MKS 146C Instruction Manual
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MKS 146C Instruction Manual

MKS 146C Instruction Manual

Cluster gauge vacuum gauge measurement and control system
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  • Page 1 (217) 352-9330 | Click HERE Find the MKS Instruments 146A-ACONM-1 at our website:...
  • Page 2 120598-P1 Rev B, 3/99 Instruction Manual MKS Type 146C Cluster Gauge Vacuum Gauge Measurement and Control System Six Shattuck Road Fax: (978) 975-0093 Andover, MA 01810-2449 E-mail: mks@mksinst.com (800) 227-8766 or (978) 975-2350 Web site: http://www.mksinst.com Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 3 MKS sales representative or distributor from which the equipment was purchased or, in the case of a direct purchase from MKS, with the MKS home office in Andover, Massachusetts, USA.
  • Page 4 120598-P1 Rev B, 3/99 MKS Type 146C Cluster Gauge Vacuum Gauge Measurement and Control System Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 5 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.

  • Page 6: Table Of Contents

    Table of Contents Table of Contents Safety Information........................1 Symbols Used in This Instruction Manual..............1 Symbols Found on the Unit ..................2 Safety Procedures and Precautions ................3 Sicherheitshinweise........................ 5 In dieser Betriebsanleitung vorkommende Symbole ........... 5 Am Gerät angebrachte Symbole................. 6 Sicherheitsvorschriften und Vorsichtsmaßnahmen............
  • Page 7 Table of Contents Interface Cables .....................25 Generic Shielded Cable Description...............25 Model Code Explanation ................28 Product Location and Requirements ................29 Operating Environmental Requirements............29 Safety Conditions ..................29 Mounting Instructions..................29 Electrical Requirements .................29 System Requirements ....................30 Pressure Transducer Selection................30 Valve Selection....................30 Mass Flow Controller Selection ..............30 Dimensions ........................31 146 Set Up .........................32 General ......................32...
  • Page 8 Table of Contents Capacitance Manometer Board ..............48 Pirani/Convection..................50 Configuring the Dual Channel Pirani/Convection Board as Single Channel Board ....................51 Cold Cathode ....................54 Hot Cathode ....................55 Thermocouple Board ..................59 Configuring the Dual Thermocouple Board as Single Channel Board .... 60 Mass Flow Controller Board .................
  • Page 9 Table of Contents Displayless 146 Unit ....................98 Connecting to the Displayless 146 Unit ............98 The LED......................99 How To Establish RS-232 Communications ..........100 Chapter Four: Operation in Normal Mode................101 General Information ....................101 Normal Mode is Used when Performing the Following Procedures ....102 How To Display the Software Version ...............103 How To Switch Channels in the Main Display ............104 How To Turn a Channel ON or OFF ................106...
  • Page 10 Table of Contents How To Span a Pirani Type Sensor to Atmosphere ............ 138 How To Span a Sensor with a Reference..............140 How To Toggle the Span On and Off................. 142 How To Calculate the Analog Set Point ..............143 How To Command an MFC Open Override...............
  • Page 11 Table of Contents Capacitance Manometer.................192 Pirani and Convection Gauges ...............194 Cold Cathode....................196 Hot Cathode....................198 Mass Flow Controller ..................200 Thermocouple....................202 How To Set Up a Dual Channel Display..............204 Two Types of Dual Channel Operation - Continuous and Discontinuous ..206 How To Configure an Analog Output.................208 Linear Scaling....................209 Logarithmic Scaling..................209 Set Point ......................209...
  • Page 12 How To Set the Valve to MANUAL Position ............253 Chapter Nine: RS-232 Communications ................255 General Information....................255 How To Establish RS-232 Communications..........255 MKS RS-232 Protocol .................. 256 Channel Numbering ..................256 General Guidelines for RS-232 Messages ............258 Command Messages ....................259 Power Control Messages ................
  • Page 13 Table of Contents Chapter Eleven: Troubleshooting ...................291 The Diagnostics Feature .....................291 Starting the Diagnostics Feature..............291 Performing 146 Instrument Self Tests ............291 Code 1: RAM Test..................292 Code 2: PROM Test ..................293 Code 3: Display Test ..................293 Code 4: Check all Keys.................294 Code 5: Beeper Test..................295 Code 5x: Relay Test..................296 Code 6: Rear Panel Status................297...
  • Page 14 Table of Contents Auxiliary Output Messages..................327 Control Messages ...................... 329 Index............................331 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 15 Table of Contents Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 16 List of Figures List of Figures Figure 1: The Front Panel of the 146 Instrument..............21 Figure 2: Preferred Method....................26 Figure 3: Alternate Method To Use When Cable Clamp is Not Available......26 Figure 4: Rear Panel of the 146 Unit ..................27 Figure 5: Model Code ......................
  • Page 17 List of Figures Figure 31: Graph Showing Analog Set Point Defaults............118 Figure 32: Adjusting Lower and Upper Points for Analog Set Point Calculations ....119 Figure 33: Leakage Mode ......................125 Figure 34: Software Version Number in Leakage Mode ............128 Figure 35: Dual Channel Display in Leakage Mode ...............130 Figure 36: Zeroing a Sensor ....................133 Figure 37: Spanning a Sensor....................138 Figure 38: Spanning a Sensor with a Reference..............140...
  • Page 18 List of Figures Figure 64: Linear: Voltage versus Pressure................209 Figure 65: Linear and Logarithmic: Voltage versus Pressure ..........209 Figure 66: Code 1 Display..................... 212 Figure 67: Code 2 Display..................... 215 Figure 68: Code 3 Display..................... 216 Figure 69: Code 4 Display..................... 218 Figure 70: Code 5 Display.....................
  • Page 19 List of Figures Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 20 Table 6: Description of the Front Panel Keys................41 Table 7: Standard Front Panel Messages...................45 Table 8: Capacitance Manometer Pinout...................48 Table 9: MKS Capacitance Manometers and Cables ..............49 Table 10: Pirani/Convection Connector Pinout .................50 Table 11: Pirani Sensors and Cables ..................50 Table 12: Cold Cathode Connector Pinout................54...
  • Page 21 List of Tables Table 31: BCD Board Pinout ....................76 Table 32: RS-232 Connector Pinout and Cables............... 77 Table 33: Normal and Leakage Mode Status Codes..............80 Table 34: When a Channel’s Condition Changes from Measuring To ........84 Table 35: When a Channel’s Condition Changes To Measuring/Initializing From ....85 Table 36: Default Settings of the Trip Point Alarms..............
  • Page 22 List of Tables Table 64: Dual Channel Setup Messages ................266 Table 65: Chapter References for Dual Channel Setup Messages..........266 Table 66: Alarm Messages .....................267 Table 67: Chapter References for Alarm Messages ..............267 Table 68: Analog Output Messages ..................269 Table 69: Chapter References for Analog Output Messages............269 Table 70: General Control Messages ..................270 Table 71: Chapter References for General Control Messages ..........270 Table 72: Control Adjust Messages ..................271...
  • Page 23 List of Tables Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 24: Safety Information

    Safety Information Symbols Used in This Instruction Manual Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.

  • Page 25: Symbols Found On The Unit

    Symbols Found on the Unit Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Earth (ground) Off (Supply) On (Supply) IEC 417, No.5019 IEC 417, No.5008 IEC 417, No.5017...

  • Page 26: Safety Procedures And Precautions

    DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
  • Page 27 Safety Procedures and Precautions Safety Information USE THE PROPER POWER SOURCE This product is intended to operate from a power source that does not apply more voltage between the supply conductors, or between either of the supply conductors and ground, than that specified in the manual.

  • Page 28: Sicherheitshinweise

    Sicherheitshinweise In dieser Betriebsanleitung vorkommende Symbole Sicherheitshinweise In dieser Betriebsanleitung vorkommende Symbole Definition der mit WARNUNG!, VORSICHT! und HINWEIS überschriebenen Abschnitte in dieser Betriebsanleitung. Warnung! &CU 5[ODQN 9#4070) YGKUV CWH GKPG )GHCJTGPSWGNNG JKP 'U OCEJV CWH GKPGP #TDGKVUCDNCWH GKPG #TDGKVUYGKUG GKPGP <WUVCPF QFGT GKPG UQPUVKIG )GIGDGPJGKV CWHOGTMUCO FGTGP WPUCEJIGO·­G #WUHÒJTWPI D\Y WPIGPÒIGPFG $GTÒEMUKEJVKIWPI \W -ÌTRGTXGTNGV\WPI HÒJTGP MCPP...

  • Page 29: Am Gerät Angebrachte Symbole

    Am Gerät angebrachte Symbole Sicherheitshinweise Am Gerät angebrachte Symbole Der untenstehenden Tabelle sind die Bedeutungen der Symbole zu entnehmen, die an dem Gerät angebracht sind. Definitionen der am Gerät angebrachten Symbole Ein (Netz) Aus (Netz) Erde Schutzleiter IEC 417, Nr. 5007 IEC 417, Nr.

  • Page 30: Sicherheitsvorschriften Und Vorsichtsmaßnahmen

    Bauen Sie in das Instrument keine Ersatzteile ein, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor! Schicken Sie das Instrument zu Wartungs- und Reparatur-zwecken an einen MKS-Kalibrierungs- und -Kundendienst ein! Dadurch wird sicher-gestellt, daß alle Sicherheitseinrichtungen voll funktionsfähig bleiben.
  • Page 31 Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitshinweise Erdung und Verwendung geeigneter elektrischer Armaturen! In diesem Instrument liegen gefährliche Spannungen an. Alle verwendeten elektrischen Armaturen und Kabel müssen dem angegebenen Typ entsprechen und sich in einwand-freiem Zustand befinden. Alle elektrischen Armaturen sind vorschriftsmäßig anzubringen und zu erden. Richtiges Netzkabel verwenden! Das verwendete Netzkabel muß...

  • Page 32: Informations Relatives À La Sécurité

    Informations relatives à la sécurité Symboles utilisés dans ce manuel d'utilisation Informations relatives à la sécurité Symboles utilisés dans ce manuel d'utilisation Définition des indications AVERTISSEMENT, ATTENTION et REMARQUE utilisées dans ce manuel. #XGTVKUUGOGPV . KPFKECVKQP #8'46+55'/'06 UKIPCNG WP FCPIGT RQVGPVKGN 'NNG GUV FGUVKP¾G ¯...

  • Page 33: Symboles Apparaissant Sur L'appareil

    Symboles apparaissant sur l'appareil Informations relatives à la sécurité Symboles apparaissant sur l'appareil Le tableau suivant décrit les symboles apparaissant sur l'appareil. Définition des symboles apparaissant sur l'appareil Terre de protection Marche (sous tension) Arrêt (hors tension) Terre (masse) (masse) IEC 417, No.

  • Page 34: Mesures De Sécurité Et Mises En Garde

    NE PAS SUBSTITUER DES PIÈCES OU MODIFIER L'APPAREIL Ne pas utiliser de pièces détachées autres que celles vendues par MKS Instruments, Inc. ou modifier l'appareil sans l'autorisation préalable de MKS Instruments, Inc. Renvoyer l'appareil à...
  • Page 35 Mesures de sécurité et mises en garde Informations relatives à la sécurité UTILISATION D'UN CORDON D'ALIMENTATION APPROPRIÉ Utiliser uniquement un cordon d'alimentation en bon état et conforme aux exigences de puissance d'entrée spécifiées dans le manuel. Utiliser uniquement un cordon d'alimentation amovible avec des conducteurs dont la section est égale ou supérieure à...

  • Page 36: Información Sobre Seguridad

    Información sobre seguridad Símbolos usados en el manual de instrucciones Información sobre seguridad Símbolos usados en el manual de instrucciones Definiciones de los mensajes de ADVERTENCIA, PRECAUCIÓN Y OBSERVACIÓN usados en el manual. #FXGTVGPEKC 'N UÃODQNQ FG #&8'46'0%+# KPFKEC WP TKGUIQ 2QPG FG TGNKGXG WP RTQEGFKOKGPVQ RT±EVKEC EQPFKEKÉP GVE SWG FG PQ TGCNK\CTUG W QDUGTXCTUG EQTTGEVCOGPVG RQFTÃC ECWUCT NGUKQPGU C NQU GORNGCFQU...

  • Page 37: Símbolos Que Aparecen En La Unidad

    Símbolos que aparecen en la unidad Información sobre seguridad Símbolos que aparecen en la unidad En la tabla que figura a continuación se indican los símbolos que aparecen en la unidad. Definición de los símbolos que aparecen en la unidad Encendido Apagado (alimentación eléctrica)

  • Page 38: Procedimientos Y Precauciones De Seguridad

    No se debe instalar piezas que no sean originales ni modificar el instrumento sin autorización. Para garantizar que las prestaciones de seguridad se observen en todo momento, enviar el instrumento al Centro de servicio y calibración de MKS cuando sea necesaria su reparación y servicio de mantenimiento.
  • Page 39 Procedimientos y precauciones de seguridad Información sobre seguridad USAR EL CABLE ELÉCTRICO ADECUADO Usar únicamente un cable eléctrico que se encuentre en buenas condiciones y que cumpla los requisitos de alimentación de entrada indicados en el manual. Usar únicamente un cable desmontable instalado con conductores que tengan un área de sección transversal equivalente o superior a 0,75mm².

  • Page 40: Chapter One: General Information

    Chapter One: General Information Introduction The Type 146C Cluster Gauge Vacuum Gauge Measurement and Control System is a versatile, ½ rack instrument which can power and provide concurrent readouts for up to four different vacuum gauges, or a combination of gauges and flow controllers. The instrument can support capacitance manometers (4, 5, or 6 decade), Pirani, and ion gauges.

  • Page 41: How This Manual Is Organized

    How this Manual is Organized Chapter One: General Information How this Manual is Organized This manual is designed to provide detailed, step by step instructions for all the functions the Type 146 unit can perform. It also supplies overview and background information to help you acquire a general understanding of the 146 instrument, and how to use it.

  • Page 42: Format Of Instructions

    Chapter One: General Information How this Manual is Organized Format of Instructions Each set of directions contained in this manual includes all the steps necessary to perform a particular task. Even though some steps are identical for several operations, they are repeated in each set of instructions.

  • Page 43: Terminology Used In This Manual

    How this Manual is Organized Chapter One: General Information Modes: Modes are always written in proper format (the first letter is capitalized). For example, the three standard modes available with the 146 unit are Normal Mode, Leakage Mode, and Setup Mode. Boards: The names for the boards are always written in proper format (the first letter is capitalized).

