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Summary of Contents for Pfeiffer Vacuum SPM 200
- Page 1 Operating Instructions incl. Manufacturer's declaration Sputter Process Monitor SPM 200 BG 805 210 BE / A (0207)
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Page 2: Product Identification
Product Identification In all communications with Pfeiffer Vacuum, please specify the information on the product nameplates. For convenient reference copy the information for all items of your system into the corresponding nameplate replicas in this document (® 2 6). Validity... -
Page 3: Table Of Contents
1.2 Personnel Qualifications 1.3 General Safety Instructions 1.4 Liability and Warranty 2 Technical Data 2.1 System Overview 2.2 Standards Implemented 2.3 Ambient Conditions 2.4 SPM 200 2.5 QME 200 2.6 Power Supply 2.7 Dimensions 2.8 Pin Assignment 3 Installation 3.1 Mechanic Installation 3.1.1 Installing the QMA... -
Page 4: Safety
Dirt prolongs the pumpdown process. Always wear clean, lint-free gloves and use clean tools when working in this area..please contact your nearest Pfeiffer Vacuum service center. The result is O.K. The result is not as expected. The lamp/display is lit. -
Page 5: Personnel Qualifications
Communicate the safety instructions to all other users. 1.4 Liability and Warranty Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the end-user or third parties · disregard the information in this document ·... -
Page 6: Technical Data
2 Technical Data 2.1 System Overview Note In all communications with Pfeiffer Vacuum, please specify the information on the product nameplates. For convenient reference copy the information for all items of your system into the corresponding nameplate replicas in this document. - Page 7 Power cable Software Quadstar QUADSTAR 422 QMS 422 Version: 6.xx SPM 200 - x Key-Nbr.: xxxx PT 882239 - T Date: Copyright (C) Accessories ® Comprising: Pumping system & [8] TMU 071 Turbomolecular drag pump, air cooled, with vent valve ®...
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Page 8: Standards Implemented
QME 0 … +40 °C 0 … +40 °C Relative humidity max. 80% up to 31 °C, linearly decreasing to 50% at 40 °C 2.4 SPM 200 SPM 200 Mass range 1 … 100 1 … 200 Detector type... -
Page 9: Qme 200
II (according to EN 61010) Weight 0.7 kg 2.0 kg By series connection of 2 110 kohm resistors, 1 %, in both lines, the range is extended to ± 10.24 V. BG 805 210 BE / A (0207) SPM 200.om... -
Page 10: Dimensions
2.7 Dimensions SP 200 SPM 200 BG 805 210 BE / A (0207) SPM 200.om... -
Page 11: Pin Assignment
If you are using the control and/or RS-232-C connection, install a screened cable to ensure electromagnetic compatibility. The shield should contact the connector case at one end. The other end should remain open or be grounded to prevent damaging compensating currents. BG 805 210 BE / A (0207) SPM 200.om... - Page 12 + 24 V DC RS-232-C control Case Screen Assignment 13-pin, male Reserve Extr Focus HV – Filament 1 Filament 2 Anode RF – WARNING RF + This connector carries hazardous voltages! Filament Common BG 805 210 BE / A (0207) SPM 200.om...
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Page 13: Installation
(grounding screw M4) to ground using a separate conductor. Make the ground connection with a yellow/green or an unisolated stranded copper conductor: · 2.5 mm² if mechanically protected (according to DIN VDE 110 T540) · 4.0 mm² if unprotected BG 805 210 BE / A (0207) SPM 200.om... - Page 14 Establish a flange connection between the analyzer and the process chamber or valve. Ž Flange the turbo- molecular drag pump to the analyzer (if not yet mounted). BG 805 210 BE / A (0207) SPM 200.om...
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Page 15: Installing The Qme
Connect the product according to the local regulations and ground it correctly. WARNING All electrical connections must have strain relief. Route the cables separately from EMI sources. BG 805 210 BE / A (0207) SPM 200.om... -
Page 16: Connecting The Qme
(Protection) is exceeded. They are turned on by the software when the total pressure is below the set power-off threshold (Protection). INTERNAL: The SEM and filament supplies are turned on and off by the software. BG 805 210 BE / A (0207) SPM 200.om... -
Page 17: Control Connection
Specifications and pin assignments ® External start of External start of measurement cycles with a floating contact between the signal measurement cycles lines EXT_RUN and GND. There are four control methods: BG 805 210 BE / A (0207) SPM 200.om... - Page 18 Signal: AI_CH 0 + ; AI_CH 0 – Þ AI - Channel 0 AI_CH 1 + ; AI_CH 1 – Þ AI - Channel 1 BG 805 210 BE / A (0207) SPM 200.om...
