Capacitance manometer with devicenet digital interface (137 pages)
Summary of Contents for MKS Granville-Phillips Mini-Convectron 275 series
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Series 275 ® ® Granville-Phillips Series 275 Mini-Convectron Vacuum Gauge Module with Linear Analog Output Instruction Manual Instruction Manual Instruction manual part number 275539 Revision G - November 2016...
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Series 275 Mini-Convectron Module with both linear and non-linear analog output, no setpoint relays, and no digital display panel. 0 to 1 Torr linear analog output (0 to 10 Vdc) 1 mTorr to 1000 Torr nonlinear analog output (0.375 to 5.659 Vdc).
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Catalog numbers for Series 275 Mini-Convectron Modules with Linear Analog Output (CE Marked) Includes a 9-pin D subminiature electrical connector. Operating power: 13.6 Vdc to 26.5 Vdc. The 27585X series Mini-Convectron Modules have both linear and non-linear analog output, no setpoint relays, and no digital display panel. The 275330-XX series Mini-Convectron Modules are the same as the 27585X series, and are also RoHS compliant.
Failure to comply with the instructions violates standards of design, manufacture, and intended use of the module. Granville-Phillips and MKS Instruments, Inc. disclaim all liability for the customer's failure to comply with the instructions. • Read instructions – Read all instructions before installing or operating the product.
Chapter 1 Safety Instructions This manual contains caution and warning statements with which you must comply to prevent inaccurate measurement, property damage, or personal injury. NOTES: These instructions do not and cannot provide for every contingency that may arise in connection with the installation, operation, or maintenance of this product.
Introduction/Safety WARNING The fumes from solvents such as trichloroethylene, perchloroethylene, toluene, and acetone can be dangerous to health if inhaled. Use only in well ventilated areas exhausted to the outdoors. Acetone and toluene are highly flammable and should not be used near an open flame or energized electrical equipment.
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Chapter 1 WARNING If accurate conversion data is not used, or is improperly used, a potential overpressure explosion hazard can be created under certain conditions. Using the N calibration to pressurize a vacuum system above about 1 Torr with certain other gases can cause dangerously high pressures which may cause explosion of the system.
Service Guidelines Some minor problems are readily corrected on site. If the product requires service, contact the MKS, Granville-Phillips Division Technical Support Department at 1-303-652-4400 or 1-800-776-6543 for troubleshooting help over the phone. If the product must be returned to the factory for service, request a Return Material Authorization (RMA) from Granville-Phillips.
Introduction/Safety Analog Outputs Bridge Output: Analog Output 0.375 to +5.659 Vdc for 0 to 1000 Torr of N , non-linear 0 to 1333 mbar of N , non-linear –1 0 to 1.33 x10 kPa of N , non-linear Linear Output: (1 Ohm output 0.0 to +10 Vdc minimum for 0 to 1000 mTorr of N impedance)
Chapter 2 Installation The Mini-Convectron Module contains a Convectron convection-enhanced Module Components Pirani heat-loss gauge. WARNING Using the module to measure the pressure of flammable or explosive gases can cause a fire or explosion resulting in severe property damage or personal injury. Do not use the Mini−Convectron Module to measure the pressure of flammable or explosive gases.
Chapter 2 WARNING Failure to use accurate pressure conversion data for N or air to other gases can cause an explosion due to overpressurization. If the module will measure any gas other than N or air, before putting the module into operation, adjust the setpoint relays for the process gas that will be used.
Installation For proper operation of the module above 1 Torr, orient the module so the Orientation of the Module axis is horizontal (see Figure 2-1). Although the Convectron gauge will read correctly below 1 Torr with the module mounted in any position, inaccurate readings will result at pressures above 1 Torr if the module axis is not horizontal.
Chapter 2 Step 2 Attach the Module to the Vacuum Chamber Attach the module vacuum chamber fitting to its mate on the vacuum chamber. CAUTION Twisting the module to tighten the fitting to the vacuum chamber can damage the module’s internal connections. •...
Installation To minimize the possibility of leaks with ConFlat flanges, use high strength ConFlat flange stainless steel bolts and a new, clean OFHC copper gasket. Avoid scratching the seal surfaces. To avoid contamination, install metal gaskets. a. Finger tighten all bolts. b.
