MKS Baratron DMA Series Instruction Manual
  1. Manuals
  2. Brands
  3. MKS Manuals
  4. Measuring Instruments
  5. Baratron DMA Series
  6. Instruction manual
MKS Baratron DMA Series Instruction Manual

MKS Baratron DMA Series Instruction Manual

Capacitance manometer with devicenet digital interface
Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
MKS Baratron DMA Series Instruction Manual

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the Baratron DMA Series and is the answer not in the manual?

Questions and answers

Related Manuals for MKS Baratron DMA Series

Summary of Contents for MKS Baratron DMA Series

  • Page 1 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...
  • Page 2 130429-P1 REV C, 4/09 Instruction Manual ® MKS Baratron Type DMA Capacitance Manometer with DeviceNet™ Digital Interface Applicable to firmware revision 3.03 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 3 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.

  • Page 4: Table Of Contents

    Table of Contents Table of Contents Pressure Transducer Safety Information..................1 Symbols Used in This Instruction Manual..............1 Symbols Found on the Unit ....................2 Safety Procedures and Precautions .................3 Sicherheitshinweise für den Druckmeßumformer ...............5 In dieser Betriebsanleitung vorkommende Symbole ............5 Erklärung der am Gerät angebrachten Symbole .............6 Sicherheitsvorschriften und Vorsichtsmaßnahmen............7 Informations relatives à...
  • Page 5 Table of Contents Product Location and Requirements ................25 Operating Environmental Requirements............25 Safety Conditions....................25 Power Requirements ..................25 Setup ..........................26 Dimensions ......................26 Fittings .......................27 Mounting Instructions..................27 Electrical Information .....................28 Grounding ......................28 Connectors ......................28 Startup..........................29 Power-Up ......................29 Warm Up Time ....................30 Zero Adjustment ....................30 System Status.....................30 Reporting the Pressure Value................31 Suggested Pressures for Reading and Control ...........31...
  • Page 6 Table of Contents Network Status LED..................39 Data Rate and Node Address Switches..............39 Fault Conditions......................41 Minor Faults.......................41 Major Faults.......................41 Trip Points ........................42 Trip Point Hysteresis ..................42 Trip Point Settling Time ..................42 Labels..........................43 Band Label......................43 Serial Number Label ..................43 Chapter Four: Operation ......................45 General Information......................45 Operating Modes....................45 DeviceNet Messaging Protocol..................45...
  • Page 7 Table of Contents I/O Poll Messaging Instance Attributes .............61 Connection Object Supported Services .............64 S-Analog Sensor Object....................65 Customer Supported Attributes................65 Pressure Units Support..................69 Specific Services....................70 Device Configuration Object ..................71 Device Configuration Object Instance Attributes..........71 Device Configuration Object Supported Services ..........71 S-Device Supervisor Object....................72 Class Specific Attributes..................72 S-Device Supervisor Object Supported Services..........82...
  • Page 8 Table of Contents Appendix C: Command Summary ....................95 Attribute Summary ......................95 Supported Service Summary...................103 Reset ........................105 Recover ......................105 Abort ........................105 Get Attribute Single ...................106 Set Attribute Single....................106 Restore Default ....................107 Allocate Master/Slave..................107 Release Master/Slave ..................108 Lock ........................108 Unlock........................109 Perform Fine Zero Offset (0x4B) ..............109 Perform Coarse Zero Offset (0x32) ..............109 Appendix D: Example Messages ....................111 General Information......................111...
  • Page 9 Table of Contents viii Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 10 List of Figures List of Figures Figure 1: DeviceNet Transducer Object Model ................18 Figure 2: Top View Dimensions of the DMA Transducer ............26 Figure 3: Side View Dimensions of the DMA Transducer............26 Figure 4: Analog and Digital Pressure Calculation ..............37 Figure 5: Top Panel Components ....................38 Figure 6: Data Rate Rotary Switch .....................40 Figure 7: Node Address Rotary Switches ...................40...
  • Page 11 List of Figures Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 12 List of Tables List of Tables Table 1: Definition of Symbols Found on the Unit ................ 2 Tabelle 2: Bedeutung der am Gerät angebrachten Symbole............6 Tableau 3: Définition des symboles apparaissant sur l'unité ............10 Tabla 4: Definición de los símbolos hallados en la unidad............14 Table 5: Definitions ........................
  • Page 13 List of Tables Table 31: Poll Response Setup of the Produced_Connection_Path..........63 Table 32: Poll Response Assembly Instance 2 ................64 Table 33: Poll Response Assembly Instance 5 ................64 Table 34: Connection Object Supported Services ................ 64 Table 35: S-Analog Sensor Class Specific Attributes..............65 Table 36: Attribute ID # 03 Data Type ..................

  • Page 14: Pressure Transducer Safety Information

    0BPressure Transducer Safety Information 38BSymbols Used in This Instruction Manual Pressure Transducer Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.

  • Page 15: Symbols Found On The Unit

    39BSymbols Found on the Unit 0BPressure Transducer Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Table 1: Definition of Symbols Found on the Unit Earth (ground) Protective earth On (Supply) Off (Supply) IEC 417, No.5017 (ground)

  • Page 16: Safety Procedures And Precautions

    DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
  • Page 17 40BSafety Procedures and Precautions 0BPressure Transducer Safety Information OPERATE AT SAFE INLET PRESSURES Never operate at pressures higher than the rated maximum pressure (refer to the product specifications for the maximum allowable pressure). INSTALL A SUITABLE BURST DISC When operating from a pressurized gas source, install a suitable burst disc in the vacuum system to prevent system explosion should the system pressure rise.

  • Page 18: Sicherheitshinweise Für Den Druckmeßumformer

    1BSicherheitshinweise für den Druckmeßumformer 41BIn dieser Betriebsanleitung vorkommende Sicherheitshinweise für den Druckmeßumformer In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. Es macht auf einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bzw.

