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Ti interface
(continued)
Speed
20 µm system
0004
0020
0040
(5 µm)
(1 µm)
(0.5 µm)
10
10
10
10
10
10
10
10
8.1
10
10
6.75
10
9
4.5
10
8.1
4.05
10
6.48
3.24
10
4.5
2.25
10
3.37
1.68
4.2
0.84
0.42
40 µm system
0004
0020
0040
(10 µm)
(2 µm)
(1 µm)
20
20
20
20
20
20
20
20
16.2
20
20
13.5
20
18
9
20
16.2
8
20
12.96
6.48
20
9
4.5
20
6.74
3.36
8.4
1.68
0.84
Analogue speed
20 µm system - 10 m/s (−3dB)
40 µm system - 20 m/s (−3dB)
ATOM linear installation guide
Maximum speed (m/s)
0100
0200
0400
(0.2 µm)
(0.1 µm)
(50 nm)
6.48
3.24
1.62
5.4
2.7
1.35
3.24
1.62
0.81
2.7
1.35
0.675
1.8
0.9
0.45
1.62
0.81
0.405
1.29
0.648
0.324
0.9
0.45
0.225
0.67
0.338
0.169
0.16
0.084
0.042
Maximum speed (m/s)
0100
0200
0400
(0.4 µm)
(0.2 µm)
(0.1 µm)
12.96
6.48
3.25
10.8
5.4
2.7
6.48
3.24
1.62
5.4
2.7
1.34
3.6
1.8
0.9
3.24
1.62
0.8
2.58
1.296
0.648
1.8
0.9
0.45
1.34
0.676
0.338
0.32
0.168
0.084
1000
2000
4000
(20 nm)
(10 nm)
(5 nm)
0.648
0.324
0.162
0.54
0.27
0.135
0.324
0.162
0.081
0.27
0.135
0.068
0.18
0.09
0.045
0.162
0.081
0.041
0.13
0.065
0.032
0.09
0.045
0.023
0.068
0.034
0.017
0.017
0.008
0.004
1000
2000
4000
(40 nm)
(20 nm)
(10 nm)
1.296
0.648
0.324
1.08
0.54
0.27
0.648
0.324
0.162
0.54
0.27
0.136
0.36
0.18
0.09
0.324
0.162
0.082
0.26
0.13
0.064
0.18
0.09
0.046
0.136
0.068
0.034
0.034
0.016
0.008
Lowest recommended
counter input frequency
10KD
20KD
(MHz)
(2 nm)
(1 nm)
0.0654
0.032
0.054
0.027
0.032
0.016
0.027
0.013
0.018
0.009
0.016
0.0081
0.013
0.0065
0.009
0.0045
0.0068
0.0034
0.0017
0.0008
Lowest recommended
counter input frequency
10KD
20KD
(MHz)
(4 nm)
(2 nm)
0.013
0.064
0.108
0.054
0.064
0.032
0.054
0.026
0.036
0.018
0.032
0.0162
0.026
0.013
0.018
0.009
0.0136
0.0068
0.0034
0.0016
50
40
25
20
12
10
8
6
4
1
50
40
25
20
12
10
8
6
4
1
44
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