Pfeiffer Vacuum PRISMAPRO QMG 250 Operating Instructions Manual
Compact mass spectrometer
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Summary of Contents for Pfeiffer Vacuum PRISMAPRO QMG 250
- Page 1 OPERATING INSTRUCTIONS Translation of the Original QMG 250 PRISMAPRO ® Compact mass spectrometer...
- Page 2 These operating instructions describe all models and variants of your product. Note that your product may not be equipped with all features described in this document. Pfeiffer Vacuum constantly adapts its products to the latest state of the art without prior notice. Please take into account that online operating instructions can deviate from the printed operating instructions supplied with your product.
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Page 3: Table Of Contents
Foreseeable improper use Responsibilities and warranty Owner requirements Personnel qualification 2.8.1 Ensuring personnel qualification 2.8.2 Personnel qualification for maintenance and repair 2.8.3 Advanced training with Pfeiffer Vacuum Operator requirements Product description Identifying the product Scope of delivery Operating principle System overview 3.4.1 Structure of the system... - Page 4 Malfunctions Shipping Recycling and disposal 12.1 General disposal information 12.2 Dispose of a compact mass spectrometer Service solutions by Pfeiffer Vacuum Ordering information 14.1 Ordering parts 14.2 System components 14.3 Ion sources and filament units for QMA 250 analyzers 14.4 Spare parts and parts sets Technical data and dimensions 15.1 Technical data and dimensions (Faraday)
- Page 5 Table of contents NRTL Listed Declaration of conformity 5/74...
- Page 6 List of tables List of tables Tbl. 1: Applicable documents Tbl. 2: QMG 250 PrismaPro Tbl. 3: Analyzer QMA 250 Tbl. 4: Electronic unit QME 250 Tbl. 5: Abbreviations used Tbl. 6: Shipment Tbl. 7: Ion source for QMA 250 M Tbl.
- Page 7 List of figures List of figures Fig. 1: Principle of the quadrupole mass spectrometer system Fig. 2: PrismaPro overview Fig. 3: System overview Fig. 4: QMA 250 F/M analyzers (with transport protection) Fig. 5: QMA 250 analyzer implementation Fig. 6: QME 250 front panel: left standard, right with IO 250 Fig.
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Page 8: About This Manual
About this manual 1 About this manual IMPORTANT Read carefully before use. Keep the manual for future consultation. 1.1 Validity This document describes the function of the products listed in the following and provides the most im- portant information for safe use. The description is written in accordance with the valid directives. The information in this document refers to the current development status of the products. -
Page 9: Target Group
Electronic unit QME 250 The part number is found on the rating plate of the product. Pfeiffer Vacuum reserves the right to make technical changes without prior notification. The figures in this document are not to scale (Dimensions in mm). -
Page 10: Pictographs
About this manual 1.3.2 Pictographs Pictographs used in the document indicate useful information. Note 1.3.3 Product sticker This section describes all the stickers on the product along with their meaning. Rating plate You can find the rating plates for the overall system (QMG 250), the electronic unit (QME 250) and the analyzer (QMA 250) at the bot- tom of the QME 250 electric unit. -
Page 11: Trademarks
(unshielded cable with twisted pair of wires) Web UI User Interface via web connection (user interface) Tbl. 5: Abbreviations used 1.4 Trademarks ● PrismaPro ® is a trademark of Pfeiffer Vacuum GmbH. ● Windows ® is a trademark of the Microsoft Corporation. 11/74... -
Page 12: Safety
Safety instructions according to product’s life stages All safety instructions in this document are based on the results of a risk assessment. Pfeiffer Vacuum has taken into account all the relevant life stages of the product. Risks during installation DANGER Danger to life caused by electric voltage on the QME electronic unit You may only attach the electronic unit to a correctly installed QMA analyzer (earth connection). - Page 13 Safety DANGER Danger to life caused by electric voltage on the analyzer During operation, dangerous voltage is present on the electrode system of the QMA analyzer. In un- favorable conditions, other parts installed in the vacuum chamber (e.g. gauges) may be exposed to this, and become dangerous to touch.
