Cleaning The Dv-6M Sensor - MKS HPS 937A Series Owner's Operation And Maintenance Manual

Pin
1,5
2,4
3
9
DV-6M thermocouple sensor shielded cable with 9-pin "D" connector

Cleaning the DV-6M Sensor

Roughing pump oils and other fluids condensing or decomposing on the
heated filament can contaminate the Sensor. This changes the emissivity
of the filament, which in turn can cause the calibration to change,
especially at low pressure.
It is not advisable to clean the Sensor. Trying to clean it may
either deform or break the filament. The deformed filament would
then cause additional error from a shift in the Sensor's output.
Replace the sensor if it becomes contaminated (see Spare Parts and
Accessories, page 67).
Description
thermocouple AC drive
thermocouple AC return
signal +
chassis ground
Keyed "D" connector for
thermocouple
937A Multi-Sensor System
A.19