Pfeiffer Vacuum PrismaPro QMG 250 Translation Of The Original
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Pfeiffer Vacuum PrismaPro QMG 250 Translation Of The Original

Compact mass spectrometer
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OPERATING INSTRUCTIONS
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Translation of the Original
QMG 250 PRISMAPRO
®
Compact mass spectrometer

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Summary of Contents for Pfeiffer Vacuum PrismaPro QMG 250

  • Page 1 OPERATING INSTRUCTIONS Translation of the Original QMG 250 PRISMAPRO ® Compact mass spectrometer...
  • Page 2 These operating instructions describe all models and variants of your product. Note that your product may not be equipped with all features described in this document. Pfeiffer Vacuum constantly adapts its products to the latest state of the art without prior notice. Please take into account that online operating instructions can deviate from the printed operating instructions supplied with your product.

  • Page 3: Table Of Contents

    Foreseeable improper use Responsibilities and warranty Owner requirements Personnel qualification 2.8.1 Ensuring personnel qualification 2.8.2 Personnel qualification for maintenance and repair 2.8.3 Advanced training with Pfeiffer Vacuum Operator requirements Product description Scope of delivery System overview 3.2.1 Structure of the system 3.2.2 Analyzer QMA 250...
  • Page 4 10.1.4Calling software error messages from PV MassSpec 10.2 Contacts on QMA 250 and QME 250 10.3 Checking the QMA 250 analyzer Shipping Recycling and disposal 12.1 General disposal information 12.2 Dispose of a compact mass spectrometer Service solutions by Pfeiffer Vacuum Ordering information 4/86...
  • Page 5 14.4.3Set of small parts PT 163 543 for crossbeam ion source 14.4.4Set of small parts PT 163 534 for grid ion source Technical data and dimensions 15.1 General 15.2 Technical data PrismaPro QMG 250 F 15.3 Technical data PrismaPro QMG 250 M 15.4 Dimensions NRTL certification...
  • Page 6 Set of small parts PT 163 534 for grid ion source Tbl. 28: Conversion table: Pressure units Tbl. 29: Conversion table: Units for gas throughput Tbl. 30: Technical data PrismaPro QMG 250 F Tbl. 31: Technical data PrismaPro QMG 250 M 6/86...
  • Page 7 List of figures List of figures Fig. 1: Position of the stickers on the product Fig. 2: Main components of the PrismaPro Fig. 3: System overview Fig. 4: Analyzers with transport protection Fig. 5: Components of the analyzer QMA 250 with open ion source Fig.

  • Page 8: About This Manual

    PV MassSpec Declaration of conformity (part of these instructions) Tbl. 1: Applicable documents You can find these documents in the Pfeiffer Vacuum Download Center. 1.1.2 Variants This document applies to products with the following part numbers: Part number Designation PT M15 ...

  • Page 9: Target Group

    Electronic unit QME 250 You can find the part number on the rating plate of the product. Pfeiffer Vacuum reserves the right to make technical changes without prior notification. The figures in this document are not to scale. Dimensions are in mm unless stated otherwise.

  • Page 10: Pictographs

    About this manual Sequence of multi-part action steps The numerical list indicates an action with multiple necessary steps. 1. Step 1 2. Step 2 3..1.3.2 Pictographs The pictographs used in the document indicate useful information. Note Wear laboratory gloves Perform a visual inspection 1.3.3 Stickers on the product This section describes all the stickers on the product along with their meaning.

  • Page 11: Abbreviations

    Unshielded twisted pair (of wires in cable) Tungsten Web UI User Interface via web connection Tbl. 5: Abbreviations used 1.4 Trademark proof ● PrismaPro ® is a registered trademark of Pfeiffer Vacuum GmbH. ● Windows ® is a trademark of the Microsoft Corporation. 11/86...