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Page 14: Safety Precautions
Safety Risks during maintenance WARNING Health hazard through poisoning from toxic contaminated components or devices Toxic process media result in contamination of devices or parts of them. During maintenance work, there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub- stances causes environmental damage. -
Page 15: Proper Use
European Direc- tives, before commissioning that system. Safety aspects If you use the device in a manner not specified by Pfeiffer Vacuum, protection provided by the device may be impaired. Poisonous substances The analyzer does not contain any poisonous substances. -
Page 16: Owner Requirements
– International, national and locally applicable standards and guidelines – Additional product-related guidelines and regulations 4. Only use original parts or parts approved by Pfeiffer Vacuum. 5. Keep the operating instructions available at the place of installation. 6. Ensure personnel qualification. -
Page 17: Personnel Qualification For Maintenance And Repair
─ Customer with Pfeiffer Vacuum service training ─ Pfeiffer Vacuum service technician 2.8.3 Advanced training with Pfeiffer Vacuum For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of courses and technical trainings. For more information, please contact Pfeiffer Vacuum technical training. -
Page 18: Product Description
3 Product description 3.1 Identifying the product You will need all the data from the rating plate to safely identify the product when communicating with Pfeiffer Vacuum. 1. Read the data on the product rating plate. 2. Record this data. 3. Always have all rating plate specifications to hand. -
Page 19: Operating Principle
Product description Designation Quantity Part number Description Web UI Available on device PV MassSpec software Can be downloaded via PV cloud Tbl. 6: Shipment Unpacking the product and checking completeness of the shipment 1. Unpack the product. 2. Remove the transport fasteners, transport protection etc. 3. -
Page 20: Fig. 2: Prismapro Overview
Product description ● Analyzer (see chapter “Analyzer QMA 250”, page 21) ● Electronic unit (see chapter “Electronic unit QME 250”, page 22) ● Power supply unit with mains cable ● PV MassSpec software (see chapter “PV MassSpec software”, page 23) Fig. -
Page 21: Analyzer Qma 250
DN 40 CF-F (116 mm) Use of the optional IO 250 I/O module enables use of additional interfaces. You can order the QME 250 elec- tronic unit with pre-installed IO 250. Pfeiffer Vacuum can however also retrofit this with a IO 250. 21/74... -
Page 22: Qma 250 Analyzer Contacts
Analyzers with Faraday detector serve the residual gas analysis in the total pressure range > 10 hPa. Pfeiffer Vacuum supplies the analyzer with Faraday cup in the open ion source version only. The QMA 250 M is optionally available with open ion source, cross beam ion source, or grid ion source. -
Page 23: Pv Massspec Software
Product description Fig. 6: QME 250 front panel: left standard, right with IO 250 Designation Explanation Note <AUX I/O> socket I/O interface (standard) 1 analog input 2 digital inputs 1 relay (see chapter “AUX I/O”, page 24) <LAN> socket Ethernet connection (see chapter “Ethernet (LAN)”, page 24) (PC) <24 V = 30 W>... -
Page 24: Interfaces
Product description Fig. 7: PV MassSpec 3.5 Interfaces 3.5.1 POWER SUPPLY The <24V = 30W> connection is comprised of a 4-pin lockable mains part socket that is insulated inter- nally from the system earthing. Fig. 8: View on the mains part plug 1 V- 2 V- 3.5.2 Ethernet (LAN) -
Page 25: Ext I/O
Product description Fig. 10: AUX I/O (15-pin D-Sub socket) 1 Relay (COM) Analog input 1 (-) 2 Relay (NO) Digital input 1 (pre-setting: Emission OFF) 3 Relay (NC) Digital input 0 (pre-setting: Emission ON) 7 0 V (GND for 24 V output) 8 + 24 V (output, max. -
Page 26: Fig. 11: Ext I/O (62-Pin Hd D-Sub Socket)
Product description Fig. 11: EXT I/O (62-pin HD D-Sub socket) Digital input 13 Digital output 9 Digital input 14 Digital output 10 Digital input 15 Digital output 11 Digital input 16 Analog output 4 Digital input 17 Analog output 5 Digital output 2 Analog output 6 Digital output 3... -
Page 27: Tp Gauge
The <TP GAUGE> connection is comprised of a 6-pin Amphenol C 091 A socket. Here you can connect gauges of the Pfeiffer Vacuum ActiveLine or DigiLine with analog relay option (AR); for example to protect the mass spectrometer against unintentional increase in pressure. -
