Cleaning the Sensor Window
Recommended Equipment
Procedure
Appendix D: The Sensor Window
Glass cleaning station with microscope within clean room.
Ionized air gun
Ionized air flood system, foot operated.
Swabs
Single drop bottle
E2 (Eclipse optic cleaning system)
Use localized ionized air flow on to the glass during sensor cleaning.
Blow off mobile contamination using an ionized air gun.
Place the sensor under the microscope at a magnification of 5x to
determine the location of any remaining contamination.
Clean the contamination on the sensor using one drop of E2 on a
swab.
Wipe the swab from left to right (or right to left but only in one
direction). Do this in an overlapping pattern, turning the swab after
the first wipe and with each subsequent wipe. Avoid swiping back and
forth with the same swab in order to ensure that particles are removed
and not simply transferred to a new location on the sensor window.
This procedure requires you to use multiple swabs.
Discard the swab after both sides of the swab have been used once.
Repeat until there is no visible contamination present.
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