  • Page 44: Figure 1: The Front Panel Of The 146 Instrument

    Chapter One: General Information How this Manual is Organized Mode The 146 instrument is designed to operate in five different modes. The associated parameters and functions of each mode are viewed in the front panel window, and operable through the front panel keypad (and the RS-232 serial port).

  • Page 45: Customer Support

    Calibration and Service Center before shipping. The ERA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials.

  • Page 46: Chapter Two: Installation

    Chapter Two: Installation How To Unpack the 146 Instrument MKS has carefully packed the 146 unit so that it will reach you in perfect operating order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that damage has not occurred during shipment.

  • Page 47: Boards

    Displayless Type 146 Units (indicated as such in the order code) • RM-6 Rack Mount (MKS p/n RM6) • RS-232 Cable for Displayless Units (MKS p/n CB146-21) • Labels for rear panel board identification (MKS p/n LB-1141011) Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 48: Interface Cables

    Generic Shielded Cable Description MKS offers a full line of cables for all MKS equipment. Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective;...

  • Page 49: Figure 2: Preferred Method

    How To Unpack the 146 Instrument Chapter Two: Installation D. The capacitance and inductance of cables which are handling fast signals, (such as data lines or stepper motor drive cables); and E. That some cables may need internal shielding from specific wires to others; please see the instruction manual for details regarding this matter.

  • Page 50: Figure 4: Rear Panel Of The 146 Unit

    Chapter Two: Installation How To Unpack the 146 Instrument Male Female Line Voltage RS-232 Connector Connector Switch Interface (Pins black) Card Slot 1 (Insulator black) Line 150 VA 50/60 Hz Power Fuse Fuses 250V IEC General 230V 1.0A (T) 115V 1.6A (T) Fuses Interface (I/O Board)

  • Page 51: Model Code Explanation

    How To Unpack the 146 Instrument Chapter Two: Installation Order Code 146C Type Number Card Slot 1 Card Slot 2 Card Slot 3 Card Slot 4 Card Slot 5 Display option Figure 5: Model Code Model Code Explanation Available Boards...

  • Page 52: Product Location And Requirements

    Chapter Two: Installation Product Location and Requirements Product Location and Requirements The Type 146 unit meets the following criteria: • POLLUTION DEGREE 2 in accordance with IEC 664 • Transient overvoltages according to INSTALLATION CATEGORY II Operating Environmental Requirements • Ambient Operating Temperature: 15°...

  • Page 53: System Requirements

    Many valve types may be used as long as proper cabling is employed. Mass Flow Controller Selection All MKS mass flow controllers, and equivalent controllers, are supported. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 54: Dimensions

    Chapter Two: Installation Dimensions Dimensions Note All dimensions are listed in inches, with millimeters referenced in parentheses. 9.45 (240.0) 8.80 (223.5) 3.00 (76.2) POWER 0.25 (6.4) 4 places 8.25 (209.6) 0.38 (9.7) 4 places Figure 6: Front Panel Dimensions 8.00 (203.2) 0.50 12.09 (307.1)

  • Page 55: 146 Set Up

    146 Set Up Chapter Two: Installation 3.47 3.38 (88.1) (85.7) Figure 8: Side Dimensions 146 Set Up Caution Provide proper clearance so that the 146 unit operates within product environmental specifications (refer to Appendix A: Product Specifications, page 301). General 1.

  • Page 56: Checking The Fuses And Ac Line Voltage Select Switch

    Chapter Two: Installation 146 Set Up Checking the Fuses and AC line Voltage Select Switch Note If the 146 unit is ordered with a full configuration form filled out, it will arrive with the correct fuse(s) and have the voltage switch set for proper AC voltage.

  • Page 57: Installing Boards In The 146 Unit

    146 Set Up Chapter Two: Installation Installing Boards in the 146 Unit This section describes how to install boards that have been ordered after the 146 unit has arrived. Warning The 146 unit has lethal voltages inside. To avoid the danger of electrical shock, the power line must be disconnected before opening the unit.

  • Page 58: Figure 10: Fastening Screw Positions

    Chapter Two: Installation 146 Set Up 6. Place the unit on a flat surface in its normal orientation, with the rear panel facing you. 7. Decide where the board will go. We recommend that you do not move any boards already installed in the 146 unit. Instead, install a new board in an unused slot.
  • Page 59 146 Set Up Chapter Two: Installation 12. Gently push the board onto the male connector. 13. If your board has two Type “D” connectors (Dual Pirani, Dual Thermocouple, Control, or Auxiliary Output boards), replace the top connector’s fastening screw. 14. Turn the unit over so that it is bottom-side up. 15.

  • Page 60: New Configuration Warning Code (C11)

    Chapter Two: Installation 146 Set Up New Configuration Warning Code (C11) Under most circumstances, when there is a configuration change in the 146 unit, a warning code (C11) is displayed and an alarm audio tone goes off when the unit is powered up again. The alarm sound is silenced by pressing the [ ] key.

  • Page 61: 146 Start Up

    146 Start Up Chapter Two: Installation Exceptions If the configuration change in the 146 unit is extensive or involves global parameters, all user- defined parameters are reset to factory defaults. As in the previous discussion, the C11 warning code is displayed at the next power up. In addition, the E4 error code is displayed after the unit its turned off and then on again.

  • Page 62: Chapter Three: Overview

    Chapter Three: Overview The Front Panel Chapter Three: Overview The Front Panel VACUUM GAUGE MEASUREMENT AND CONTROL SYSTEM TYPE 146 CHANNELS ALARMS POWER ALARM CHANNEL DUAL TUNING COMMON ZERO SPAN QUIET DEGAS DISPLAY CONTROL ENTER MODE MODE LEAD GAIN CANCEL POINT Figure 11: Front Panel of the Type 146 Instrument The front panel includes the power switch, the alarm and channel label areas, the keys, and the...

  • Page 63: Overview Of Keys And Their Functions

    Overview of Keys and Their Functions Chapter Three: Overview Overview of Keys and Their Functions This overview explains the way keys function in general. Any exceptions to the general rules are noted within each appropriate chapter. What Happens when a Key is Pressed With each valid key press, a soft beep is sounded.

  • Page 64: Specific Keys And Their Functions

    Chapter Three: Overview Overview of Keys and Their Functions Specific Keys and Their Functions Some keys have more than one function printed on them, but only one of the functions is enabled at any given time. Table 6 describes the function of each key on the front panel. If a function is restricted to a certain mode or modes, the table lists the applicable mode(s) within parentheses.
  • Page 65 Overview of Keys and Their Functions Chapter Three: Overview Description of the Front Panel Keys (Continued) Description Turns a channel/alarm/degas on. (Normal and Leakage Modes). LEAD Makes the lead parameter the active parameter. (Tuning Mode only). Turns a channel/alarm/degas off. (Normal and Leakage Modes). GAIN Makes the gain parameter the active parameter.

  • Page 66: The Front Panel Window

    Chapter Three: Overview The Front Panel Window The Front Panel Window Initial View Upon Power Up On power up, the 146 unit goes through its normal initialization and provides a full LCD test display in the front panel window, shown in Figure 12. SELF OVERRANGE OPEN...

  • Page 67: What To Look For

    The Front Panel Window Chapter Three: Overview What to Look For This is a legend This is a Tuning Blinking This is a Control indicating the active Mode Parameter Display Mode Parameter mode TUNING GAIN HOLD INVALID TORR An Error Message Channel Number Figure 13: Explanation of the Front Panel Display...

  • Page 68: Table 7: Standard Front Panel Messages

    Chapter Three: Overview The Front Panel Window Note The front panel also displays status information and error codes. Refer to Appendix D: Front Panel Error/Status Messages, page 307, for more information. Standard Front Panel Messages Category Messages and their Meaning Mode : The 146 unit is in Tuning Mode.

  • Page 69: Labels On The 146 Unit

    Model #: for the specific model configuration 146CAAFFM1 shown on the serial number tag. MKS In stru ment s, Inc. Made in t he USA Figure 14: Labels on the 146 Unit Note Not all configurations of the 146 unit are CE compliant. Units that are not CE compliant cannot display the “CE”...

  • Page 70: Inside The Type 146 Unit

    Labels are placed on the rear panel to mark the channel number and board type of each board installed in the unit when it leaves the factory. A complete set of labels is supplied if an unconfigured base unit is ordered. Additional labels are available (MKS p/n LB-1141011). Note Use overall metal braided shielded cables, properly grounded at both ends, for all connections to ensure CE compliance.

  • Page 71: Capacitance Manometer Board

    Capacitance Manometer Board The Capacitance Manometer board has one 15-pin female Type “D” connector. Table 8 shows the connector pinout. Refer to Table 9, page 49, for a list of MKS capacitance manometers supported, along with their cables. Capacitance Manometer Pinout...

  • Page 72: Table 9: Mks Capacitance Manometers And Cables

    700 Series Mini-Baratron Absolute and Gage consult factory Pressure Transducers 800 Series Ultraclean Mini-Baratron Absolute consult factory and Gage Pressure Transducers Table 9: MKS Capacitance Manometers and Cables Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 73: Pirani/Convection

    Inside the Type 146 Unit Chapter Three: Overview Pirani/Convection On the end of the Pirani/Convection board are two 9-pin female Type “D” connectors, since the board can support up to two gauges. Table 10 shows the connector pinout. The top connector is the lower numbered channel, and the bottom connector is the higher numbered channel.

  • Page 74: Configuring The Dual Channel Pirani/Convection Board As Single Channel Board

    Configuring the Dual Channel Pirani/Convection Board as Single Channel Board The Pirani/Convection board can function as a single channel board. MKS will have configured the board as a single channel board, if you requested it when you placed the order. The board will be configured for dual channel operation if you did not specify single channel operation.

  • Page 75: Figure 15: Dual Pirani Board Connectors

    Inside the Type 146 Unit Chapter Three: Overview 10. Remove the top fastening screw that is above the upper connector. Top fastening screw Figure 15: Dual Pirani Board Connectors 11. Carefully but firmly pull the Pirani/Convection board out of the 146 unit. 12.
  • Page 76 Chapter Three: Overview Inside the Type 146 Unit 14. Slide the board back inside the unit so that the connectors protrude through the opening in the rear panel. 15. Line the board up so that the female connector on the board is directly over the male connector on the mother board.

  • Page 77: Cold Cathode

    Cold Cathode Located on the end of the Cold Cathode board are two coaxial connectors. Table 12 shows the connector pinout. A list of MKS sensors, along with their cables, is shown in Table 13. Cold Cathode Connector Pinout High Voltage...

  • Page 78: Hot Cathode

    Located on the end of the Hot Cathode board is one coaxial connector and one 15-pin female Type “D” connector. Table 14 shows the connector pinout of the coaxial connector and Table 16 shows the Type “D” connector pinout. A list of MKS hot cathode gauges, along with their cables, is shown in Table 15.

  • Page 79: Table 16: Hot Cathode Type "D" Connector Pinout

    Inside the Type 146 Unit Chapter Three: Overview Hot Cathode Type “D” Connector Pinout Pin Number Assignment Filament + Chassis Ground Filament - +15 Volt Output 115 Volt Output Grid/Degas - External -15 Volts (high power) Grid/Degas + Filament + External +15 Volts Filament - Power Ground...
  • Page 80 The Hot Cathode board can be configured for a low power hot cathode (the default is for a high power gauge). MKS will configure the board at the factory, if specified on the order. If you did not request the low power configuration, but wish to use the board with a low power hot cathode, follow these instructions.

  • Page 81: Figure 17: Jumper Placement On The Hot Cathode Board

    Inside the Type 146 Unit Chapter Three: Overview The HC High Power configuration is with no jumper on JP3. The HC Low Power configuration is with a Shorting jumpers are stored on JP4. shorting jumper on JP3. Figure 17: Jumper Placement on the Hot Cathode Board 12.

  • Page 82: Thermocouple Board

    1, the top connector is channel 1, and the bottom connector is channel 2. The 146 instrument supports the following thermocouples: • MKS TC-1A • Hastings DV-6M Note Units equipped with a Thermocouple board cannot carry a CE mark since there are no CE compliant thermocouple gauges available.

  • Page 83: Configuring The Dual Thermocouple Board As Single Channel Board

    Configuring the Dual Thermocouple Board as Single Channel Board The Thermocouple board can function as a single channel board. MKS will have configured the board as a single channel board, if you requested it when you placed the order. The board will be configured for dual channel operation if you did not specify single channel operation.

  • Page 84: Figure 18: Top Fastening Screw On The Dual Thermocouple Board

    Chapter Three: Overview Inside the Type 146 Unit 10. Remove the top fastening screw that is above the upper connector. Top fastening screw Figure 18: Top Fastening Screw on the Dual Thermocouple Board 11. Carefully but firmly pull the Thermocouple board out of the 146 unit. 12.
  • Page 85 Inside the Type 146 Unit Chapter Three: Overview 16. Gently push the board onto the male connector. 17. Replace the top connector’s fastening screw. 18. Turn the unit over so that it is bottom-side up. 19. Replace the Phillips screw that fastens the board to the 146 unit. 20.

  • Page 86: Mass Flow Controller Board

    On the end of the Mass Flow Controller (MFC) board is a 15-pin female Type “D” connector. The table below shows the connector pinout. A list of MKS mass flow controllers, along with their cables, is shown in Table 20, page 64.

  • Page 87: Table 20: Mass Flow Controllers And Cables

    Chapter Three: Overview Mass Flow Controllers And Cables MFC And Cable Type Part Number All MKS Mass Flow Controllers except Types Consult the factory for a complete list of 1749/1759 MFC types, ranges, and part numbers Cable for MFCs w/ Edge Card connector CB147-7 Cable for MFCs w/ 15-pin Type “D”...

  • Page 88: General I/O Connector

    Chapter Three: Overview Inside the Type 146 Unit General I/O Connector The General I/O connector is a 25-pin male Type “D” connector. This connector brings out the analog output 1 signal, Relay A and B contacts, and remote zero, alarm latch, and front-panel- lockout digital control lines.
  • Page 89 Inside the Type 146 Unit Chapter Three: Overview General I/O Connector Pinout (Continued) Pin Number Assignment Reserved Reserved Analog 1 Common (Single Ground) Relay A Normally Open Relay A Common Relay A Normally Closed Table 21: General I/O Connector Pinout Remote Zero Line Function with Ion Gauges The Remote Zero lines on the General I/O connector act as an On/Off toggle switch for ion gauges.

  • Page 90: Auxiliary Output Board

    Chapter Three: Overview Inside the Type 146 Unit Auxiliary Output Board The Auxiliary Output board contains relays C and D (which supplement relays A and B), and analog outputs 2 and 3. The modified, male 9-pin Type “D” connector at the top of the board allows operation of 120 VAC devices.