Chapter 2 Grounding WARNING Improper grounding could cause product failure, property damage, or serious personal injury. To reduce the risk of product failure, property damage, or serious personal injury, follow ground network requirements for the facility. • Maintain all exposed conductors at earth ground. •...
Installation WARNING Failure to use accurate pressure conversion data for N or air to other gases can cause an explosion due to overpressurization. Step 4 Calibrate the Convectron Gauge Calibration improves the accuracy and repeatability of the Convectron gauge. An atmospheric calibration is performed on the Convectron gauge, using N , at the factory before the module is shipped.
Installation The FULL SCALE adjustment calibrates the linear analog output voltage for Set the FULL SCALE Adjustment the specific gas-type being used in the vacuum chamber. There are 2 methods to set the FULL SCALE adjustment. 1. Use another gauge that is gas-independent and known to be accurate: a.
Chapter 3 Operation This chapter explains how to operate the Mini-Convectron Module with a linear analog output. Calibrating the Convectron Gauge, and using the Convectron Gauge with gases other than N or Air are explained. –4 The module measures gas pressures from 1 x 10 Torr to 1000 Torr.
Chapter 3 As vacuum chamber pressure decreases, the number of molecules in the vacuum chamber and the resulting heat loss from the sensing wire also decrease. Temperature and R resistance therefore increase. The increased resistance through R causes the bridge to become unbalanced and a voltage to develop across the null terminals.
Operation Figure 3-2 Mini-Convectron Module Front Panel - Indicator and Adjustments Before putting the module into operation, you must perform the following Preparing for Operation procedures: Install the module in accordance with the instructions on pages 15-23. Develop a logic diagram of the process control function. Attach a copy of the process control circuit diagram to this manual for future reference and troubleshooting.
Chapter 3 type, gas density (pressure), and the module orientation. The module is factory calibrated for N (air has approximately the same calibration). For gases other than N or air, heat loss varies at any given pressure, and you must apply an appropriate conversion factor. Convectron Gauges are Pirani type thermal conductivity gauges that Understanding Convectron Gauge...
Operation NOTE: You must ensure that the atmosphere adjustments for the Mini-Convectron Module are correctly set. See Calibrate at Atmosphere on page 21. If the gas being used is not included in Table 3-2, or for a gas mixture, you Commonly used Gases Other than N or Air...
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Chapter 3 Table 3-1 Equations for Calculating N or Air Pressure versus Bridge Analog Output Voltage Segment Output Voltage Equation where y = Pressure and x = Voltage Coefficients 0.375 to 2.842 V –0.02585 Torr 0.03767 ) 133.3 × 0.04563 0.1151 ×...
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Operation Table 3-2 Bridge Analog Output Voltage (Vdc) for Various Gases Mini-Convectron Module Instruction Manual - 275539...
Chapter 3 Figure 3-5 and Figure 3-6 illustrate the relationship of true pressure as Bridge Analog Output Voltage bridge analog output voltage (Vdc) when using N or Air in the vacuum system. The graphs are plotted using the data in Table 3-2, which lists the bridge analog output voltage at various pressures, using various gases.
Operation It is possible to accomplish a full scale calibration of the linear analog External Calibration output externally to the Mini-Convectron Module for use in a system where multiple gases are being switched. By varying the feedback resistor of the final amplifier from a nominal of 10 K Ohm, you can compensate for the approximate resistance value shown in Table 3-3.
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Chapter 3 NOTE: To use the external calibration technique, a jumper inside of the Mini-Convectron Module must be removed. To remove the internal jumper: Turn OFF power to the Mini-Convectron Module and unplug the 9-pin connector on the side of the module. Remove the 4 screws on each side of the module but not the two D-connector hex head jack screws.
Operation Figure 3-5 Analog Output Voltage vs. Indicated N or Air Pressure, 1 mTorr to 100 mTorr Mini-Convectron Module Instruction Manual - 275539...
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Chapter 3 Figure 3-6 Analog Output Voltage vs. Indicated N or Air Pressure, 0.1 Torr to 1000 Torr Mini-Convectron Module Instruction Manual - 275539...
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Operation Figure 3-7 Linear Analog Output Voltage (Vdc) for Various Gases Mini-Convectron Module Instruction Manual - 275539...