  • Page 19: Erklärung Der Am Gerät Angebrachten Symbole

    42BErklärung der am Gerät angebrachten Symbole 1BSicherheitshinweise für den Druckmeßumformer Erklärung der am Gerät angebrachten Symbole Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können. Tabelle 2: Bedeutung der am Gerät angebrachten Symbole Ein (Energie) Aus (Energie) Erdanschluß...

  • Page 20: Sicherheitsvorschriften Und Vorsichtsmaßnahmen

    Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor. Schicken Sie das Gerät zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daß alle Schutzvorrichtungen voll funktionsfähig bleiben.
  • Page 21 43BSicherheitsvorschriften und 1BSicherheitshinweise für den Druckmeßumformer Anweisungen zum Installieren der Armaturen! Alle Anschlußstücke und Armaturenteile müssen mit der Gerätespezifikation übereinstimmen, und mit dem geplanten Einsatz des Gerätes kompatibel sein. Der Einbau, insbesondere das Anziehen und Abdichten, muß gemäß den Anweisungen des Herstellers vorgenommen werden. Verbindungen auf Undichtigkeiten prüfen! Überprüfen Sie sorgfältig alle Verbindungen der Vakuumkomponenten auf undichte Stellen.

  • Page 22: Informations Relatives À La Sécurité Pour Le Transducteur De Pression

    2BInformations relatives à la sécurité pour le 44BSymboles utilisés dans ce manuel d'utilisation Informations relatives à la sécurité pour le transducteur de pression Symboles utilisés dans ce manuel d'utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel. Avertissement L'indication AVERTISSEMENT signale un danger pour le personnel.

  • Page 23: Symboles Apparaissant Sur L'unité

    45BSymboles apparaissant sur l'unité 2BInformations relatives à la sécurité pour le Symboles apparaissant sur l'unité Le tableau suivant décrit les symboles pouvant apparaître sur l'unité. Tableau 3: Définition des symboles apparaissant sur l'unité Marche Terre de protection (sous tension) Arrêt (hors tension) Terre (masse) (masse) IEC 417, No.5007...

  • Page 24: Mesures De Sécurité Et Précautions

    Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur l'appareil. Renvoyer l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité.
  • Page 25 46BMesures de sécurité et précautions 2BInformations relatives à la sécurité pour le VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS Vérifier attentivement toutes les connexions des composants pour le vide afin de garantir l'étanchéité de l'installation. EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES Ne jamais utiliser des pressions supérieures à...

  • Page 26: Medidas De Seguridad Del Transductor De Presión

    3BMedidas de seguridad del transductor de presión 47BSímbolos usados en este manual de instrucciones Medidas de seguridad del transductor de presión Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales.

  • Page 27: Símbolos Hallados En La Unidad

    48BSímbolos hallados en la unidad 3BMedidas de seguridad del transductor de presión Símbolos hallados en la unidad La tabla siguiente contiene los símbolos que puede hallar en la unidad. Tabla 4: Definición de los símbolos hallados en la unidad Encendido Apagado Puesta a tierra Protección a tierra...

  • Page 28: Procedimientos Y Precauciones De Seguridad

    No instale piezas que no sean originales ni modifique el instrumento sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe el instrumento al Centro de servicio y calibración de MKS toda vez que sea necesario repararlo o efectuar tareas de mantenimiento.
  • Page 29 49BProcedimientos y precauciones de seguridad 3BMedidas de seguridad del transductor de presión USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS PROCEDIMIENTOS DE AJUSTE Todos los accesorios del instrumento deben cumplir las especificaciones del mismo y ser compatibles con el uso que se debe dar al instrumento. Arme y ajuste los accesorios de acuerdo con las instrucciones del fabricante.

  • Page 30: Chapter One: General Information

    Type DMA Absolute Pressure Transducer with a DeviceNet™ Digital Interface is part of the MKS family of general purpose pressure transducers designed to provide accurate, reliable, and repeatable pressure measurements in the range from 1K Torr to as low as 100 mTorr Full Scale (FS).

  • Page 31: Devicenet Transducer Object Model

    50BIntroduction 4BChapter One: General Information DeviceNet Transducer Object Model The operating information for the DeviceNet digital interface is arranged as a collection of objects (Figure 1). Specific attributes within each object control specific network or instrument features and are referenced by a unique ID number. The object models and attributes for the DMA transducer are described in detail in Chapter Four: Operation, page 45.

  • Page 32: Definitions

    4BChapter One: General Information 50BIntroduction Definitions Table 5: Definitions Term Description Attribute All elementary data types are defined in [1] ARRAY A listing or grouping of elements of the same data type BOOL Boolean, which can take either a 0 or 1 value Control Area Network, which is a specification of physical layer signaling and media access control in DeviceNet Class Code...

  • Page 33: How This Manual Is Organized

    51BHow This Manual is Organized 4BChapter One: General Information Table 6 lists the documents referenced throughout this manual. Table 6: References Reference Number Document “DeviceNet Specification, Volume I: DeviceNet Communication Model and Protocol,” Open DeviceNet Vendors Association, Inc. Release 2.0. “DeviceNet Specification, Volume II: DeviceNet Profiles and Object Library,”...

  • Page 34: Customer Support

    52BCustomer Support Customer Support Standard maintenance and repair services are available at all of our regional MKS Calibration and Service Centers, listed on the back cover. In addition, MKS accepts the instruments of other manufacturers for recalibration using the Primary and Transfer Standard calibration equipment located at all of our regional service centers.
  • Page 35 52BCustomer Support 4BChapter One: General Information This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 36: Chapter Two: Installation

    Do not discard any packing materials until you completed your inspection and are sure the unit arrived safely. If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to MKS, obtain an RMA (Return Material Authorization) Number from the MKS Service...

  • Page 37: Generic Shielded Cable Guidelines

    For cables connecting to non-MKS products, you can purchase normal shielding or braided shielded cable assemblies from MKS in a nominal 10’ (3 m) length, terminating in flying leads (pigtail) fashion at both ends.