  • Page 12: Safety

    Safety instructions according to product’s life stages All safety instructions in this document are based on the results of a risk assessment. Pfeiffer Vacuum has taken into account all the relevant life stages of the product. Risks during installation DANGER Danger to life caused by electric voltage on the QME electronic unit You may only attach the electronic unit to a correctly installed QMA analyzer (earth connection).
  • Page 13 Safety DANGER Danger to life caused by electric voltage on the analyzer During operation, dangerous voltage is present on the electrode system of the QMA analyzer. In un- favorable conditions, other parts installed in the vacuum chamber (e.g. gauges) may be exposed to this, and become dangerous to touch.
  • Page 14 Safety Risks during maintenance DANGER Danger to life due to electric voltage High voltages are present inside the device. When touching parts that are live, there is a risk of death. If there is visible damage, there is a risk of death when commissioning the device. ►...

  • Page 15: Safety Precautions

    Safety Risks during disposal WARNING Health hazard through poisoning from toxic contaminated components or devices Toxic process media result in contamination of devices or parts of them. During maintenance work, there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub- stances causes environmental damage.

  • Page 16: Proper Use

    ● Use with replacement or accessory parts that are inadequate or are not approved 2.6 Responsibilities and warranty Pfeiffer Vacuum shall assume no responsibilities and warranty if the operating company or a third party: ● disregards this document ● does not use the product for its intended purpose ●...

  • Page 17: Ensuring Personnel Qualification

    ─ Customer with Pfeiffer Vacuum service training ─ Pfeiffer Vacuum service technician 2.8.3 Advanced training with Pfeiffer Vacuum For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of courses and technical trainings. For more information, please contact Pfeiffer Vacuum technical training.

  • Page 18: Product Description

    Product description 3 Product description 3.1 Scope of delivery The scope of delivery includes the following parts: ● QMG 250 PrismaPro ─ Analyzer QMA 250 with transport protection and intermediate piece (EM variant only) ─ Electronic unit QME 250 ─ SP 250 Power supply unit ─...

  • Page 19: Fig. 2: Main Components Of The Prismapro

    The use of the optional IO 250 I/O module permits the use of additional interfaces. The QME 250 elec- tronic unit is available with the IO 250 already installed. Pfeiffer Vacuum can, however, also retrofit the QME 250 electronic unit with a IO 250.

  • Page 20: Analyzer Qma 250

    Analyzers with Faraday detector provide a residual gas analysis in the total pressure range > 10 hPa. Pfeiffer Vacuum supplies the analyzer QMA 250 F with Faraday cup in the open ion source version on- ly. The QMA 250 M is optionally available with open ion source, cross beam ion source, or grid ion source.

  • Page 21: Electronic Unit Qme 250

    Product description Type Description open ion source Standard ion source with maximum sensitivity Cross beam ion source for molecular beam applications Grid ion source for residual gas analysis in UHV (< 10 hPa) Tbl. 6: Ion sources for analyzer QMA 250 M 2 3 4 5 Fig.

  • Page 22: Pv Massspec Software

    Product description Fig. 6: QME 250 front panel: left standard, right with IO 250 Designation Explanation <AUX I/O> socket I/O interface (standard) <LAN> socket Ethernet connection (PC) <24 V = 30 W> socket Connecting socket for SP 250 <USB> socket USB connection for IO 250 <EXT I/O>...

  • Page 23: Ethernet (Lan)

    Product description Fig. 8: View on the mains part plug 1 V- 2 V- 3.3.2 Ethernet (LAN) The <LAN> connection is comprised of a 8-pin RJ-45 socket. RJ-45 green yellow Fig. 9: Ethernet connection 1 Transmission data (TD+) 4, 5, 7, 8 Not used 2 Transmission data (TD-) Reception data (RD-)

  • Page 24: Ext I/O

    Product description Relay The status relay output is active (closed) when the emission is switched on. ● Emission ON: pin 1 + pin 2 connected = Relay closed. ● Emission OFF: pin 1 + pin 2 not connected = Relay open. ●...

  • Page 25: Fig. 12: Connection Example: Digital Output Ext I/O

    Product description Analog output ● 8 16 bit analog output channels (analog output 0 to 7) ● Voltage range: 0 to 10 V Analog inputs ● 8 16 bit differential analog input channels (analog input 2 to 9) ● Voltage range: +/- 10 V Digital outputs ●...