  • Page 91: Auxiliary Output Board - Fail-Safe Feature

    Inside the Type 146 Unit Chapter Three: Overview Auxiliary Output Board - Fail-Safe Feature Relays C and D on the Auxiliary Output board are associated with the 146 instrument’s Fail-Safe feature. When the 146 unit is powered on, this feature is activated. The processor waits until pressure readings are stable before activating any of the relays in the 146 unit.

  • Page 92: Control Board

    Chapter Three: Overview Inside the Type 146 Unit Control Board The Control board has two 9-pin Type “D” connectors (one female, one male). The female connector is located at the top of the board. It carries the valve drive lines, and the PCS (pressure control signal) output used for throttle valves or ratio controllers.

  • Page 93: Table 25: Control Interface (Bottom) Connector Pinout

    The male connector carries open, close, manual, and set point recipe select digital control lines. It also carries the analog set point input. Table 25, page 70, lists the pinout of this connector. Table 28, page 71, lists MKS flow controllers that interface to the 146 unit. Control Interface (Bottom) Connector Pinout...

  • Page 94: Table 27: Control Valves And Cables

    Chapter Three: Overview Inside the Type 146 Unit Control Valves and Cables Valve Type MKS Valve Part Number for Cable Solenoid 148, 248 CB251-2-10, CB251S-2-10 Smart Throttle (not powered by the 146) CB153-4-10, CB153S-4-10 Smart Throttle (powered by the 146)

  • Page 95: How To Configure The Control Board To Drive Different Valves

    Inside the Type 146 Unit Chapter Three: Overview How To Configure the Control Board to Drive Different Valves 1. Be sure the power cord is disconnected. Warning The 146 unit has lethal voltages inside. To avoid the danger of electrical shock, disconnect the power line before opening the unit.
  • Page 96 Chapter Three: Overview Inside the Type 146 Unit 9. Replace the bottom cover by inserting it into the grooves provided, and firmly sliding it towards the front of the unit. Replace the seven (7) screws that fasten the bottom cover. The center screw on the bottom cover is slightly off center to avoid interfering with a connector on a board in slot 5.

  • Page 97: The Displayless Front Panel Connector Pinout

    The pinout of the connector is listed in Table 30, page 75. The RS-232 cable used on the front panel connector (MKS p/n CB146-21) is not the same as the RS-232 cable used for rear panel communications (refer to Table 32, page 77, for the proper MKS part number).

  • Page 98: Table 30: Front Panel Connector Pinout On The Displayless 146 Unit

    Chapter Three: Overview Inside the Type 146 Unit Front Panel Connector Pinout on the Displayless 146 Unit Pin Number Assignment Chassis Ground RS-232 Transmit RS-232 Receive RS-232 Receive Enable (connect to digital ground to override rear connector RS-232) RS-232 CTS (special option) Spare Digital Ground Filtered +5 Volts...

  • Page 99: The Binary Coded Decimal (Bcd) Board

    Inside the Type 146 Unit Chapter Three: Overview The Binary Coded Decimal (BCD) Board The BCD board has an unwired, 25-pin female Type “D” connector. This board provides input/output signals for hot cathode gauges. The first four signals listed are inputs. The active low for the inputs requires about a 1 mA sink, 0.8 Volts maximum.

  • Page 100: The Rs-232 Connector

    Chapter Three: Overview Inside the Type 146 Unit BCD Connector Pinout (Continued) Pin Number Assignment Inverse of Status 2, 14 External Digital Ground Digital Ground (Reserve) 1 and shell Chassis Ground Digital +5 Volts (Reserved) Table 31: BCD Board Pinout The RS-232 Connector Located on the rear panel is the standard, 9-pin male Type “D”...

  • Page 101: Figure 21: Sample Display For Each Mode

    Inside the Type 146 Unit Chapter Three: Overview Torr mTorr Torr HOLD Normal Mode mTORR Torr mTorr Torr LEAKAGE HOLD Leakage Mode TORR TUNING HOLD Tuning Mode (requires the TORR Control Board) SETUP CLOSE Setup Mode TORR TRIP POINT OPEN Torr AUTO CLOSE...

  • Page 102: Overview Of Modes

    Chapter Three: Overview Overview of Modes Overview of Modes There are three standard modes for the 146 unit: Normal, Leakage, and Setup. Two additional modes are available if the optional Control board is installed: Control and Tuning. All commands for all modes are accessible with the front panel keypad. Most commands are accessible through the RS-232 communications port.

  • Page 103: Overview Of The Five Modes

    Overview of Modes Chapter Three: Overview Overview of the Five Modes Normal Normal Mode is the default mode, and is a general system status mode. When in this mode, the default is for the channel 1 pressure reading to appear in the main display. The exception to this is if all four channels are used, whereupon the pressure reading for channel 4 appears in the main display.
  • Page 104 Chapter Three: Overview Overview of Modes Normal and Leakage Mode Status Codes (Continued) " - - - - " Overrange sensor (upper segments of the display are turned on) When a sensor’s input goes over range, the legend OVERRANGE appears on the right side of the window. "...

  • Page 105: Operational Diagram

    Operational Diagram Chapter Three: Overview Operational Diagram Included with this manual is an operational diagram depicting the procedures used to perform tasks with the 146 unit. The purpose of the diagram is to provide a pictorial quick reference guide to the different modes of the 146 unit, the functions (tasks) contained within each mode, and instructions needed to perform those functions.
  • Page 106 Chapter Three: Overview Operational Diagram Example 2: SELECT A MODE Starting at the center of the diagram, the 146 unit defaults to Normal Mode. Use the ] key to scroll to Tuning Mode. DISPLAY MODE PROCEED TO A BLUE COLORED WEDGE There are two blue colored wedges touching the Tuning Mode wedge.

  • Page 107: Effects Of Channel Changes

    Effects of Channel Changes Chapter Three: Overview Effects of Channel Changes When a Channel’s Condition Changes from Measuring To . . . Source PCS Output Analog Output Relay Auto Power Dual Channel goes currently in (see note #1) Operation Reference Channel from Auto Mode...

  • Page 108: When A Channel's Condition Changes To Measuring/Initializing From

    Chapter Three: Overview Effects of Channel Changes When a Channel’s Condition Changes to Measuring/Initializing From . . Source channel goes PCS Output Analog Relay Auto Power Dual to Measuring or currently in Output Operation Reference Channel Initializing from: Auto Mode (see note #1) Channel Operation...

  • Page 109: Overview Of Alarms

    Overview of Alarms Chapter Three: Overview Overview of Alarms From a design viewpoint, the alarm system in the 146 unit consists of several, single pole, double throw relays. Two alarms (A and B) come standard with the 146 unit and are available on the General I/O connector.

  • Page 110: Figure 23: Relay B During An Alarm Condition, When Configured As An Actuated Relay

    Chapter Three: Overview Overview of Alarms If a relay is set up as an actuated relay and an alarm condition arises, the relay will be configured as shown in Figure 23. Normally Open (Pin 11) Relay B Common (Pin 12) Normally Closed (Pin 13) Figure 23: Relay B during an Alarm Condition, when configured as an Actuated Relay Refer to Table 21, page 65, for the pinouts of relays A and B, and Table 22, page 67, for the...

  • Page 111: Alarm Conditions

    Overview of Alarms Chapter Three: Overview Alarm Conditions An alarm condition occurs when a channel’s pressure reading goes over the alarm trip point. When an alarm condition arises, the 146 responds in four ways. In this example, the latching state is enabled, but the relay is initially unlatched. 1.
  • Page 112 Chapter Three: Overview Overview of Alarms 3. The channel’s pressure reading drops below the alarm trip point. A. The diamond in the window disappears, but the relay remains latched. 4. Unlatch the alarm relay via the connector on the General I/O connector. A.

  • Page 113: System Design Elements

    System Design Elements Chapter Three: Overview System Design Elements This section discusses, in a general way, how the 146 instrument can be used to control a pressure/vacuum system. A Control board must be installed in the 146 instrument for the control capabilities to function.
  • Page 114 Chapter Three: Overview System Design Elements The 146 instrument utilizes Proportional-Integral-Derivative (PID) control found in most industrial controllers today. The P-I-D parameters operate according to an equation. These parameters are: 1. Proportional control action (Gain) is used as a constant to create a valve drive signal that is proportional to the error signal, (the error signal is the result of comparing actual pressure with the set point).

  • Page 115: Pressure Control

    System Design Elements Chapter Three: Overview Pressure Control The speed of pressure response is relative, and depends on chamber size and the pressure range in which the system is operating. Lower pressures (less than 10 mTorr) are usually slower because of the slower molecular flow (and reduced pumping speed).

  • Page 116: Mass Flow Control

    Chapter Three: Overview System Design Elements Mass Flow Control The MFC board allows the 146 instrument to communicate with mass flow controllers (MFCs) to regulate the flow of gas into a system. The 146 instrument can operate in either set point, totaling, or ratio flow control mode.
  • Page 117 System Design Elements Chapter Three: Overview Example 1: Assume you have two MFCs configured for ratio control and you change the control set point to 100%. Each MFC has a set point of 50%. The PID control algorithm determines that full scale flow is required to meet the new set point, so the equation becomes: MFC control signal = ½...

  • Page 118: Memory Storage In The 146 Instrument

    Chapter Three: Overview System Design Elements Memory Storage in the 146 Instrument The operational parameters of the 146 unit are stored in non-volatile memory as parameters are changed. The 146 unit is designed to store most user-defined, and 146-determined data in EEPROM.
  • Page 119 Baud rate Lower threshold Communications mode (parity, data bits, stop Continuity type bits) Associated channels in dual 1 and dual 2 Protocol (MKS 146 or data logger) General Settings Audio alarm state (enabled or disabled) Channel range Measurement units Channel sensitivity...

  • Page 120: Ion Gauge High Pressure Protection/Disconnect Detection

    Chapter Three: Overview System Design Elements Ion Gauge High Pressure Protection/Disconnect Detection A characteristic of either hot or cold cathode gauges is that they may provide invalid pressure readings when the pressure is above 1 x 10 Torr. In addition, hot cathode tubes may be damaged at high pressures.

  • Page 121: Displayless 146 Unit

    Displayless 146 Unit Chapter Three: Overview Displayless 146 Unit A displayless 146 unit is controlled by remote RS-232 communications through the RS-232 connector on the rear panel. An additional Interface connector on the front panel provides a convenient serial communications port so you can use a portable computer to communicate with the unit while it is installed in your system.

  • Page 122: The Led

    Chapter Three: Overview Displayless 146 Unit The LED The LED on a displayless 146 unit indicates the status of the unit. When a displayless 146 unit is powered on, the LED condition is as follows: 1. The LED turns red, then changes to green within a few seconds. This indicates that all systems are operating properly.

  • Page 123: How To Establish Rs-232 Communications

    146 unit into your system using the rear panel connector. Note that the RS-232 cable used for rear panel communications (refer to Table 32, page 77, for the proper MKS part number) differs from the RS-232 cable for front panel communications (MKS p/n CB146-21). All RS-232 commands are supported through either connector.

  • Page 124: Chapter Four: Operation In Normal Mode

    Chapter Four: Operation in Normal Mode General Information Chapter Four: Operation in Normal Mode General Information Figure 25 shows a sample window for Normal Mode. In Normal Mode, all displays show a pressure reading, provided the displays are connected to active sensors and the sensors are reading within their range.

  • Page 125: Normal Mode Is Used When Performing The Following Procedures

    General Information Chapter Four: Operation in Normal Mode Normal Mode is Used when Performing the Following Procedures Normal Mode Functions Function Comments View most System Status Displays the pressure readings from up to four different Information sensors. Display software version Lists the software version number.

  • Page 126: How To Display The Software Version

    Chapter Four: Operation in Normal Mode How To Display the Software Version How To Display the Software Version 1. Repeatedly press the [ ] key until the 146 unit is in Normal Mode. DISPLAY MODE The system responds by scrolling through modes. 2.

  • Page 127: How To Switch Channels In The Main Display

    How To Switch Channels in the Main Display Chapter Four: Operation in Normal Mode How To Switch Channels in the Main Display The system defaults to showing the pressure reading for channel 1 in the main display. The exception to this is if all four channels are used, whereupon the pressure reading for channel 4 appears in the main display.

  • Page 128: Figure 27: Dual Channel Display In Normal Mode

    Chapter Four: Operation in Normal Mode How To Switch Channels in the Main Display LEFT DISPLAY CENTER DISPLAY RIGHT DISPLAY The pressure reading The pressure reading The pressure reading from the gauge on from the gauge on from the gauge on channel 1 is shown here.

  • Page 129: How To Turn A Channel On Or Off

    How To Turn a Channel ON or OFF Chapter Four: Operation in Normal Mode How To Turn a Channel ON or OFF The ability to turn off power to sensors is a useful function in several situations. For example, it is a safety procedure against explosion during cryo-pump regeneration with all sensors except capacitance manometers (the danger of explosion does not exist with capacitance manometers).

  • Page 130: How To Turn An Alarm On Or Off

    Chapter Four: Operation in Normal Mode How To Turn an Alarm ON or OFF How To Turn an Alarm ON or OFF 1. Repeatedly press the [ ] key until the 146 unit is in Normal Mode. DISPLAY MODE The system responds by scrolling through modes. 2.

  • Page 131: How To Zero A Sensor/Mfc

    How To Zero a Sensor/MFC Chapter Four: Operation in Normal Mode How To Zero a Sensor/MFC For pressure sensors, zeroing means adjusting the readout for the sensor. The zero point is the pressure at which the instrument displays zero pressure. For capacitance manometers and Pirani type gauges, the zero point is the output voltage at which zero pressure is referenced.
  • Page 132 Chapter Four: Operation in Normal Mode How To Zero a Sensor/MFC Note Before zeroing an MFC, verify that there is no gas flow through the unit. Two ways to accomplish this involve an upstream valve, or with a digital override (refer to How To Command an MFC Close Override, page 121).
  • Page 133 T ZERO 4. Ion gauges cannot be zeroed since they are high vacuum gauges. 5. For the MKS Type 120 gauge, the zeroing occurs in both the sensor and in the 146 unit. If the Type 120 gauge cannot complete the zeroing itself, a ’...

  • Page 134: Table 39: Ranges For Zeroing A Sensor

    Chapter Four: Operation in Normal Mode How To Zero a Sensor/MFC Ranges for Zeroing a Sensor Sensor Type Zero Range Type 107 Capacitance Manometer -0.2 Volts to +0.2 Volts Type 120 Capacitance Manometer -0.8 Volts to +0.8 Volts Linear Capacitance Manometer -0.3 Volts to +0.3 Volts Pirani Type Gauges Gauges can always be zeroed...

