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MKS Microvision Plus User Manual
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MKS Microvision Plus User Manual

MKS Microvision Plus User Manual

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Microvision Plus
User Manual
LP101009.303 11 Jan 2005

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Summary of Contents for MKS Microvision Plus

  • Page 1 Microvision Plus User Manual LP101009.303 11 Jan 2005...
  • Page 2 +44 (0)1270 251939 Windows is a trademark of the Microsoft Corporation. All other brand or product names are trademarks or registered trademarks of their respective companies Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 3: Ec Declaration Of Conformity

    EN 61326:1998 ELECTRICAL EQUIPMENT FOR MEASUREMENT, CONTROL & LABORATORY USE EN 61010-1:2001 SAFETY REQUIREMENTS FOR ELECTRICAL EQUIPMENT FOR MEASUREMENT, CONTROL & LABORATRY USE. SIGNED: T.R.ROBINSON GENERAL MANAGER DATE: 23 February 2004 Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 4: Installation

    Instruments Ltd. 5. Cables attached to all other ancillary signal and control ports must have a length of less than 3 metres. If greater length is required, MKS Instruments Ltd. must be contacted for technical guidance on possible EMC and safety issues.

  • Page 5: Maintenance

    No damage is caused to the multiplier by high temperatures provided it is not switched on. The Microvision electronics should not be exposed to temperatures above 35 Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 6: Table Of Contents

    2. The quadrupole filter ................ 24 3. The detector ..................24 4. The flanged housing................. 24 6.2 Ohmmeter analyser checks..............26 6.3 Checking filaments................28 6.4 Changing filaments ................29 Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...
  • Page 7 7.3 Filament Plate..................40 7.4 Source Assembly................. 41 7.5 Source Alignment Jig................42 7.6 Extract Plate ..................43 8. Returning Your Unit for Service ............44 Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 8: Specification

    Insulation Class I to IEC536 1.3 Environmental Temperature range 0 to 40 C, 80%RH non-condensing, operating and storage. Pollution degree 2 to EN61010 Enclosure IP20 to EN60529 Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 9: Safety

    LM70 or LM76 Microvision Plus units. 1.5 Connectors The connectors for external circuits are for use only with MKS Spectra equipment, or equipment which has no accessible hazardous live parts. The external circuits must comply with the requirements of EN61010-1 section 6.6.1...

  • Page 10: Warning Labels

    On the rear panel refers to: a. Read all instructions carefully before use. b. The control unit and signal ports are designed for connection to MKS Spectra accessories via MKS Spectra supplied cables. There are no accessible hazardous voltages or currents on these ports.

  • Page 11: Introduction

    IBM compatible PC, running the Spectra Process Eye V2.0 software package. Complete RGA systems may comprise of one Microvision Plus and a PC, referred to as a single headed system or a number of Microvision Plus units connected to a single computer known as a multi-headed system.

  • Page 12: User Interface

    +24 volts DC 9, 10, 11 0 volts (24 volt return) Connector Shell Functional Earth The power input is 24 volts DC ± 10%, 2 Amps max. Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 13: Indicators

    The maximum common mode voltage is 60V DC or peak AC, current Limited to 2mA. 2.2.2 Indicators On the rear panel of the Microvision Plus there are five function LED indicators, their functions are described below. 1. Filament 1 This is a green LED labelled FILAMENT 1 on the rear panel of the Microvision Plus unit.

  • Page 14: Rs232 Connector

    Leak checking tone and audio alarms. The minimum load impedance should be 8 ohms and the power handling is 2 watts max. Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 15: Analog I/O Connector

    Note that the total power consumption on each rail (+5V and ±15V) for both the Analog and Digital I/O ports must not exceed 100mA, otherwise internal fuses will operate. The internal fuses are not operator replaceable. Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 16: Digital I/O Connector

    Not Connected Note that the total power consumption on each rail (+5V and ±15V) for both the Analog and Digital I/O ports must not exceed 100mA. Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 17: Reset Switch

    It allows an independent total pressure gauge or a signal from a vacuum control system to be connected to the Microvision Plus. It is the most effective of the trips available and we would always recommend its use. The external trip input can be driven in three ways.

  • Page 18: Analyser Installation

    MKS Spectra representative who will be able to help you. 3.1 Unpacking When you receive the Microvision Plus carefully check each item before removing the foam packaging and plastic wrapping, to ensure that no physical damage has occurred during shipment.

  • Page 19: Installing The Analyser

    If your chamber does not meet the above criteria, you should use a specially designed adapter so that the analyser may be mounted outside the chamber. Please contact your local MKS Spectra representative for assistance. 3.4 Checking the system pressure...

  • Page 20: Mounting The Analyser

    If in the future you need to return the analyser for service, it should be returned in its original packaging to avoid damage. Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 21: Microvision Installation

    RS485 - The cable from the preceding Microvison in the daisy chain should be connected to the 9-way D-Type socket labelled RS422/485 on the rear panel of the Microvision. The cable to the next unit in the Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...
  • Page 22 When the power is switched on the LED on the rear of the Microvision will illuminate. Care should be taken in routing and securing all cables. Avoid running the serial cables next to mains power cables. Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 23: Baking

    The Microvision may be supplied with the factory fitted Bakeable Extender option, in which case the Microvision need not be removed and the analyser may be run during baking. Please contact your local MKS Spectra facility for further details of this option.

