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HPS 919 Series
MKS HPS 919 Series Manuals
Manuals and User Guides for MKS HPS 919 Series. We have
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MKS HPS 919 Series manual available for free PDF download: Operation And Maintenance Manual
MKS HPS 919 Series Operation And Maintenance Manual (54 pages)
Hot Cathode Ionization High Vacuum Sensor System
Brand:
MKS
| Category:
Industrial Equipment
| Size: 3 MB
Table of Contents
Table of Contents
6
Table of Contents
8
Package Contents
8
Symbols Used in this Manual
9
Symboles Utilisés Dans Ce Manuel
10
In dieser Betriebsanleitung Vorkommende Symbole
11
Símbolos Usados en el Manual
12
Symbols Found on the Unit
13
Symboles Apparaissant Sur L'appareil
14
Am Gerät Angebrachte Symbole
15
Símbolos que Aparecen en la Unidad
16
Safety Procedures and Precautions
17
Mesures de Sécurité Et Mises en Garde
19
Sicherheitsvorschriften und Vorsichtsmaßnahmen
21
Procedimientos y Precauciones de Seguridad
23
Specifications
25
Controller
25
Sensor
27
Feature and Control Locations
28
Typical Applications for the Series 919 Hot Cathode System
30
About the HPS Products Series 919 Hot Cathode Ionization System
31
Installing and Setting up the Series 919 Hot Cathode System
32
Hot Cathode Sensor Installation
32
Location
32
Orientation
32
Contamination
32
Vacuum Connection
32
Hot Cathode Controller Installation
32
Operating the Series 919 Hot Cathode System
37
Reading Pressure
37
Using the Analog Output
37
Adjusting the Set Points
38
Adjusting the Filament Protection Limit
39
Restarting the Filament
39
Local Method
39
Remote Method
39
Setting the Sensor Sensitivity
40
Sensor Sensitivity for Different Pressure Units
40
Degassing the Sensor
40
Preparing for Sensor Bakeout
41
Using the Series 919 Hot Cathode System with Other Gases
42
Adjusting System Sensitivity for Another Gas
42
Maintaining the Series 919 Hot Cathode System
44
Cleaning the Controller Front Panel
44
Servicing the Controller
44
Replacing a Power Fuse
44
Testing the Sensor
45
Accessories
46
Product Warranty
47
Appendix A: How the Series 919 Hot Cathode System Works
48
Theory of a Hot Cathode Ionization Sensor
48
HPS ® Sensors
48
Notes
49
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