User Manuals: MKS HPS 903 Series Vacuum Transducer

Manuals and User Guides for MKS HPS 903 Series Vacuum Transducer. We have 1 MKS HPS 903 Series Vacuum Transducer manual available for free PDF download: Operation And Maintenance Manual

MKS HPS 903 Series Operation And Maintenance Manual

MKS HPS 903 Series Operation And Maintenance Manual (36 pages)

Inverted Magnetron Transducer Cold Cathode Ionization Vacuum Sensor

Brand: MKS | Category: Accessories | Size: 0 MB

Table of Contents

Table of Contents
5
Package Contents
7
Symbols Used in this Manual
7
Safety Precautions
8
Specifications
9
Feature and Control Locations
11
Typical Applications for the Series 903 (IMT)
12
About the HPS TM Products Series 903 (IMT)
13
Installing the Series 903 (IMT)
14
- Location
  14
- Orientation
  14
- Contamination
  14
- Vacuum Connection
  15
- Electrical Connection
  15
- Input/Output Wiring
  15
- Relay Inductive Loads and Arc Suppression
  17
Operating the Series 903 (IMT)
18
- Starting the (IMT)
  18
- Reading Pressure
  18
- Equation for Converting Voltage to Pressure
  19
- Using the Set Point
  19
- Venting to Atmosphere
  20
- Analog-To-Digital (A/D) Converter
  20
- Preparing for Bakeout
  20
- Leak Detection
  20
Using the Series 903 (IMT) with Other Gases
22
- Calibrating for Other Gases
  23
Maintaining the Series 903 (IMT)
24
- Troubleshooting and Service
  24
- Contamination of the (IMT) Sensor
  25
  - Disassembly
    25
  - Cleaning
    25
  - Assembly
    26
Accessories/Part Replacement
28
Product Warranty
29
Notes
30
Appendix A: How the Series 903 (IMT) Works
31
Theory of a Cold Cathode Ionization Sensor
31
Notes
33

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