs, and no charge carrier flow can occur.

  • Page 23: Cabling With Qma 400

    HV+ HV– 4.5 Cabling with QMA 400 Cable the system in accordance with the following tables Short TNC and short SHV = short circuit plugs Configuration config-SYSTEM-DETECT:FARAD 1. Faraday cup Module Connector Connection l [m] Module Connector Comments QC422 control cable QMH (QC) Optional extension 7m...

  • Page 24: Cabling With Qma 125

    4. SEM 217, HV 420 In addition to 1. Configuration config-SYSTEM-DETECT:SEM and ion counter Module Connector Connection l [m] Module Connector Comments HV420 HV– High voltage CP400 HV– or 10 m short SHV CP400 short TNC EP(FARAD) if no EP QC422 control cable CP400...

  • Page 25: Rs-232-C Interface

    4. 90° SEM and ion counter In addition to 1. Configuration config-SYSTEM-DETECT:SEM Module Connector Connection l [m] Module Connector Comments HV - High voltage HV - ev. 6 m short SHV HV + QC422 Ion counter EP422 Input Meas. signal short TNC without EP422 control cable...

  • Page 26: Lan Interface

    4.8 LAN interface Configuring the transmission On the QC 422 check the setting of jumper X20 and correct it, if necessary. distance Installation/removal of QC 422 ( → X20 determines the Transmission power, it is determined by the receiver of the remote station and the type of fiber-optic (FO) conductor..
  • Page 27 OH 421 Installation/removal → 29, there is no address setting. Settings: Jumper Function Purpose X12: IN *) Central hub First hub directly linked to the PC FO connectors X1 ... X5 are peer-to-peer X12: OUT Expansion hub Connected to other hub Connect X1 always in the direction toward the PC! FO connectors X2 ...

  • Page 28: Installing/Removing Options

    4.9 Installing/removing Options are factory installed if they have been ordered together with the system. options They can also be installed in the field at any time. Skilled personnel Work on open equipment may only be performed by specialists. Switch off the unit before any manipulations on the equipment. Wait 10 s and detach all cables (power cable last).
  • Page 29 Bus modules Disconnect all cables from the unit, unplug the power cable To prevent damage to the connectors the module to be installed must be accurately pushed into the circuit board guides. Firmly tighten the screws. Loose screws cause malfunctions. DANGER As hazardous voltages are present inside the unit empty slots must be closed off with blanking plates ( →...
  • Page 30 IS 420 Adress jumpers IS 420 Check address setting: Address 175 500(octal) Jumpers A3,4,5,7,10 inserted on IC 420 HV 420 Check address setting: Address 175 400(octal) Adress jumpers HV 420 Jumpers A1,2,3,4,5,6,7,10 inserted HV 421 The address 175 404 is fixed. Jumpers: X6 all OUT, X7 IN, X8:2-4 connected. Jumper plugs are inserted on the SHV terminals, depending on the operating mode of the SEM ( →...

  • Page 31: Description

    5 Description 5.1 Operator console In the basic version of the QMS 422 and on the QMI 422 the front panel contains only a power switch and the corresponding LED. The CS 422 operator console is available as an option. It can easily be retrofitted and is highly recommended for learning purposes, e.g.
  • Page 32 Measured value display After the start (run key) of the measurement cycle the measured value of the momentary measurement channel is displayed. In multichannel mode (cycle- MODE:MULTI) the progression of the channels can be seen (possibly with gaps in fast processes) mesured value ...

  • Page 33: Functions

    5.2 Functions Parameters for operating the mass filter and for ion detection can be stored in up to 64 channels. When the measurement is performed the channels are processed sequentially and cyclically. Channels group channels select detect mass amplif Control keys for all parameters of a measurement channel output trip...
  • Page 34 v1...v6 Ion source voltages V1...V6. v7... Ion source voltages V7...V9. operation group operation Control keys for operation of: sem hv ion src cycle • • ion source filam run/halt mono multi • measurement process halt sem hv sem hv defines the global SEM high voltage. It is effective in all channels for which no individual voltage is specified.