  • Page 24: Analyser Maintenance

    The cleanliness of the vacuum, hours of operation and the type of sample being analysed all have an effect on the analyser’s performance. Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...
  • Page 25 SKILLED PERSONNEL USING SPECIALIST TOOLS AND JIGS. UNDER NO CIRCUMSTANCES SHOULD THE FILTER ASSEMBLY BE DISMANTLED. IF YOU ARE IN ANY DOUBT WHEN SERVICING YOUR ANALYSER, PLEASE CONTACT YOUR LOCAL SERVICE CENTRE. Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 26: Ohmmeter Analyser Checks

    If not, you have either a serious problem, or more likely a faulty meter/meter leads. If after checking your meter, an open circuit still exists, contact your nearest MKS Spectra service center for advice. Move the lead from the flange and connect to pins 2 to 12 on the analyser feedthrough in turn.
  • Page 27 If any of the pins read short-circuit to another pin, contact your local MKS Spectra service center with the results of your tests and they will advise you how to proceed. Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005...

  • Page 28: Checking Filaments

    Examine the RF/analyser connector on the front of the control unit and check that none of the gold sockets are pushed out of place. Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 29: Changing Filaments

    Refer to the exploded views of the Filament Plate shown on Page 38. Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 30: Removing The Filaments

    If these oxides are present, it is recommended that you refer to the section on source removal and cleaning before proceeding, see Page 30. Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 31: Fitting New Filaments

    6. Replace the analyser into your vacuum housing and again check for shorts or grounding to the outer vacuum housing. You are now ready to pump down and continue the operation of your quadrupole. Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 32: Ion Source Cleaning

    Remove the analyser and allow any excess alcohol to drain off. Keep the analyser inverted (feedthrough upper most) until it is dry. Do not let any Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...
  • Page 33 After the bake period, check all the screws in the ion source are tight and re-fit the analyser to the vacuum chamber. A further bake under vacuum will be required to drive off any remaining residue. Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 34: Cleaning Or Replacing The Ion Source

    Pen and paper on which to make notes and sketches Refer to the exploded views of the Analyser shown on Page 37. Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 35: Removing The Ion Source

    The Extract plate does not usually require service, as it is furthest away from potential contamination. However, if you wish to remove the Extract Plate, see the exploded diagram on Page Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 36: Source Re-Assembly

    Using an Ohmmeter, check that there are no short circuits present between any of the three plates, or the source mounting ring. Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...
  • Page 37 The filament plate can now be re-fitted and the remaining connection made. Once again, check all connections with an Ohmmeter before returning the analyser back to the vacuum chamber. Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 38: Exploded Views

    Pin Descriptions Connection Earth Source plate Electron Multiplier Filament 1 Extraction plate Suppressor plate RF.1 Repeller plate / filament common No connection Filament 2 RF.2 Collector Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 39: Exploded View Of The Analyser

    7.2 Exploded view of the Analyser Item Description Part Number (Dimensions in mm) Source Assembly Tungsten Fils 842-021 Source Assembly Thoria Fils 842-022 Screw M2 x 4 200902004 Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 40: Filament Plate

    305040214 Screw M2 x 4 200902004 Filament Plate Tungsten Fils LM508-015PL Filament Plate Thoria Fils LM508-020PL Filament Screen 305080594 Screw M1.6 x 4 (3 off) 200901604 Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 41: Source Assembly

    27031600 Screw M1.6 x 8 200901608 Ceramic Tube 2.8D x 3.5L 400020035 Ceramic Washer 4.7D x 1L 400010203 Repeller Plate Assembly LM508-018PL Source Plate Assembly LM508-017PL Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 42: Source Alignment Jig

    Remove the source by pushing it out from the bottom of the jig, do not pull out the source. Item Description Part Number (Dimensions in mm) Source Alignment Jig 842-029 Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 43: Extract Plate

    27031600 Screw M1.6 x 6 200901606 Ceramic Tube 2.8D x 2L 400020020 Ceramic Washer 4.7D x 1L 400010203 Extract Plate Assembly LM508-016PL Source Mounting Ring 305080603 Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...

  • Page 44: Returning Your Unit For Service

    If you wish to return the instrument for service, please follow these simple guidelines. Contact your local MKS Spectra service facility to obtain a Returns Material Authorisation (RMA) number. We will require some instrument details, such as the serial numbers, date of purchase and a detailed fault description.
  • Page 45 Please complete the form and fax or send by first class post to the appropriate MKS Spectra facility. Fax numbers and addresses can be found on the inside front page of this manual. Please ensure that we have this information before we receive the equipment.
  • Page 46 1. The equipment has been securely packaged and labelled. 2. The carrier has been informed of the hazardous nature of the consignment. Signed: Title: Date: Phone No. Microvision Plus - LP101009 Rev 3.03 – 11 Jan 2005 MKS Instruments, Spectra Products...