Pfeiffer Vacuum Prisma 80 QMS 200 Operating Instructions Manual
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Pfeiffer Vacuum Prisma 80 QMS 200 Operating Instructions Manual

Pfeiffer Vacuum Prisma 80 QMS 200 Operating Instructions Manual

Quadrupole mass spectrometer
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Operating Instructions
Incl. Declaration of Conformity
Prisma™ 80
Quadrupole Mass Spectrometer
QMS 200
1
BG 805 204 BE / B
(0203)

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Summary of Contents for Pfeiffer Vacuum Prisma 80 QMS 200

  • Page 1 Operating Instructions Incl. Declaration of Conformity Prisma™ 80 Quadrupole Mass Spectrometer QMS 200 BG 805 204 BE / B (0203)

  • Page 2: Product Identification

    Product Identification In all communications with Pfeiffer Vacuum, please specify the information on the product nameplates. For convenient reference copy the information for all items of your system into the space provided below. QME 200 Pfeiffer Vacuum, D-35614 Asslar Typ:...

  • Page 3: Table Of Contents

    Contents Product Identification Validity Intended Use Trademarks 1 Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 General Safety Instructions 1.4 Liability and Warranty 2 Technical Data 2.1 Standards Complied With 2.2 Ambient Conditions 2.3 Prisma™ 80 2.4 QME 200 2.5 SP 200 2.6 Pin Assignment 3 Installation 3.1 Unpacking...

  • Page 4: Safety

    1 Safety 1.1 Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environmental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. The result is O.K. The result is not as expected.

  • Page 5: General Safety Instructions

    Communicate the safety instructions to all other users. 1.4 Liability and Warranty Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the end-user or third parties • disregard the information in this document •...

  • Page 6: Technical Data

    2 Technical Data Safety 2.1 Standards Complied QME/QMA EN 61010-1:1993 With IEC1010-1:1990 +A1:1992 Protection class I SP 200 DIN EN 60950 IEC 950, UL 1950 CSA 22.2 No. 234 Immunity EN 50082-2 Emission EN 50081-1 Operation Indoors only 2.2 Ambient Conditions Altitude max.

  • Page 7: Qme 200

    Measurement channels 2.4 QME 200 Measurement modes Scan analog, Scan Bargraph, MID Measurement cycles Single- / Multi-channel 1 … 9999 Cycles or Repeat Measurement data buffer 128 Kbytes MID dwell 10 ms … 60 s Measurement speed Scan Analog + Bargraph Peak 200 ms/u …...

  • Page 8: Pin Assignment

    2.6 Pin Assignment TalkStar does not support the gauge connection. Assignment control VACUUM tune ready RS-232-C control REL_1A D-Sub H-Density REL_1B 15-pin, female REL_2A REL_2B Case Shield TalkStar does not support this function. WARNING If this connection is used, a shielded cable is required for EMC reasons. The shield must contact the connector housing.
  • Page 9 Assignment 24 VDC +24 VDC VACUUM Case Screen tune ready RS-232-C control 3-pin, female DANGER This connection carries hazardous voltages. Assignment Reserve Extr Focus HV– Filament 1 Filament 2 Anode RF– 13-pin, male Filament Common BG 805 204 BE / B (0203) QMS200.oi...

  • Page 10: Installation

    3 Installation 3.1 Unpacking Store the transport safety devices and re-install them before transporting the product again. 3.2 Installation DANGER Voltages up to 330 VDC appear on the QMA 200 during operation. Other components in the vacuum chamber (e.g. gauges) may possibly be ex- posed to this voltage under unfavorable conditions.

  • Page 11: Space Requirements [Mm]

    3.2.1 Space Requirements [mm] QMA 200, QME 200 (100) DN 40 CF-F Caution The QMA 200 may only be installed in flanges or tubes with an internal diameter ≥37 mm, otherwise short circuits to the wall can occur. Note the required installation depth. Do not kink the cables. SP 200 3.2.2 Required Tools •...

  • Page 12: Installing The Qma

    3.2.3 Installing the QMA DANGER The analyzer flange must be properly grounded. • Connect it with all 6 screws to the properly grounded vacuum system. • If the vacuum system is not grounded, connect the QMA flange (grounding screw M4) to ground by means of a separate ground conductor. Establish this connection with yellow/green insulated or bare stranded copper wire: •...

  • Page 13: Installing The Qme

    3.2.4 Installing the QME DANGER The QME may be mounted only to a correctly installed QMA as the only ground connection is established via the QMA flange. The 24 V feeder line from the SP 200 must never be connected if the QMA is not screw fastened to the QME.

  • Page 14: Connecting The Sp 200 Power Supply To The Prisma

    3.3.1.1 Connection TalkStar does not support the gauge connection. 3.3.1.2 control Connection VACUUM tune ready RS-232-C control Digital input Digital outputs Analog inputs Analog outputs TalkStar does not Switching thresholds TalkStar does not TalkStar does not support this function. or e.g. open/close support this function.

  • Page 15: Connecting The Pc

    3.3.3 Connecting the PC VACUUM RS-232-C interface: Use the supplied 9-conductor null modem tune ready cable. (If required use the extension cable.) → & [1] RS-232-C control LAN interface: TalkStar does not support the LAN interface. 3.4 Installing the Software TalkStar is a 32 bit software and requires Windows™...

  • Page 16: Operation

    4 Operation 4.1 First Time Operation DANGER Caution: damaged product Putting a damaged product into operation can be extremely hazard- ous. In case of visible damages, make sure the product is not put into operation. DANGER Caution: line voltage Incorrectly grounded products can be extremely hazardous in the event of a fault.