  • Page 38: Product Location And Requirements

    5BChapter Two: Installation 55BProduct Location and Requirements Product Location and Requirements The DMA unit meets the following criteria: • POLLUTION DEGREE 2 in accordance with IEC 664 • Transient overvoltages according to INSTALLATION CATEGORY II Operating Environmental Requirements • Ambient Operating Temperature: 0° to 50° C (32° to 122° F)—DMA (Ambient) 15°...

  • Page 39: Setup

    56BSetup 5BChapter Two: Installation Setup Dimensions Note All dimensions are listed in inches with millimeters referenced in parentheses. Tolerances are ± .03 [.76 mm] unless specified otherwise. Figure 2: Top View Dimensions of the DMA Transducer Figure 3: Side View Dimensions of the DMA Transducer Artisan Technology Group - Quality Instrumentation ...

  • Page 40: Fittings

    Mount the unit vertically if the model code has the form: DMAXXXXXXXXVXXX Mount the unit horizontally if the model code has the form: DMAXXXXXXXXHXXX Contact MKS if you require assistance. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 41: Electrical Information

    57BElectrical Information 5BChapter Two: Installation Electrical Information Grounding Ensure that your DMA unit, powered from the DeviceNet network, is grounded in accordance with the requirements in the ODVA “DeviceNet Specification,” Volume I [1]. Connectors The DMA transducer has one 5-pin micro-style digital communications connector and one 9-pin Type DE-9S analog interface connector on its top panel (Figure 2, page 26).

  • Page 42: Startup

    Note 1. The 9-pin Type DE-9S analog interface connector is a new style connector, that differs from those used on other MKS Baratron transducers. 2. The “Reserved” pin assignment refers to a pin with an internal connection that may be assigned a function in the future.

  • Page 43: Warm Up Time

    Network Status LED remains OFF until the device establishes communication with other devices on the network. Note If the power up LED sequence does not function properly, contact MKS for assistance. Warm Up Time After installation and power-up, allow the DMA to warm up, as specified below. Ensure your device is fully stabilized and then check the transducer zero to verify the proper output.

  • Page 44: Reporting The Pressure Value

    5BChapter Two: Installation 58BStartup Reporting the Pressure Value The system pressure can be reported at any time using the appropriate digital communication commands. The data will be reported as either an INT or REAL value dependent upon device settings. (e.g. Data Type attribute in the S-Analog Sensor Object) •...

  • Page 45: Adjusting The Zero

    59BAdjusting the Zero 5BChapter Two: Installation Adjusting the Zero The DMA unit uses a digital zero in the calculation of the reported pressure value. Figure 4, page 37, illustrates where the digital zero is incorporated into the calculation of the pressure value. The transducer’s calibrated, analog pressure signal is measured from pin 1 on the Type DE-9S interface connector (Table 10, page 29).

  • Page 46: Adjusting The Analog And Digital Zero

    5BChapter Two: Installation 59BAdjusting the Zero Adjusting the Analog and Digital Zero 1. Install the transducer in a system with a power supply/readout. 2. Power the transducer and allow it to warm up and stabilize. Note Before use, allow the DMA (Ambient) transducer to warm up for ½ hour. Allow the DMA (45°...
  • Page 47 59BAdjusting the Zero 5BChapter Two: Installation This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 48: Chapter Three: Overview

    6BChapter Three: Overview 60BGeneral Information Chapter Three: Overview General Information The DMA transducer contains a digital interface. All communication to and from the device is achieved using the DeviceNet network. Interfacing with your transducer is accomplished using the DeviceNet digital communications protocol, which gives you access to all features of the instrument.

  • Page 49: Signal Conditioner/Electronics

    62BSignal Conditioner/Electronics 6BChapter Three: Overview Signal Conditioner/Electronics The signal conditioner contains state-of-the-art, low impedance balanced bridge circuitry, self- compensated for thermal stability with ambient temperature changes. The output is a DC voltage that is then digitally linearized and calibrated against a pressure standard to produce both analog and digital outputs.

  • Page 50: Figure 4: Analog And Digital Pressure Calculation

    6BChapter Three: Overview 63BPressure Measurement Figure 4: Analog and Digital Pressure Calculation Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 51: Top Panel Components

    64BTop Panel Components 6BChapter Three: Overview Top Panel Components Figure 5 shows the top panel of your DMA transducer. Figure 5: Top Panel Components Digital Communications Connector The 5-pin male micro-style connector accepts the power input from the DeviceNet network and provides the interface for digital communications.

  • Page 52: Network Status Led

    6BChapter Three: Overview 64BTop Panel Components when the visual indicator is on. (Refer to Visual Indicator, page 77, for more information.) If a fault condition is detected, the Module Status LED illuminates a solid red. Table 14: Module Status LED Indicators LED State Meaning Power is OFF...

  • Page 53: Figure 6: Data Rate Rotary Switch

    64BTop Panel Components 6BChapter Three: Overview • If either switch is in the network (PGM) position at power-up, the data rate or address is read from the nonvolatile memory. Any changes to the values must be made over the network. Any changes in the rotary switch positions after power-up are ignored. •...

  • Page 54: Fault Conditions

    When this fault condition occurs, the Module Status LED illuminates solid red, in accordance with the ODVA “DeviceNet Specification,” Volume I [1]. Note When a major unrecoverable fault occurs, the device cannot communicate on the network and operation stops. Contact MKS for assistance. Table 16: Fault Conditions Module Status Fault Type...

  • Page 55: Trip Points

    66BTrip Points 6BChapter Three: Overview Trip Points The DMA transducer has two software trip points, which are maintained in the S-Analog Sensor Object: • Trip Point-Alarm, Low and High • Trip Point-Warning, Low and High The software trip point values are adjustable using digital communication commands such that when the pressure rises above one or below the other, the corresponding trip point changes state.