Page 28: Transport And Storage
Transport and storage 4 Transport and storage 4.1 Transporting the product NOTICE Damage caused by incorrect transportation Transportation in unsuitable packaging, or failure to install all transport locks, can damage the prod- uct. ► Comply with the instructions for safe transportation. Packing We recommend keeping the transport packaging and original protective cover. -
Page 29: Installation
Installation 5 Installation 5.1 Installing the product DANGER Danger to life due to electric voltage High voltages are present inside the device. When touching parts that are live, there is a risk of death. If there is visible damage, there is a risk of death when commissioning the device. ►... -
Page 30: Installing The Analyzer
Installation 1. Analyzer (see chapter “Installing the Analyzer”, page 30) 2. Electronic unit (see chapter “Installing the electronic unit”, page 32) 3. Communication cable from the host computer to the electronic unit (see chapter “Establishing the Ethernet connection”, page 33) 4. -
Page 31: Fig. 15: Attaching The Analyzer
Installation Horizontal Analyzer positioning The Analyzer is suitable for installation on the vacuum system in any position. Pfeiffer Vac- uum recommends a horizontal mounting position. This has the following advantages: ● optimum protection of the QME electronic unit against falling debris ●... -
Page 32: Installing The Electronic Unit
Installation Spare parts required ● Copper gasket (490DFL040-S-G-S5, 1×) 1. Place the Analyzer in the installation tool supplied. 2. Carefully remove the transport protection and store in case it has to be used again in the future. 3. Fix the analyzer to the vacuum chamber with a new copper gasket electrically conductive. –... -
Page 33: Establishing An Electrical Connection
Installation 5.4 Establishing an electrical connection 5.4.1 Establishing the Ethernet connection As the PrismaPro is not equipped with its own operation elements, it can be operated using a PC (host computer) or via a network. Connecting the Ethernet cable ► Connect the Ethernet cable supplied to the QME 250 electronic unit and the PC. 2 LEDs in the RJ-45 socket indicate the interface status (see chapter “Ethernet (LAN)”, page 24). -
Page 34: Establishing A Network Connection
NOTICE IP address conflicts when connecting several devices Pfeiffer Vacuum supplies each PrismaPro with the same default IP address. If you want to connect several PrismaPro devices, their IP addresses are therefore initially not yet unique and you have to change these. -
Page 35: Sub-Networks
Installation Using IP addresses We recommend the use of static IP addresses for the PrismaPro. For this purpose, you should reserve a block of addresses for the static use and ban them on the DHCP server (host). Conflicts with double IP addresses can be avoided as a result. If you connect the PrismaPro to an existing local network, a static IP address must be avail- able for each PrismaPro installed. -
Page 36: Installing Pv Massspec
The access credentials can be found in the PrismaPro Web UI under the "HELP" menu. Fig. 17: Desktop shortcut Installing PV MassSpec 1. Open the directory in the Pfeiffer Vacuum Cloud. 2. Download the software. 3. Start the software installation by double-clicking "PVMassSpec_Installer.exe". -
Page 37: Connecting Each Individual Prismapro
NOTICE IP address conflicts when connecting several devices Pfeiffer Vacuum supplies each PrismaPro with the same default IP address. If you want to connect several PrismaPro devices, their IP addresses are therefore initially not yet unique and you have to change these. -
Page 38: Commissioning
Commissioning 6 Commissioning 6.1 Before switching on, the following points must be fulfilled: ● The mains plug of the current supply has been removed. (see chapter “Connecting the current supply”, page 33) ● All system components are correctly mounted. ● The vacuum or system conditions are tested and fulfilled. ●... - Page 39 Commissioning Data transfer problem If the yellow LED stays dark, there is a data transmission problem between the device and the PC. In this case, check the cable and components in the connection path as well as the correct PC configuration (software, firewall status, etc.). Switch on the device 1.
