Complete Ion-Source; Spare Parts; Filaments - MKS HPQ3 Hardware Manual

9. Spare Parts

Spare parts for your quadrupole analyser are available from your local MKS Instruments sales
office under the part numbers detailed below.
Filaments are supplied in pairs, either on a single plate or on two plates depending on the
analyser.
Replacement ion sources are supplied complete with filaments.

Filaments

Tungsten Thoriated Iridium Yttrium
842-070 842-071 842-073

Complete Ion-source

Thoriated
Fitted with - Tungsten Yttrium
Iridium
842-081 842-082 842-080
If you require a spare part not mentioned above, please contact your local MKS Instruments office
for help on obtaining a part number.
MKS Instruments UK Ltd 58
HPQ3 Hardware Manual – SP101019.101 October 2012