  • Page 35: Parameter List

    5.3 Parameter list The parameters below are listed in alphabetic order by name. Notation: DETECT (config-SYSTEM) Parameter possibly subfunction(s) of the function Additional information on the utilization, the advantages and disadvantages of individual settings can be found in Chapter 6. ADJ-TYP (cycle) ADJ-TYP Type of search with cycle-FUNCT:ADJUST...
  • Page 36 BAUD (config-CTRL) BAUD Only with config-CTRL-MODE:ASCII, BIN and MODEM 300, 1200, 2400 Baud rate of the RS232 interface, can always be set on the 4800, 9600, 19200 CS 422 (300 baud only with ASCII protocol) BEGIN With cycle-FUNCT:CYCLE and cycle-MODE:MULTI BEGIN (cycle) 0 ...
  • Page 37 CYCLES With cycle-FUNCT:CYCLE CYCLES (cycle) REPEAT (0) The measurement cycle is repeated endlessly. 1 ... 10'000 Number of measurement cycles to be executed D-EMIS (ion src) D-EMIS With ion src-MODE:DEGAS 0.0 ... 20.0 mA Emission current in Degas mode. D-PROT With ion src-MODE:DEGAS D-PROT (ion src) 0.00 ...
  • Page 38 DWELL (mass) Measurement time on mass number MASS with mass-MODE:SAMPLE Electrometer or Extern: DWELL detect-TYPE:FARAD, SEM or EXTERN 0.5, 1, 2, 5, 10, 20, 50 ms The measured value is determined by 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 60 s averaging across the DWELL time.
  • Page 39 Time constant of the analog filter for the electrometer signal FILTER (amplif) FILTER With detect-TYPE:FARAD, SEM and EXTERN 18 µs ... 800 ms Manual setting for special requirements. Choose a filter value that is appropriate to the measuring speed. AUTO The analog filter is automatically set as follows: SPEED [ms/u] SPEED [s/u]...
  • Page 40 IS-TYP Specify the ion source installed in the QMA. IS-TYP (config) AXIAL Axial ion source Cross-beam ion source GRID Grid ion source Sputter process monitor ion source SPEC+ Special ion source positive ions SPEC– Special ion source negative ions See TEST-CS 422 KEY-T (config) LEVEL-A, -B (trip) Threshold values of the switching functions...
  • Page 41 MODE Measurement cycle mode. The cycle is started/stopped with run/halt MODE (cycle) MONO Single channel measurement in selected channel MULTI Measurement of the channels between BEGIN and END. Channels that are in aux-STATE:SKIP state will be skipped. MODE Ion source mode MODE (ion src) NORMAL Normal operation with the parameters defined in the ion source set.
  • Page 42 PE-CTRL (detect) PE-CTRL With detect-TYPE:PENNING Penning switched off Penning switched on (wait for ignition, pressure dependent) PI-CH With detect-TYPE:PIRANI PI-CH (detect) 0 / 1 Pirani channel to be measured POS (config) See TEST-SERVICE See TEST-CS 422, -DSP and -QMS PRG-NR (config) Configuration input of the QMA type based on which the unit QMA (config-SYSTEM) recognizes the family...
  • Page 43 SEM+FIL Control of filament and SEM supply SEM+FIL (config-CTRL) INTERN Control with CS 422 or interface. Control with EXT-PROT signal on ctrl connector: EXTERN • Contact open: SEM+FIL switched off. • Contact closed: SEM+FIL switched on. Switch-off with EXT-PROT signal on ctrl connector: EXT-PROT •...
  • Page 44 CS 422 Test of the CS 422 console with: DISP-T Endless test of the LC display. After the test has been canceled the Display- RAM test result is displayed. EPROM-T After the EPROM test the result is displayed and the checksum is displayed at the soft key.
  • Page 45 TYPE Selection of signal source, depends on the configuration TYPE (detect) FARAD Electrometer signal from Faraday collector Electrometer signal with SEM ION-CNT Ion counter EXTERN External analog signal in place of EP 422 signal. Filter and processing functions of the QC 422 are used. PIRANI Total pressure measurement with Pirani module PENNING...

  • Page 46: Operation

    6 Operation The following description is applicable to units equipped with CS 422 operator console. They apply analogously also without CS 422. 6.1 Initial start up DANGER Before you switch on the power make sure that all components have been installed correctly (see Chapter Installation) and that the installation conforms to the technical data →...

  • Page 47: Filament Protection

    6.2 Filament protection Optimize the filament current cut-off point for optimum protection of the filament. a) Switch off the emission: press filam, the filam lamp goes out b) Ensure that the pressure is mbar. c) Switch on filam: filam light turns on. d) If Emission error *) is displayed continue with f).