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Page 40: Operation
Operation 7 Operation 7.1 Using PrismaPro Web UI Detailed information on the use of PrismaPro Web UI can be found in the corresponding operating in- structions. 7.2 Using PV MassSpec Detailed information on the use of PV MassSpec can be found in the corresponding operating instruc- tions. -
Page 41: Inspection
Before replacing the filament unit, you must also inspect and assess the rest of the ion source. Pfeiffer Vacuum recommends replacing the complete ion source in the event of damage, visible deposits or impurities, or signs of contamination (e.g. discoloration). -
Page 42: Maintenance
The following will result in the loss of the warranty: ● Damage to or removal of a closure seal ● Opening the device during the warranty period Contact the Pfeiffer Vacuum Service Center in the event of process-related shorter mainte- nance intervals. First read through the sections completely Read the section with the work instructions through completely first before you commence with work. -
Page 43: Baking Out The Analyzer
Maintenance Fig. 18: Test report extract (example) View test report 1. Open your web browser. 2. In the address bar, enter: http://<IP ADDRESS>//testreport.pdf – In place of <IP ADDRESS>, enter the PrismaPro IP address. The test report PDF file opens. 9.3 Baking out the analyzer WARNING Risk of burns during baking out... -
Page 44: Checking The Filaments And Ion Source
2. If you do not achieve the required results by baking out the analyzer, check the filaments and the ion source. 3. In case the existing problem cannot be rectified by this, contact the Pfeiffer Vacuum service de- partment. 9.4 Checking the filaments and ion source... -
Page 45: Calibrating The Mass Scale
9.5 Calibrating the mass scale Pfeiffer Vacuum calibrates the HF/DC ratio of a PrismaPro so that only one mass can pass the quadru- pole filter at a given HF/DC ratio. The HF/DC ratio for each mass selected can be precisely determined by a fine calibration. -
Page 46: Selecting The Gas Mixture For The Mass Calibration
Maintenance Pfeiffer Vacuum has preset masses 1, 2, 4, 28, 86 in the default settings. The masses can be adjusted to the gas mixture with which you want to perform mass calibration by adding and deleting masses. However, masses 1 and 2 should not be deleted. -
Page 47: Replace Filament Unit
Before replacing the filament unit, you must also inspect and assess the rest of the ion source. Pfeiffer Vacuum recommends replacing the complete ion source in the event of damage, visible deposits or impurities, or signs of contamination (e.g. discoloration). -
Page 48: Fig. 19: Disassembly Of The Filament Unit
Maintenance Fig. 19: Disassembly of the filament unit 1 Nut (3×) Screw (3×) (M1.6, hex, stainless steel, gilt) (M1.6x4, flathead) 2 Lock washer (3×) Clamp (3x) (M1.6, for filament) 3 Brace (3×) Filament unit (old) Fig. 20: Inserting a new filament unit 1 Filament unit (new) Brace (3×) 2 Counterbore... -
Page 49: Filament Unit (Cross Beam Ion Source)
Maintenance Installing new filament unit Required tools ● Socket key (3.2 mm WAF) ● Screwdriver (flat, 1.6 mm) Required aids ● Analyzer installation tool Spare parts required ● Filament unit for open ion source with tungsten filaments or Y -coated iridium filaments 1. - Page 50 6. Carefully pull both filament holder and ceramic isolators away from the ion source. Installing new filament unit Renew filaments of both filament holders Pfeiffer Vacuum recommends always renewing both filament holders with filaments. Required tools ● Socket key (3.2 mm WAF) ●...
