Capacitance manometer with devicenet digital interface (137 pages)
Summary of Contents for MKS e-Vision+
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® ® e-Vision & e-Vision User Manual LP101013.100 01 January 2004...
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+44 (0)1270 250150 Tel. International +44 (0)1270 251939 Fax. International Email: manual_info@mksinst.com e-Vision®, e-Vision+® and EasyView are registered trademarks of MKS Instruments, Spectra Products. Conflat® is a registered trademark of Varian Associates. Viton® is a registered trademark of E.I. Dupont de Nemours & Co., Inc.
EN 61326:1998 ELECTRICAL EQUIPMENT FOR MEASUREMENT, CONTROL & LABORATORY USE EN 61010-1:2001 SAFETY REQUIREMENTS FOR ELECTRICAL EQUIPMENT FOR MEASUREMENT, CONTROL & LABORATRY USE. SIGNED: T.R.ROBINSON GENERAL MANAGER DATE: 23 February 2004 e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
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Warning The control unit must not be powered up when not connected to the analyser e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
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5. Cables attached to all other ancillary signal and control ports must have a length of less than 3 metres. If greater length is required, MKS Instruments Ltd. must be contacted for technical guidance on possible EMC and safety issues.
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WARNING-DANGEROUS VOLTAGES EXIST INSIDE THE EQUIPMENT 1. Maintenance functions must only be carried out by competent persons. 2. During the warranty period, faulty equipment must be returned to MKS Instruments, Spectra Products Ltd., unless special arrangements are made. 3. There are no user serviceable parts in the electronic equipment. Certain components are EMC and safety critical and must not be substituted.
Fuses Internal, not user replaceable Insulation Class I to IEC536 1.3 Environmental Temperature range 0 to 40 C, 80%RH non-condensing, operating and storage. Pollution degree 2 to EN61010 Enclosure IP20 to EN60529 e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
There are no operator replaceable parts within the 24VDC power supply unit or the e-Vision / e-Vision+ unit. 1.5 Connectors The connectors for external circuits are for use only with MKS Spectra equipment, or equipment which has no accessible hazardous live parts. The external circuits must comply with the requirements of EN61010-1 section 6.6.1.
On the rear panel refers to: a. Read all instructions carefully before use. b. The control unit and signal ports are designed for connection to MKS Spectra accessories via MKS Spectra supplied cables. There are no accessible hazardous voltages or currents on these ports.
The e-Vision is designed to be operated in several ways: From a host computer, which will normally be an IBM compatible PC running the MKS Spectra EasyView Windows software package. By browsing to the e-Vision using a Java enabled web browser.
The power input is 24 volts DC ± 10%, 2 Amps max. The current drawn depends on the mass range and whether a filament is on or off. The primary power circuit is galvanically isolated from the system ground. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
The external trip circuitry is galvanically isolated from the system ground. The maximum common mode voltage is 60V DC or peak AC, current limited to 2mA. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
If a problem occurs, or during specific operations such as a software download, it may be necessary to reset the e-Vision electronics. 3.7 Mode switch See Section 10 for function details. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
This section deals with getting the equipment you have just bought out of its box and installing it on your system. If you have any questions or experience any difficulties, contact your local MKS Spectra representative who will be able to help you.
If your chamber does not meet the above criteria, you should use a specially designed adapter so that the analyser may be mounted outside the chamber. Please contact your local MKS Spectra representative for assistance. 4.4 Checking the system pressure...
Do not discard the plastic shipping envelope or the two-piece foam packing surrounding it. If in the future you need to return the analyser for service, it should returned in its original packaging to avoid expensive damage. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
PC is required, use a crossover cable. If connecting via a network hub, a standard patch lead may be used. If required, connect your X-Trip signal cable to the socket marked “X-TRIP”. For signal options, see Section 3.5. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
Immediately push and hold the “mode” button until the “status” indicator lights and flashes rapidly four times and is then extinguished. Press the “reset” button to reboot the unit using the default IP address. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
In this case only the Faraday detector should be used, NOT the multiplier. The multiplier will not be damaged by high temperatures, providing it is not switched on. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
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SKILLED PERSONNEL USING SPECIALIST TOOLS AND JIGS. UNDER NO CIRCUMSTANCES SHOULD THE FILTER ASSEMBLY BE DISMANTLED. IF YOU ARE IN ANY DOUBT WHEN SERVICING YOUR ANALYSER, PLEASE CONTACT YOUR LOCAL SERVICE CENTRE. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
2. Connect the other lead to the analyser flange, you should read a short circuit. If not, you have either a serious problem, or more likely a faulty meter/meter leads. If after checking your meter, an open circuit still exists, contact your nearest MKS Spectra service center for advice.
8 to pin 10, which should show short-circuit as these are the filament connections. If any of the pins read short-circuit to another pin, contact your local MKS Spectra service center with the results of your tests and they will advise you how to proceed.
The analyser is fitted with dual filaments mounted on a single plate. Changing filaments is the most common maintenance event with quadrupole analysers. For this reason, the MKS Spectra analyser has been designed to make this task as quick and easy as possible.
6. Replace the analyser into your vacuum housing and again check for shorts or grounding to the outer vacuum housing. You are now ready to pump down and continue the operation of your quadrupole. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
Check the condition of the ion source. A second or third wash may be required Note: the ultra sonic bath may loosen some of the screws in the ion source, take care not to throw these away when discarding the alcohol. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
Some method of holding the analyser securely in an upright position, a small bench vice is ideal. Pen and paper on which to make notes and sketches Refer to the exploded views of the Analyser shown on Page 32. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
The Extract plate does not usually require service, as it is furthest away from potential contamination. However, if you wish to remove the Extract Plate, see the exploded diagram in Section 8.5. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
11. The filament plate can now be re-fitted and the remaining connection made. Once again, check all connections with an Ohmmeter before returning the analyser back to the vacuum chamber. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
8.2 Exploded view of the Analyser Item Description Part Number (Dimensions in mm) Source Assembly Tungsten Fils 842-021 Source Assembly Thoria Fils 842-022 Screw M2 x 4 200902004 e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
Remove the source by pushing it out from the bottom of the jig, do not pull out the source. Item Description Part Number (Dimensions in mm) Source Alignment Jig 842-029 e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
If you wish to return the instrument for service, please follow these simple guidelines. Contact your local MKS Spectra service facility to obtain a Returns Material Authorisation (RMA) number. We will require some instrument details, such as the serial numbers, date of purchase and a detailed fault description.
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Please complete the form and fax or send by first class post to the appropriate MKS Spectra facility. Fax numbers and addresses can be found on the inside front page of this manual. Please ensure that we have this information before we receive the equipment.
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1. The equipment has been securely packaged and labelled. 2. The carrier has been informed of the hazardous nature of the consignment. Signed: Title: Date: Phone No. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
<Next> button to begin the update. Do not power down the unit during this process, unless told to do so. e-Vision and e-Vision+ LP101013.100 – 01 January 2004 MKS Instruments, Spectra Products...
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