  • Page 26: Tp Gauge

    3 Signal input (measuring signal 0 to +10 V DC) Supply voltage (+24 V DC) 3.3.6 USB The mini USB connection <USB> is reserved for use by Pfeiffer Vacuum service personnel, for service purposes. 3.4 Identifying the product You will need all the data from the rating plate to safely identify the product when communicating with Pfeiffer Vacuum.

  • Page 27: Operating Principle

    Product description 3.5 Operating principle The PrismaPro compact mass spectrometer is a quadrupole mass spectrometer system for qualitative and quantitative gas analysis within the high, and ultra-high vacuum range, for leak detection and to identify any trace contaminations. An electron beam ion source ionizes the neutral gas particles. A high-frequency electric quadrupole field separates the generated ions from one another according to their mass to charge ratio.

  • Page 28: Transport And Storage

    Transport and storage 4 Transport and storage 4.1 Transporting the product NOTICE Damage caused by incorrect transportation Transportation in unsuitable packaging, or failure to install all transport locks, can damage the prod- uct. ► Comply with the instructions for safe transportation. Packing We recommend keeping the transport packaging and original protective cover.

  • Page 29: Installation

    Installation 5 Installation 5.1 Installing PrismaPro DANGER Danger to life due to electric voltage High voltages are present inside the device. When touching parts that are live, there is a risk of death. If there is visible damage, there is a risk of death when commissioning the device. ►...

  • Page 30: Installing The Analyzer

    Installation NOTICE Property damage as a result of inadequate spatial conditions Inadequate spatial conditions will lead to property damage caused by short circuits between analyzer and wall. ► Observe the spatial conditions required for the PrismaPro. ► Always install the analyzer in flanges or pipes featuring an internal diameter ≥ 37 mm, and where possible >...
  • Page 31 Installation NOTICE Damage to the analyzer caused by external voltages and magnetic fields Never expose the analyzer electrode system to external voltages that are hazardous in the event of contact, as a result of galvanic connections, contact, flashover, plasma, ion or electron beams, etc. If such danger sources exist in the vacuum chamber, you must provide protective measures that safely rule out such influences.
  • Page 32 Installation Fig. 16: Fastening and grounding of analyzer 1 Marking of grounding connection with ground symbol Position of the screw heads 2 Grounding connection (M4) QMA 250 F QMA 250 M Fig. 17: Mounting aid and transport protection 1 Transport protection Mounting aid 2 Analyzer Procedure...

  • Page 33: Assemble The Electronic Unit

    Installation 5.3 Assemble the electronic unit DANGER Danger to life caused by electric voltage on the QME electronic unit You may only attach the electronic unit to a correctly installed QMA analyzer (earth connection). The 24 V supply line of the SP current supply may never be connected if the connection of the QMA Ana- lyzer is not screwed tight to the QME electronic unit.

  • Page 34: Connecting The Current Supply

    Prerequisite ● IO 250 installed Gauge type Plug Degas Pfeiffer Vacuum ActiveLine PCR 280 <TP GAUGE> PKR 251 / PKR 261 / PKR 360 / PKR 361 PBR 260 TPR 270 / TPR 271 / TPR 280 / TPR 281...

  • Page 35: Establishing A Network Connection

    NOTICE IP address conflicts when using multiple PrismaPro devices Pfeiffer Vacuum supplies each PrismaPro with the same default IP address. Simultaneous connec- tion of multiple PrismaPro devices with the same IP address leads to IP address conflicts in the net- work.

  • Page 36: Sub-Networks

    Installation The PrismaPro uses IPv4 IP addresses. IPv4 IP addresses consist of 32 bits in dotted decimal notation. They consist of four decimal numbers that are each separated from 0 to 255 by bots, for example: 192.168.1.100. Each part represents an octet. Normally, IP addresses comprise one network prefix and one host protocol.

  • Page 37: Connecting The Prismapro

    NOTICE IP address conflicts when using multiple PrismaPro devices Pfeiffer Vacuum supplies each PrismaPro with the same default IP address. Simultaneous connec- tion of multiple PrismaPro devices with the same IP address leads to IP address conflicts in the net- work.