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Page 51: Filament Unit (Grid Ion Source)
Maintenance 9.6.3 Filament unit (grid ion source) Fig. 22: Replace filament unit 1 Filament unit Hood (3×) 2 Filament unit connection (3x) Ceramic isolator (3x) 3 Screw (3×) Stud bolts (3×) (M1.6, flathead) 4 Nut (3×) Support ring (M1.6, hex, stainless steel) 5 Circlip (3×) Support ring screw (3×) 6 Washer (3×) -
Page 52: Replacing The Ion Source
Maintenance 3. Place the new filament unit on the ion source stud bolts. 4. Install the ceramic isolators, hoods, washers, and circlips. 5. Install the nuts and tighten them with the socket key. 6. Loosen support ring screws using the screwdriver, and remove the support ring. 7. -
Page 53: Open Ion Source
Maintenance 9.7.1 Open ion source Fig. 23: Replacing the open ion source 1 Screw (3×) (M1.6×5, slotted, stainless steel, gilt) 2 Nut (3×) (rectangular) 3 Clamps for ion source supply (3×) 4 Clamps for filament unit (3×) 5 Ion source fixing screw (3x) (M2×3, crosshead, stainless steel, gilt) Replacing the ion source Required tools... -
Page 54: Cross Beam Ion Source
Maintenance Spare parts required ● Open ion source with tungsten filament or Y -coated iridium filament 1. Insert the analyzer in the installation tool. 2. Carefully remove the ion source from the transport packaging. 3. Carefully place the ion source onto the quadrupole rod system. 4. -
Page 55: Grid Ion Source
Maintenance Installing new ion source Required tools ● Screwdriver (flat, 3 mm) ● Crosshead screwdriver (Philips #1) ● Flat pliers Required aids ● Analyzer installation tool Spare parts required ● Cross beam ion source with tungsten filaments or Y -coated iridium filaments 1. - Page 56 Maintenance 4. Loosen and remove the ion source mount crosshead screws with the crosshead screwdriver. 5. Carefully pull the ion source away from the quadrupole rod system. Installing new ion source Required tools ● Screwdriver (flat, 3 mm) ● Crosshead screwdriver (Philips #1) ●...
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Page 57: Malfunctions
– Port 80 is open on the host computer. – There is no IP address conflict between the PrismaPro and another network device. 4. In case the existing problem cannot be rectified by this, contact the Pfeiffer Vacuum service de- partment. - Page 58 (see chapter “QMA 250 analyzer (Anode error) contacts”, page 22) Repair or replace the analyzer. Error in the electronic unit Send the QME to Pfeiffer Vacuum for repairs. (QME) High-frequency error Analyzer defective, check the Check the HF connections on the analyzer for short- HF connections circuits using a multimeter.
- Page 59 Focus error Focus voltage cannot be started Reset the electronic unit (QME). or maintained. (Focus error) Send the QME to Pfeiffer Vacuum for repairs. No spectra Emission is off. Switch on the emission. (No spectra) EM is in operation.
- Page 60 System grounding Make sure that the vacuum system is grounded. (High noise level) Error in the electronic unit Send the QME to Pfeiffer Vacuum for repairs. (QME) Electronic unit (QME) not at- Make sure that the electronic unit (QME) has been tached to the analyzer correctly completely pushed onto the analyzer .