  • Page 17: Software Operation

    Check the line voltage + power connection 24 VDC Ready for operation ready Not ready Contact Pfeiffer Vacuum Service Center ready TalkStar Software Start the TalkStar software in the Start menu under "Programs" – "TalkStar" or via the Desktop by clicking the icon.
  • Page 18 The Y axis can be switched from "Ion Current" to "Partial Pressure" and vice-versa. BG 805 204 BE / B (0203) QMS200.oi...
  • Page 19 Definition of mass dependent calibration factors The properties of the Prisma are accessed via the "Prisma 80" context menu. You can access the mass dependent calibration factors on the "Calibration Factors" page. Parameterizing in the When a recipe has been started and the measurement data are displayed, you can measurement data display access a parameter by double clicking the corresponding curve.
  • Page 20 Addition and removal of In the Measurement data display, all settings of the currently active recipe can be components / scans accessed by clicking the "Display Properties" button. On the "Tasks" page, com- ponents / scans can be added or removed. As soon as the new settings have been confirmed with OK, they are applied in the (current) measurement.

  • Page 21: Settings

    Shutting TalkStar down The context of "Devices" allows access to the device properties. On the "Common Parameters" page you can chose whether a warning message shall be displayed when TalkStar is finished while the emission is still If you are going to quit TalkStar only for a short time, preferably leave the emission on in order to obtain stable measurement readings immediately upon starting the program again.

  • Page 22: Maintenance

    5 Maintenance 5.1 QMA 5.1.1 Changing the Filament Skilled personnel Filaments are supplied as preassembled units. They should only be changed by qualified personnel. Caution Caution: dirt sensitive area Touching the product or parts thereof with one's bare hands increases the desorption rate.
  • Page 23 ” Open the packing tube of the spare filament assembly. Carefully lift off the support bracket while gripping the filament assembly at the base of the protective packing. Do not touch the filament, not even with gloved hands. Support bracket Spare filament Spare filament assembly...

  • Page 24: Qme

    5.2 QME 5.2.1 Cleaning the Housing DANGER Disconnect the 24 V power supply of the QME from the AC power source before any moist cleaning. A slightly damp cloth normally suffices for cleaning the outside of the unit. Do not use any aggressive or scouring cleaning agents.

  • Page 25: Tuning The Rf Generator

    5.2.4 Tuning the RF Generator Correct tuning assures optimum measurement accuracy over the entire mass range. The RF circuit has to be tuned: • upon exchange of the analyzer or electronics • when a corresponding error message is displayed. An annual tuning check is also recommended. Œ...

  • Page 26: Optimizing The Ion Source Sensitivity

    5.2.5 Optimizing the Ion When the Prisma is used for the first time, the factory parameter settings of the ion source are applied. TalkStar reads these parameter values when it starts Source Sensitivity communication with the Prisma. ΠStart TalkStar. In the tree, select "Recipes" and start "Tune Ionsource" with a double click.
  • Page 27 Ž If "Emission Error" is displayed several times: ò • Set the "Cathode" value to 100 V. • Set the "Emi Current" value to 0.1 mA. • Start the emission. • Increase the "Emi Current" value in small increments to 2 mA. ...

  • Page 28: Replacing The Qme

    5.2.6 Replacing the QME If the QME or QMA needs to be replaced, the procedure is the same as for the initial installation. The individual steps are: Œ Installing the QME → 2 13.  Connecting the QME → 2 13. Ž...

  • Page 29: Accessories And Spare Parts

    6 Accessories and Spare Parts Item Designation Ordering number Hexagon socket screw key M5 (size 4) N 5701 009 BC Hexagon socket screw M3×8 B 3079 191 X Lock washer B 3547 137 X Filter mat B 5099 154 FE D-Sub connector, complete 15 pin BG 442 639 -T...

  • Page 30: Returning The Product

    Contaminated products (e.g. radioactive, toxic, caustic or microbio- logical hazard) can be detrimental to health and environment. Products returned to Pfeiffer Vacuum should preferably be free of harmful substances. Adhere to the forwarding regulations of all in- volved countries and forwarding companies and enclose a duly com- pleted declaration of contamination (→...

  • Page 31: Appendix

    Appendix Literature & [1] www.pfeiffer-vacuum.de Communication Protocol Prisma™ 80 Quadrupole Mass Spectrometer BG 805 206 BE Pfeiffer Vacuum GmbH, D-35614 Asslar, Deutschland & [2] Brochure Partial Pressure Measurement in Vacuum Technology vznb01e1 BG 805 204 BE / B (0203) QMS200.oi...

  • Page 32: Declaration Of Contamination

    Declaration of Contamination The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted. Non-completion will result in delay. This declaration may only be completed (in block letters) and signed by authorized and qualified staff. Description of product Reason for return Type...

  • Page 33: Declaration Of Conformity

    Declaration of Conformity We, Pfeiffer Vacuum, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electrical equipment designed for use within certain voltage limits 73/23/EEC and the Directive relating to electromagnetic compatibility 89/336/EEC.
  • Page 34 Notes BG 805 204 BE / B (0203) QMS200.oi...
  • Page 35 Notes BG 805 204 BE / B (0203) QMS200.oi...
  • Page 36 Berliner Strasse 43 D–35614 Asslar Deutschland Tel +49 (0) 6441 802-0 Fax +49 (0) 6441 802-202 info@pfeiffer-vacuum.de Original: German BG 805 204 BD / B (0203) www.pfeiffer-vacuum.de bg805204be/ b...

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