User Manuals: MKS HPS 945 Series Pirani Vacuum Sensor

User Manuals: MKS HPS 945 Series Pirani Vacuum Sensor

Manuals and User Guides for MKS HPS 945 Series Pirani Vacuum Sensor. We have 1 MKS HPS 945 Series Pirani Vacuum Sensor manual available for free PDF download: Operation And Maintenance Manual

MKS HPS 945 Series Operation And Maintenance Manual

MKS HPS 945 Series Operation And Maintenance Manual (38 pages)

Digital Pirani Vacuum Sensor System

Brand: MKS | Category: Vacuum Cleaner | Size: 0 MB

Table of Contents

Table of Contents
5
Table of Contents

7
Package Contents

7
Symbols Used in this Manual

8
Safety Precautions

9
Specifications

11
- Controller
  11
  - Sensor Tube
    12
Feature and Control Locations

13
Typical Applications for the Series 945 Pirani System

14
About the Sensavac® Series 945 Pirani Vacuum

15
Sensor System

15
Installing the Series 945 Pirani System

16
- Pirani Sensor Installation
  16
  - Location
    16
  - Orientation
    16
  - Contamination
    16
  - Vacuum Connection
    16
- Pirani Controller Installation
  17
  - Controller Mounting
    17
  - Connecting the Sensor to the Controller
    18
  - AC Power Cord
    18
  - Fuse Replacement
    19
  - Accessory Connector
    19
  - Relay Inductive Loads and Arc Suppression
    20
Operating the Series 945 Pirani System

21
- Reading Pressure
  21
- Sensor Adjustment
  22
- Calibrating for Zero and Atmosphere
  23
- Adjusting the Set Point
  23
- Venting to Atmosphere
  23
- Buffered Analog Output
  24
- Use with Computers
  24
- Leak Detection
  24
Using the Series 945 Pirani System with Other Gases

26
- Nitrogen Equivalent Pressure
  26
- Calibrating for Other Gases
  27
Maintaining the Series 945 Pirani System

28
Accessories

30
Product Warranty

31
Notes

32
Appendix A: How the Series 945 Pirani System Works

33
- Theory of a Thermal Conductivity Sensor
  33
- Measurement Limits
  33
- The Series 945 Pirani System Design Overview
  34
  - Amplifier
    34
  - Output
    34
  - Set Point Relays
    34
  - Comparator
    34
Notes

35

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