  • Page 56: Labels

    6BChapter Three: Overview 67BLabels Labels Note The drawings in Figures 8 and 9 are not drawn to scale. Band Label The band label, which is wrapped around the transducer body, lists the pinouts for the unit’s 5-pin micro-style digital communications connector (Table 9, page 28) and the 9-pin Type DE-9S analog interface connector (Table 10, page 29).
  • Page 57 67BLabels 6BChapter Three: Overview This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 58: Chapter Four: Operation

    7BChapter Four: Operation 68BGeneral Information Chapter Four: Operation General Information Note Use this manual with the ODVA “DeviceNet Specification,” Volume I and Volume II [1, 2]; and the SEMI Standards Common and Specific Device Models [3, 4, 5] to obtain a complete functional description of your device. Refer to Table 6, page 20, for a list of the documents referenced throughout this manual.

  • Page 59: Message Formats

    69BDeviceNet Messaging Protocol 7BChapter Four: Operation Note The DeviceNet messaging protocol is based on hexadecimal (base 16) math, rather than decimal (base 10) math. Descriptions in this chapter and the examples in Appendix D: Example Messages, page 111, assume a basic understanding of hexadecimal math.

  • Page 60: Can Identifier Field

    7BChapter Four: Operation 69BDeviceNet Messaging Protocol CAN Identifier Field The CAN Identifier Field is a single 11-bit field that defines the components of a DeviceNet connection (Table 17, page 48). This information is required for both explicit and I/O poll messaging connections.

  • Page 61: Can Data Field

    69BDeviceNet Messaging Protocol 7BChapter Four: Operation Table 17: CAN Identifier Field Group 2 Group 2 Message Node Address Message ID Type ID Hexadecimal Value—6-bits Fixed 2-bit value Fixed 3-bit value Destination Node Address Master’s Explicit Request Source Node Address Slave’s Explicit Response Destination Node Address Master’s I/O Poll Command...

  • Page 62: Table 18: Can Data Field

    7BChapter Four: Operation 69BDeviceNet Messaging Protocol The message body is a series of up to five, 8-bit fields that defines the specific explicit message. The information included in the message body varies, depending on whether the message is a request or a response. The explicit message body consists of the following three required and two optional components: Required: •...
  • Page 63 69BDeviceNet Messaging Protocol 7BChapter Four: Operation Transaction ID Bit The transaction ID (XID) bit is a 1-bit field that is essentially a placeholder with a fixed value of Node Address The node address is a 6-bit field that identifies the network address of the device as a hexadecimal value.

  • Page 64: Objects

    The attributes and services associated with each Object Model are defined throughout this chapter. Descriptions are supplied for the attributes and services that are either MKS-specific or require additional specifications beyond the DeviceNet and SEMI specifications [1, 2, 3, 4, 5]. A summary of the attributes is listed in Table 51, page 95.

  • Page 65: Table 19: Object Classes In The Dma Transducer

    70BObjects 7BChapter Four: Operation Table 19: Object Classes in the DMA Transducer Class Refer to Object Class Effect on Behavior Page Identity Supports the Reset services. Upon receipt of a Reset service request of any type, the Identity Object sends a Reset service request to the S-Device Supervisor.

  • Page 66: Identity Object

    * This information also is available—in a different format—in the S-Device Supervisor Object (see page 74, for more information). Vendor Attribute ID #01 reports the registered vendor supplying the device. MKS Instruments is identified as Vendor #36 (24 Device Type Attribute ID #02 reports the type of device on the network in accordance with the ODVA “DeviceNet Specification,”...

  • Page 67: Identity Object Supported Services

    71BIdentity Object 7BChapter Four: Operation Status Attribute ID #05 reports the current status of the device in accordance with the ODVA “DeviceNet Specification,” Volume II [2]. Serial Number Attribute ID #06 reports the serial number of the device in accordance with the ODVA “DeviceNet Specification,”...

  • Page 68: Devicenet Object

    7BChapter Four: Operation 72BDeviceNet Object DeviceNet Object The DeviceNet Object (Class Code 03 ) contains the attributes for defining the configuration and status of the physical DeviceNet network connections. Use this object to set or report the node address (network address), the data rate, and the bus-off interrupt. In addition, use this object to report how the messaging supported by the device is allocated.
  • Page 69 72BDeviceNet Object 7BChapter Four: Operation Node Address The Node Address (network address) can be set with a software command using standard DeviceNet protocol over the network, or manually using the two 10-position rotary switches located on the top of the unit. Refer to Data Rate and Node Address Switches, page 39, for more information.

  • Page 70: Devicenet Object Supported Services

    7BChapter Four: Operation 72BDeviceNet Object Data Rate Switch Adjustment Refer to Data Rate Switch, page 40, for complete information on adjusting this switch. Note In order to control the data rate directly from the switch, ensure the switch is set to an actual value at power up, and not to the network (PGM) position.

  • Page 71: Assembly Object

    73BAssembly Object 7BChapter Four: Operation Assembly Object The Assembly Object (Class Code 04 ) stores data and groups attributes from multiple objects, allowing data to or from each object to be sent or received using a single explicit messaging command. Two instances of the Assembly Object (Table 25) are supported with one instance attribute (Table 26, page 59) and one DeviceNet common service (Table 27, page 59).

  • Page 72: Assembly Object Instance Attribute

    7BChapter Four: Operation 73BAssembly Object Assembly Object Instance Attribute Table 26: Assembly Object Instance Attribute Attribute User Non- Factory ID # Data Mode Mode Volatile Data Default (hex) Description Type Access Access Memory Variable Setting Data ARRAY none none Data Attribute ID #03 reports the assembly data for the specified instance.

  • Page 73: Connection Object

    74BConnection Object 7BChapter Four: Operation Connection Object The Connection Object (Class Code 05 ) contains the attributes for defining the messaging connections in the device. Each connection is defined by the type of messaging (explicit or I/O) it supports and how the I/O connections publish attribute data. Your transducer supports explicit and I/O poll messaging as defined in the Predefined Master/Slave Connection Set [1].