  • Page 38: Installing Pv Massspec

    Password: PrismaPro. Fig. 18: Desktop shortcut Procedure 1. Open the directory in the Pfeiffer Vacuum Cloud. 2. Download the software. 3. Start the software installation by double-clicking " PVMassSpec_Installer.exe". 4. If necessary, acknowledge the User Account Control prompt with "Yes".

  • Page 39: Commissioning

    Commissioning 6 Commissioning 6.1 Commissioning the device Factory setting Pfeiffer Vacuum configures complete systems optimally at the factory. Therefore, do not change anything without good reason. Prerequisites ● System components correctly installed ● Vacuum- or system-related conditions satisfied ● Technical data observed ●...
  • Page 40 Commissioning Data transfer problem If the yellow LED of the Ethernet connection remains unlit, a problem has occurred during data transfer. Check the cable and components in the connection path, as well as the cor- rect PC configuration (software, firewall status etc.). Procedure As an alternative to operation with the PV MassSpec software, you can also operate the PrismaPro via the Web UI.

  • Page 41: Operation

    Operation 7 Operation 7.1 Using PrismaPro Web UI Detailed information on the use of PrismaPro Web UI can be found in the corresponding operating in- structions. 7.2 Use PV MassSpec Detailed information on the use of PV MassSpec can be found in the Help file for the software and in these operating instructions.

  • Page 42: Decommissioning

    Decommissioning 8 Decommissioning DANGER Danger to life due to electric voltage High voltages are present inside the device. When touching parts that are live, there is a risk of death. If there is visible damage, there is a risk of death when commissioning the device. ►...

  • Page 43: Maintenance

    The following will result in the loss of the warranty: ● Damage to or removal of a closure seal ● Opening the device during the warranty period Contact the Pfeiffer Vacuum Service Center in the event of process-related shorter mainte- nance intervals. First read through the sections completely Read the section with the work instructions through completely first before you commence with work.

  • Page 44: Maintaining The Analyzer Qma 250

    Maintenance Fig. 19: Excerpt of an exemplary a test report View test report 1. Open your web browser. 2. In the address bar, enter: http://<IP ADDRESS>//testreport.pdf – In place of <IP ADDRESS>, enter the PrismaPro IP address. The test report PDF file opens. 9.3 Maintaining the analyzer QMA 250 NOTICE Filament damage from incorrect handling...

  • Page 45: Visually Inspect The Qma 250 Analyzer

    Maintenance NOTICE Impairment from contamination and damage Touching the devices or components with bare hands increases the desorption rate and leads to in- correct measurements. Dirt (e.g. dust, fingerprints, etc.) and damage impair the function. ► During assembly and maintenance work on high or ultra high vacuum systems, always wear clean, lint-free and powder-free laboratory gloves.

  • Page 46: Tbl. 12: Connections Of The Filament And The Ion Source

    Maintenance Fig. 21: Connections of the filament and the ion source with clamps 1 U-clamp Well fitted connection 2 Screw Clamp parallel to U-clamp 3 Clamp not parallel to U-clamp Poorly fitted connection Good connection Poor connection ● Wire in corner of U- ●...

  • Page 47: Baking Out The Analyzer

    2. Check the filaments and the ion source if the desired result is not accomplished by baking out the analyzer. 3. Contact Pfeiffer Vacuum Service if you cannot resolve the existing problem by doing so. 9.4 Replace filament unit Visual inspection before replacing the filament unit Inspect and assess the complete ion source before replacing the filament unit.

  • Page 48: Replacing The Filament Unit Of The Open Ion Source

    Maintenance NOTICE Impairment from contamination and damage Touching the devices or components with bare hands increases the desorption rate and leads to in- correct measurements. Dirt (e.g. dust, fingerprints, etc.) and damage impair the function. ► During assembly and maintenance work on high or ultra high vacuum systems, always wear clean, lint-free and powder-free laboratory gloves.

  • Page 49: Fig. 23: Disassembling The Filament Unit Of The Open Ion Source

    Maintenance Fig. 23: Disassembling the filament unit of the open ion source 1 Nut (3×) Clamp (3×) (M1.6, hexagon, stainless steel, gold-plated) (M1.6, for filament) 2 Lock washer (3×) Filament unit 3 Brace (3×) Spring washer 4 Screw (3×) Fixing screw (M1.6×4, flat head) Disassembling the filament unit 1.

