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Summary of Contents for MKS e-Vision+
- Page 1 ® ® e-Vision & e-Vision User Manual LP101013.100 01 January 2004...
- Page 2 +44 (0)1270 250150 Tel. International +44 (0)1270 251939 Fax. International Email: manual_info@mksinst.com e-Vision®, e-Vision+® and EasyView are registered trademarks of MKS Instruments, Spectra Products. Conflat® is a registered trademark of Varian Associates. Viton® is a registered trademark of E.I. Dupont de Nemours & Co., Inc.
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Page 3: Ec Declaration Of Conformity
EN 61326:1998 ELECTRICAL EQUIPMENT FOR MEASUREMENT, CONTROL & LABORATORY USE EN 61010-1:2001 SAFETY REQUIREMENTS FOR ELECTRICAL EQUIPMENT FOR MEASUREMENT, CONTROL & LABORATRY USE. SIGNED: T.R.ROBINSON GENERAL MANAGER DATE: 23 February 2004 e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... - Page 4 Warning The control unit must not be powered up when not connected to the analyser e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
- Page 5 5. Cables attached to all other ancillary signal and control ports must have a length of less than 3 metres. If greater length is required, MKS Instruments Ltd. must be contacted for technical guidance on possible EMC and safety issues.
- Page 6 WARNING-DANGEROUS VOLTAGES EXIST INSIDE THE EQUIPMENT 1. Maintenance functions must only be carried out by competent persons. 2. During the warranty period, faulty equipment must be returned to MKS Instruments, Spectra Products Ltd., unless special arrangements are made. 3. There are no user serviceable parts in the electronic equipment. Certain components are EMC and safety critical and must not be substituted.
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Page 7: Table Of Contents
4.4 Checking the system pressure ..........18 4.5 Mounting the analyser ............19 5. e-Vision Installation ...............20 5.1 Installation ...............20 5.2 Electrical connections ............20 5.3 IP Address................21 5.4 Re-setting the IP address...........21 6. Baking ..................22 e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... - Page 8 8.6 Source Alignment Jig ............37 8.5 Extract Plate ..............38 9. Returning Your Unit for Service ..........39 Support Contact Numbers ............39 10. FTP Mode ................42 e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
- Page 9 LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
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Page 10: Specification
Fuses Internal, not user replaceable Insulation Class I to IEC536 1.3 Environmental Temperature range 0 to 40 C, 80%RH non-condensing, operating and storage. Pollution degree 2 to EN61010 Enclosure IP20 to EN60529 e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... -
Page 11: Safety
There are no operator replaceable parts within the 24VDC power supply unit or the e-Vision / e-Vision+ unit. 1.5 Connectors The connectors for external circuits are for use only with MKS Spectra equipment, or equipment which has no accessible hazardous live parts. The external circuits must comply with the requirements of EN61010-1 section 6.6.1. -
Page 12: Ventilation
On the rear panel refers to: a. Read all instructions carefully before use. b. The control unit and signal ports are designed for connection to MKS Spectra accessories via MKS Spectra supplied cables. There are no accessible hazardous voltages or currents on these ports. -
Page 13: Introduction
The e-Vision is designed to be operated in several ways: From a host computer, which will normally be an IBM compatible PC running the MKS Spectra EasyView Windows software package. By browsing to the e-Vision using a Java enabled web browser. -
Page 14: Connections
The power input is 24 volts DC ± 10%, 2 Amps max. The current drawn depends on the mass range and whether a filament is on or off. The primary power circuit is galvanically isolated from the system ground. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... -
Page 15: Power Indicator
The external trip circuitry is galvanically isolated from the system ground. The maximum common mode voltage is 60V DC or peak AC, current limited to 2mA. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... -
Page 16: Reset Switch
If a problem occurs, or during specific operations such as a software download, it may be necessary to reset the e-Vision electronics. 3.7 Mode switch See Section 10 for function details. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... -
Page 17: Analyser Installation
This section deals with getting the equipment you have just bought out of its box and installing it on your system. If you have any questions or experience any difficulties, contact your local MKS Spectra representative who will be able to help you. -
Page 18: Installing The Analyser
If your chamber does not meet the above criteria, you should use a specially designed adapter so that the analyser may be mounted outside the chamber. Please contact your local MKS Spectra representative for assistance. 4.4 Checking the system pressure... -
Page 19: Mounting The Analyser
Do not discard the plastic shipping envelope or the two-piece foam packing surrounding it. If in the future you need to return the analyser for service, it should returned in its original packaging to avoid expensive damage. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... -
Page 20: E-Vision Installation
PC is required, use a crossover cable. If connecting via a network hub, a standard patch lead may be used. If required, connect your X-Trip signal cable to the socket marked “X-TRIP”. For signal options, see Section 3.5. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... -
Page 21: Ip Address
Immediately push and hold the “mode” button until the “status” indicator lights and flashes rapidly four times and is then extinguished. Press the “reset” button to reboot the unit using the default IP address. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... -