  • Page 48: Ion Counter

    The mass number should be selected in such a way that no ion current occurs. With CLEAR you can disable the offset correction; the offset values are set to zero. The values of the ranges 10 , 10 , 10 , 10 A are not displayed, they are available at the interfaces.

  • Page 49: Measurement Cycle

    6.8 Measurement cycle With cycle-MODE choose single channel (MONO) or multichannel (MULTI) mode. The measurement cycle is started and stopped with run/halt and its state is indicated with the mono, multi and halt LEDs. The number of measurement cycles is chosen with cycle-CYCLES: 1...10000 or repeating (0).

  • Page 50: Electrometer Modes

    6.9 Electrometer modes The range of the electrometer preamplifier can be selected in 3 different ways: AUTO With amplif-MODE:AUTO the electrometer range is set automatically across all decades. This results in a huge dynamic response of over 10 decades or 200 dB. Use AUTO whenever possible.
  • Page 51 The FIR filter largely eliminates noise and interference so that also very small peaks can be detected against the background. Statistical intensity fluctuations which on account of the 90° SEM arrangement frequently account for the major portion of the noise are particularly well suppressed by the FIR filter. For this reason you should always use SCAN-F, except in the few special cases were raw data are actually required.

  • Page 52: Integral Spectrum

    There are two methods: • With PEAK-L (Level) the peak processing algorithm is applied to the normal spectrum (SCAN-N). • With PEAK-F the peak processing algorithm is applied to the measured values processed with the FIR filter. This is advantageous because parasitic signals have largely been removed from the measured values so that a very low THRESH can be used.
  • Page 53 Start: Stop measuring cycle: run/halt:halt Choose mass-MODE:SAMPLE Choose cycle-FUNCT:ADJUST Choose cycle-MODE:MONO or MULTI Choose cycle-ADJ-TYP:COARSE Start ADJUST measurement: run/halt:run Procedure: Signal mon Adjust With successful Adjust the mass number MASS of the measured channel is updated with the new value. If unsuccessful it remains Peak found unchanged.
  • Page 54 Examples: Peak intensity Level ½ l ½ l MASS Peak mass MASS MASS 000001 : → → → → 000100 : → → → → 010010 : ↑ ↑ ↑ ↑ ← ← ← ← 000000 : OK increase MASS increase MASS decrease MASS F.S.

  • Page 55: Analog Outputs

    Examples of unsuccessful fine searches: -1,5% +1,5% +1,5% -1,5% +1/8 –1/8 MASS 6.13 Analog outputs On the QC 422 there are some signal connections (see pin assignment 15). Nowadays measurement data are generally acquired with computers. For investigating possible measuring problems (noise, transient response, etc.) and for special cases the analog signals can be very useful.
  • Page 56 Electrometer operation detect-TYPE:FARAD, SEM output- Output format mass-MODE AO-MODE, amplif- MONITOR MODE Decades V/Decade Formulas SCAN-N FIX,AUTO SCAN-F AUTO-D STAIR FIX,AUTO LOG 3D 3.333 b), c), d) PEAK-L AUTO-D PEAK-F AUTO LOG 8D 1.25 ADJ-COARSE AUTO-D FIX,AUTO SAMPLE AUTO-D ADJ-FINE LOG 3D 3.333 b), c), d)
  • Page 57 g) for Uo: 0 ... 10 V: Rate = 0.1 × O-RNG × Uo = O-RNG 2 4 6 8 [cps] Formula g) 0.3 Uo LOG 3 DEC h) for Uo: 1V ... 10V Rate = 10 × O-RNG × 10 0.25V ...

  • Page 58: Switching Functions

    Recording For recording analog measured values (spectra or versus time) the following possibilities exist: Paper feed should match SPEED, e.g. y/t Recorder QC 422 1 mm/s for 1 s/u. Sensitivity: 10 V for full scale deflection – – Mirror imaged spectra can be inverted with amplif-CALIB: -1.
  • Page 59 Window comparator The window comparator is only possible in conjunction with the DO 420A module Choose trip-TYPE : ABS With trip-LEVEL-A enter the upper threshold With trip-LEVEL-B enter the lower threshold With trip-DO-A:xx, trip-DO-B:xx assign A and B to the same DO bit. TRIP A TRIP A&B &...