  • Page 50: Replacing The Filament Unit Of The Crossbeam Ion Source

    – Alternatively, enter "/mmsp/sensorIonSource/tPTripCount/set?0" in the web browser and con- firm with Enter. 9.4.2 Replacing the filament unit of the crossbeam ion source Renew filaments of both filament holders Pfeiffer Vacuum recommends always renewing both filament holders with filaments. Prerequisite ● PrismaPro deactivated Required tools ●...

  • Page 51: Replacing The Filament Unit Of The Grid Ion Source

    Maintenance Fig. 26: Support spring on the analyzer with crossbeam ion source 1 Support spring Disassembling the filament unit 1. Place the analyzer in the mounting aid. 2. Remove the support spring. 3. Hold the clamps with the flat pliers. 4.

  • Page 52: Fig. 27: Filament Unit Of The Grid Ion Source

    Maintenance Required spare parts ● Filament unit for grid ion source with tungsten filaments ● If necessary, set of parts PT 163 534 for the replacement of screws, nuts or clamps Fig. 27: Filament unit of the grid ion source 1 Filament unit Hood (3×) 2 Connection of filament unit (3×)

  • Page 53: Replacing The Ion Source

    Maintenance 9.5 Replacing the ion source NOTICE Impairment from contamination and damage Touching the devices or components with bare hands increases the desorption rate and leads to in- correct measurements. Dirt (e.g. dust, fingerprints, etc.) and damage impair the function. ► During assembly and maintenance work on high or ultra high vacuum systems, always wear clean, lint-free and powder-free laboratory gloves.

  • Page 54: Replacing The Cross Beam Ion Source

    Maintenance Fig. 28: Replacing the open ion source 1 Screw (3×) Clamp for the filament unit (3×) (M1.6×5, slot, stainless steel, gold-plated) 2 Nut (3×) Fixing screw of the ion source (3×) (rectangular) (M2×3, crosshead, stainless steel, gold-plated) 3 Clamp for the ion source supply (3×) Disassembling the ion source 1.

  • Page 55: Fig. 29: Replacing The Cross Beam Ion Source

    Maintenance Prerequisite ● PrismaPro deactivated Required tools ● Flat screwdriver, 1.5 mm ● Flat screwdriver, 3 mm ● Crosshead screwdriver, Philips #1 ● Torque wrench ● Flat pliers Required aid ● Mounting aid for the analyzer Required spare parts ● Crossbeam ion source with tungsten filaments or Y -coated iridium filaments ●...

  • Page 56: Replacing The Grid Ion Source

    Maintenance Installing the ion source 1. Place the analyzer in the mounting aid. 2. Carefully remove the ion source from the transport packaging. 3. Carefully place the ion source onto the quadrupole rod system. 4. Fasten the fixing screws of the ion source. –...

  • Page 57: Calibrating High Frequency And The Mass Scale

    9.6 Calibrating high frequency and the mass scale Pfeiffer Vacuum calibrates the HF/DC ratio of a PrismaPro such that only one mass can pass the quad- rupole mass filter at a given HF/DC ratio. The HF/DC ratio for each mass selected is precisely deter- mined by fine calibration.

  • Page 58: Attaining A Stable Operating Temperature For Prismapro

    Maintenance Mass [u] Gas used Mass position toler- 100 u 200 u 300 u ance [u] Peak width at 10 % of the peak height (resolution) ±0.05 0.5 ±0.15 0.5 ±0.15 0.5 ±0.15 0.9 ±0.05 0.9 ±0.05 0.9 ±0.05 FC-5311 Tbl.

  • Page 59: Perform Mass Calibration (Tune)

    Maintenance Fig. 32: Warning message with security prompt Fig. 33: New high frequency/reverse polarity Prerequisite ● PrismaPro at a stable operating temperature Required software ● PV MassSpec Procedure 1. Start PV MassSpec. 2. In the “Main” window, select: Configuration > Sensor: Hardware Configuration 3.

  • Page 60: Calibrating With A Test Gas Mixture

    Add or delete masses in or from the calibration table Pfeiffer Vacuum has preset the masses 1, 2, 4, 28, and 86 in the default settings. ► Adjust the masses for the gas mixture with which you want to perform mass calibration by adding and deleting masses.