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Page 61: Shipping
► Comply with the instructions for safe shipping. Decontamination subject to charge Pfeiffer Vacuum decontaminates products not clearly declared "Free of contamination" at your expense. Instructions for safe shipping ► Do not ship microbiological, explosive or radioactively contaminated products. -
Page 62: Recycling And Disposal
– Potentially contaminated components that come into contact with media 12.2 Dispose of a compact mass spectrometer Pfeiffer Vacuum compact mass spectrometers contain materials that you must recycle. 1. Dismantle the housing parts. 2. Dismantle all individual components and circuit boards. -
Page 63: Service Solutions By Pfeiffer Vacuum
We are always focused on perfecting our core competence – servicing of vacuum components. Once you have purchased a product from Pfeiffer Vacuum, our service is far from over. This is often exactly where service begins. Obviously, in proven Pfeiffer Vacuum quality. - Page 64 Service solutions by Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the provisions in the contamination declaration. a) Neutralize the product with nitrogen or dry air. b) Seal all openings with blind flanges, so that they are airtight.
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Page 65: Ordering Information
You can replace individual defective system components, such as electronic unit QME 250 or Analyzer QMA 250. Tuning the components Please be aware, that replaced electronic units or analyzers must be tuned to the existing components. Pfeiffer Vacuum recommends arranging for a Pfeiffer Vacuum Service Center to carry this out. Part number Short description... -
Page 66: Ion Sources And Filament Units For Qma 250 Analyzers
Ordering information Part number Short description Mass range Detector Ion source Filament mate- Wiring rial PT M25 431 QMA 250 F3 1-300 Faraday open Nickel PT M25 432 Ir-Y PT M25 433 QMA 250 M3 Faraday/EM PT M25 434 Ir-Y PT M25 435 Copper, silver-plated PT M25 436... -
Page 67: Tbl. 21: Small Parts Set (Open Ion Source)
Ordering information Parts set PT 163 544 Designation Quantity (pieces) Screw (M2×3, crosshead, stainless steel, gilt) Lock washer (slotted, stainless steel) Nut (M1.6, hex, stainless steel, gilt) Clamp (M1.6, for filament) Screw (M1.6x4, flathead) Clamp (M1.6, for ion source) Screw (M1.6×5, slotted, stainless steel, gilt) Tbl. -
Page 68: Technical Data And Dimensions
Technical data and dimensions 15 Technical data and dimensions 15.1 Technical data and dimensions (Faraday) Standard conditions All values were measured after a 30 minute heat-up phase under standard conditions as long as not specified otherwise. Parameter QMG 250 F1 QMG 250 F2 QMG 250 F3 Detector type Faraday... -
Page 69: Technical Data And Dimensions (Em / Faraday)
Technical data and dimensions Parameter QMG 250 F1 QMG 250 F2 QMG 250 F3 Digital inputs 5×, low active, low < +2 V; high > +3 V, ≤ +24 V Output voltage +24 V, max. 1 A (including current to +24 V output at standard control connection) Mounting orientation Venting requirements min. - Page 70 Technical data and dimensions Parameter QMG 250 M1 QMG 250 M2 QMG 250 M3 C/B ion source (Faraday) > 2 · 10 A/hPa > 1 · 10 A/hPa > 5 · 10 A/hPa Grid ion source (Faraday) > 1 · 10 A/hPa >...
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Page 71: Fig. 27: Dimensions (Em/Faraday | Open Ion Source)
Technical data and dimensions 417.1 10.5 169.9 Fig. 27: Dimensions (EM/Faraday | open ion source) 417.1 10.5 „A“ = Orientation of the 169.9 formation chamber 66.5 Fig. 28: Dimensions (EM/Faraday | cross beam ion source) A Formation room orientation 423.1 10.5 169.9 Fig. - Page 72 The product QMG 250 PrismaPro - conforms to the UL standard UL 61010-1:2012. - is certified to the CAN/CSA standard CAN/CSA C22.2 No. 61010-1-12. - conforms to the IEC standard YJBA IEC 61010-1:2010.
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Page 73: Declaration Of Conformity
DIN EN 61010-1:2011-07 DIN EN 61326-1:2013-07 DIN EN 55011:2009 + A1:2010 (Class A) CISPR 11:2009 + A1:2010 FCC, Title 47 CFR, Part 18, Class A Signature: Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germany (Daniel Sälzer) Asslar, 2020-01-06 Managing Director...
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