  • Page 135: How To Toggle The Zero On And Off

    The system responds by undoing the previous command, and restoring the channel’s user-defined zero. Note 1. For the MKS Type 120 capacitance manometer, the zero is restored in both the sensor and in the 146 unit. 2. For Pirani gauges, the user-defined zero is restored.

  • Page 136: How To Span A Pirani Type Sensor To Atmosphere

    Chapter Four: Operation in Normal Mode How To Span a Pirani Type Sensor to Atmosphere How To Span a Pirani Type Sensor to Atmosphere Spanning a Pirani type sensor should only be done at atmosphere. Spanning is done to adjust the upper range of the gauge which may have drifted due to contamination or aging of the sensor.
  • Page 137 How To Span a Pirani Type Sensor to Atmosphere Chapter Four: Operation in Normal Mode 1. Repeatedly press the [ ] key until the 146 unit is in Normal Mode. DISPLAY MODE The system responds by scrolling through modes. 2. Press the [ /.] key, followed by [1], [2], [3], or [4].

  • Page 138: How To Span A Sensor With A Reference

    Chapter Four: Operation in Normal Mode How To Span a Sensor with a Reference How To Span a Sensor with a Reference This procedure stores a span constant for a spanned gauge. This makes the upper pressure reading of the spanned gauge agree with the pressure reading of the referenced gauge. Spanning is done with two sensors that are well within their measurement ranges.
  • Page 139 How To Span a Sensor with a Reference Chapter Four: Operation in Normal Mode 1. Repeatedly press the [ ] key until the 146 unit is in Normal Mode. DISPLAY MODE The system responds by scrolling through modes. ], followed by [1], [2], [3], or [4] (lower range 2.

  • Page 140: How To Toggle The Span On And Off

    Chapter Four: Operation in Normal Mode How To Toggle the Span On and Off How To Toggle the Span On and Off Once a sensor has been spanned, use this procedure to toggle between undoing the span, and then re-instating the span. This procedure does not apply to capacitance manometers. When the span is toggled off, the factory-defined span is used for the display of pressure.

  • Page 141: How To Calculate The Analog Set Point

    How To Calculate the Analog Set Point Chapter Four: Operation in Normal Mode How To Calculate the Analog Set Point The analog set point input is a linear input sent through the lower connector on the Control board. The input corresponds to an analog set point value (refer to Figure 31). By adjusting the analog set point input voltage, the analog set point is changed.

  • Page 142: Figure 32: Adjusting Lower And Upper Points For Analog Set Point Calculations

    Chapter Four: Operation in Normal Mode How To Calculate the Analog Set Point When adjusting the lower point, the upper point remains fixed, and the slope changes. Original slope When adjusting the upper point, the lower point remains fixed, and the slope changes. 1000 Analog Set Point (Torr) Figure 32: Adjusting Lower and Upper Points for Analog Set Point Calculations...

  • Page 143: How To Command An Mfc Open Override

    How To Command an MFC Open Override Chapter Four: Operation in Normal Mode Adjusting the Upper Point of The Analog Set Point Input Voltage Range The analog set point feature does not need to be enabled to allow a change in the upper point of the analog input voltage range.

  • Page 144: How To Command An Mfc Close Override

    Chapter Four: Operation in Normal Mode How To Command an MFC Close Override How To Command an MFC Close Override A mass flow controller (MFC) moves to full close from any position within two seconds when commanded with a close override. 1.

  • Page 145: How To Start Hot Cathode Low Power Degassing

    How To Start Hot Cathode Low Power Degassing Chapter Four: Operation in Normal Mode How To Start Hot Cathode Low Power Degassing During a low power degas, the filament inside the hot cathode stays on, and valid pressure readings continue to be obtained. During low power degas (I R resistance heating), all the power remaining (after powering the filament) is delivered to the grid inside the tube.

  • Page 146: How To Start Hot Cathode High Power Degassing

    Chapter Four: Operation in Normal Mode How To Start Hot Cathode High Power Degassing How To Start Hot Cathode High Power Degassing During a high power degas, the filament inside the hot cathode is turned off, and all power is delivered to the grid inside the tube.

  • Page 147: How To Stop Hot Cathode Degassing

    How To Stop Hot Cathode Degassing Chapter Four: Operation in Normal Mode How To Stop Hot Cathode Degassing When a low power degas is turned off, power to the grid inside the tube is discontinued. The filament remains on and the front panel display shows the pressure reading. When a high power degas is turned off, power to the grid inside the tube is discontinued (as with a low power degas).

  • Page 148: Chapter Five: Operation In Leakage Mode

    Chapter Five: Operation in Leakage Mode General Information Chapter Five: Operation in Leakage Mode General Information Press the [ ] key once from Normal Mode to get to Leakage Mode. The word DISPLAY MODE appears in small letters above the main display. LEAKAGE LEFT DISPLAY CENTER DISPLAY...
  • Page 149 General Information Chapter Five: Operation in Leakage Mode Code 7: How To Set the Display for Leakage Mode, page 222, to learn how to define the time base. Instantaneous leakage is the difference between the current pressure reading, and the base pressure.

  • Page 150: Leakage Mode Is Used When Performing The Following Procedures

    Chapter Five: Operation in Leakage Mode General Information Leakage Mode is Used when Performing the Following Procedures Leakage Mode Functions Function Comments View most System Status Information Displays the pressure readings from up to four different sensors. Display software version Lists the software version number.

  • Page 151: How To Display The Software Version

    How To Display the Software Version Chapter Five: Operation in Leakage Mode How To Display the Software Version 1. Repeatedly press the [ ] key until the 146 unit is in Leakage Mode. DISPLAY MODE The system responds by scrolling through modes. 2.

  • Page 152: How To Switch Channels In The Main Display

    Chapter Five: Operation in Leakage Mode How To Switch Channels in the Main Display How To Switch Channels in the Main Display The system defaults to showing the leakage rate or instantaneous leakage for channel 1 in the main display. The exception to this is if all four channels are used, whereupon the same information for channel 4 appears in the main display.

  • Page 153: Figure 35: Dual Channel Display In Leakage Mode

    How To Switch Channels in the Main Display Chapter Five: Operation in Leakage Mode LEFT DISPLAY RIGHT DISPLAY CENTER DISPLAY The pressure reading from The pressure reading from The pressure reading from the gauge on channel 3 is the gauge on channel 2 is the gauge on channel 1 is shown here.

  • Page 154: How To Turn A Channel On Or Off

    Chapter Five: Operation in Leakage Mode How To Turn a Channel ON or OFF How To Turn a Channel ON or OFF The ability to turn off power to sensors is a useful function in several situations. For example, it is a safety procedure against explosion during cryo-pump regeneration with all sensors except capacitance manometers (the danger of explosion does not exist with capacitance manometers).

  • Page 155: How To Turn An Alarm On Or Off

    How To Turn an Alarm ON or OFF Chapter Five: Operation in Leakage Mode How To Turn an Alarm ON or OFF 1. Repeatedly press the [ ] key until the 146 unit is in Leakage Mode. DISPLAY MODE The system responds by scrolling through modes. 2.

  • Page 156: How To Zero A Sensor/Mfc

    Chapter Five: Operation in Leakage Mode How To Zero a Sensor/MFC How To Zero a Sensor/MFC For pressure sensors, zeroing means adjusting the readout for the sensor. The zero point is the pressure at which the instrument displays zero pressure. For capacitance manometers and Pirani type gauges, the zero point is the output voltage at which zero pressure is referenced.
  • Page 157 How To Zero a Sensor/MFC Chapter Five: Operation in Leakage Mode Note Before zeroing an MFC, verify that there is no gas flow through the unit. Two ways to accomplish this involve an upstream valve, or with a digital override (refer to How To Command an MFC Close Override, page 146).
  • Page 158 T ZERO 4. Ion gauges cannot be zeroed since they are high vacuum gauges. 5. For the MKS Type 120 gauge, the zeroing occurs in both the sensor and in the 146 unit. If the Type 120 gauge cannot complete the zeroing itself, a ’...

  • Page 159: Table 41: Ranges For Zeroing A Sensor

    How To Zero a Sensor/MFC Chapter Five: Operation in Leakage Mode Ranges For Zeroing A Sensor Sensor Type Zero Range Type 107 Capacitance Manometer -0.2 Volts to +0.2 Volts Type 120 Capacitance Manometer -0.8 Volts to +0.8 Volts Linear Capacitance Manometer -0.3 Volts to +0.3 Volts Pirani Type Gauges Gauges can always be zeroed...

  • Page 160: How To Toggle The Zero On And Off

    The system responds by undoing the previous command, and restoring the channel’s user-defined zero. Note 1. For the MKS Type 120 capacitance manometer, the zero is restored in both the sensor and in the 146 unit. 2. For Pirani gauges, the user-defined zero is restored.

  • Page 161: How To Span A Pirani Type Sensor To Atmosphere

    How To Span a Pirani Type Sensor to Atmosphere Chapter Five: Operation in Leakage Mode How To Span a Pirani Type Sensor to Atmosphere Spanning a Pirani type sensor should only be done at atmosphere. Spanning is done to adjust the upper range of the gauge which may have drifted due to contamination or aging of the sensor.
  • Page 162 Chapter Five: Operation in Leakage Mode How To Span a Pirani Type Sensor to Atmosphere 1. Repeatedly press the [ ] key until the 146 unit is in Leakage Mode. DISPLAY MODE The system responds by scrolling through modes. 2. Press the [ /.] key, followed by [1], [2], [3], or [4].

  • Page 163: How To Span A Sensor With A Reference

    How To Span a Sensor with a Reference Chapter Five: Operation in Leakage Mode How To Span a Sensor with a Reference This procedure stores a span constant for a spanned gauge. This makes the upper pressure reading of the spanned gauge agree with the pressure reading of the referenced gauge. Spanning is done with two sensors that are well within their measurement ranges.
  • Page 164 Chapter Five: Operation in Leakage Mode How To Span a Sensor with a Reference Note 1. Pirani gauges must be reading above 100 Torr, and the reference channel must be within a decade of the Pirani channel for a valid span. 2.

  • Page 165: How To Toggle The Span On And Off

    How To Toggle the Span On and Off Chapter Five: Operation in Leakage Mode How To Toggle the Span On and Off Once a sensor has been spanned, use this procedure to toggle between undoing the span, and then re-instating the span. This procedure does not apply to capacitance manometers. When the span is toggled off, the factory-defined span is used for the display of pressure.

  • Page 166: How To Calculate The Analog Set Point

    Chapter Five: Operation in Leakage Mode How To Calculate the Analog Set Point How To Calculate the Analog Set Point The analog set point input is a linear input sent through the lower connector on the optional Control board. The input corresponds to an analog set point value (refer to Figure 39). By adjusting the analog set point input voltage, the analog set point is changed.

  • Page 167: Figure 40: Adjusting The Lower And Upper Points For The Analog Set Point Calculations

    How To Calculate the Analog Set Point Chapter Five: Operation in Leakage Mode When adjusting the lower point, the upper point remains fixed, and the slope changes. Original slope When adjusting the upper point, the lower point remains fixed, and the slope changes. 1000 Analog Set Point (Torr) Figure 40: Adjusting the Lower and Upper Points for the Analog Set Point Calculations...
  • Page 168 Chapter Five: Operation in Leakage Mode How To Calculate the Analog Set Point Adjusting the Upper Point of The Analog Set Point Input Voltage Range The analog set point feature does not need to be enabled to allow a change in the upper point of the analog input voltage range.

  • Page 169: How To Command An Mfc Open Override

    How To Command an MFC Open Override Chapter Five: Operation in Leakage Mode How To Command an MFC Open Override A mass flow controller (MFC) moves to full open from any position within two seconds when commanded with an open override. 1.

  • Page 170: How To Cancel An Mfc Open/Close Override

    Chapter Five: Operation in Leakage Mode How To Cancel an MFC Open/Close Override How To Cancel an MFC Open/Close Override An open or close override is canceled with the same sequence of steps. 1. Repeatedly press the [ ] key until the 146 unit is in Leakage Mode. DISPLAY MODE The system responds by scrolling through modes.

  • Page 171: How To Start Hot Cathode Low Power Degassing

    How To Start Hot Cathode Low Power Degassing Chapter Five: Operation in Leakage Mode How To Start Hot Cathode Low Power Degassing During a low power degas, the filament inside the hot cathode stays on, and valid pressure readings continue to be obtained. During low power degas (I R), all the power remaining (after powering the filament) is delivered to the grid inside the tube.

  • Page 172: How To Start Hot Cathode High Power Degassing

    Chapter Five: Operation in Leakage Mode How To Start Hot Cathode High Power Degassing How To Start Hot Cathode High Power Degassing During a high power degas, the filament inside the hot cathode is turned off, and all power is delivered to the grid inside the tube.

  • Page 173: How To Stop Hot Cathode Degassing

    How To Stop Hot Cathode Degassing Chapter Five: Operation in Leakage Mode How To Stop Hot Cathode Degassing When a low power degas is turned off, power to the grid inside the tube is discontinued. The filament remains on and the front panel display shows the pressure reading. When a high power degas is turned off, power to the grid inside the tube is discontinued (as with a low power degas).

  • Page 174: Chapter Six: Operation In Tuning Mode

    Chapter Six: Operation in Tuning Mode General Information Chapter Six: Operation in Tuning Mode General Information Tuning Mode is available only if a Control board is installed (in which case, a valve control legend such as , is displayed). Press the [ ] key twice from Normal Mode HOLD DISPLAY MODE...

  • Page 175: The Front Panel Window

    General Information Chapter Six: Operation in Tuning Mode The Front Panel Window LEFT DISPLAY RIGHT DISPLAY CENTER DISPLAY This is the current valve This indicates which of the This indicates which of the position expressed as a four possible recipes is the four possible recipes is percent of the valve active recipe (in this case,...

  • Page 176: Figure 42: The Set Point Legend Displayed In Tuning Mode

    Chapter Six: Operation in Tuning Mode General Information LEFT DISPLAY CENTER DISPLAY RIGHT DISPLAY The GAIN value for the This is the pressure reading The LEAD value for the selected recipe is shown here. from the gauge on the selected recipe is shown here. control channel.

  • Page 177: The Various Displays In Tuning Mode

    General Information Chapter Six: Operation in Tuning Mode The Various Displays in Tuning Mode In Tuning Mode, the content of the different displays varies depending upon which function you are currently performing. Table 42, page 155, summarizes what is in each display when performing Tuning Mode functions.