Chapter 3 –4 –1 Figure 3-8 True Pressure versus Indicated Pressure for Commonly used Gases, 10 to 10 Torr , Air freon 22 freon 12 Use this data only when the Convectron Gauge axis is horizontal. Do NOT use this data with any transducers other than G-P Series 275 Convectron Gauges.
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Operation –1 Figure 3-9 True Pressure versus Indicated Pressure for Commonly used Gases, 10 to 1000 Torr 1000 freon 12 N , air Use this data only when the Convectron Gauge axis is horizontal. Do NOT use this data with any transducers other than G-P Series 275 Convectron Gauges.
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Chapter 3 –1 Figure 3-10 True Pressure versus Indicated Pressure for Commonly used Gases, 10 to 1000 Torr 1000 freon 22 N , air Use this data only when the Convectron Gauge axis is horizontal. Do NOT use this data with any transducers other than G-P Series 275 Convectron Gauges.
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Operation –4 Figure 3-11 True Pressure versus Indicated Pressure for Commonly used Gases, 10 to 0.1 mbar , Air freon 22 freon 12 Use this data only when the Convectron Gauge axis is horizontal. Do NOT use this data with any transducers other than G-P Series 275 Convectron Gauges.
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Chapter 3 Figure 3-12 True Pressure versus Indicated Pressure for Commonly used Gases, 0.10 to 1000 mbar 1000 freon 12 N , air Use this data only when the Convectron Gauge axis is horizontal. Do NOT use this data with any transducers other than G-P Series 275 Convectron Gauges.
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Operation Figure 3-13 True Pressure versus Indicated Pressure for Commonly used Gases, 0.10 to 1000 mbar 1000 freon 22 N , air Use this data only when the Convectron Gauge axis is horizontal. Do NOT use this data with any transducers other than G-P Series 275 Convectron Gauges.
Chapter 3 During a fast pumpdown from atmospheric pressure, thermal effects 3.10 Modules Operating at Low Pressure temporarily prevent the module from measuring pressure accurately below 1 x 10 –3 Torr (1.3 x 10 –4 kPa, 1.3 x 10 –3 mbar).
Chapter 4 Maintenance For Customer Service / Technical Support: Customer Service MKS Pressure and Vacuum Measurement Solutions ® MKS Instruments, Inc., Granville-Phillips Division 6450 Dry Creek Parkway Longmont, Colorado 80503 USA Tel: 303-652-4400 Fax: 303-652-2844 Email: mks@mksinst.com Turn OFF power to the module and refer servicing to qualified service...
Chapter 4 If any of the conditions described on page 45 have occurred, Troubleshooting troubleshooting is required to determine the repairs that are necessary. Because the Convectron gauge contains static-sensitive electronic parts, Precautions follow these precautions while troubleshooting: • Use a grounded, conductive work surface. Wear a high impedance ground strap for personal protection.
Maintenance Table 4-1 lists failure symptoms, causes, and solutions. Symptoms, Causes, and Solutions Table 4-1 Failure Symptoms, Causes, and Solutions Symptom Possible Causes Solution Output voltage = 0 V 13.6 to 26.5 Vdc power supply cable is Repair or replace power supply cable improperly connected or faulty.
Chapter 4 Convectron Gauge Test CAUTION Do not perform a Convectron gauge test with an instrument that applies more than 0.1 V of electromotive force. Performing a Convectron gauge test with instruments that apply more than 0.1 V with the gauge at vacuum chamber pressure can result in property damage.
Maintenance Convectron Gauge Removal and WARNING Replacement Removing or replacing the Convectron gauge in a high−voltage environment can cause an electrical discharge through a gas or plasma, resulting in serious property damage or personal injury due to electrical shock. Vent the vacuum chamber to atmospheric pressure and shut off power to the module before you remove or replace the Convectron gauge.
Some minor problems are readily corrected on site. If the product requires Returning a Product for Repair service, contact the MKS, Granville-Phillips Division Technical Support Department at 1-303-652-4400 or 1-800-776-6543 for troubleshooting help over the phone. If the product must be returned to the factory for service, request a Return Material Authorization (RMA) from Granville-Phillips.
Index ground connection to vacuum chamber 20 Module Orientation 17 Analog Output module with two relays, no display 14, 27 Equations 30 output voltage versus N or air pressure Voltage/Pressure 29, 31 0.1 Torr to 1000 Torr 36 Wiring 19 true pressure versus indicated pressure Atmosphere Adjustment 26 to 10...
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