  • Page 74: Explicit Messaging Instance Attributes

    7BChapter Four: Operation 74BConnection Object Explicit Messaging Instance Attributes Table 29: Explicit Messaging Instance Attributes Attribute Default ID # (dec) Attribute Name Value Description state Indicates the Explicit Messaging is in the Established state. instance_type Indicates this is an Explicit Messaging Connection.

  • Page 75: Table 30: I/O Poll Messaging Instance Attributes

    74BConnection Object 7BChapter Four: Operation Table 30: I/O Poll Messaging Instance Attributes Attribute Default ID # (dec) Attribute Name Value Description state Indicates the Poll Connection Object is in the Configuring state. instance_type Indicates this is an I/O Connection. transportClass_trigger Server/Transport Class 3.

  • Page 76: Table 31: Poll Response Setup Of The Produced_Connection_Path

    7BChapter Four: Operation 74BConnection Object ID # (dec) Value consumed_connection_path Empty No specified default. An implementation must choose an Application Object to reference by default and initialize this attribute accordingly. production_inhibit_time Default is no inhibit time. * Refer to the ODVA “DeviceNet Specification,” Volume II [2], for information on User and Calibration Mode access.

  • Page 77: Connection Object Supported Services

    74BConnection Object 7BChapter Four: Operation Table 32: Poll Response Assembly Instance 2 Data Byte Description Exception Status 16-Bit Pressure Class Code (hex) 0x30 0x31 Device Supervisor S-Analog Sensor Object Model Instance ID # (hex) 0x01 0x01 Attribute ID # (hex) 0x0C 0x06 Data Type...

  • Page 78: S-Analog Sensor Object

    7BChapter Four: Operation 75BS-Analog Sensor Object S-Analog Sensor Object The S-Analog Sensor Object (Class Code 31 ) contains the attributes for reporting the pressure values and for setting the variables used in the pressure calculation. The S-Analog Sensor Object also supports software alarm and warning trip points as descibed below. One instance of the S-Analog Sensor Object is supported with 25 instance attributes (refer to Table 35) and three DeviceNet services (refer to Table 39, page 70).

  • Page 79: Table 36: Attribute Id # 03 Data Type

    75BS-Analog Sensor Object 7BChapter Four: Operation Table 35: S-Analog Sensor Class Specific Attributes (continued) Attribute ID Non- Factory DeviceNet Access Volatile Default Description Data Type Rule Memory Setting (dec) (hex) 0x1F Averaging Time UINT U-Set/Get 0x20 Overrange INT or REAL U-Get 110% FS 0x21...

  • Page 80: Table 37: Status Attribute Values

    7BChapter Four: Operation 75BS-Analog Sensor Object PressurePFS = Attribute 0x77 Full Scale = Attribute 0x0A Gain = Attribute 0x0E OffsetB = Attribute 0x10 Status Attribute ID # 07 indicates the Alarm and Warning state of this object instance. Table 37: Status Attribute Values Definition High Alarm Exception: 0 = cleared, 1 = set...
  • Page 81 75BS-Analog Sensor Object 7BChapter Four: Operation Offset-B Customer Offset Attribute ID # 16 indicates an amount added to derive Value. The acceptable value for Offset B is ±2% of the Full Scale pressure value. This can be modified by the Zero_Adjust Service. The default is 0.

  • Page 82: Pressure Units Support

    7BChapter Four: Operation 75BS-Analog Sensor Object Note Hysteresis can only be set using DeviceNet digital communications commands. Warning Settling Time Attribute ID # 24 determines the time in milliseconds that the Value must exceed the Trip Point before the exception condition is generated. The default is 0. Averaging Time Attribute ID # 31 specifies the time in ms over which analog samples are averaged.

  • Page 83: Specific Services

    75BS-Analog Sensor Object 7BChapter Four: Operation Code Symbol Name Conversion Factor 1001 hex 4097 Counts Full Scale Counts 29788=100% Full Scale 1007 hex 4103 Percent % Full Scale 100.00 (Base % Full Scale) (pound-force)/(inch) 2 1300 hex 4864 0.0193368 (Base Torr) 1301 hex 4865 Torr...

  • Page 84: Device Configuration Object

    7BChapter Four: Operation 76BDevice Configuration Object Device Configuration Object Support added in firmware version AF (1.009). Not valid for previous versions. The Device Configuration Object (Class Code 6D ) contains the attributes for selecting the poll response that is returned with I/O poll messaging connections. One instance of the Device Configuration Object is supported with three instance attributes (Table 40) and three DeviceNet common services (Table 41, page 71).

  • Page 85: S-Device Supervisor Object

    Identity Object (refer to Table 20, page 53) in accordance with the ODVA DeviceNet Specification, Volume II [2]. In addition, the S-Device Supervisor Object includes attributes specific to the MKS transducer, in accordance with the SEMI Standards Common and Specific Device Models [3, 4, 5].
  • Page 86 7BChapter Four: Operation 77BS-Device Supervisor Object Table 42: S-Device Supervisor Class Specific Attributes (continued) Attribute ID DeviceNet Non-Volatile Factory Description* Data Type Access Rule Memory Default Setting (dec) (hex) 0x0F Alarm Enable BOOL U-Set/Get 0 (disabled) 0x10 Warning Enable BOOL U-Set/Get 0 (disabled) Attribute...

  • Page 87: Table 43: Device Status Attribute Values

    Manufacturer’ Name Attribute ID #05 reports the manufacturer of the DMA capacitance manometer using an ASCII string of up to 20 characters. The manufacturer of the unit is always reported as MKS Instruments, identified with the ASCII string “MKS Instruments”...

  • Page 88: Table 44: Exception Status Bit Map

    • Device Specific—specific to capacitance manometers • Manufacturer Specific—specific to the MKS unit The response is a byte structured as a bit mapped variable [3]. The transducer supports the expanded method of reporting exceptions. The bit map format is: Table 44 lists the bit map defining this variable.