  • Page 178: Table 42: Summary Of Tuning Mode Displays

    Chapter Six: Operation in Tuning Mode General Information Summary of Tuning Mode Displays Adjust these Left Display Center Display Right Display Main Display Parameters Current valve Indicates Valve Indicates active Pressure reading Position position recipe editable recipe from gauge on control channel * (No MANUAL...

  • Page 179: Tuning Mode Is Used When Performing The Following Procedures

    General Information Chapter Six: Operation in Tuning Mode Tuning Mode is Used when Performing the Following Procedures Tuning Mode Functions Change the valve position This feature is only functional if the [ ] or MANUAL ] legend is displayed. The current valve position HOLD becomes editable.

  • Page 180: The Two Levels Within Tuning Mode

    Chapter Six: Operation in Tuning Mode General Information The Two Levels within Tuning Mode Figure 43, page 158, depicts the differences in functionality and in key operation between the two levels of Tuning Mode. The Upper Level of Tuning Mode When Tuning Mode is first entered, it is always operating at the upper level.

  • Page 181: Figure 43: The Two Levels Within Tuning Mode

    General Information Chapter Six: Operation in Tuning Mode Upper Level of Tuning Mode Valve Position Base To select Valve Position: Set Point 1. No other Tuning Mode parameters Start can be displayed. 2. Control Mode parameter HOLD or MANUAL must be displayed. Lead [DEGAS/SETPOINT] Shortcut Keys go directly...

  • Page 182: Keys

    Chapter Six: Operation in Tuning Mode General Information Keys Table 44 explains the variations in how keys work in Tuning Mode. The Shortcut keys are quick ways of selecting certain parameters. The arrow keys can also be used. Special Key Functions in Tuning Mode Keys Key Function [+/-]...

  • Page 183: The Deviation Indicator

    General Information Chapter Six: Operation in Tuning Mode The Deviation Indicator In Tuning Mode there is a deviation indicator which indicates the deviation of the system pressure from set point. The deviation from set point is displayed approximately every one-third second (this is how often the LCD screen is refreshed).
  • Page 184 Chapter Six: Operation in Tuning Mode General Information If the system is operating far below set point, there will be a large change in pressure between screen refreshing because the system will be quickly moving towards set point. Within the one-third second time frame, the deviation could range from - 22% (at the beginning of the time frame), to - 4% (at the end of the time frame).

  • Page 185: How To Change The Valve Position

    How To Change the Valve Position Chapter Six: Operation in Tuning Mode How To Change the Valve Position CENTER DISPLAY LEFT DISPLAY RIGHT DISPLAY This is the current valve This indicates which of the This indicates which of the position expressed as a four possible recipes is the four possible recipes is percent of the valve...
  • Page 186 Chapter Six: Operation in Tuning Mode How To Change the Valve Position 1. Repeatedly press the [ ] key until the 146 unit is in Tuning Mode. DISPLAY MODE The system responds by scrolling through modes. 2. Be sure the correct Tuning Mode window is displayed. If any of the Tuning Mode legends is displayed ( BASE START...

  • Page 187: How To Adjust Base

    How To Adjust Base Chapter Six: Operation in Tuning Mode How To Adjust Base LEFT DISPLAY CENTER DISPLAY RIGHT DISPLAY This is the current valve The BASE valve position This indicates which of the position expressed as a is expressed as a percent four possible recipes is percent of the valve of the valve control signal...
  • Page 188 Chapter Six: Operation in Tuning Mode How To Adjust Base 2. Select the parameter by scrolling through the parameters with the arrow keys. BASE The system responds by displaying each of the Tuning parameters as they are scrolled through. 3. Press the [ ] key.

  • Page 189: How To Adjust Start

    How To Adjust Start Chapter Six: Operation in Tuning Mode How To Adjust Start LEFT DISPLAY CENTER DISPLAY RIGHT DISPLAY This is the current valve The START valve position This indicates which of the position expressed as a is expressed as a percent four possible recipes is percent of the valve of the valve control signal...
  • Page 190 Chapter Six: Operation in Tuning Mode How To Adjust Start 2. Select the parameter by scrolling through the parameters with the arrow keys. START The system responds by displaying each of the Tuning parameters as they are scrolled through. 3. Press the [ ] key.

  • Page 191: How To Adjust Integral

    How To Adjust Integral Chapter Six: Operation in Tuning Mode How To Adjust Integral CENTER DISPLAY RIGHT DISPLAY LEFT DISPLAY This is the current valve The INTEGRAL parameter This indicates which of the position expressed as a selects the time constant for four possible recipes is percent of the valve PID calculations.
  • Page 192 Chapter Six: Operation in Tuning Mode How To Adjust Integral 4. Enter the Integral value. The value must be between 0.02 and 100 (inclusive) seconds, and the default is 0.3 seconds. A. If the center display shows the correct Integral value, press the [ ] key.

  • Page 193: How To Adjust Preset

    How To Adjust Preset Chapter Six: Operation in Tuning Mode How To Adjust Preset LEFT DISPLAY CENTER DISPLAY RIGHT DISPLAY This is the current valve The PRESET valve position This indicates which of the position expressed as a is expressed as a percent four possible recipes is percent of the valve of the valve control signal...
  • Page 194 Chapter Six: Operation in Tuning Mode How To Adjust Preset 4. Enter the Preset value. The range is from 0 to 103% of full open, and the default is 99.8%. A. If the center display shows the correct Preset value, press the [ ] key.

  • Page 195: How To Edit Recipes (Gain, Lead, And Set Point)

    How To Edit Recipes (Gain, Lead, and Set Point) Chapter Six: Operation in Tuning Mode How To Edit Recipes (Gain, Lead, and Set Point) Editing a recipe follows the same procedure as editing the gain, lead, and set point parameters separately.
  • Page 196 Chapter Six: Operation in Tuning Mode How To Edit Recipes (Gain, Lead, and Set Point) 3. Press the [ ] key. GAIN The system responds by changing the window parameters, and causing the right display to blink. The legend is displayed. Refer to Figure 50, page 174, for an example GAIN of the front panel window with the legend displayed.

  • Page 197: How To Adjust Gain

    How To Adjust Gain Chapter Six: Operation in Tuning Mode How To Adjust Gain CENTER DISPLAY RIGHT DISPLAY LEFT DISPLAY This is the current valve The LEAD value for the The GAIN value for the position expressed as a selected recipe is shown selected recipe is shown percent of the valve here.
  • Page 198 Chapter Six: Operation in Tuning Mode How To Adjust Gain 2. Enter the number of the recipe (1 through 4), which is to have the Gain setting adjusted. The system responds by accepting the recipe number. Note If the legend is displayed, and the right display MANUAL HOLD shows the Edit Recipe parameter (E1, E2, E3, or E4), the left display will...

  • Page 199: How To Adjust Lead

    How To Adjust Lead Chapter Six: Operation in Tuning Mode How To Adjust Lead CENTER DISPLAY RIGHT DISPLAY LEFT DISPLAY This is the current valve The LEAD value for the The GAIN value for the position expressed as a selected recipe is shown selected recipe is shown percent of the valve here.
  • Page 200 Chapter Six: Operation in Tuning Mode How To Adjust Lead 2. Enter the number of the recipe (1 through 4), that needs to have the Lead setting adjusted. The system responds by accepting the recipe number. Note If the legend is displayed, and the right display MANUAL HOLD shows the Edit Recipe parameter (E1, E2, E3, or E4), the left display will...

  • Page 201: How To Adjust Set Point

    How To Adjust Set Point Chapter Six: Operation in Tuning Mode How To Adjust Set Point LEFT DISPLAY CENTER DISPLAY RIGHT DISPLAY This is the pressure The LEAD value for the The GAIN value for the reading from the gauge selected recipe is shown select recipe is shown on the control channel.
  • Page 202 Chapter Six: Operation in Tuning Mode How To Adjust Set Point Note If the legend is displayed, and the right display MANUAL HOLD shows the Edit Recipe parameter (E1, E2, E3, or E4), the left display will blink. The left display is flashing the current control valve position. Since we want to edit a recipe, you may ignore the blinking left display and proceed to the next step.
  • Page 203 How To Adjust Set Point Chapter Six: Operation in Tuning Mode This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 204: Chapter Seven: Operation In Setup Mode

    Chapter Seven: Operation in Setup Mode General Information Chapter Seven: Operation in Setup Mode General Information Press the [ ] key three times from Normal Mode to get to Setup Mode. The word DISPLAY MODE appears in small letters above the main display. SETUP Figure 53 shows a sample window for Setup Mode.

  • Page 205: The Various Displays In Setup Mode

    General Information Chapter Seven: Operation in Setup Mode The Various Displays in Setup Mode In Setup Mode, the content of the different displays varies depending upon which function you are currently performing. Table 45, page 183, summarizes what is in each display when performing the Setup Mode functions.

  • Page 206: Table 45: Summary Of Setup Mode Displays

    Chapter Seven: Operation in Setup Mode General Information Summary of Setup Mode Displays Function Left Display Center Display Right Display Main Display Set Alarm Trip Alarm letter Channel number On/Off Alarm Alarm trip point Points for alarm Set Up Dual Dual channel Control channel Continuous (ct) or...

  • Page 207: Table 46: Summary Of Setup Mode Codes

    4 Adjust Alpha Code number Alpha value 5 Set up Code number Data bits and Data logger or Baud rate RS-232 Port parity MKS protocol 7 Set up Main Code number Determine Display in Leakage Mode Leakage Mode main display 8 Edit Data...

  • Page 208: Table 47: Setup Mode Procedures

    Chapter Seven: Operation in Setup Mode General Information Summary of Setup Mode Codes (Continued) Function Left Display Center Display Right Display Main Display 15x Set up Code number Voltage to span On/Off analog set Full scale input Analog Set and recipe analog input point voltage...

  • Page 209: Table 48: Setup Mode Functions

    General Information Chapter Seven: Operation in Setup Mode Setup Mode Functions Miscellaneous Codes Code Functions Code 1: Selects pressure, voltage, or current for the main display in Normal and Leakage Modes. Pressure/Volt/Current Select Code 2: Selects Torr, mbar, or Pascal. Pressure Units Code 3: Turns all audio sounds, except the key-press click, On or Off.
  • Page 210 Chapter Seven: Operation in Setup Mode General Information Setup Mode Functions (Continued) Miscellaneous Codes Code Functions Code 14x: Where x is a channel number. Select Polarity and Selects polarity for upstream or downstream control, and selects the Control Channel control channel. Code 15x: Where x is a recipe number.

  • Page 211: How To Set Alarm Trip Points

    How To Set Alarm Trip Points Chapter Seven: Operation in Setup Mode How To Set Alarm Trip Points LEFT DISPLAY CENTER DISPLAY RIGHT DISPLAY The letter of the alarm This is the channel number This indicates whether the which is selected for for the gauge which is selected alarm is ON (enabled) editing (A through D)
  • Page 212 Chapter Seven: Operation in Setup Mode How To Set Alarm Trip Points 3. Enter the correct alarm letter in the left display. A. If the display is correct, press the [ ] key. ENTER B. If the display is incorrect, press one of the alarm keys ([ ], [ ], [ ], or [...

  • Page 213: How To Perform Sensor Calibration/Mfc Setup

    How To Perform Sensor Calibration/MFC Setup Chapter Seven: Operation in Setup Mode How To Perform Sensor Calibration/MFC Setup Sensor calibration is used to adjust parameters that are specific to different gauge types or to a mass flow controller (MFC). The 146 unit determines which type of sensor is connected to the selected channel, however, the sensor must be powered on for the determination to be accurate.

  • Page 214: Figure 55: Sensor Codes For Sensor Calibration

    Hot Cathode (high power) Hot Cathode (low power) Cold Cathode Mass Flow Controller MKS TC-1A Thermocouple Hastings DV-6M Thermocouple Figure 55: Sensor Codes for Sensor Calibration This chapter reviews the sensor calibration for each sensor category separately, and then covers the MFCs and thermocouples.

  • Page 215: Capacitance Manometer

    The system responds by accepting the span value, and blinking the center display. Note For a 6 decade MKS Type 107 gauge, the range is adjustable ± 6% only. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 216 Chapter Seven: Operation in Setup Mode How To Perform Sensor Calibration/MFC Setup 5. Enter the sensor resolution in the center display. Sensor resolution is the smallest pressure that can be displayed above or below zero. The sensor resolution range for a Type 120 gauge or linear capacitance manometer is ±7 decades.

  • Page 217: Pirani And Convection Gauges

    How To Perform Sensor Calibration/MFC Setup Chapter Seven: Operation in Setup Mode Pirani and Convection Gauges LEFT DISPLAY RIGHT DISPLAY CENTER DISPLAY This indicates either a The number for the input This indicates the type of channel is entered here. Factory (F), or User (U) gauge associated with the defined ZERO (left...
  • Page 218 Chapter Seven: Operation in Setup Mode How To Perform Sensor Calibration/MFC Setup Refer to How To Perform Sensor Calibration/MFC Setup, page 190, for steps 1 through 3. 4. Verify that the 146 unit has correctly determined the sensor type. If the sensor type is incorrect, use the arrow keys to change the sensor type entry.

  • Page 219: Cold Cathode

    How To Perform Sensor Calibration/MFC Setup Chapter Seven: Operation in Setup Mode Cold Cathode CENTER DISPLAY RIGHT DISPLAY LEFT DISPLAY The input channel This is the disconnect threshold This indicates a cold number is entered pressure for the sensor reading. cathode gauge.
  • Page 220 Chapter Seven: Operation in Setup Mode How To Perform Sensor Calibration/MFC Setup 5. Enter a disconnect threshold for the sensor in the center display. A. If the display is correct, press the [ ] key. ENTER B. If the display is incorrect, enter the correct disconnect threshold, then press the ] key.

  • Page 221: Hot Cathode

    How To Perform Sensor Calibration/MFC Setup Chapter Seven: Operation in Setup Mode Hot Cathode CENTER DISPLAY RIGHT DISPLAY LEFT DISPLAY The number for the input This is the lower cutoff This stands for hot channel is entered here. pressure for the sensor cathode.
  • Page 222 Chapter Seven: Operation in Setup Mode How To Perform Sensor Calibration/MFC Setup 5. Enter a disconnect threshold for the sensor in the center display. A. If the display is correct, press the [ ] key. ENTER B. If the display is incorrect, enter the correct disconnect threshold, then press the ] key.

