MKS HPS 947 Series Manuals

Manuals and User Guides for MKS HPS 947 Series. We have 1 MKS HPS 947 Series manual available for free PDF download: Operation And Maintenance Manual

MKS HPS 947 Series Operation And Maintenance Manual

MKS HPS 947 Series Operation And Maintenance Manual (40 pages)

Brand: MKS | Category: Controller | Size: 1 MB

Table of Contents

Table of Contents
5
Table of Contents

7
Package Contents

7
Symbols Used in this Manual

8
Safety Precautions

9
Specifications

11
- Controller
  11
  - Sensor Tube
    13
Feature and Control Locations

14
Typical Applications for the Series 947 CEP System

15
About the Sensavac Series 947 CEP Vacuum Sensor System

16
Installing the Series 947 CEP System

17
- CEP Sensor Installation
  17
  - Location
    17
  - Orientation
    17
  - Contamination
    17
  - Vacuum Connection
    17
  - CEP Controller Installation
    18
    
    Controller Mounting
    18
    
    Connecting the Sensor to the Controller
    19
    
    AC Power Cord
    20
    
    Fuse Replacement
    20
    
    Accessory Connector
    20
    
    Relay Inductive Loads and Arc Suppression
    21
Operating the Series 947 CEP System

22
- Reading Pressure
  22
  - Sensor Adjustment
    24
  - Calibrating for Zero and Atmosphere
    24
  - Adjusting the Set Points
    24
  - Venting to Atmosphere
    25
  - Buffered Analog Output
    25
  - Use with Computers
    25
- Leak Detection
  25
Using the Series 947 CEP System with Other Gases

28
- Nitrogen Equivalent Pressure
  28
- Calibrating for Other Gases
  29
Maintaining the Series 947 CEP System

30
Accessories

33
Product Warranty

35
Notes

36
Appendix A: How the Series 947 CEP System Works

37
- Theory of a Thermal Conductivity Sensor
  37
- Measurement Limits
  37
- The Series 947 CEP System Design Overview
  38
  - Bridge Amplifier
    38
  - Output
    38
  - Set Point Relays
    38
  - Comparator
    38

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