  • Page 89: Table 45: Exception Detail Alarm Bytes

    77BS-Device Supervisor Object 7BChapter Four: Operation Table 45: Exception Detail Alarm Bytes Byte Description Number of Common Alarm Detail Bytes XXXXXXXX Common Alarm Detail Byte 0 XXXXXXXX Common Alarm Detail Byte 1 Number of Device Alarm Detail Bytes XXXXXXXX Device Alarm Detail Byte 0 XXXXXXXX Device Alarm Detail Byte 1 Number of Manufacturer Alarm Detail Bytes...
  • Page 90 7BChapter Four: Operation 77BS-Device Supervisor Object Alarm Enable This Boolean attribute (Attribute ID #15) is used to enable (1) or disable (0) the S-Device Supervisor object’s process of setting Alarm Exception bits. Disabled (default) Enabled When disabled, corresponding bits are never set; and, if they were set, disabling clears them. Also, alarm bit states are not retained;...
  • Page 91 77BS-Device Supervisor Object 7BChapter Four: Operation Note To switch between the two operating modes, you must use the Lock and Unlock services. Use the Lock service to place your device into the User Mode (refer to Lock, page 108). Use the password protected (1234 ) Unlock service to place your device into the Calibration Mode (refer to Unlock, page 109).

  • Page 92: Table 47: Exception Detail Alarm Map

    7BChapter Four: Operation 77BS-Device Supervisor Object Table 47: Exception Detail Alarm Map Byte Description Object Model Common Alarm 0 to 7 Least significant byte of Common Alarm Single Byte 2 Size Size (byte length) always 01 hex. Byte length always 02 hex Common [Byte 0] Internal Diagnostic Exception S-Device Supervisor...
  • Page 93 77BS-Device Supervisor Object 7BChapter Four: Operation Table 47: Exception Detail Warning Map (continued) Byte Description Object Model Common Warning 0 to 7 Byte length always 01 hex Single Byte 2 Size Common [Byte 0] Internal Diagnostic Exception S-Device Supervisor Microprocessor Exception S-Device Supervisor EEPROM Exception S-Device Supervisor...

  • Page 94: Table 48: Calibration Date Format

    7BChapter Four: Operation 77BS-Device Supervisor Object Last Calibration Date Attribute ID # 0x13 reports the date the device was last calibrated by the user. The response is formatted as a data structure of four bytes used to represent a calendar date, as listed in Table 48. Table 48: Calibration Date Format Byte # Description...

  • Page 95: S-Device Supervisor Object Supported Services

    77BS-Device Supervisor Object 7BChapter Four: Operation S-Device Supervisor Object Supported Services The S-Device Supervisor Object is supported by the seven DeviceNet services listed in Table 49. Refer to Supported Service Summary, page 103, for more information. Table 49: S-Device Supervisor Object Supported Services Service Parameter ID #...

  • Page 96: Chapter Five: Maintenance And Troubleshooting

    Troubleshooting Chart (Table 50, page 84). If the transducer performance does not improve and it is necessary to return the unit to MKS for service, obtain an ERA Number (Equipment Return Authorization Number) from any MKS Calibration and Service Center (listed on the inside back cover of this manual) before shipping.

  • Page 97: Troubleshooting

    (transducer to electronics Inspect cable and transducer. module). Replace, if necessary. Measurement Overpressure and/or a build-up Return to MKS for servicing or slowly goes of contamination in the transducer replacement. positive over time. measurement cavity. Unstable zero The ambient temperature may be Refer to Startup, page 29 to ensure output.

  • Page 98: Appendix A: Product Specifications

    9BAppendix A: Product Specifications 80BTroubleshooting Appendix A: Product Specifications Digital Communication Specifications Bus Addressing Master/slave information flow Data Rate Switch/Network Length One, 4-position user-adjustable switch: Software Override PGM (Programmable over the network) 125 Kb 500 m (1,640 ft) 250 Kb 250 m (820 ft) 500 Kb 100 m (328 ft)

  • Page 99: Electrical Specifications

    80BTroubleshooting 9BAppendix A: Product Specifications Electrical Specifications DMA (Ambient) DMA (45° C) DMA (80° C) CE Compliance Pending Specification EN61326 Electromagnetic EMC Directive 2004/108/EEC Compatibility Input Power Requirements Voltage +11 to +25 VDC * +11 to +25 VDC * +11 to +25 VDC * Current at Warm Up 200 mAmps (max) 700 mAmps (max)

  • Page 100: Environmental Specifications

    9BAppendix A: Product Specifications 80BTroubleshooting Environmental Specifications DMA (Ambient) DMA (45° C) DMA (80° C) Maximum External Case 50° C (122° F) 65° C (149° F) 50° C (122° F) Temperature 0° to 50° C 15° to 40° C 15° to 50° C Operating (32°...

  • Page 101: Performance Specifications

    80BTroubleshooting 9BAppendix A: Product Specifications Performance Specifications Accuracy Range (Torr) Standard Accuracy Optional (nonlinearity, hysteresis, and nonrepeatability) (% of Reading) (% of Reading) (% of Reading) DMA (Ambient) 1, 2, 5 0.25% 10, 20, 50, 100, 0.25% 0.15% 200, 500, 1000 DMA (45°...