  • Page 223: Mass Flow Controller

    How To Perform Sensor Calibration/MFC Setup Chapter Seven: Operation in Setup Mode Mass Flow Controller LEFT DISPLAY CENTER DISPLAY RIGHT DISPLAY This displays the mode of The number for the input The FC indicates channel is entered here. operation, SP for Set Point Flow Controller.
  • Page 224 Chapter Seven: Operation in Setup Mode How To Perform Sensor Calibration/MFC Setup Refer to How To Perform Sensor Calibration/MFC Setup, page 190, for steps 1 through 3. 4. Enter the range of the MFC, in sccm. The default is 1000 sccm. The range is 0.0002 sccm to 1 x 10 sccm.

  • Page 225: Thermocouple

    (nitrogen, as in this case), HE (helium), and Ar (argon). Figure 61: Sensor Calibration for Thermocouples The thermocouple gauge codes are 1A for the MKS TC-1A, and d6 for the Hastings DV-6M gauge. The gauge type is automatically determined when a channel is initialized.
  • Page 226 Chapter Seven: Operation in Setup Mode How To Perform Sensor Calibration/MFC Setup 5. Use the arrow keys to select the gas type (n2 for nitrogen, HE for helium, and Ar for argon), listed in the main display. The default gas type is nitrogen. A.

  • Page 227: How To Set Up A Dual Channel Display

    How To Set Up a Dual Channel Display Chapter Seven: Operation in Setup Mode How To Set Up a Dual Channel Display LEFT DISPLAY CENTER DISPLAY RIGHT DISPLAY This display indicates if the This indicates the dual This indicates the channel channel setup number number associated with selected dual channel setup is...

  • Page 228: Table 50: Default Values For Dual Channel Displays

    Chapter Seven: Operation in Setup Mode How To Set Up a Dual Channel Display Note There are no default values supplied for a hot cathode gauge. If 0 is entered for a switchpoint, the system accepts the value of 0. The default values for a cold cathode gauge are good values to reference when determining the best switchpoint values for a hot cathode gauge.

  • Page 229: Two Types Of Dual Channel Operation - Continuous And Discontinuous

    How To Set Up a Dual Channel Display Chapter Seven: Operation in Setup Mode Two Types of Dual Channel Operation - Continuous and Discontinuous Continuous operation means the 146 unit smoothly transitions the pressure readout (in the main display), from one sensor to another over the pressure range where they overlap. This is done by creating a percent gradient which gives the lower range sensor’s reading a greater weight in calculations at the lower end of the overlapping range, and the upper sensor’s reading a greater weight at the higher end of the overlapping range.
  • Page 230 Chapter Seven: Operation in Setup Mode How To Set Up a Dual Channel Display A. If the main display is correct, press the [ ] key. ENTER B. If the main display is not correct, enter the correct switchpoint value, then press the ] key.

  • Page 231: How To Configure An Analog Output

    How To Configure an Analog Output Chapter Seven: Operation in Setup Mode How To Configure an Analog Output CENTER DISPLAY RIGHT DISPLAY LEFT DISPLAY This indicates which This display lists the The output scaling method analog output (1 through 3) input channel (1 through 4) is selected in this display.

  • Page 232: Linear Scaling

    Chapter Seven: Operation in Setup Mode How To Configure an Analog Output Linear Scaling In linear scaling, the voltage versus pressure curve is linear over its entire length. Refer to Figure 64 for a scalar representation of voltage versus pressure. Volts Torr 200 300...
  • Page 233 How To Configure an Analog Output Chapter Seven: Operation in Setup Mode 3. Enter the number for the analog output to be modified. A. If the left display is correct, press the [ ] key. ENTER B. If the left display is not correct, enter the correct analog output number (1 through 3), then press the [ ] key.

  • Page 234: How To Adjust Miscellaneous Codes

    Chapter Seven: Operation in Setup Mode How To Adjust Miscellaneous Codes How To Adjust Miscellaneous Codes There are many miscellaneous parameters that can be modified with the miscellaneous code functions. Some miscellaneous codes refer to PID control and are, therefore, only in effect if the Control board is installed.

  • Page 235: Code 1: How To Select Pressure/Volt/Current

    Code 1: How To Select Pressure/Volt/Current Chapter Seven: Operation in Setup Mode Code 1: How To Select Pressure/Volt/Current LEFT DISPLAY RIGHT DISPLAY When "Volt" is selected in the main display, this display The code number is scrolls through HU (high voltage for cold cathodes), displayed and edited here.
  • Page 236 Chapter Seven: Operation in Setup Mode Code 1: How To Select Pressure/Volt/Current The high voltage (HU) selection only applies to cold cathodes (CC). The high voltage, which is being applied to the cold cathode, is shown in the main display in Normal and Leakage Modes. This display can be used for several purposes, such as a diagnostic aid.
  • Page 237 Code 1: How To Select Pressure/Volt/Current Chapter Seven: Operation in Setup Mode 5. If Volt is selected, the right display blinks. Select HU (high voltage for cold cathodes), IC (ion current for ion gauges), or EC (emission current for hot cathodes). Note This parameter is irrelevant if a gauge other than an ion gauge is selected as the main display channel in Normal or Leakage Modes.

  • Page 238: Code 2: How To Select Pressure Units

    Chapter Seven: Operation in Setup Mode Code 2: How To Select Pressure Units Code 2: How To Select Pressure Units LEFT DISPLAY The code number is displayed and edited here. In this example, the code number is 2. SETUP CLOSE TORR CODE MAIN DISPLAY...

  • Page 239: Code 3: How To Adjust Audio Alarms

    Code 3: How To Adjust Audio Alarms Chapter Seven: Operation in Setup Mode Code 3: How To Adjust Audio Alarms LEFT DISPLAY The code number is displayed and edited here. In this example, the code number is 3. SETUP CLOSE CODE MAIN DISPLAY This display toggles between on (turn the audio alarm on),...
  • Page 240 Chapter Seven: Operation in Setup Mode Code 3: How To Adjust Audio Alarms 3. Enter the number 3 and press the [ ] key. ENTER The system responds by displaying the appropriate parameters for code 3, and causing the main display to blink. 4.

  • Page 241: Code 4: How To Adjust Alpha (Pid Control)

    Code 4: How To Adjust Alpha (PID Control) Chapter Seven: Operation in Setup Mode Code 4: How To Adjust Alpha (PID Control) LEFT DISPLAY The code number is displayed and edited here. In this example, the code number is 4. SETUP CLOSE CODE...
  • Page 242 Chapter Seven: Operation in Setup Mode Code 4: How To Adjust Alpha (PID Control) 3. Enter the number 4 and press the [ ] key. ENTER The system responds by displaying the appropriate parameters for code 4, and causing the main display to blink. 4.

  • Page 243: Code 5: How To Configure The Rs-232 Port

    (300, 1200, 2400, 4800, or 9600), parity (odd, even, or no), data bits (7 or 8), and communication protocol (MKS protocol or data logger). Refer to Code 8: How To Edit the Data Logger Interval, page 224, for the set up of the data logger interval.
  • Page 244 ENTER B. If the display is not correct, use the arrow keys to select the correct protocol, then press the [ ] key. The choices for protocol are 146 (MKS Protocol) and dl ENTER (data logger). The system responds by accepting the protocol, and causing the center display to blink.

  • Page 245: Code 7: How To Set The Display For Leakage Mode

    Code 7: How To Set the Display for Leakage Mode Chapter Seven: Operation in Setup Mode Code 7: How To Set the Display for Leakage Mode LEFT DISPLAY The code number is displayed and edited here. In this example, the code number is 7.
  • Page 246 Chapter Seven: Operation in Setup Mode Code 7: How To Set the Display for Leakage Mode 1. Repeatedly press the [ ] key until the 146 unit is in Setup Mode. DISPLAY MODE The system responds by scrolling through modes. 2.

  • Page 247: Code 8: How To Edit The Data Logger Interval

    Code 8: How To Edit the Data Logger Interval Chapter Seven: Operation in Setup Mode Code 8: How To Edit the Data Logger Interval LEFT DISPLAY The code number is displayed and edited here. In this example, the code number is 8. SETUP CLOSE CODE...
  • Page 248 Chapter Seven: Operation in Setup Mode Code 8: How To Edit the Data Logger Interval 3. Enter the number 8 and press the [ ] key. ENTER The system responds by displaying the appropriate parameters for code 8, and causing the main display to blink.

  • Page 249: Code 10X: How To Adjust The Display Lag

    Code 10x: How To Adjust the Display Lag Chapter Seven: Operation in Setup Mode Code 10x: How To Adjust the Display Lag LEFT DISPLAY The code number is displayed and edited here. In this example, the code number is 10x, where x represents the channel number of the display to be edited.
  • Page 250 Chapter Seven: Operation in Setup Mode Code 10x: How To Adjust the Display Lag 1. Repeatedly press the [ ] key until the 146 unit is in Setup Mode. DISPLAY MODE The system responds by scrolling through modes. 2. Use the arrow keys to scroll to the legend.

  • Page 251: Code 11X: How To Turn Auto Zeroing On Or Off

    Code 11x: How To Turn Auto Zeroing ON or OFF Chapter Seven: Operation in Setup Mode Code 11x: How To Turn Auto Zeroing ON or OFF LEFT DISPLAY RIGHT DISPLAY This display toggles between The code number is displayed on (enable the auto zero feature), and and edited here.
  • Page 252 Chapter Seven: Operation in Setup Mode Code 11x: How To Turn Auto Zeroing ON or OFF 1. Repeatedly press the [ ] key until the 146 unit is in Setup Mode. DISPLAY MODE The system responds by scrolling through modes. 2.

  • Page 253: Code 12X: How To Adjust The Auto Power Control

    Code 12x: How To Adjust the Auto Power Control Chapter Seven: Operation in Setup Mode Code 12x: How To Adjust the Auto Power Control LEFT DISPLAY CENTER DISPLAY RIGHT DISPLAY The code number is This display toggles between This is the number for the oFF (disable the auto power control) displayed and edited reference channel.
  • Page 254 Chapter Seven: Operation in Setup Mode Code 12x: How To Adjust the Auto Power Control 1. Repeatedly press the [ ] key until the 146 unit is in Setup Mode. DISPLAY MODE The system responds by scrolling through modes. 2. Use the arrow keys to scroll to the legend.

  • Page 255: Code 13X: How To Adjust Softstart For Control

    Code 13x: How To Adjust Softstart for Control Chapter Seven: Operation in Setup Mode Code 13x: How To Adjust Softstart for Control LEFT DISPLAY RIGHT DISPLAY The code number is This display toggles between displayed and edited here. oFF (disable the softstart speed feature for the selected recipe), In this example, the code and on (enable the softstart speed...
  • Page 256 Chapter Seven: Operation in Setup Mode Code 13x: How To Adjust Softstart for Control 1. Repeatedly press the [ ] key until the 146 unit is in Setup Mode. DISPLAY MODE The system responds by scrolling through modes. 2. Use the arrow keys to scroll to the legend.

  • Page 257: Code 14X: How To Select Control Settings

    Code 14x: How To Select Control Settings Chapter Seven: Operation in Setup Mode Code 14x: How To Select Control Settings LEFT DISPLAY RIGHT DISPLAY The code number is The input channel number for the control displayed and edited loop of the selected recipe is entered here. here.
  • Page 258 Chapter Seven: Operation in Setup Mode Code 14x: How To Select Control Settings 1. Repeatedly press the [ ] key until the 146 unit is in Setup Mode. DISPLAY MODE The system responds by scrolling through modes. 2. Use the arrow keys to scroll to the legend.

  • Page 259: Code 15X: How To Set Up The Analog Set Point

    Code 15x: How To Set Up the Analog Set Point Chapter Seven: Operation in Setup Mode Code 15x: How To Set Up the Analog Set Point LEFT DISPLAY CENTER DISPLAY RIGHT DISPLAY The code number is This is the full scale This display toggles between voltage used to set the displayed and edited...

  • Page 260: Figure 79: Graph Showing Analog Set Point Defaults

    Chapter Seven: Operation in Setup Mode Code 15x: How To Set Up the Analog Set Point 1000 Torr set point. The acceptable analog input voltage range is 0 to 10 Volts, with the default full scale voltage set at 5 Volts. The full scale set point pressure can range from 0 to 100,00 Torr;...
  • Page 261 Code 15x: How To Set Up the Analog Set Point Chapter Seven: Operation in Setup Mode B. If the display is not correct, enter the correct full scale set point, then press the ] key. ENTER The system responds by accepting the full scale pressure value, associating it with the selected recipe, and causing the right display to blink.

  • Page 262: Code 16X: How To Set The Hc Shutoff Features

    Chapter Seven: Operation in Setup Mode Code 16x: How To Set the HC Shutoff Features Code 16x: How To Set the HC Shutoff Features RIGHT DISPLAY LEFT DISPLAY This display shows the state of The code number is displayed the internal fast rate-of-rise shutoff and edited here.
  • Page 263 Code 16x: How To Set the HC Shutoff Features Chapter Seven: Operation in Setup Mode 1. Repeatedly press the [ ] key until the 146 unit is in Setup Mode. DISPLAY MODE The system responds by scrolling through modes. 2. Use the arrow keys to scroll to the legend.

  • Page 264: Code 17X: How To Set Up The Mfc

    Chapter Seven: Operation in Setup Mode Code 17x: How To Set Up the MFC Code 17x: How To Set Up the MFC LEFT DISPLAY CENTER DISPLAY RIGHT DISPLAY The code number is This display selects the mode of This is the number for the operation, either set point (SP), displayed and edited co-channel (only used...

  • Page 265: Set Point Mode Of Operation

    Code 17x: How To Set Up the MFC Chapter Seven: Operation in Setup Mode Set Point Mode of Operation When using the Set Point mode of operation, the 146 unit sends out a voltage corresponding to a user-defined set point (in sccm). The set point voltage takes into account any zero offset which may have resulted from zeroing the MFC, to ensure that the MFC controls to the desired flow rate.
  • Page 266 Chapter Seven: Operation in Setup Mode Code 17x: How To Set Up the MFC Example 2: If the control algorithm determined that the change necessitates a 60% flow rate, the equation becomes: MFC control signal = ½ (6 Volts)(50%) = 1.5 Volts Each MFC would receive a 1.5 Volt control signal.
  • Page 267 Code 17x: How To Set Up the MFC Chapter Seven: Operation in Setup Mode 1. Repeatedly press the [ ] key until the 146 unit is in Setup Mode. DISPLAY MODE The system responds by scrolling through modes. 2. Use the arrow keys to scroll to the legend.

  • Page 268: Code 18X: How To Select The Convection Gauge

    Chapter Seven: Operation in Setup Mode Code 18x: How To Select the Convection Gauge Code 18x: How To Select the Convection Gauge LEFT DISPLAY The code number is displayed and edited here. In this example, the code number is 18x, where x represents the channel number of a convection gauge.
  • Page 269 Code 18x: How To Select the Convection Gauge Chapter Seven: Operation in Setup Mode 1. Repeatedly press the [ ] key until the 146 unit is in the Setup Mode. DISPLAY MODE The system responds by scrolling through the modes. 2.