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Page 19: Connecting The Power Supply To The Prisma
• the air circulation is not impeded and the ambient conditions are met. Insert the outlet connector of the corresponding power supply into the 24 V= connector of the QME. BG 805 210 BE / A (0207) SPM 200.om... -
Page 20: Connecting The Pc
Switch on your PC and install the supplied Quadstar software. The RGA program is also loaded during installation ® & Quadstar [1]. The installation program creates the "SPM 200" group (if it does not exist yet). BG 805 210 BE / A (0207) -
Page 21: Operation
WARNING The power connector must be easily accessible. If this is not the case at the installation site, a power switch or connector must be provided at an easily accessible place. BG 805 210 BE / A (0207) SPM 200.om... -
Page 22: Configuration
Check mains voltage available and connection 24 V= ready ready not ready Contact Pfeiffer Vacuum service center ready Start Quadstar software ® & Quadstar [1]. 4.2 Configuration When the system is operated for the first time, it must be configured. -
Page 23: Maintenance
Unscrew the six nuts (4, 5), carefully remove the analyzer from the housing and insert it into the supplied mounting tool. Note Do not tilt the analyzer when removing it from the housing. 4, 5 1 2 3 BG 805 210 BE / A (0207) SPM 200.om... - Page 24 Mount the three nuts onto the set screws and tighten them with the socket wrench. Grip the U-sections with flat-nose pliers, introduce the electrical connection of the filament laterally at the U-sections, and tighten the screws. BG 805 210 BE / A (0207) SPM 200.om...
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Page 25: Qme
Replace the filter mat when it is decomposed or cannot be cleaned as described above. ΠDisconnect the 24 V power supply from the mains and detach all electrical connections from the QME. BG 805 210 BE / A (0207) SPM 200.om... -
Page 26: Tune" Of The Rf Generator
Tune LED of the QME. The LED flashes. In case of severe clockwise detuning, the LED is constantly lit after flashing for 2 s. In this case, begin with b). BG 805 210 BE / A (0207) SPM 200.om... -
Page 27: Optimizing The Sensitivity Of The Ion Source
Field Axis parameter as follows: Set the voltage to 5 V. Reduce the voltage until the resolution and peak form correspond the spectrum in the test report. The ion source is now optimized. BG 805 210 BE / A (0207) SPM 200.om... -
Page 28: Replacing The Qme
Installing the QME ® 2 15. Connecting the QME ® 2 16. Ž "TUNE" of the RF generator ® 2 26. Optimizing the sensitivity of the ion source 2 27. BG 805 210 BE / A (0207) SPM 200.om... -
Page 29: Accessories And Spare Parts
ARCNET board for PC/AT OPA 200 B5278503KT RS-232-C control Fiber-optic cable 10 m B51596152H other lengths on request A = Optional accessory, not supplied Z = Supplied accessory E = Spare part BG 805 210 BE / A (0207) SPM 200.om... -
Page 30: Disposal
Contaminated components (radioactive, toxic, caustic, or biological hazard etc.) must be decontaminated in accordance with the relevant national regulations, separated according to their materials, and recycled. Other components Such components must be separated according to their materials and recycled. BG 805 210 BE / A (0207) SPM 200.om... -
Page 31: Appendix
Establish the connection between the PC and the Prisma. Note For fiber-optic conductors with ength: < 750 m ® factory configuration > 750 m ® reconfiguration required ..Please contact your local Pfeiffer Vacuum service center. Ž Connection via HUB OHA 200 & OHA 200 [2]. -
Page 32: B: Literature
B: Literature & [1] www.pfeiffer-vacuum.de Operating Instructions Quadstar 422 BG 805 224 BE Pfeiffer Vacuum GmbH, D–35614 Asslar, Deutschland & [2] www.pfeiffer-vacuum.de Operating Instructions Optical Hub OHA 200 BG 805 055 BE Pfeiffer Vacuum GmbH, D–35614 Asslar, Deutschland & [3] www.sohard.de... -
Page 33: Declaration Of Contamination
Date and legally binding signature Company stamp This form can be downloaded Copies: from our website. Original for addressee - 1 copy for accompanying documents - 1 copy for file of sender BG 805 210 BE / A (0207) SPM 200.om... -
Page 34: Manufacturer's Declaration
Manufacturer's Declaration Sputter Process Monitor Product SPM 200 EU manufacturer's declaration as We herewith declare that the above product is intended for incorporation into a defined by the listed guidelines machine or for assembly with other machines into a system. Putting the equipment into operation is not permitted until evidence is given that the system into which the machine shall be installed is in accordance with the provisions of the guidelines. - Page 35 Notes BG 805 210 BE / A (0207) SPM 200.om...
- Page 36 Berliner Strasse 43 D–35614 Asslar Deutschland Tel +49 (0) 6441 802-0 Fax +49 (0) 6441 802-202 info@pfeiffer-vacuum.de Original: German BG 805 210 BD / A (0207) www.pfeiffer-vacuum.de bg805210be/ a...
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