  • Page 102: Physical Specifications

    9BAppendix A: Product Specifications 80BTroubleshooting Time Response Pressure Measurement Response Less than 30 ms with no digital filtering. Polled Communication Response 1 ms, maximum Media Compatibility Any gas compatible with Iconel 600 Series and 316 SS Physical Specifications Dimensions Diameter 3.13”...
  • Page 103 80BTroubleshooting 9BAppendix A: Product Specifications This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 104: Appendix B: Model Code Explanation

    10BAppendix B: Model Code Explanation 81BModel Code Appendix B: Model Code Explanation Model Code The options for your transducer are identified in the model code when you order the unit. The model code for your transducer is: Model Number (DMA) This designates the model number of the instrument as DMA.
  • Page 105 81BModel Code 10BAppendix B: Model Code Explanation Full Scale Range Ordering (mmHg/Torr) Code 1000 Engineering Units (X) The engineering units are indicated by a single letter code. Ordering Units Code Torr/mmHg mBar kiloPascal Pascal Fittings (XX) Several types of fittings are available, designated by a 2-character code. No additional parts are required.
  • Page 106 10BAppendix B: Model Code Explanation 81BModel Code Accuracy (X) The accuracy is specified by a single letter code. Ordering Accuracy Code 0.12% of Reading 45° C, 1.0 thru 1000 Torr 0.15% of Reading 45° C, 0.05 to 1.0 Torr 0.25% of Reading Ambient, 1.0 Torr thru 1000 Torr 45°...
  • Page 107 81BModel Code 10BAppendix B: Model Code Explanation Interface/Connector (X) The interface connector is designated by a single number code. Ordering Interface Connector Code DeviceNet/Micro Style, Male (CE) Firmware Version (XX) The firmware version is designated by a 2-character code. Ordering Firmware Version Code Version 3.03...

  • Page 108: Appendix C: Command Summary

    11BAppendix C: Command Summary 82BAttribute Summary Appendix C: Command Summary Attribute Summary Table 51 lists the attributes for the Object Models in your transducer by Class Code. For more information on each Object Model, refer to Chapter Four: Operation, page 45. Table 51: Attribute Summary Instance Attribute...
  • Page 109 82BAttribute Summary 11BAppendix C: Command Summary Table 51: Attribute Summary (continued) Class Code (hex) Instance Attribute Factory Object ID # ID # Default Default Model (hex) (dec) Attribute Name Value Description Setting none state Indicates the Explicit Connection Messaging is in the Established state.
  • Page 110 11BAppendix C: Command Summary 82BAttribute Summary Table 51: Attribute Summary (continued) Class Code (hex) Instance Attribute Factory Object ID # ID # Default Default Model (hex) (dec) Attribute Name Value Description Setting produced_ Refer to [1]. Connection connection_path_ length produced_ Empty Refer to [1].
  • Page 111 82BAttribute Summary 11BAppendix C: Command Summary Table 51: Attribute Summary (continued) Class Code (hex) Instance Attribute Factory Object ID # ID # Default Default (dec) Attribute Name Value Description Setting Model (hex) state Indicates the Poll none Connection Connection Object is in the Configuring state.
  • Page 112 11BAppendix C: Command Summary 82BAttribute Summary Table 51: Attribute Summary (continued) Class Code (hex) Instance Attribute Factory Object ID # ID # Default Default (dec) Attribute Name Value Description Setting Model (hex) watchdog_ Transition to the Timed none Connection timeout_action Out state.
  • Page 113 82BAttribute Summary 11BAppendix C: Command Summary Table 51: Attribute Summary (continued) Class Non- Attribute Factory Code (hex) Volatile ID # DeviceNet Data Access Default Object Memor Description Type Rule Setting Model (dec) (hex) 0x31 0x03 Data Type USINT U-Set/Get 0xC3 S-Analog (INT) Sensor...
  • Page 114 Device Type SHORT U-Get Supervisor STRING 0x04 SEMI Standard SHORT U-Get E54-0997 Revision Level STRING 0x05 Manufacturer’s SHORT U-Get MKS Instruments Name STRING 0x06 Manufacturer’s SHORT U-Get Model Number STRING 0x07 Software SHORT U-Get Current firmware Revision Level STRING revision...
  • Page 115 82BAttribute Summary 11BAppendix C: Command Summary Table 51: Attribute Summary (continued) Class Code (hex) Attribute Non- Factory Object ID # DeviecNet Access Mode Volatile Data Default Memory Variable Setting Model (dec) Description Data Type Rule Access S-Device Scheduled -32,767 to Supervisor Maintenance +32,767...

  • Page 116: Supported Service Summary

    11BAppendix C: Command Summary 83BSupported Service Summary Supported Service Summary Table 52 lists the services supported by the Object Models in your transducer by their ID number. It also lists the Object Models that support each service. The service parameters are defined on pages 106 to 110.
  • Page 117 83BSupported Service Summary 11BAppendix C: Command Summary Table 52: Supported Service Summary (continued) Service Parameter ID # Service Data Service Object (hex) Name Type(s) Type Description Models Set_Attribute_Single* USINT, Request Modifies the object Identity attribute. Attribute DeviceNet Data Type Connection Analog Input Output Pressure...

  • Page 118: Reset

    11BAppendix C: Command Summary 83BSupported Service Summary Table 52: Supported Service Summary (continued) Service Parameter ID # Service Data Service Object (hex) Name Type(s) Type Description Models Reset USINT Request Places the object into its Initializing state. Get_Attribute_Single USINT Request Reads the object attribute.

  • Page 119: Get Attribute Single

    83BSupported Service Summary 11BAppendix C: Command Summary Get Attribute Single The Get_Attribute_Single service (ID #0E) reads the value of an object instance attribute. This service is valid for every object in your device. Table 53 lists the parameters for this DeviceNet common service.

  • Page 120: Restore Default

    11BAppendix C: Command Summary 83BSupported Service Summary Restore Default The Restore_Default service (ID #15) restores attributes in the specified object to their factory default values. This service is valid for the Analog Input, Output Pressure, Device Configuration, Trip Point, and SAC Objects. Table 55 lists the parameters for this DeviceNet common service. Table 55: Restore Default Service Parameters Service Parameter...

  • Page 121: Release Master/Slave

    83BSupported Service Summary 11BAppendix C: Command Summary Allocation Choice Parameter The Allocation Choice parameter is specified within a single byte (Table 57). Each bit denotes an explicit and/or I/O poll connection(s) from the Predefined Master/Slave Connection Set that is to be allocated.