  • Page 61: Malfunctions

    – There is no IP address conflict between the PrismaPro and another network device. 4. Check PV MassSpec-specific error messages in the help file for the software. 5. Contact Pfeiffer Vacuum Service if you cannot resolve the existing problem. 10.1.1 Remedying system and communication errors...

  • Page 62: 2Remedying Hardware Errors

    ● Replace the Ethernet card of the host com- puter is faulty puter. Ethernet interface of the elec- ● Contact Pfeiffer Vacuum Service. tronic unit (QME) is faulty Communication error (DSP) Incorrect DSP response detect- ● Reset the electronic unit (QME) by switch- ing off.
  • Page 63 Malfunctions Symptom / malfunction messages Possible causes Remedy High-frequency error Electronic unit (QME) not ● Contact Pfeiffer Vacuum Service. properly tuned to the ana- (RF error) lyzer Analyzer defective, HF ● Check the HF connections for short-circuit and in- connections open or sulation.
  • Page 64 ● Ensure that the flange or the pipe features an in- ner diameter of ≥ 37 mm, preferably > 39 mm. ● Replace the IS 250. Internal power supply failure Error in the electronic unit ● Contact Pfeiffer Vacuum Service. (QME) Tbl. 16: Hardware errors 64/86...

  • Page 65: 3Remedying Operating And Measuring Errors

    Peak detection error No peak for the target mass ● Load the settings from the test report. ● Contact Pfeiffer Vacuum Service. (Peak detection error) Peak for target mass too small/ ● Load the settings from the test report.

  • Page 66: 4Calling Software Error Messages From Pv Massspec

    (Poor peak shape) ● Replace the filament unit and/or the ion source. ● Replace the analyzer. ● Contact Pfeiffer Vacuum Service. System pressure too high ● Ensure that the pressure is below the maxi- mum operating pressure: < 5 × 10 hPa.

  • Page 67: Contacts On Qma 250 And Qme 250

    Malfunctions 10.2 Contacts on QMA 250 and QME 250 Fig. 34: Contacts on QMA 250 and QME 250 1 PP (partial pressure) 2 EM HV 3 Filament 1 Filament Common 4 Filament 2 Reserved 5 Anode Focus 6 RF- TP (total pressure) 7 GND 10.3 Checking the QMA 250 analyzer NOTICE...

  • Page 68: Tbl. 19: Measurements For Checking The Analyzer

    Malfunctions Measurement Pins Measured resistance Result Pin to ground all pins to GND (7 or 8) Ion source intact > 30 MΩ < 30 MΩ Ion source defective Pin to Pin > 30 MΩ Ion source intact All pins facing one another <...

  • Page 69: Shipping

    ► Comply with the instructions for safe distribution. Decontamination subject to charge Pfeiffer Vacuum decontaminates products not clearly declared "Free of contamination" at your expense. Instructions for safe shipping ► Do not ship microbiological, explosive or radioactively contaminated products.

  • Page 70: Recycling And Disposal

    – Potentially contaminated components that come into contact with media 12.2 Dispose of a compact mass spectrometer Pfeiffer Vacuum compact mass spectrometers contain materials that you must recycle. 1. Dismantle the housing parts. 2. Dismantle all individual components and circuit boards.

  • Page 71: Service Solutions By Pfeiffer Vacuum

    We are always focused on perfecting our core competence – servicing of vacuum components. Once you have purchased a product from Pfeiffer Vacuum, our service is far from over. This is often exactly where service begins. Obviously, in proven Pfeiffer Vacuum quality.
  • Page 72 Service solutions by Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the provisions in the contamination declaration. a) Neutralize the product with nitrogen or dry air. b) Seal all openings with blind flanges, so that they are airtight.

  • Page 73: Ordering Information

    Defective system components, such as the QME 250 electronic unit or the QMA 250 ana- lyzer can be replaced individually. Replaced electronic units or analyzers must be calibrated with the existing components. Pfeiffer Vacuum recommends arranging for a Pfeiffer Vacuum Service Center to carry out this necessary calibration.