Page 22: Baking
In this case only the Faraday detector should be used, NOT the multiplier. The multiplier will not be damaged by high temperatures, providing it is not switched on. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... -
Page 23: Analyser Maintenance
LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... - Page 24 SKILLED PERSONNEL USING SPECIALIST TOOLS AND JIGS. UNDER NO CIRCUMSTANCES SHOULD THE FILTER ASSEMBLY BE DISMANTLED. IF YOU ARE IN ANY DOUBT WHEN SERVICING YOUR ANALYSER, PLEASE CONTACT YOUR LOCAL SERVICE CENTRE. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
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Page 25: Ohmmeter Analyser Checks
2. Connect the other lead to the analyser flange, you should read a short circuit. If not, you have either a serious problem, or more likely a faulty meter/meter leads. If after checking your meter, an open circuit still exists, contact your nearest MKS Spectra service center for advice. -
Page 26: Checking Filaments
8 to pin 10, which should show short-circuit as these are the filament connections. If any of the pins read short-circuit to another pin, contact your local MKS Spectra service center with the results of your tests and they will advise you how to proceed. -
Page 27: Changing Filaments
The analyser is fitted with dual filaments mounted on a single plate. Changing filaments is the most common maintenance event with quadrupole analysers. For this reason, the MKS Spectra analyser has been designed to make this task as quick and easy as possible. -
Page 28: Fitting New Filaments
6. Replace the analyser into your vacuum housing and again check for shorts or grounding to the outer vacuum housing. You are now ready to pump down and continue the operation of your quadrupole. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... -
Page 29: Ion Source Cleaning
Check the condition of the ion source. A second or third wash may be required Note: the ultra sonic bath may loosen some of the screws in the ion source, take care not to throw these away when discarding the alcohol. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... -
Page 30: Cleaning Or Replacing The Ion Source
Some method of holding the analyser securely in an upright position, a small bench vice is ideal. Pen and paper on which to make notes and sketches Refer to the exploded views of the Analyser shown on Page 32. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... -
Page 31: Removing The Ion Source
The Extract plate does not usually require service, as it is furthest away from potential contamination. However, if you wish to remove the Extract Plate, see the exploded diagram in Section 8.5. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... -
Page 32: Source Re-Assembly
11. The filament plate can now be re-fitted and the remaining connection made. Once again, check all connections with an Ohmmeter before returning the analyser back to the vacuum chamber. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... -
Page 33: Exploded Views
8.1 Analyser Flange pin-outs Pin Descriptions Connection Earth Source plate Electron Multiplier Filament 1 Extraction plate Suppressor plate RF.1 Repeller plate / filament common No connection Filament 2 RF.2 Collector e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... -
Page 34: Exploded View Of The Analyser
8.2 Exploded view of the Analyser Item Description Part Number (Dimensions in mm) Source Assembly Tungsten Fils 842-021 Source Assembly Thoria Fils 842-022 Screw M2 x 4 200902004 e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... -
Page 35: Filament Plate
Barrel Connector 305040214 Screw M2 x 4 200902004 Filament Plate Tungsten Fils LM508-015PL Filament Plate Thoria Fils LM508-020PL Filament Screen 305080594 Screw M1.6 x 4 (3 off) 200901604 e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... -
Page 36: Source Assembly
Plain washer SS M1.6 27031600 Screw M1.6 x 8 200901608 Ceramic Tube 2.8D x 3.5L 400020035 Ceramic Washer 4.7D x 1L 400010203 Repeller Plate Assembly LM508-018PL Source Plate Assembly LM508-017PL e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... -
Page 37: Source Alignment Jig
Remove the source by pushing it out from the bottom of the jig, do not pull out the source. Item Description Part Number (Dimensions in mm) Source Alignment Jig 842-029 e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... -
Page 38: Extract Plate
Plain washer SS M1.6 27031600 Screw M1.6 x 6 200901606 Ceramic Tube 2.8D x 2L 400020020 Ceramic Washer 4.7D x 1L 400010203 Extract Plate Assembly LM508-016PL Source Mounting Ring 305080603 e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products... -
Page 39: Returning Your Unit For Service
If you wish to return the instrument for service, please follow these simple guidelines. Contact your local MKS Spectra service facility to obtain a Returns Material Authorisation (RMA) number. We will require some instrument details, such as the serial numbers, date of purchase and a detailed fault description. - Page 40 Please complete the form and fax or send by first class post to the appropriate MKS Spectra facility. Fax numbers and addresses can be found on the inside front page of this manual. Please ensure that we have this information before we receive the equipment.
- Page 41 1. The equipment has been securely packaged and labelled. 2. The carrier has been informed of the hazardous nature of the consignment. Signed: Title: Date: Phone No. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
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Page 42: Ftp Mode
<Next> button to begin the update. Do not power down the unit during this process, unless told to do so. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
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