  • Page 60: Troubleshooting

    The relevant safety instructions given in the corresponding Chapters must be conscientiously followed. Protection against electrostatic discharges (ESD) is absolutely essential, otherwise the Pfeiffer Vacuum warranty becomes null and void. 7.2 Warnings Warnings related to operator action are displayed for approx. 10 sec.
  • Page 61 7.3.1 ERROR table No Description Possible cause / Test methods Correction Communication CS to QC CS 422, its cable or QC 422 defective Replace CS 422 stack overflow CS 422 idle error, op. syst. overloaded CS 422 defective Replace CS 422 watchdog error CS 422 Display RAM run testprogram: CS 422 EPROM checksum incorr.

  • Page 62: Measurement Signal Problems

    7.4 Measurement signal problems Problem Possible cause / Test methods Correction No measurement signal with Try simulation Replace QC 422 if not ok EP 422 or CP 400 Cabling not o.k. Check, see p. 23 u. 24 Wrong detector selection Set detect-TYPE correctly No emission Switch on filam...

  • Page 63: General Problems

    Problem Possible cause / Test methods Correction Unsatisfactory peak shape, poor Small emission (0.1 mA) cannot be set on Replace the insulators in the ion source, see QMA 125 →  [4] sensitivity QME 125 Ion source insulation in analyzer bad Replace the insulators in the ion source, see QMA 400 →...

  • Page 64: Service Interventions

    Refer to the maintenance instructions in all the user’s guides of the components that form part of the system. See list of literature on 9 Decommissioning Please contact your Pfeiffer Vacuum service location on instructions of how to dispose of your system. BG 805 981 BE (0201) QMG422.oi...

  • Page 65: Spare Parts And Accessories

    10 Spare parts and accessories Ordering number QMS 422 Basic unit without QC 422 PT 444 580-T CS 422 Operator console PT 444 650-T 1 Filter mat for QMS 422 B 5099 154 FD 1 Ventilator for QMS 422 B 5099 130 CD 1 Blanking plate, 4 subunits (20 mm wide) BG 544 775-T Power supply for QMS 422 and QMI 422 (90...265 V) B 5181 214 QY...

  • Page 66: Appendix

    Appendix Default parameter For activating the default parameters see Parameter INIT. values Parameter Function Default value Parameter Function Default value Channels AI-CH detect MODE amplif AO-CH output MODE mass SCAN-N AO-MODE output MONITOR output AVERAGE mass O-RNG output CALIB amplif 1.000 E0 P-CAL amplif...
  • Page 67 Parameter Function Default value Parameter Function Default value Operation ADJ-TYP cycle COARSE FIL1 ion src SET 0 BEGIN cycle FIL2 ion src SET 0 COPY TO SET ion src SET 0 FUNCT cycle CYCLE CYCLES cycle REPEAT MODE cycle MONO D-EMIS ion src 10.0 mA...

  • Page 68: B: Literature

     [7] Operating manual Optical Hub OHA 200  [8] Operating instructions Pirani module PI 420  [9] Operating instructions Penning Module PE 420 Ordering source Pfeiffer Vacuum GmbH Emmeliusstrasse 33 D-35614 Asslar BG 805 981 BE (0201) QMG422.oi...

  • Page 69: C: Index

    Note: Index Information on the parameters can be found in the alphabetical list beginning on page 35 Accessories Group Parameter channels display ADJUST general coarse Parameters ion source fine alphabetic list operation AI 421 10; 20; 30 Pause HV 420 9;...

  • Page 70: Declaration Of Contamination

    Declaration of Contamination The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted. Non-completion will result in delay. This declaration may only be completed (in block letters) and signed by authorized and qualified staff. Description of product Reason for return Type...

  • Page 71: Declaration Of Conformity

    Declaration of Conformity as defined by the Directive relating to machinery 98/37/EC, Appendix IIb We, Pfeiffer Vacuum, hereby declare that putting the incomplete equipment mentioned below into operation is not permitted until evidence is given that the system into which that incomplete equipment shall be installed is in conformity with the provisions of the EC Directive relating to machinery.
  • Page 72 Berliner Strasse 43 D–35614 Asslar Deutschland Tel +49 (0) 6441 802-0 Fax +49 (0) 6441 802-202 info@pfeiffer-vacuum.de Original: German BG 805 981 BD (0201) www.pfeiffer-vacuum.de bg805981be...

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