  • Page 74: 3Filament Units

    Ordering information Part number Short description Mass range [u] Detector Ion source Filament Wiring PT M25 421 QMA 250 F2 1 – 200 Faraday open Nickel PT M25 422 Ir-Y PT M25 423 QMA 250 M2 Faraday/EM PT M25 424 Ir-Y PT M25 425 Copper, silver-plated...

  • Page 75: 2Set Of Small Parts Pt 163 544 For Open Ion Source

    Ordering information Part number Quantity Description (pieces) PT 163 504 SP 250 (external power supply pack with mains cable QMG 250 100–240 V(AC)/24 V, 80 W (DC)) PT 163 508 Socket key Filament unit PT 163 510 Installation tool QMA 250 PT 163 512 UTP patch cable, red, length 3 m, crossover connection QMG 250...

  • Page 76: Technical Data And Dimensions

    59.8 0.76 atm cm Tbl. 29: Conversion table: Units for gas throughput 15.2 Technical data PrismaPro QMG 250 F Standard conditions All values were measured after a 30 minute heat-up phase under standard conditions as long as not specified otherwise. Parameter...

  • Page 77: Technical Data Prismapro Qmg 250 M

    Other substances stainless steel, ceramic (Al ), glass, gold Tbl. 30: Technical data PrismaPro QMG 250 F 15.3 Technical data PrismaPro QMG 250 M Standard conditions All values were measured after a 30 minute heat-up phase under standard conditions as long as not specified otherwise.
  • Page 78 Technical data and dimensions Parameter QMG 250 M1 QMG 250 M2 QMG 250 M3 Vacuum required < 5 × 10 (max. operating pressure) Maximum underground cross-sensitiv- < 5 ppm < 65 ppm < 100 ppm ity at 2 u Detection limit (EM) with QME 250 (straight) Open ion source 3.0 ×...

  • Page 79: Dimensions

    Substances in contact with the media Filament Tungsten (W) or Yttrium oxide-coated iridium (Ir-Y Other substances stainless steel, ceramic (Al ), glass, gold Tbl. 31: Technical data PrismaPro QMG 250 M 15.4 Dimensions Dimensions in mm 361.1 10.5 169.9 Fig. 35:...

  • Page 80: Fig. 36: Dimensions Qmg 250 M / Open Is / Straight Qme 250

    Technical data and dimensions 417.1 10.5 169.9 Fig. 36: Dimensions QMG 250 M / open IS / straight QME 250 417.1 10.5 169.9 66.5 Fig. 37: Dimensions QMG 250 M / crossbeam IS / straight QME 250 A Formation room orientation 423.1 10.5 169.9...

  • Page 81: Fig. 39: Dimensions Qmg 250 F / Open Is / 90° Qme 250

    Technical data and dimensions 260.9 217.8 10.5 169.9 Fig. 39: Dimensions QMG 250 F / open IS / 90° QME 250 260.9 217.8 10.5 169.9 Fig. 40: Dimensions QMG 250 M / open IS / 90° QME 250 81/86...

  • Page 82: Fig. 41: Dimensions Qmg 250 M / Crossbeam Is / 90° Qme 250

    Technical data and dimensions 260.9 217.8 10.5 169.9 Fig. 41: Dimensions QMG 250 M / crossbeam IS / 90° QME 250 A Formation room orientation 260.9 217.8 10.5 169.9 Fig. 42: Dimensions QMG 250 M / grid IS / 90° QME 250 82/86...

  • Page 83: Nrtl Certification

    The product QMG 250 PrismaPro - conforms to the UL standard UL 61010-1:2012. - is certified to the CAN/CSA standard CAN/CSA C22.2 No. 61010-1-12. - conforms to the IEC standard YJBA IEC 61010-1:2010.

  • Page 84: Declaration Of Conformity

    DIN EN 61010-1:2011-07 DIN EN 61326-1:2013-07 DIN EN 55011:2009 + A1:2010 (Class A) CISPR 11:2009 + A1:2010 FCC, Title 47 CFR, Part 18, Class A Signature: Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germany (Daniel Sälzer) Aßlar, 2020-03-03 Managing Director...
  • Page 85 85/86...

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