  • Page 270: Chapter Eight: Operation In Control Mode

    Chapter Eight: Operation in Control Mode General Information Chapter Eight: Operation in Control Mode General Information Toggle in and out of this mode by pressing the [ ] key. CONTROL MODE Note The Control Mode functions only if a Control board is installed. Figure 83, page 248, shows an example of the Control Mode window.

  • Page 271: Figure 83: Control Mode Screen

    General Information Chapter Eight: Operation in Control Mode LEFT DISPLAY CENTER DISPLAY RIGHT DISPLAY This is the current valve The set point for the active The active recipe is position, expressed as selected in this display. recipe is entered here. OR, a percent of the valve if an analog set point is being control signal output.

  • Page 272: The Deviation Indicator

    Chapter Eight: Operation in Control Mode General Information The Deviation Indicator In Control Mode there is a deviation indicator which indicates the deviation of the system pressure from set point. The deviation from set point is displayed approximately every one-third second (this is how often the LCD screen is refreshed).

  • Page 273: The Rear Panel Override Indicator

    General Information Chapter Eight: Operation in Control Mode If the system is operating far below set point, there will be a large change in pressure between screen refreshing because the system will be quickly moving towards set point. Within the one-third second time frame, the deviation could range from -22% (at the beginning of the time frame), to -4% (at the end of the time frame).

  • Page 274: How To Select The Active Recipe

    Chapter Eight: Operation in Control Mode How To Select the Active Recipe How To Select the Active Recipe Up to four user-defined recipes, each containing gain, lead, and set point values, can be edited in Tuning Mode. This function determines which of the four recipes is the active recipe. The active recipe is the recipe that regulates the control valve when the feature is selected in AUTO...

  • Page 275: How To Set The Valve To Auto Position

    How To Set the Valve to AUTO Position Chapter Eight: Operation in Control Mode How To Set the Valve to AUTO Position This feature operates the valve according to the control parameters in the active recipe. The control parameters include gain, lead, and set point. 1.

  • Page 276: How To Set The Valve To Hold Position

    Chapter Eight: Operation in Control Mode How To Set the Valve to HOLD Position How To Set the Valve to HOLD Position This function is used to hold the valve control signal output at its current value. This has the effect of holding the control valve in its current position.
  • Page 277 How To Set the Valve to MANUAL Position Chapter Eight: Operation in Control Mode This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 278: Chapter Nine: Rs-232 Communications

    Displayless units have an RS-232 connector on both the front and rear panels. Note that the RS-232 cable used for rear panel communications (refer to Table 32, page 77, for the proper MKS part number) is not the same as the RS-232 cable used for the front panel (MKS p/n CB146-21).

  • Page 279: Mks Rs-232 Protocol

    General Information Chapter Nine: RS-232 Communications MKS RS-232 Protocol Command formats sent by the Host computer Messages sent by the host computer to the 146 unit are either commands that instruct the instrument to change an operating parameter, or requests that prompt the instrument to report status information.

  • Page 280: Table 54: Rs-232 Command Message Format

    Chapter Nine: RS-232 Communications General Information RS-232 Command Message Format Command Command Parameter Data Checksum Category Number (one of the following) Optional Byte 1 Byte 2 up to 20 data Byte 1 Byte 2 bytes Description The “@” character is always the first character in a message 2 ASCII Bytes These two bytes represent the Command Category 1 ASCII Byte...

  • Page 281: General Guidelines For Rs-232 Messages

    General Information Chapter Nine: RS-232 Communications General Guidelines for RS-232 Messages • All commands are sent and received as ASCII strings except for the checksum, which is binary. • All commands must include a parameter byte, even if it has no significance. Any character, including a space, can be supplied in its place.

  • Page 282: Command Messages

    Chapter Nine: RS-232 Communications Command Messages Command Messages This section describes all of the RS-232 commands that can be received by the 146 unit. The commands in this section are grouped by function. Refer to Appendix G: Board Specific Commands, page 315, for a list of commands organized by plug-in board type. Should an incorrect command message be sent, the 146 unit will return an error message.

  • Page 283: Power Control Messages

    Command Messages Chapter Nine: RS-232 Communications Power Control Messages The power control messages enable you to turn the power to a channel on or off; to activate the Auto Power feature; and to perform a hot cathode degas procedure. Power Control Messages Message Description Message Format @ command...

  • Page 284: Calibration Messages

    Chapter Nine: RS-232 Communications Command Messages Calibration Messages Depending upon the type of sensor, calibration may involve adjusting the zero, the span, or both the zero and span. Calibration Messages Message Description Message Format @ command command Parameter Data Optional category number checksum...

  • Page 285: Table 58: Chapter References For The Power Control Messages

    Command Messages Chapter Nine: RS-232 Communications Table 58 lists the chapter that explains the function performed by each message. Chapter References for Calibration Messages Function Chapter Chapter Four: Operation in Normal Mode Zero Channel Chapter Five: Operation in Leakage Mode Define Lower Analog Set Point Input Chapter Four: Operation in Normal Mode Span Channel...

  • Page 286: Sensor Configuration Messages

    Chapter Nine: RS-232 Communications Command Messages Sensor Configuration Messages The sensor configuration messages set the parameters specific to each type of channel. For example, you must set the gas type for a Pirani or convection gauge. Table 60, page 264, lists the parameters for each gauge type.

  • Page 287: Table 60: Sensor Configuration Parameters For Each Gauge Type

    Command Messages Chapter Nine: RS-232 Communications Sensor Configuration Parameters for Each Gauge Type Gauge Type Configuration Parameter Pirani or Convection Gas Type Convection Gauge Type (convection gauges only) Hot Cathode Sensitivity High Pressure Shutoff Disconnect Threshold Cold Cathode Gauge Correction Factor Disconnect Threshold Capacitance Manometer Sensor Range...

  • Page 288: Mass Flow Controller Messages

    Chapter Nine: RS-232 Communications Command Messages Mass Flow Controller Messages The Mass Flow Controller board enables the 146 unit to communicate with mass flow controllers to regulate the flow of gas into a system. Mass Flow Controller Messages Message Description Message Format @ command command...

  • Page 289: Dual Channel Setup Messages

    Command Messages Chapter Nine: RS-232 Communications Dual Channel Setup Messages The dual channel feature allows the 146 unit to report pressure from one of two associated sensors. One sensor controls over a low range; the other sensor controls over the high range. Dual Channel Setup Messages Message Description Message Format...

  • Page 290: Alarm Trip Point Messages

    Chapter Nine: RS-232 Communications Command Messages Alarm Trip Point Messages The trip point defines the pressure at which an alarm is tripped. Trip Point A and B are standard; Trip Point C and D are available on the Auxiliary Output board. Alarm Messages Message Description Message Format...
  • Page 291 Command Messages Chapter Nine: RS-232 Communications Unlatch Currently Alarmed Relays Refer to Chapter Three: Overview, for a description of the latching state. There are two ways to unlatch currently alarmed relays; either send the RS-232 command, or set a TTL signal high (the latch pins are located on the General I/O connector).

  • Page 292: Analog Output Messages

    Chapter Nine: RS-232 Communications Command Messages Analog Output Messages The 146 unit supports one analog output on the CPU board and two additional analog outputs provided by the Auxiliary Output board. Analog Output Messages Message Description Message Format @ command command Parameter Data...

  • Page 293: Control Messages

    Command Messages Chapter Nine: RS-232 Communications Control Messages The control messages are separated into three categories: General; Control Adjust; and Recipe Specific messages. Note The General and Control Adjust messages support Control Channel 0, which is a virtual control channel used by the MFC board for Ratio flow control.

  • Page 294: Table 72: Control Adjust Messages

    Chapter Nine: RS-232 Communications Command Messages Control Adjust Messages Message Description Message Format @ command command Parameter Data Optional category number (Control checksum channel) Adjust Integral 0,* 1 : 0.01 to 100 seconds CR c1 Adjust Base 0,* 1 : 0 to 103 CR c1 (% of full open) Adjust Start...

  • Page 295: Table 74: Recipe Specific Messages

    Command Messages Chapter Nine: RS-232 Communications Recipe Specific Messages Message Description Message Format @ command command Parameter Data Optional category number checksum : ±100,000 Torr CR c1 1, 2, 3, or 4 Adjust Set Point (recipe #) 1, 2, 3, or 4 : 0.001 to 1000 CR c1 Adjust Lead...

  • Page 296: Miscellaneous Messages

    Chapter Nine: RS-232 Communications Command Messages Miscellaneous Messages These messages enable you to set a variety of global parameters. Miscellaneous Messages Message Description Message Format @ command command Parameter Data Optional category number checksum Audio Alarm : E = Enable CR c1 D = Disable Front Panel Lockout...

  • Page 297: Table 77: Chapter References For Miscellaneous Messages

    Command Messages Chapter Nine: RS-232 Communications Chapter References for Miscellaneous Messages Function Chapter Chapter Seven: Operation in Setup Mode Audio Alarm Chapter Three: Operation in Overview Mode Front Panel Lockout Chapter Seven: Operation in Setup Mode Select Pressure Units Applies to RS-232 messages only  see below Optional Checksum Applies to RS-232 messages only ...
  • Page 298 Chapter Nine: RS-232 Communications Command Messages How To Select the Response Format You can specify whether the response sent by the 146 unit is in scientific notation or fixed format. The initial configuration is fixed. The 146 unit will accept messages in either format, regardless of the format selected for its response messages.

  • Page 299: Read Only Messages

    Command Messages Chapter Nine: RS-232 Communications Read Only Messages The read only messages prompt the 146 unit to return information. You cannot change the value or setting of any read only parameter. The read only messages are divided into read only data messages and read only status messages.

  • Page 300: Table 79: Response Format For Read Only Data Messages

    Chapter Nine: RS-232 Communications Command Messages Read Only Data Messages (Continued) Message Description Message Format @ command command Parameter Data Optional category number checksum CR c1 Relay Status A, B, C, or D Alarm Status CR c1 A, B, C, or D Current Control Mode @ 6 CR c1 Any character...

  • Page 301: Table 80: Chapter References For Read Only Data Messages

    Command Messages Chapter Nine: RS-232 Communications Response Format for Read Only Data Messages (Continued) Message Response* Description where <para> A, B, C, or D Alarm Status @60B:<para><status> <status> is E = Enabled D = Disabled T = Tripped where <over> is: 0 = No override Control Mode @60C:<over><mode>...
  • Page 302 Chapter Nine: RS-232 Communications Command Messages Chapter References for Read Only Data Messages Function Chapter Chapter Seven: Operation in Setup Mode Analog Set Point Applies to RS-232 messages only  see below Channel Status Chapter Four: Operation in Normal Mode Power Up Status Chapter Three: Overview Relay Status...
  • Page 303 Command Messages Chapter Nine: RS-232 Communications How To Check the Status of an Alarm or a Relay There are separate read only messages to report the status of an alarm and the status of a relay. The status message reports whether the alarm or relay is enabled, disabled, or tripped. To determine the status of an alarm or a relay, send the message: @60#X?<CR>...
  • Page 304 Chapter Nine: RS-232 Communications Command Messages How To Check the Channel Status The channel status message reports the channel’s pressure if the channel is currently on or currently performing a low power degas. Otherwise, the response will indicate the condition of the channelinitializing, zeroing, underranged, overranged, off (either manual or auto), high power degas, disconnected, sensor problem, or not installed.

  • Page 305: Table 81: Response To A Power Up Status Message

    Command Messages Chapter Nine: RS-232 Communications How To Check the Power Up Status Send a power up status message if the 146 instrument encounters a power up problem. The response will report the cause; either a configuration, calibration, or memory problem. To query the power up status enter: •...

  • Page 306: Table 82: Read Only Status Messages

    Chapter Nine: RS-232 Communications Command Messages Read Only Status Messages Message Description Message Format @ command command Parameter Data Optional category number checksum CR c1 Software Version Channel Status CR c1 Alarm Status CR c1 Configuration Setup CR c1 Rear Panel Status CR c1 Reference Voltage CR c1...
  • Page 307 Command Messages Chapter Nine: RS-232 Communications Response Format for the Read Only Status Messages (Continued) Message Response Description Configuration (slot status at Sx<text> LF CR where x is 1 through 5 power up) <text> is: CC-- = Cold Cathode CLN = Linear Cap. Man. C107 = Type 107 Cap.
  • Page 308 Chapter Nine: RS-232 Communications Command Messages Response Format for the Read Only Status Messages (Continued) Message Response Description Rear Panel Status Remote zero channel 1 RZ1:<text> LF CR where <text> is L for low (Ground) Remote zero channel 2 RZ2:<text> LF CR H for high (5 Volts) Remote zero channel 3 RZ3:<text>...

  • Page 309: Table 84: Chapter References For Read Only Status Messages

    Command Messages Chapter Nine: RS-232 Communications Table 84 lists the chapter that explains the function performed by each message. Chapter References for Read Only Status Messages Function Chapter Chapter Four: Operation in Normal Mode Software Version Chapter Four: Operation in Normal Mode Channel Status Chapter Three: Overview Alarm Status...

  • Page 310: Error Messages

    Chapter Nine: RS-232 Communications Error Messages Error Messages If the 146 instrument cannot execute a command, it will respond with an error message. Error Code Summary Error Code Description E111 Unrecognized command E112 Inappropriate command E122 Invalid data field E131 Bad checksum Table 85: Error Code Summary E111: Unrecognized Command...
  • Page 311 Error Messages Chapter Nine: RS-232 Communications This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 312: Chapter Ten: Maintenance

    How To Determine The Software Version How To Determine The Software Version Chapter Ten: Maintenance General Information The Type 146 instrument is virtually maintenance free, however, a few common sense notes are included here. • Periodically check for wear on the cables and inspect the enclosure for visible signs of damage.

  • Page 313: How To Replace The Fuses

    How To Determine The Software Version How To Determine The Software Version How To Replace the Fuses Warning Be sure the power cord is DISCONNECTED before proceeding with the next step. 1. Select the proper fuses. All units should have two fuses installed to fuse both sides of the line. A.

  • Page 314: Chapter Eleven: Troubleshooting

    Chapter Eleven: Troubleshooting The Diagnostics Feature Chapter Eleven: Troubleshooting The Diagnostics Feature The 146 unit comes with a basic diagnostics feature. This feature is used to command the 146 unit to perform specific self-tests and display the test results in the front panel window. Starting the Diagnostics Feature 1.