  • Page 122: Unlock

    11BAppendix C: Command Summary 83BSupported Service Summary Unlock The password protected Unlock service (ID #4E)—valid only for the S-Device Supervisor Object—places the device into the Calibration Mode, which enables you to modify certain read- only attributes of the device. Table 60 lists the parameters for this service. Table 60: Unlock Service Parameters Service Parameter...
  • Page 123 83BSupported Service Summary 11BAppendix C: Command Summary The method to issue the Coarse_Zero_Offset service request is shown below. Table 63: Method to Issue the Coarse_Zero_Offset Service Request Service Code Class Instance Service Data 0x32 0x31 0x01 None, a target of zero will be assumed. This service is valid only when the Raw Pressure Value is within –4 to +20% of the full scale range of the device.

  • Page 124: Appendix D: Example Messages

    The examples depict explicit messaging. • The examples are all nonfragmented message strings. • The node address of the MKS device (the Slave) is 05. • The node address of the master device is 01. • Spaces are shown for clarity only. Do not enter spaces in the actual message string.

  • Page 125: Example 1: Sending An Explicit Request Message

    Refer to Figure 11, step 1, page 113. This 11-bit field represents the fixed Group 2 Message ID (bits 10 and 9), the destination node address (the MKS device) as a hexadecimal number (bits 8 to 3), and the fixed Message Type ID for an explicit request (bits 2 to 0). The hexadecimal value of the CAN Identifier Field components is 42C 2.

  • Page 126: Figure 11: Explicit Request Message Components

    12BAppendix D: Example Messages 85BExplicit Messaging 000101 = 42C Step 1 GROUP 2 MESSAGE ID (fixed 2 bit hex value) IDENTIFIER FIELD DESTINATION MAC ID (= 5) (6 bit hex value) MESSAGE TYPE ID (fixed 3 bit hex value; explicit request shown) = 01 000001 Step 2...

  • Page 127: Example 2: Interpreting A Successful Explicit Message Response

    Refer to Figure 13, step 1, page 115. This 11-bit field represents the fixed Group 2 Message ID (bits 10 & 9), the source Node Address (the MKS device) as a hexadecimal number (bits 8 to 3), and the fixed Message Type ID for an explicit response (bits 2 to 0).

  • Page 128: Figure 13: Successful Explicit Message Response Components

    12BAppendix D: Example Messages 85BExplicit Messaging = 42B 000101 Step 1 GROUP 2 MESSAGE ID (fixed 2 bit hex value) IDENTIFIER FIELD SOURCE MAC ID (= 5) (6 bit hex value) MESSAGE TYPE ID (fixed 3 bit hex value; explicit response shown) = 01 000001 Step 2...

  • Page 129: Example 3: Interpreting An Explicit Message Error Response

    Refer to Figure 15, step 1, page 117. This 11-bit field represents the fixed Group 2 Message ID (bits 10 and 9), the source node address (the MKS device) as a hexadecimal number (bits 8 to 3), and the fixed Message Type ID for an explicit response (bits 2 to 0).

  • Page 130: Figure 15: Explicit Message Error Response Components

    12BAppendix D: Example Messages 85BExplicit Messaging = 42B 000101 Step 1 GROUP 2 MESSAGE ID (fixed 2 bit hex value) IDENTIFIER FIELD SOURCE MAC ID (= 5) (6 bit hex value) MESSAGE TYPE ID (fixed 3 bit hex value; explicit response shown) 000001 = 01 Step 2 MESSAGE HEADER...

  • Page 131: I/O Poll Messaging

    Refer to Figure 17. This 11-bit field represents the fixed Group 2 Message ID (bits 10 and 9), the destination node address (the MKS device) as a hexadecimal number (bits 8 to 3), and the fixed Message Type ID for an I/O request (bits 2 to 0). The hexadecimal value of the CAN Identifier Field components is 42D Artisan Technology Group - Quality Instrumentation ...

  • Page 132: Example 2: Interpreting An I/O Poll Response Message

    Refer to Figure 19, step 1, page 120. This 11-bit field represents the fixed Group 2 Message ID (bits 10 & 9), the source node address (the MKS device) as a hexadecimal number (bits 8 to 3), and the fixed Message Type ID for an explicit response (bits 2 to 0).

  • Page 133: Figure 19: Successful I/O Poll Response Message Components

    86BI/O Poll Messaging 12BAppendix D: Example Messages 2. Interpret the reported value of poll response #1. Refer to Figure 19, step 2, page 120. The reported value for the Status Byte (80 ) indicates that no exceptions are set. The Status Byte Bit map is shown in Table 44, page 75. The reported value for the 16-bit pressure value (FF 3F) indicates that the pressure is measured at 50% FS.

  • Page 134: Index

    13BIndex 86BI/O Poll Messaging Index Connectors DMA, 28 Accuracy, 93 DMA unit, 28–29 Alarms Customer support, 21 calibration expiration, 81 Allocation information, 57, 60, 107 Assembly Data format, 59 data format, 59 Device configuration object, 66–71 poll messaging, 58 Device manager object, 73–82 Assembly object, 58–59 Device type, 53, 71, 73 Attribute summary, 95–102...
  • Page 135 13BIndex user, 45, 53, 55, 58, 59, 71, 77, 78, 82, 95, 104, 108 Hardware revision level, 74 Model code, 43, 91–93 Hysteresis, definition of, 42 Mounting instructions DMA unit, 27 I/O poll messaging connections, 46 Identity object, 53–54 Network manager object, 55–57 Installation Category, 25 Non-volatile RAM, 51 Labels...
  • Page 136 13BIndex Returning the product, 21, 23, 83 Revision class attribute Vendor, 53 network manager object, 55 Visual indicator, 77 Run hours, 81 Warm up time, 30 Safety information, 1–16 Sensor, description of, 35 Serial number Zero adjustment, 30, 83 ASCII string, 74 digital (zero offset), 33 label, 43 Perform_Remote_Zero, 109...
  • Page 137 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...

Table of Contents