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Related Manuals for MKS HPQ2
Summary of Contents for MKS HPQ2
- Page 1 HPQ2 Manual SP101007.206 7 July 2009...
- Page 2 Conflat is a registered trademark of Varian Associates. Viton is a registered trademark of E.I. Dupont de Nemours & Co., Inc. All other brand or product names are trademarks or registered trademarks of their respective companies. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products...
- Page 3 This apparatus shall not be used in the residential, commercial, and light industrial environment unless further mitigation measures are taken. For advice please contact Spectra SensorTech Ltd. SIGNED: J.M.Higgins GENERAL MANAGER DATE: 7 July 2009 HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products...
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Page 4: Safety
There are no operator replaceable parts within the 24VDC power supply unit or the HPQ2 unit. Connectors The connectors for external circuits are for use only with MKS Spectra equipment, or equipment which has no accessible hazardous live parts. The external circuits must comply with the requirements of EN61010-1 section 6.6.1. -
Page 5: Ventilation
On the rear panel refers to: a. Read all instructions carefully before use. b. The control unit and signal ports are designed for connection to MKS Spectra accessories via MKS Spectra supplied cables. There are no accessible hazardous voltages or currents on these ports. - Page 6 5. Cables attached to all other ancillary signal and control ports must have a length of less than 3 metres. If greater length is required, MKS Instruments Ltd. must be contacted for technical guidance on possible EMC and safety issues.
- Page 7 WARNING-DANGEROUS VOLTAGES EXIST INSIDE THE EQUIPMENT 1. Maintenance functions must only be carried out by competent persons. 2. During the warranty period, faulty equipment must be returned to MKS Instruments, Spectra Products Ltd., unless special arrangements are made. 3. There are no user serviceable parts in the electronic equipment. Certain components are EMC and safety critical and must not be substituted.
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Page 8: Table Of Contents
7.10 Ion source, replacing and cleaning ............. 33 7.11 Removing the Ion Source............... 33 7.12 Cleaning the Source............... 34 7.13 Re-fitting the Ion Source..............35 8. Exploded Views ................36 8.1 Analyser Flange pin-outs ..............36 HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... - Page 9 8.2 Exploded View of the Analyser ............. 37 9. Ion Source Parameters..............39 10. Returning Your Unit for Service ............. 40 HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products...
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Page 10: Specification
1.0 inch (25.4mm) Ion Source Sensitivity 5 x 10-5 A/Torr Electron Energy 40 and 70 eV nominal (adjustable from PC) Emission Current 0.1 and 0.7mA nominal (adjustable from PC) Filaments 2, independent, tungsten HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... - Page 11 Windows V2.4 Power 24V DC 3A External supply included Serial Communication RS232, RS422, RS485 Baud Rate & Distance RS232C 9600 baud, 15 metres (50ft) RS422 /485 115k baud,1.2km (4000ft) Maximum RGA Heads HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products...
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Page 12: Introducing Hpq-2
RGA for Windows or Process Eye Professional. Note: one RS232 or RS422 port is required for each HPQ-2 or one RS485 port is required for each 18 HPQ-2 units. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... -
Page 13: Control Unit Overview
The HPQ-2 control unit contains no user serviceable parts and the only manual adjustment is the volume control for the audio, which is mounted on the rear panel. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... -
Page 14: The Rear Panel
9, 10, 11 (joined together) 0 volts (24 volt return) The power input is 24 volts DC 10%, 3 Amps max. The current drawn depends on the mass range and whether a filament is on or off. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... -
Page 15: Indicators
The indicator is lit when the SEM detector is active. This is not implemented on the HPQ-2 as there is no SEM detector fitted. Power The indicator is lit when power is supplied to the HPQ2 unit. Comms This indicator will flash to show a comms event to the HPQ-2 unit. If there are no active communications with the HPQ-2, this indicator will pulse at approximately 2Hz, depending on the RGA software version used. -
Page 16: Rs422/485 Plug And Socket
0 to +10V and four quasi-differential analog inputs 0 to ± with a maximum voltage on the return of 0.5V. ± 15V power outputs both fused at 100mA, fuses are self resetting. ± HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... -
Page 17: Analog Connector Pin Connections
Analog input 1 return Analog output Note that the total power consumption on each rail (+5V and 15V) for ± both the Analog and Digital I/O ports must not exceed 100mA. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... -
Page 18: Digital I/O Connector
Not Connected Not Connected Not Connected Note that the total power consumption on each rail (+5V and 15V) for ± both the Analog and Digital I/O ports must not exceed 100mA. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... -
Page 19: Reset Switch
The signal should be low for normal operation, high for a trip condition or if the protective equipment is switched off. The external trip circuitry is fully isolated from the system ground. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... -
Page 20: Analyser Installation
This section deals with getting the equipment you have just bought out of its box and installing it on your system. If you have any questions or experience any difficulties, contact your local MKS Spectra representative who will be able to help you. -
Page 21: Installing The Analyser
The standard 2 ¾ inch Conflat flange on the analyser can be sealed to the vacuum chamber with either a copper gasket or a Viton® gasket with a square cross section. Which one you choose depends on the ultimate pressure you expect in your system. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... - Page 22 Please do not throw shipping cover or the two piece foam packing surrounding it away. If at a future date you need to return the analyser for service it is vital it is shipped in its original packaging to avoid potentially very expensive damage. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products...