  • Page 315: Code 1: Ram Test

    The Diagnostics Feature Chapter Eleven: Troubleshooting There are three general message codes that may appear in the main display. One general message code is nA for non-applicable. This appears when a test is being run inappropriately. The general message code ni stands for not installed. For example, if the Code 6x test is being run to test one of the analog outputs on the Analog Output board, and the Analog Output board is not installed in the 146 unit, then the ni general message code is displayed.

  • Page 316: Code 2: Prom Test

    Chapter Eleven: Troubleshooting The Diagnostics Feature Code 2: PROM Test 1. Press the [2/2] key and then the [ ] key. ENTER The system should respond by performing a checksum verification and displaying PASS. The display is the same as shown in Figure 86, page 292. Note Codes 1 and 2 are the same tests the 146 unit performs as part of the normal power up procedure.

  • Page 317: Code 4: Check All Keys

    The Diagnostics Feature Chapter Eleven: Troubleshooting Code 4: Check all Keys 1. Press the [4/4] key and then the [ ] key. ENTER The system should respond by clearing the window and showing the number four (4) in the right display. All keys on the keypad can now be tested. To test a key simply press it.

  • Page 318: Code 5: Beeper Test

    Chapter Eleven: Troubleshooting The Diagnostics Feature Figure 87: The Keypad Test Result for the [+/-] Key Figure 88: The Keypad Test Result for the [ ] Key QUIET CANCEL Code 5: Beeper Test 1. Press the [5/ ] key and then the [ ] key.

  • Page 319: Code 5X: Relay Test

    The Diagnostics Feature Chapter Eleven: Troubleshooting Code 5x: Relay Test The x in the code represents the relay letter A through D. To perform a relay test on relay A, press the [5/ ] key, followed by the [7/A] key. DUAL Figure 89: Rear Panel Output Test Display When all Bits are High Steps 2 and 3 in this instruction set, can be performed in reverse order.

  • Page 320: Code 6: Rear Panel Status

    Chapter Eleven: Troubleshooting The Diagnostics Feature Code 6: Rear Panel Status 1. Press the [6] key and then the [ ] key. ENTER The 146 unit’s processor should respond by reading the inputs for 8 bits (remote zero 1 through 4, and latches A through D) on the General I/O connector, and displaying the sum of the hexadecimal values which are assigned to each bit when the bit is high.

  • Page 321: Code 6X: Analog Outputs Check

    The Diagnostics Feature Chapter Eleven: Troubleshooting Code 6x: Analog Outputs Check The x in the code represents the analog output number (1 through 3). 1. Press the [6] key, followed by an analog output number (1 through 3). The system should respond by placing the analog output number (1 through 3) in the center display, and the analog output abbreviation AnAl in the main display.

  • Page 322: Code 7X: Response Time For Fail-Safe Feature

    Chapter Eleven: Troubleshooting The Diagnostics Feature Code 7x: Response Time for Fail-Safe Feature The x in the code represents the Auxiliary Output board relay letter (C or D). Relays C and D on the Auxiliary Output board are associated with the 146 instrument’s Fail-Safe feature.

  • Page 323: Code 9999: Factory Calibration

    Chapter Eleven: Troubleshooting Code 9999: Factory Calibration MKS Instruments performs factory calibration procedures on the 146 instrument. Part of the calibration procedure involves entering Code 9999 while the 146 unit is attached to other instrumentation. When 9999 is entered, the abbreviation CAL appears in the main display.

  • Page 324: Appendix A: Product Specifications

    Compatible Instruments Capacitance Manometers Any capacitance manometer providing 0 to ± 10 VDC output; MKS Types 107, 120, 122, 124, 127, 128, 220, 221, 223, 224, 225, 390 or 690 with 270, 622, 623, 624, 625, 626, 627, 628, 700 Series or 800 Series.

  • Page 325: Electrical Specifications

    Electrical Specifications Appendix A: Product Specifications Physical Specifications (Continued) Digital Output RS-232 Input Power Required 100 to 120 VAC or 220 to 240 VAC, 50/60 Hz Mounting ½ rack; 9” W x 3½” H x 12” D (24.1 cm x 8.9 cm x 30.5 cm) Power Supply Output ±...

  • Page 326: Appendix B: Parts List/Accessories

    For glass envelope tubes CB146-13 KF40 or 2¾ CF For glass envelope tubes CB146-16 MKS Hot Cathode Gauges nude or B/A, & external power thoriated iridium or tungsten filament, For nude hot cathode tube CB146-19 Types IG-xx, RG75, & NRC563...
  • Page 327 Appendix B: Parts List/Accessories Mass Flow Controller Cables Mass Flow Controller Cables Mass Flow Controllers Cable All MKS MFCs except Cable for MFCs w/ Edge Card connector CB147-7 Types 1749 and 1759 Cable for MFCs w/ 15-pin Type “D” connector CB147-1 Cable for MFCs w/ 9-pin Type “D”...

  • Page 328: Appendix C: Rs-232 Error Codes

    Appendix C: RS-232 Error Codes Error Code Summary Appendix C: RS-232 Error Codes Error Code Summary If the 146 instrument cannot execute a command, it will respond with an error message. The error codes are summarized in Refer to Table 89. RS-232 Error Code Summary Error Code Description...
  • Page 329 Error Code Summary Appendix C: RS-232 Error Codes E122: Invalid Data Field An “invalid data field” error message indicates a problem with the data field of the command string. The data field can contain a maximum of 26 characters. If your data field exceeds 26 characters, the 146 instrument will return an invalid command error message.

  • Page 330: Appendix D: Front Panel Error/Status Messages

    Appendix D: Front Panel Error/Status Messages Description Appendix D: Front Panel Error/Status Messages Description 1. E stands for Error. 2. C stands for Caution, or a non-vital problem. 3. Input channel errors appear in their respective displays. 4. Output channel and system errors appear in the main display. Description of Front Panel Error/Status Messages Display/Error Code Error...
  • Page 331 A sensor is considered bad if it is unable to provide pressure information. This determination is sensor dependent. A Pirani type gauge with an open filament, an MKS Type 120 sensor which cannot range switch or which has a non-verified change in gain, and MKS Type 107 six decade transducer with corrupted EEPROM data, are the detectable bad sensors.

  • Page 332: Appendix E: Instrument Default Values

    Appendix E: Instrument Default Values Default Values Appendix E: Instrument Default Values Default Values Active recipe Alarm Relays Untripped alarm state Actuated Channel assignment (all alarms) Trip point default 1000 Torr (range ± 105,000 Torr) Alarm status Disabled Latch state Alarms - Audio Alpha Analog Output End Point...
  • Page 333 Default Values Appendix E: Instrument Default Values Capacitance Manometer Span 1000 Torr Resolution Cold Cathode Gauge & GCF Disconnect Threshold Torr Control Channel Control Valve Position CLOSE Data Bits 7 bit Data Logger Interval 60 seconds Dual Channel Continuity status Upper channel number Lower channel number Upper threshold value...
  • Page 334 Appendix E: Instrument Default Values Default Values Polarity Direct Preset 99.8% (range 0 to 103% of full open) Protocol MKS Protocol Set Point 0 (range ± 100,000 Torr) Softstart Speed value 10 (range 1.0 to 990 seconds) Status Disabled (for all recipes)
  • Page 335 Default Values Appendix E: Instrument Default Values This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 336: Appendix F: Underrange And Overrange Values

    Appendix F: Underrange and Overrange Values Underrange and Overrange Values Appendix F: Underrange and Overrange Values Underrange and Overrange Values Sensor Type Gas Type Overrange Value UnderrangeValue Cold Cathode 1.05 x 10 Torr 1.05 x 10 Torr Hot Cathode 1.05 x 10 Torr 1.05 x 10 Torr...
  • Page 337 Underrange and Overrange Values Appendix F: Underrange and Overrange Values This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 338: Appendix G: Board Specific Commands

    Appendix G: Board Specific Commands General Information Appendix G: Board Specific Commands General Information This appendix organizes the 146 commands by plug-in board type. It lists all the commands necessary to operate each type of sensor. The plug-in boards covered include: •...

  • Page 339: Capacitance Manometer Messages

    Capacitance Manometer Messages Appendix G: Board Specific Commands Capacitance Manometer Messages The 146 supports a wide variety of MKS capacitance manometers. Refer to Table 9, page 49, for a complete list of transducers. Capacitance Manometer Messages Function Description Command Range and Restrictions...
  • Page 340 Appendix G: Board Specific Commands Capacitance Manometer Messages Capacitance Manometer Messages (Continued) Function Description Command Range and Restrictions Status Report @601<para>? <para> is the channel number 1, 2, 3, or 4 channel Request only - Sensor must be installed reading Report reading @602<para>? <para>...

  • Page 341: Pirani/Convection Messages

    Pirani/Convection Messages Appendix G: Board Specific Commands Pirani/Convection Messages The 146 unit can identify the gauge as a Pirani or convection gauge. If the gauge is identified as a convection gauge, you must further identify the gauge as either a Granville-Phillips Convectron gauge or an HPS Convection Enhanced Pirani (CEP) gauge.
  • Page 342 Appendix G: Board Specific Commands Pirani/Convection Messages Pirani/Convection Messages (Continued) Function Description Command Range and Restrictions Calibration Zero function @056<para>:<state> <para> is the channel number 1, 2, 3, or 4 <state> is ON for on; OFF for off Sensor must be installed Zero channel @051<para>...

  • Page 343: Cold Cathode Messages

    Cold Cathode Messages Appendix G: Board Specific Commands Cold Cathode Messages The 146 unit supports up to four cold cathode gauges. Cold Cathode Messages Function Description Command Range and Restrictions Power Channel @081<para>:<state> <para> is the channel number 1, 2, 3, or 4 power <state>...
  • Page 344 Appendix G: Board Specific Commands Cold Cathode Messages Cold Cathode Messages (Continued) Function Description Command Range and Restrictions Status Report channel @608<para>? <para> is the channel number 1, 2, 3, or 4 condition Request only - Sensor must be installed Report reading @602<para>? <para>...

  • Page 345: Hot Cathode Messages

    Hot Cathode Messages Appendix G: Board Specific Commands Hot Cathode Messages The 146 unit supports up to four hot cathode gauges. Hot Cathode Messages Function Description Command Range and Restrictions Power Channel @081<para>:<state> <para> is the channel number 1, 2, 3, or 4 power <state>...
  • Page 346 Appendix G: Board Specific Commands Hot Cathode Messages Hot Cathode Messages (Continued) Function Description Command Range and Restrictions Calibration Span function @057<para>:<state> <para> is the channel number 1, 2, 3, or 4 <state> is ON for on; OFF for off Sensor must be installed Span with @055<para>:<ref>...

  • Page 347: Mass Flow Controller Messages

    Mass Flow Controller Messages Appendix G: Board Specific Commands Mass Flow Controller Messages The 146 instrument supports all MKS mass flow controllers, and equivalent flow controllers. Mass Flow Controller Messages Function Description Command Range and Restrictions Power Channel @081<para>:<state> <para> is the channel number 1, 2, 3, or 4 power <state>...
  • Page 348 Appendix G: Board Specific Commands Mass Flow Controller Messages Mass Flow Controller Messages Function Description Command Range and Restrictions Status Report MFC @608<para>? <para> is the channel number 1, 2, 3, or 4 status Request only - MFC must be installed Report MFC @601<para>? <para>...

  • Page 349: Thermocouple Messages

    Thermocouple Messages Appendix G: Board Specific Commands Thermocouple Messages The 146 instrument supports the MKS TC-1A and the Hastings DV-6M thermocouples. Thermocouple Messages Function Description Command Range and Restrictions Power Channel power @081<para>:<state> <para> is the channel number 1, 2, 3, or 4 <state>...
  • Page 350 Appendix G: Board Specific Commands Auxiliary Output Messages Auxiliary Output Messages The Auxiliary Output board provides two relays (in addition to relays A and B, available on the General I/O connector), and two analog outputs (in addition to the single analog output provided by the General I/O connector).
  • Page 351 Auxiliary Output Messages Appendix G: Board Specific Commands Auxiliary Output Messages (Continued) Function Description Command Range and Restrictions Analog @071<para>:<type> <para> is the analog output (1, 2, or 3) Channel Outputs Output Type <type> is LN for linear LO1 to LO9 for log 1 to log 9 SP for set point @072<para>:<chan>...
  • Page 352 Appendix G: Board Specific Commands Control Messages Control Messages The Control board allows you to use the 146 as a closed-loop controller. The control messages are separated into three categories: General; Control Adjust; and Recipe Specific messages. Control Messages Function Description Command Range and Restrictions...
  • Page 353 Control Messages Appendix G: Board Specific Commands Control Messages (Continued) Function Description Command Range and Restrictions Control Integral @031<para>:<data> <para> is control channel number (0*, 1) Adjust <data> is from 0.01 to 100 seconds Base @032<para>:<data> <para> is control channel number (0*, 1) <data>...
  • Page 354 Index Index general I/O, 33, 65, 87, 297 hot cathode, 24, 55, 322 active recipe, 81, 155, 172, 247, 250, 251, ion gauge, 81 mass flow controller, 24, 324 actuation, 86 MFC, 63 alarm, 45, 46, 182 pirani, 24, 35, 50, 102, 106, 127, 318 disconnected sensor, 89 thermocouple, 202, 326 disconnected sensor condition, 44, 80...
  • Page 355 Index code 13x, 186, 232, 233 front panel, 17, 20, 39, 43, 152, 289 code 14x, 187, 234, 235 function, 21 code 15x, 187, 236 fuses, 33, 290 code 16x, 187, 239 code 17x, 187, 200, 241 , 40, 42, 45, 81, 95, 151, 155, 156, code 18x, 187, 195, 245 GAIN 157, 159, 161, 172, 173, 174, 175, 250, 251,...
  • Page 356 Index keys, 19, 40, 41, 159 parameter, 21, 154, 258 parameter data, 95 PCS, 69, 93, 242 latchability state, 88 pirani gauge, 30, 318 LCD, 17, 20, 43, 293 Pollution Degree, 29 , 40, 42, 45, 81, 90, 91, 95, 151, 155, LEAD , 45, 95, 151, 155, 156, 157, 170, PRESET...
  • Page 357 Index software version, 102, 127 troubleshooting, 291 software version display, 103, 128 diagnostics feature, 291 , 40, 41, 102, 113, 115, 117, 127, 138, SPAN 140, 142, 185, 192, 195, 261 start, 38, 45, 95, 151, 155, 156, 157, 166, underrange, 307, 313 status, channel, 281, 283 status, 102, 276...

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