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Page 23: Control Unit Installation
If any problems arise due to electromagnetic emissions from this unit, first check the tightness of this clamp. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... -
Page 24: Electrical Connections
When the power is switched on the LED on the rear of the HPQ-2 will illuminate. Care should be taken in routing and securing all cables. Avoid running the serial cables next to mains power cables. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... -
Page 25: Baking
The analyser may be baked up to 250 C but care should be taken to avoid exposing the ceramic feedthrough to sudden changes in temperature. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... -
Page 26: Analyser Maintenance
This is the only part of your analyser that you will see under normal operating conditions. Comprising of an industry standard 2.75" Conflat® flange with an electrical feedthrough which carries the various supplies and signals to and from the quadrupole analyser. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... -
Page 27: Maintenance Of Your Analyser
These, being insulators, have a far more noticeable effect upon the performance of the source and therefore a more frequent cleaning program should be undertaken. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... -
Page 28: Failed Filaments
So, checking that the filament is open circuit is worth doing before going to the trouble of removing the analyser from your vacuum system. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... -
Page 29: Ohmmeter Analyser Checks
Now attach the first meter lead to pin 3 and check to pins 4 to 12. Proceed around the feedthrough until all possible connections have been checked. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... -
Page 30: Checking Filaments
Changing filaments is probably the most common maintenance procedure that has to be undertaken with quadrupole analysers but the analyser has been designed to make the task as quick and easy as possible. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... - Page 31 6. Make a note of which way round the filament assembly is fitted onto the ion source then lift away the filament assembly. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products...
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Page 32: Fitting New Filaments
4. Repeat step 3 for the other filament connection. 5. Check with your Ohmmeter for shorts. 6. Replace the analyser into your vacuum housing and again check for shorts or grounding to the outer vacuum housing. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... -
Page 33: Ion Source, Replacing And Cleaning
These may be partially obscured by connecting wires. 5. The source is now free from the rest of the assembly and can be removed and placed onto the bench. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... -
Page 34: Cleaning The Source
6. Re-fit the ion source by following the instructions on Page 35. If after two washes there are still deposits on the ion source it should be returned to an MKS service facility to be cleaned. HPQ2 SP101007.206 7 July 2009... -
Page 35: Re-Fitting The Ion Source
2. When the ion source is in place tighten the two socket set (Allen) screws in the source-mounting collar. 3. Tighten the screws in the three barrel connectors. 4. Re-fit the filament assembly by following the instructions on Page 32. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... -
Page 36: Exploded Views
8. Exploded Views 8.1 Analyser Flange pin-outs Pin Descriptions Connection Earth Source plate No connection Filament 1 Extraction plate Suppressor plate RF.1 Repeller plate / filament common No connection Filament 2 RF.2 Collector HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products... - Page 37 8.2 Exploded View of the Analyser HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products...
- Page 38 Ceramic Tube 2.7 x 1.7 x 4.0mm long Tube 0.076”dia x 0.056” id x .375” long Aly53 Alsint Tube 2mm x 1.2mm x 300mm long Nickel Wire 1mm dia. Stainless Steel Wire 22swg. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products...
- Page 39 0.39mA. This change results from changes to parts used in the ion source. An incorrect emission current setting will result in a loss of sensitivity. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products...
- Page 40 If you wish to return the instrument for service, please follow these simple guidelines. Contact your local MKS Spectra service facility to obtain a Returns Material Authorisation (RMA) number. We will require some instrument details, such as the serial numbers, date of purchase and a detailed fault description.
- Page 41 Please complete the form and fax or send by first class post to the appropriate MKS Spectra facility. Fax numbers and addresses can be found on the inside front page of this manual. Please ensure that we have this information before we receive the equipment.
- Page 42 1. The equipment has been securely packaged and labelled. 2. The carrier has been informed of the hazardous nature of the consignment. Signed: Title: Date: Phone No. HPQ2 SP101007.206 7 July 2009 MKS Instruments, Spectra Products...
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